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CN-122028687-A - Battery piece coating equipment and method thereof

CN122028687ACN 122028687 ACN122028687 ACN 122028687ACN-122028687-A

Abstract

The application discloses battery piece coating equipment and a method thereof, relates to the technical field of vacuum coating, and aims to solve the problems of low utilization rate and low productivity of processing chambers caused by sequential transmission in the conventional equipment production line due to inconsistent beats of the processing chambers. The battery piece coating equipment comprises a process section and a conveying device, wherein the process section comprises a plurality of processing chambers which are sequentially arranged, any adjacent processing chambers can be communicated or separated, the plurality of processing chambers comprise a plurality of processing chambers which are sequentially arranged, the conveying device penetrates through the plurality of processing chambers and is used for driving a carrier carrying a substrate to sequentially pass through the plurality of processing chambers, the plurality of processing chambers are used for coating films on two opposite surfaces of the substrate, and the carrier in the latter of any adjacent processing chambers can be conveyed into the former under the condition that any adjacent processing chambers are communicated. The battery piece coating equipment is used for coating the substrate.

Inventors

  • ZHOU SHENGXIN
  • YANG BAOHAI
  • LI YISHENG

Assignees

  • 营口金辰机械股份有限公司
  • 金辰双子太阳能光伏科技(营口)有限公司北京分公司

Dates

Publication Date
20260512
Application Date
20241108

Claims (20)

