CN-122028686-A - Substrate processing system and substrate transferring method

CN122028686ACN 122028686 ACN122028686 ACN 122028686ACN-122028686-A

Abstract

The invention provides a substrate processing system, which comprises a plurality of stations, a transfer device and a conveying device, wherein the transfer device is arranged on the stations and used for taking and placing substrates, and the conveying device is arranged along the arrangement direction of the stations and used for transferring the substrates to any station for taking by the transfer device. According to the substrate processing system, the transfer device and the conveying device are matched to finish the transfer work of the substrate, so that the transfer efficiency of the substrate is greatly improved. Furthermore, when the substrate is transported by the conveying device, the normal work of other stations is not influenced, and the efficiency of the substrate transportation system is effectively improved. On the other hand, the invention also provides a substrate transfer method, which completes the transfer work of the substrate through the cooperation of the transfer device and the conveying device, thereby greatly improving the transfer efficiency of the substrate.

Inventors

WANG RONGXIANG
PENG BO
LI ZE
LI SHUANG
LIU TAO

Assignees

上海芯源微企业发展有限公司

Dates

Publication Date: 20260512
Application Date: 20241108

Claims (10)

1. A substrate processing system, comprising: The plurality of stations are arranged at intervals; The conveying device is arranged along the arrangement direction of the plurality of stations and comprises a conveying piece for loading the substrate, and the conveying piece can reciprocate along the arrangement direction of the plurality of stations and is used for conveying the substrate to a position corresponding to any one station of the plurality of stations; a plurality of transfer devices corresponding to the plurality of stations, the transfer devices being used for taking out the substrate from the stations corresponding thereto and placing the substrate on the conveyor; the transfer device is also used for taking out the substrate from the conveying piece and placing the substrate on the station corresponding to the transfer device.
2. The substrate processing system of claim 1, wherein the transfer apparatus comprises: The rack extends along the arrangement direction of the stations; The conveying piece is arranged on the rack in a sliding manner and is used for bearing the substrate and transferring the substrate to the corresponding station; The guide rail is arranged on the rack and is in sliding connection with the conveying piece, and the guide rail is used for guiding the conveying piece to slide; the first driving device is arranged on the frame, connected with the conveying piece through a transmission mechanism and used for driving the conveying piece to slide along the guide rail.
3. The substrate processing system of claim 2, wherein the transfer member comprises: the sliding connection assembly is in sliding connection with the guide rail and slides along the guide rail under the drive of the transmission mechanism; And the substrate supporting assembly is connected with the sliding connection assembly and is used for loading the substrate.
4. The substrate processing system of claim 3, wherein the slip joint assembly comprises a mounting plate, a first support plate and a second support plate, wherein the mounting plate is disposed parallel to a transport plane of the conveyor, the first support plate and the second support plate are disposed opposite to each other and are vertically connected to both ends of the mounting plate, and lower ends of the first support plate and the second support plate are slidably connected to the guide rail.
5. The substrate processing system of claim 4, wherein the substrate support assembly comprises a fixed block and a support member, wherein two of the fixed blocks are disposed opposite to and fixedly coupled to the mounting plate, the support member is mounted on the fixed block, and a plurality of the support members are coupled to each other to support the substrate.
6. The substrate processing system of claim 4, wherein the rail comprises a first rail and a second rail symmetrically disposed on both sides of the frame, the first support plate having a lower end slidably coupled to the first rail, and the second support plate having a lower end slidably coupled to the second rail.
7. The substrate processing system of claim 6, wherein the transport apparatus includes n transport members, wherein any two transport members do not interfere with each other, and an n-1 transport member is movable between the n transport member and the frame while sliding along the guide rail.
8. The substrate processing system of claim 1, wherein the transfer device comprises: A second driving device; One end of the first mechanical arm is connected with the power output end of the second driving device and is driven by the second driving device to rotate; One end of the second mechanical arm is connected with the power output end of the third driving device and is driven by the third driving device to rotate; and one end of the third mechanical arm is connected with the power output end of the fourth driving device and driven by the fourth driving device to rotate, and the other end of the third mechanical arm is provided with a supporting plate for taking and placing the substrate.
9. The substrate processing system of claim 8, wherein a plurality of the pallets are connected to the third robot arm, the plurality of pallets are arranged at equal intervals, and a distance between two adjacent pallets is greater than a thickness of a single substrate.
10. A substrate transfer method, comprising the steps of: The transfer device takes out the substrate from the current station and places the substrate on the conveying device; step two, conveying the substrate to a target station by a conveying device; and step three, taking the substrate from the conveying device by a transfer device at the target station.

