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CN-122028672-A - Spray device and substrate processing equipment

CN122028672ACN 122028672 ACN122028672 ACN 122028672ACN-122028672-A

Abstract

The application discloses a spraying device and substrate processing equipment, wherein the spraying device comprises a body and a switching element, a cavity is formed in the body, the body is further provided with a liquid inlet and a liquid outlet, the liquid inlet is used for introducing at least two liquid medicines into the cavity, the liquid outlet is used for discharging mixed liquid of the at least two liquid medicines in the cavity, the switching element comprises an inner core, the inner core is movably arranged in the cavity so as to open or close the liquid outlet, at least two liquid medicines are introduced into the cavity through the liquid inlet in a state that the inner core closes the liquid outlet, so that the at least two liquid medicines are mixed to form mixed liquid, and the inner core is opened to discharge the mixed liquid when the mixing duration of the mixed liquid reaches a preset duration. The spraying device can mix the mixed liquid in the cavity of the spraying device body for a preset time so as to supply the mixed liquid to the surface of the substrate to achieve a good substrate treatment effect.

Inventors

  • CHEN FUPING
  • PANG HAO
  • ZHANG FENGRONG
  • WANG HUI

Assignees

  • 盛美半导体设备(上海)股份有限公司

Dates

Publication Date
20260512
Application Date
20241104

Claims (11)

  1. 1. A spray device, comprising: The liquid inlet is used for introducing at least two liquid medicines into the cavity, and the liquid outlet is used for discharging mixed liquid of the at least two liquid medicines in the cavity; A switching element including an inner core movably disposed in the cavity to open or close the liquid outlet; The spray device is configured to: Introducing the at least two liquid medicines into the cavity through the liquid inlet under the state that the inner core closes the liquid outlet so as to mix the at least two liquid medicines to form a mixed liquid, and And when the mixing time of the mixed liquid reaches a preset time, opening the liquid outlet by the inner core so as to discharge the mixed liquid.
  2. 2. The spraying device according to claim 1, wherein the cavity comprises a first cavity and a second cavity, the inner core comprises a movable end and a penetrating part, the movable end is located in the first cavity and is used for dividing the first cavity into a first pressure regulating cavity and a second pressure regulating cavity, the first pressure regulating cavity is located above the second pressure regulating cavity, the first end of the penetrating part is connected with the movable end, the penetrating part penetrates into the second cavity from the first cavity, the second cavity is provided with the liquid inlet and the liquid outlet, the liquid inlet is located above the liquid outlet, and the second end of the penetrating part is used for opening or closing the liquid outlet; The side wall of the first pressure regulating cavity is provided with a first opening, the side wall of the second pressure regulating cavity is provided with a second opening, and the spraying device is configured to regulate the pressure inside the first pressure regulating cavity and the second pressure regulating cavity by respectively introducing or discharging fluid into the first opening and the second opening so that the movable end drives the penetrating part to move relative to the liquid outlet.
  3. 3. The spray device of claim 2, wherein said switching element further comprises: the elastic sealing piece is arranged on the periphery of the penetrating part, the first end of the elastic sealing piece is connected with the movable end, and the second end of the elastic sealing piece is connected with the bottom of the first cavity.
  4. 4. The spray device of claim 2, wherein said body further has: and the limiting piece is arranged in the second pressure regulating cavity and positioned below the movable end and is used for being abutted with the movable end.
  5. 5. The spray device of claim 2, wherein said body further has: The cover body is provided with a first limiting part on one side facing the cavity, the movable end is provided with a second limiting part, and the first limiting part and the second limiting part are mutually matched; The spraying device is configured such that when the movable end of the inner core drives the penetrating part to move relative to the liquid outlet, the second limiting part is always limited in the first limiting part, so as to prevent the inner core from rotating around the inner core axis.
  6. 6. The spray device of claim 1, wherein said switching element further comprises an electromagnet, said inner core comprising a permanent magnet; the spraying device is configured to enable the inner core to open or close the liquid outlet through attraction or repulsion of the electromagnet and the permanent magnet.
  7. 7. The spray device of claim 6, further comprising a receiving chamber, wherein the electromagnet is received in the receiving chamber, wherein the receiving chamber is provided with an air inlet for introducing a cooling medium into the receiving chamber and an air outlet for discharging the cooling medium from the receiving chamber.
  8. 8. The spray device of claim 6, wherein said switching element further comprises a resilient guide connecting said inner core and a sidewall of said cavity.
  9. 9. The spray device of claim 1, wherein said body further has: And the exhaust port is used for exhausting the gas in the cavity.
  10. 10. The spray device of claim 1, wherein the at least two liquid chemicals comprise sulfuric acid and hydrogen peroxide, and the liquid inlet comprises a first liquid inlet and a second liquid inlet for introducing the sulfuric acid and the hydrogen peroxide, respectively.
  11. 11. A substrate processing apparatus, comprising: a chamber for accommodating a substrate; the shower device according to any one of claims 1 to 10, configured to supply the mixed liquid to a substrate in the chamber.

