CN-122028678-A - Wet process cavity

CN122028678ACN 122028678 ACN122028678 ACN 122028678ACN-122028678-A

Abstract

The application provides a wet process cavity. The wet process cavity comprises a cavity body, at least two process cavities which are sleeved with each other and can be lifted independently, an exhaust main pipe, independent exhaust channels which are in one-to-one correspondence with the process cavities, and a valve device. The valve arrangement is configured to selectively open an independent vent passage in communication with any process chamber and close the remaining independent vent passages when the process chamber is raised to a process position. According to the technical scheme, the exhaust negative pressure is accurately concentrated in the current working process area through independent control of the exhaust channel, so that the problem of wind robbing existing in the traditional parallel exhaust system is fundamentally solved, the exhaust efficiency is remarkably improved, the waste gas backflow and cross pollution among different process cavities are effectively avoided, and the cleanliness and stability of the process environment are improved.

Inventors

ZHANG TING
SHI LEI
ZHENG HUI

Assignees

宁波润华全芯微电子设备有限公司

Dates

Publication Date: 20260512
Application Date: 20251229

Claims (11)

1. A wet process chamber, comprising: A cavity body; at least two process chambers are arranged in the chamber body in a mutually sleeved mode, and each process chamber can be driven by an independent driving mechanism to independently lift in the vertical direction; An exhaust main pipe; the independent exhaust channels are in one-to-one correspondence with the process chambers, and all the independent exhaust channels are connected to the exhaust main pipe in a converging way; the valve device is arranged at the joint of the independent exhaust channel or the exhaust main pipe; when any process chamber rises to a preset process position to open the inlet of the process chamber, the valve device is configured to open an independent exhaust channel corresponding to the process chamber and close independent exhaust channels corresponding to the rest process chambers.
2. The wet process chamber of claim 1, further comprising an air flow baffle disposed between an inner wall of the chamber body and the outermost process chamber; The air flow baffle is matched with the process cavity and is configured to form a standby air exhaust channel to maintain air flow circulation in a standby mode, and the standby air exhaust channel is closed in the process mode to forcedly guide air flow into an independent air exhaust channel opened by the valve device.
3. The wet process chamber according to claim 1 or 2, wherein at least two exhaust ports are symmetrically arranged in each process chamber, and the exhaust ports are communicated with the independent exhaust channels corresponding to the process chamber, or, The bottom of each process cavity is provided with a mutually independent liquid outlet which is respectively connected to independent liquid outlet pipelines so as to separate and discharge waste liquid generated by different process cavities.
4. The wet process chamber according to claim 1 or 2, wherein the number of the process chambers is three, a first process chamber for treating a first chemical liquid, a second process chamber for treating a second chemical liquid, and a third process chamber for treating a cleaning liquid are sequentially provided from the inside to the outside, the independent liquid discharge ports are used for recovering the first chemical liquid, the second chemical liquid, and the cleaning liquid, respectively, or, Still be provided with in the cavity main part: the main shaft is used for clamping the substrate and driving the substrate to rotate; and the tail end of the swing arm is provided with a cylindrical spray head or a fan-shaped spray head.
5. The wet process chamber according to claim 1 or 2, wherein a fan filter unit is provided at the top of the chamber body for providing a vertically downward flow of clean gas into the chamber body, or, The cavity body is also provided with a door assembly, and the door assembly comprises a lifting cylinder for driving the door plate to lift and a sealing cylinder for realizing sealing of the door plate.
6. The wet process chamber according to any one of claims 1 or 2, wherein the valve device is interlocked with the driving mechanism of the process chamber through a control system, and the control system sends a command of opening the corresponding independent exhaust channel only after confirming that the target process chamber reaches the process position, or a flow regulating device is further arranged in the independent exhaust channel and is used for automatically regulating the exhaust flow or the negative pressure according to the process types executed by different process chambers.
7. A wet process chamber, comprising: A cavity body; at least two process chambers which are arranged in the chamber body in a mutually sleeved manner and can be switched between a descending standby position and an ascending process position along the vertical direction; the airflow baffle is annularly arranged between the inner wall of the cavity body and the outermost process cavity; when all the process chambers are at the standby position, the upper edge of the outermost process chamber is lower than the lower edge of the airflow baffle plate, so that an annular standby exhaust channel is formed between the outer wall of the outermost process chamber and the airflow baffle plate; when any process chamber is positioned at the process position, the outer wall of the outermost process chamber is matched with the air flow baffle plate so as to seal the standby exhaust channel.
8. The wet process chamber of claim 7, wherein when any of the process chambers is in the process position to open a process chamber inlet and the standby exhaust passage is closed, the clean gas flow is directed and restricted to flow through the interior space of the process chamber in the process position to the exhaust area.
9. The wet process chamber of claim 7, wherein when all of the process chambers are in the standby position, the clean gas flows through the standby exhaust channel to the bottom exhaust area of the chamber body and is exhausted through a slightly open exhaust channel or standby exhaust.
10. The wet process chamber of claim 7, wherein the number of the process chambers is three, and the process chambers are sequentially a first process chamber, a second process chamber and a third process chamber from inside to outside, wherein the first process chamber is used for treating a first chemical liquid medicine, the second process chamber is used for treating a second chemical liquid medicine, the third process chamber is used for treating a cleaning liquid, the independent liquid discharge ports are used for respectively recovering the first chemical liquid medicine, the second chemical liquid medicine and the cleaning liquid, or, Still be provided with in the cavity main part: the main shaft is used for clamping the substrate and driving the substrate to rotate; and the tail end of the swing arm is provided with a cylindrical spray head or a fan-shaped spray head.
11. The wet process chamber of claim 7, wherein a fan filter unit is disposed at a top of the chamber body for providing a vertically downward flow of clean gas into the chamber body, or, The cavity body is also provided with a door assembly, and the door assembly comprises a lifting cylinder for driving the door plate to lift and a sealing cylinder for realizing sealing of the door plate.