Description

Substrate processing system and substrate transferring method Technical Field The present invention relates to the field of semiconductor technology, and in particular, to a substrate processing system and a substrate transferring method. Background In the semiconductor industry, "substrate" refers to a base material (e.g., wafer) used to fabricate Integrated Circuits (ICs) or other semiconductor devices. It is the starting point for semiconductor fabrication, typically as a support or underlying structure, for depositing, etching, and building up semiconductor elements of different layers. The processing of the substrate involves multiple processes, with the transfer of the substrate between the different stations being undertaken by robots in the substrate processing system. In the prior art, a substrate processing system mainly comprises a loading unit, a plurality of stations and a transfer manipulator. The loading unit is positioned at the initial position of the processing system, so that the substrate can be conveniently input. The transferring manipulators are distributed among the stations and move between the loading units and the different stations. Limited by the picking range of the manipulator, one or more transition manipulators are required to be configured between the initial station and the remote station, and the transfer manipulators on different stations can transfer a substrate from the initial station to the remote station through transfer of the transition manipulators. Under this scheme, the transfer efficiency of the substrate is low. In addition, in some special process conditions, the transfer speed of the manipulator needs to be reduced due to the process requirement of the substrate, so that the transfer efficiency is further reduced, and meanwhile, a transition unit and a process unit in the substrate processing system are greatly idle, so that the efficiency of the substrate transfer system is greatly reduced. Accordingly, there is a need to provide a new substrate processing system that solves the above-mentioned problems of the prior art. Disclosure of Invention The invention aims to provide a substrate transfer method and a substrate processing system, which are used for reducing substrate carrying links and steps, improving system efficiency and improving multi-station expansibility of a system. To achieve the above object, a first aspect of the present invention provides a substrate processing system comprising: The plurality of stations are arranged at intervals; The conveying device is arranged along the arrangement direction of the plurality of stations and comprises a conveying piece for loading the substrate, and the conveying piece can reciprocate along the arrangement direction of the plurality of stations and is used for conveying the substrate to a position corresponding to any one station of the plurality of stations; a plurality of transfer devices corresponding to the plurality of stations, the transfer devices being used for taking out the substrate from the stations corresponding thereto and placing the substrate on the conveyor; the transfer device is also used for taking out the substrate from the conveying piece and placing the substrate on the station corresponding to the transfer device. Through the technical scheme, the substrate transfer device has the technical effects that the conveying device is arranged along the arrangement direction of the stations to serve as a transition unit, so that the substrate can be conveniently transferred between different stations. Specifically, when the substrate needs to be transferred between the current station and the target station, the transfer device arranged on the current station takes the substrate out of the current station and places the substrate on the conveying device, then the conveying device directly conveys the substrate to the target station, and finally, the transfer device at the target station takes the substrate from the conveying device and places the substrate on the target station. The design scheme not only can rapidly transfer the substrate between two adjacent stations, but also has greater superiority when transferring the substrate between two stations which are far apart. According to the scheme, the transfer device and the conveying device are matched to complete the transfer work of the substrate, so that the transfer efficiency of the substrate is greatly improved. Furthermore, when the substrate is transported by the conveying device, the normal work of other stations is not influenced, and the efficiency of the substrate transportation system is effectively improved. Preferably, the conveying device comprises a frame, a conveying piece, a guide rail and a first driving device, wherein the frame extends along the arrangement direction of the stations. The conveying piece is arranged on the frame in a sliding manner and is used for bearing the substrate and transferring the substr