Description

Spray device and substrate processing equipment Technical Field The application relates to the technical field of semiconductor manufacturing, in particular to a spraying device and substrate processing equipment. Background In the semiconductor substrate processing process, SPM (Sulfuric Acid Hydrogen Peroxide Mixture: sulfuric acid hydrogen peroxide mixture) liquid medicine is often used to remove photoresist, and sulfuric acid solution and hydrogen peroxide are mixed and sprayed to the surface of the substrate. Carlo acid is generated when sulfuric acid is mixed with hydrogen peroxide, and has very strong oxidizing power, so that the photoresist can be oxidized, and the photoresist is removed. According to researches, when sulfuric acid and hydrogen peroxide are mixed for a preset time, the temperature of the SPM liquid medicine, the concentration of the Carlo in the SPM liquid medicine and the like are more favorable for realizing a better photoresist removing effect. Accordingly, it is necessary to provide a shower apparatus and a substrate processing apparatus to solve the problem of how to mix a mixed solution (SPM chemical solution) for a predetermined period of time so as to be supplied to a substrate surface for a good substrate processing effect. Disclosure of Invention The application aims to solve the problem of how to mix the mixed solution for a preset time so as to supply the mixed solution to the surface of a substrate to achieve a better substrate treatment effect in the prior art. In order to solve the above-mentioned problems, an embodiment of the present application provides a spraying device, including: The liquid inlet is used for introducing at least two kinds of liquid medicine into the cavity, and the liquid outlet is used for discharging mixed liquid of the at least two kinds of liquid medicine in the cavity; A switching element including an inner core movably disposed in the cavity to open or close the liquid outlet; the spray device is configured to: introducing at least two kinds of liquid medicine into the cavity through the liquid inlet under the state that the inner core is closed to form a mixed liquid, and And when the mixing time of the mixed liquid reaches a preset time, the inner core is opened to open the liquid outlet so as to discharge the mixed liquid. Another embodiment of the present application is directed to a substrate processing apparatus including: a chamber for accommodating a substrate; the spraying device is used for supplying the mixed liquid to the substrate in the chamber. According to the spraying device provided by the application, the switching element is arranged, the inner core of the switching element is movably arranged in the cavity so as to open or close the liquid outlet, at least two liquid medicines are mixed in the cavity of the body to form mixed liquid, and when the mixing time of the mixed liquid reaches a preset time, the mixed liquid is discharged, so that the spraying device can mix the mixed liquid for the preset time so as to supply the mixed liquid to the surface of the substrate to achieve a good substrate treatment effect. The substrate processing equipment provided by the application comprises the spraying device, and the mixed liquid with the mixing time reaching the preset time in the spraying device is supplied to the surface of the substrate, so that a good substrate processing effect is realized. Additional features and corresponding advantages of the application will be set forth in the description which follows, and in part will be apparent from the description, or may be learned by practice of the application. Drawings Fig. 1 is a schematic perspective view of a spraying device according to embodiment 1 of the present application; Fig. 2 is a schematic cross-sectional structure of the spray device of embodiment 1 of the present application when the inner core closes the liquid outlet; Fig. 3 is a schematic cross-sectional structure of the spray device according to embodiment 1 of the present application when the inner core opens the liquid outlet; FIG. 4 is a graph of concentration of generated Carlo versus time for example 1 of the present application; Fig. 5 is a schematic perspective view of a spraying device according to embodiment 2 of the present application; FIG. 6 is a schematic cross-sectional view of the spray device of embodiment 2 of the present application with the liquid outlet closed; FIG. 7 is a schematic cross-sectional view of a spray device according to embodiment 2 of the present application with an inner core having an open outlet, and Fig. 8 is a schematic view showing the structure of a substrate processing apparatus according to embodiment 3 of the present application. Detailed Description Further advantages and effects of the present application will become apparent to those skilled in the art from the disclosure of the present specification, by describing the embodiments of the present applicati