CN-122028670-A - Inert atmosphere protection device and laser annealing equipment

CN122028670ACN 122028670 ACN122028670 ACN 122028670ACN-122028670-A

Abstract

The invention provides an inert atmosphere protection device and laser annealing equipment, wherein the inert atmosphere protection device comprises a main body part, wherein a main cavity and a plurality of uniform flow structures which are arranged along the axial direction of the main body part at intervals are arranged on the main body part, the uniform flow structures comprise a plurality of purging ports which are sequentially arranged along the circumferential direction of the main cavity and are communicated with the main cavity, at least one uniform flow structure is a first uniform flow structure, and the axes of all purging ports of the same first uniform flow structure are positioned on a plane vertical to the axial direction of the main body part and are inclined relative to the normal line of the main body part along the same direction. When the inert atmosphere protection device is applied to the laser annealing equipment, and the axial direction of the main body part extends along the vertical direction, the impurity gas of the main cavity is discharged, the protection gas jet flow area is constructed for the exposure area, and meanwhile, the protection gas entering from the first uniform flow structure forms a horizontal vortex rotating around the axis of the main cavity, so that the pollutants generated in the wafer exposure process are prevented from rising, and the pollution to the exposure lens group is reduced.

Inventors

ZHANG HONGBO
GONG HUI
CHENG BINBIN
YANG YUQI
LUO BING

Assignees

上海芯上微装科技股份有限公司

Dates

Publication Date: 20260512
Application Date: 20241031

Claims (13)

1. An inert atmosphere protection device is characterized by comprising a main body part; the main body part is provided with a main cavity body which extends along the axial direction of the main body part in a penetrating way, and a plurality of uniform flow structures which are arranged at intervals along the axial direction of the main body part are also arranged on the main body part, wherein each uniform flow structure comprises a plurality of purging ports which are sequentially arranged along the circumferential direction of the main cavity body and are communicated with the main cavity body; The axial line of the purging ports of the first uniform flow structure is positioned on a plane perpendicular to the axial direction of the main body part, and the axial lines of all the purging ports of the same first uniform flow structure are inclined relative to the normal line of the main body part along the same direction.
2. An inert atmosphere protection device according to claim 1, wherein an angle formed by an axis of any one of the purge ports of the first type of uniform flow structure and a normal line of the main body portion at a corresponding position is not less than 10 ° and not more than 60 °.
3. The inert atmosphere protection apparatus according to claim 1, wherein a plurality of the uniform flow structures are divided into a first combination and a second combination, the first combination and the second combination being disposed at intervals in an axial direction of the main body portion; The first and second combinations each include at least two of the uniform flow structures.
4. An inert atmosphere protection device according to claim 3, wherein the uniform flow structure closest to the second combination in the first combination is the first type of uniform flow structure.
5. An inert atmosphere protection device according to claim 3, wherein all of the uniform flow structures in the first combination are of the first type.
6. The inert atmosphere protection device according to claim 4 or 5, wherein the uniform flow structure closest to the first combination in the second combination is a second type uniform flow structure; The axis of the purging port of the second uniform flow structure is inclined relative to the axis of the main body part, the projection of the axis of any purging port of the second uniform flow structure on a plane perpendicular to the axial direction of the main body part coincides with or is parallel to the normal line of the main body part at a corresponding position, and the outflow end of the purging port of the second uniform flow structure in the second combination is closer to the first combination than the inflow end.
7. An inert atmosphere protection device according to claim 6, wherein the angle of the axis of the purge port of the second uniform flow structure to the acute angle formed by its projection onto a plane perpendicular to the axial direction of the main body portion is not more than 80 °.
8. An inert atmosphere protection device according to claim 3 or 4, wherein the uniform flow structure of the second combination furthest from the first combination is the first type of uniform flow structure.
9. The inert atmosphere protection device according to claim 8, wherein the flow-homogenizing structure closest to the first combination in the second combination is a second-type flow-homogenizing structure, an axis of the purge port of the second-type flow-homogenizing structure is inclined with respect to an axis of the main body portion, and a projection of an axis of any one of the purge ports of the second-type flow-homogenizing structure on a plane perpendicular to an axial direction of the main body portion coincides with or is parallel to a normal line of the main body portion at a corresponding position; the flow homogenizing structures farthest from the second combination in the first combination are third-class flow homogenizing structures, the axes of the purging ports of the third-class flow homogenizing structures are inclined relative to the axes of the main body part, the inflow ends of the purging ports of the third-class flow homogenizing structures are closer to the second combination than the outflow ends, and the projections of the axes of all the purging ports of the same third-class flow homogenizing structures on a plane perpendicular to the axial direction of the main body part are inclined relative to the normal line of the main body part along the same direction.
10. The inert atmosphere protection device according to claim 8, wherein the uniform flow structure closest to the first combination in the second combination, the uniform flow structure farthest from the second combination in the first combination are all of a third type of uniform flow structure; The axes of the purge ports of the third type of uniform flow structures are inclined relative to the axis of the main body part, the projections of the axes of all purge ports of the same third type of uniform flow structures on a plane perpendicular to the axial direction of the main body part are inclined relative to the normal line of the main body part along the same direction, the outflow ends of the purge ports of the third type of uniform flow structures in the second combination are closer to the first combination than the inflow ends, and the inflow ends of the purge ports of the third type of uniform flow structures in the first combination are closer to the second combination than the outflow ends.
11. An inert atmosphere protection device according to claim 9, wherein the angle of the axis of the purge port of the second uniform flow structure to its projection on a plane perpendicular to the axial direction of the main body portion is not more than 80 °.
12. Inert atmosphere protection device according to claim 9 or 10, characterized in that the angle of the acute angle formed by the axis of the purge port of the third type of uniform flow structure and its projection on a plane perpendicular to the axial direction of the main body portion is not more than 80 °, and the angle formed by the projection of the axis of any one of the purge ports of the third type of uniform flow structure on a plane perpendicular to the axial direction of the main body portion and the normal of the main body portion at the corresponding position is not less than 10 ° and not more than 60 °.
13. A laser annealing device, which is characterized by comprising a workpiece table, an exposure lens group and an inert atmosphere protection device according to any one of claims 1-12, wherein the exposure lens group, the inert atmosphere protection device and the workpiece table are sequentially arranged.