Description

Wet process cavity Technical Field The invention relates to the technical field of semiconductor manufacturing equipment, in particular to a wet process cavity. Background In the semiconductor manufacturing industry, wet processes, such as cleaning, etching, and the like, have extremely high requirements on the cleanliness of the process environment. These processes are typically performed in a closed process chamber where chemical aerosols, reaction byproducts, and small particles generated inside the chamber, if not effectively expelled in time, may redeposit on the substrate surface, forming defects that directly affect product yield. In order to maintain the cleanliness of the cavity, the conventional wet process equipment is generally provided with a fan filter unit at the top of the cavity to provide clean air flow, and is connected with an exhaust system at the bottom to form air flow circulation. In some designs for improving the production efficiency and the equipment integration level, a plurality of process units are integrated in one cavity, for example, a plurality of sleeved process cavities capable of being lifted independently are adopted, and each process cavity corresponds to one process step. In this configuration, each process chamber is typically provided with separate exhaust channels that ultimately merge into one exhaust manifold. However, this parallel design of multiple exhaust channels is problematic in practical applications. The resistance of the pipeline is different due to different factors such as the pipeline length and bending of each independent exhaust channel. When the central exhaust system provides an overall negative pressure, the air flow will preferentially flow through the path of least resistance, the so-called windbreak phenomenon. The exhaust efficiency of the working process chamber is affected by other parallel channels, and even the channel with large negative pressure can reversely exhaust gas from the channel with small negative pressure, so that the exhaust efficiency of the main process area is reduced, and the residual chemical waste gas of other process chambers is more likely to be reversely sucked into the working process chamber, so that cross contamination is caused, and the stability of the process is threatened. Disclosure of Invention The application provides a wet process cavity for solving the problems of wind robbing and cross contamination caused by parallel exhaust of the existing wet process cavity. The technical scheme of the invention provides a wet process cavity, which comprises a cavity body, at least two process cavities, an exhaust main pipe, at least two independent exhaust channels and a valve device, wherein the process cavities are arranged in the cavity body in a mutually sleeved mode, each process cavity can be driven by an independent driving mechanism to independently lift in the vertical direction, the independent exhaust channels are in one-to-one correspondence with the process cavities and all the independent exhaust channels are connected to the exhaust main pipe in a converging way, the valve device is arranged at the joint of the independent exhaust channels or the exhaust main pipe, and when any process cavity is lifted to a preset process position to open a process cavity inlet, the valve device is configured to open the independent exhaust channels corresponding to the process cavity and close the independent exhaust channels corresponding to the rest process cavities. Preferably, the device further comprises an air flow baffle plate, wherein the air flow baffle plate is arranged between the inner wall of the cavity body and the outermost process cavity, the air flow baffle plate is matched with the process cavity and is configured to form a standby air exhaust channel to maintain air flow circulation in a standby mode, the standby air exhaust channel is closed in the process mode, and air flow is forcedly guided into an independent air exhaust channel opened by the valve device. Preferably, at least two exhaust outlets which are symmetrically distributed are arranged in each process cavity, the exhaust outlets are communicated with the independent exhaust channels corresponding to the process cavities, or the bottom of each process cavity is provided with mutually independent liquid discharge ports which are respectively connected to independent liquid discharge pipelines so as to separate and discharge waste liquid generated by different process cavities. Preferably, the number of the process chambers is three, namely a first process chamber, a second process chamber and a third process chamber from inside to outside in sequence, wherein the first process chamber is used for processing a first chemical liquid medicine, the second process chamber is used for processing a second chemical liquid medicine, the third process chamber is used for processing cleaning liquid, the independent liquid draining ports are used