Description

Inert atmosphere protection device and laser annealing equipment Technical Field The invention belongs to the technical field of laser annealing, and particularly relates to an inert atmosphere protection device and laser annealing equipment. Background Laser annealing is to provide a laser source by a laser pulser, wherein the laser provided by the laser source is formed into a rectangular beam with an elongated cross section after passing through an optical system (i.e. a series of lenses), and the laser irradiates a film layer on a wafer. The purpose of using laser annealing techniques on wafers is to convert amorphous materials into polycrystalline or single crystalline states for crystallization or to increase crystallinity, so that after ion implantation, the doped impurities combine with ordered arrangements of atoms in the film, thereby improving the electrical properties of the material on the die units of the wafer. In order to prevent the formation of impurities such as high-resistance silicon dioxide and nickel oxide components in an oxygen atmosphere during annealing, it is required that the laser annealing operation be performed under the protection of an inert gas such as nitrogen gas, and further, the laser annealing performance be improved. Therefore, it is important to provide a device that can effectively form an inert atmosphere. Disclosure of Invention The invention aims to provide an inert atmosphere protection device and laser annealing equipment, which aim to provide inert atmosphere when carrying out laser annealing operation on a wafer. In order to achieve the above object, the present invention provides an inert atmosphere protection device comprising a main body portion; the main body part is provided with a main cavity body which extends along the axial direction of the main body part in a penetrating way, and a plurality of uniform flow structures which are arranged at intervals along the axial direction of the main body part are also arranged on the main body part, wherein each uniform flow structure comprises a plurality of purging ports which are sequentially arranged along the circumferential direction of the main cavity body and are communicated with the main cavity body; At least one of the uniform flow structures is a first type of uniform flow structure; the axes of the purge ports of the first uniform flow structure are located on a plane perpendicular to the axial direction of the main body portion, and the axes of all purge ports of the same first uniform flow structure are inclined with respect to the normal line of the main body portion along the same direction. Optionally, an angle formed by the axis of any one of the purge ports of the first uniform flow structure and the normal line of the main body at the corresponding position is not less than 10 ° and not more than 60 °. Optionally, the plurality of uniform flow structures are divided into a first combination and a second combination, and the first combination and the second combination are arranged at intervals in the axial direction of the main body part; The first and second combinations each include at least two of the uniform flow structures. Optionally, the uniform flow structure closest to the second combination in the first combination is the first type uniform flow structure. Optionally, all of the uniform flow structures in the first combination are the first type of uniform flow structures. Optionally, the uniform flow structure closest to the first combination in the second combination is a second type uniform flow structure, the axis of the purge port of the second type uniform flow structure is inclined relative to the axis of the main body part, the projection of the axis of any purge port of the second type uniform flow structure on a plane perpendicular to the axial direction of the main body part coincides with or is parallel to the normal line of the main body part at a corresponding position, and the outflow end of the purge port of the second type uniform flow structure in the second combination is closer to the first combination than the inflow end. Optionally, the axis of the purge port of the second uniform flow structure forms an acute angle with its projection on a plane perpendicular to the axial direction of the main body portion of no more than 80 °. Optionally, the uniform flow structure of the second combination that is furthest from the first combination is the first type of uniform flow structure. Optionally, the uniform flow structure closest to the first combination in the second combination is a second type uniform flow structure, the axis of the purge port of the second type uniform flow structure is inclined relative to the axis of the main body part, and the projection of the axis of any one of the purge ports of the second type uniform flow structure on a plane perpendicular to the axial direction of the main body part coincides with or is parallel to the normal line of