  1. 1. A battery piece coating apparatus, characterized by comprising: the processing section (1) comprises a plurality of processing chambers (A) which are sequentially arranged, wherein any adjacent processing chambers (A) can be communicated or separated from each other, the plurality of processing chambers (A) comprise a plurality of processing chambers (A1) which are sequentially arranged, and the plurality of processing chambers (A1) are used for coating films on the surface of the substrate (02); The conveying device (2) is arranged in the plurality of processing chambers (A) in a penetrating manner and is used for driving a carrier (03) for carrying the substrate (02) to sequentially pass through the plurality of processing chambers (A); when any adjacent processing chambers (A) are communicated, the carriers (03) in the latter of the processing chambers (A) can be conveyed into the former.
  2. 2. Battery piece coating device according to claim 1, characterized in that, in the case of communication between any adjacent processing chambers (a), the carriers (03) in the latter of any adjacent processing chambers (a) can be transported synchronously into the former.
  3. 3. The battery plate coating apparatus according to claim 1, wherein the plurality of processing chambers (a) further comprises a preheating chamber (A2), the preheating chamber (A2) being provided before the processing chamber (A1), the substrate (02) being heatable within the preheating chamber (A2).
  4. 4. The battery plate coating apparatus according to claim 3, wherein, And/or, at least one of the preheating chamber (A2) and the process chamber (A1) is provided with a non-contact heating device which is used for being arranged at intervals with the carrier (03) and heating the substrate (02) and/or the carrier (03) in a radiation way.
  5. 5. The battery sheet coating apparatus according to claim 4, wherein a gas is introduced into the preheating chamber (A2) while at least one of the contact heating means and the non-contact heating means is heated, the gas passing through at least one of the contact heating means and the non-contact heating means and flowing through the carrier (03).
  6. 6. The battery plate coating apparatus according to claim 4, wherein in the case where the adjacent preheating chamber (A2) and the process chamber (A1) are switched from partition to communication, the gas pressure in at least one of the preheating chamber (A2) and the process chamber (A1) is maintained unchanged.
  7. 7. The battery piece coating equipment according to claim 4, wherein the battery piece coating equipment (01) further comprises a cold guide (5), a medium space is formed in the cold guide (5), the cold guide (5) is arranged in at least one of the preheating chamber (A2) and the process chamber (A1), the cold guide (5) is in contact with at least one of the contact heating device and/or the non-contact heating device, and a cooling medium is introduced into the medium space after the contact heating device and/or the non-contact heating device are heated.
  8. 8. The battery piece coating equipment according to claim 1, wherein the processing chamber (a) at the head end of the process section (1) and the tail end of the process section (1) are non-process chambers which can be communicated or isolated from the adjacent processing chamber (a); The gas pressure within the process chamber (A1) is less than the gas pressure within the non-process chamber with the non-process chamber and the adjacent process chamber (a) in communication.
  9. 9. The battery plate coating apparatus according to claim 8, wherein the non-process chamber at the head end of the process section (1) comprises an in-process chamber (A3) with adjustable internal filling gas pressure, and the non-process chamber at the tail end of the process section (1) comprises an out-process chamber (A4) with adjustable internal filling gas pressure.
  10. 10. The battery piece coating equipment according to any one of claims 1 to 9, wherein the number of the process sections (1) is plural, and the plurality of process sections (1) comprises a first process section (11), a second process section (12) and a third process section (13) which are sequentially arranged; The first process section (11) comprises at least one process chamber (A1) for plating a first intrinsic layer (021) on a first surface of the substrate (02); the second process section (12) comprises at least one process chamber (A1) for plating a second intrinsic layer (022) on a second surface of the substrate (02), and at least one process chamber (A1) for plating a first doped layer (023) on the second intrinsic layer (022), which are arranged in sequence; The third process section (13) comprises at least one process chamber (A1) for plating a second doped layer (024) on the first intrinsic layer (021).
  11. 11. The battery plate coating apparatus according to claim 10, wherein, The longer the coating time is, the more the number of corresponding process chambers (A1) is, among the first intrinsic layer (021), the second intrinsic layer (022), the first doping layer (023) and the second doping layer (024).
  12. 12. The battery plate coating apparatus according to claim 10, characterized in that the process chamber (a) within the second process section (12) further comprises an isolation chamber (A5), the isolation chamber (A5) being arranged between the at least one process chamber (A1) for coating a second intrinsic layer (022) on the second surface of the substrate (02) and the at least one process chamber (A1) for coating a first doped layer (023) on the second intrinsic layer (022) and being capable of communicating or blocking with the two adjacent process chambers (A1), respectively.
  13. 13. The battery piece coating equipment according to claim 10, characterized in that each process section (1) further comprises a feeding mechanism (6) at the head of the section and a discharging mechanism (7) at the tail of the section; the feeding mechanism (6) comprises a first lower transmission station, a first lifting device and an upper chip stacking station positioned above the first lower transmission station, wherein the first lifting device is used for conveying an empty carrier (03) on the first lower transmission station to the upper chip stacking station, and a substrate (02) to be coated can be placed on the empty carrier (03); The blanking mechanism (7) comprises a second lower transmission station, a second lifting device and a sheet taking station positioned above the second lower transmission station, wherein the second lifting device is used for conveying an empty carrier (03) of the substrate (02) after the coating film is taken away on the sheet taking station to the second lower transmission station.
  14. 14. The battery plate coating apparatus according to claim 13, further comprising a turnover device (8); The turnover device (8) is arranged between the blanking mechanism (7) of the first process section (11) and the feeding mechanism (6) of the second process section (12), the turnover device (8) is used for turning over the substrate (02) plated with the first intrinsic layer (021) and/or, The turnover device (8) is arranged between the blanking mechanism (7) of the second process section (12) and the feeding mechanism (6) of the third process section (13), and the turnover device (8) is used for turning over the substrate (02) plated with the first doping layer (023).
  15. 15. The battery piece coating device according to claim 13, further comprising a return means (9); The heat-insulating device comprises a plurality of process sections (1), wherein at least one of the process sections (1) is provided with a return device (9), the return device (9) comprises a heat-insulating pipeline and a conveying line arranged along the extending direction of the heat-insulating pipeline, the conveying line is arranged in the heat-insulating pipeline, in the same process section (1), the feeding end of the heat-insulating pipeline can be communicated with the second lower transmission station, the discharging end of the heat-insulating pipeline can be communicated with the first lower transmission station, the conveying line is used for conveying the empty carrier (03), and the heat-insulating pipeline is made of heat-insulating materials.
  16. 16. The battery piece coating equipment according to any one of claims 1 to 9, wherein the conveying device (2) comprises two groups of roller groups (C) which are sequentially arranged along a first direction (X), the roller groups (C) comprise a plurality of rollers (C1) which are arranged along a second direction (Y), the axes of the rollers (C1) are along the first direction (X), the first direction (X) is perpendicular to the second direction (Y), the second direction (Y) is along the arrangement direction of the plurality of processing chambers (a), the rollers (C1) are used for driving the carrier (03) to convey, the rollers (C1) are made of metal materials or non-metal materials, the metal materials comprise stainless steel or aluminum, and the non-metal materials comprise engineering plastics or ceramics.
  17. 17. Battery piece coating device according to claim 16, characterized in that the roller (C1) is provided with a vibration damping structure (D), which vibration damping structure (D) is arranged along the circumference of the roller (C1), which vibration damping structure (D) is intended to be in contact with the carrier (03).
  18. 18. The battery piece coating equipment according to claim 16, wherein a guiding flange (E) is connected to the outer edge of the roller (C1) along the first direction (X), the guiding flange (E) is disposed around the first direction (X), the guiding flange (E) extends away from the axis of the roller (C1) and away from the roller group (C) on the other side, and an angle between an inclined surface of the guiding flange (E) and a plane perpendicular to the first direction (X) ranges from 10 ° to 45 °.
  19. 19. A method of a battery piece coating device, applied to the battery piece coating device (01) of any one of claims 1-18, characterized in that the method comprises: Communicating any adjacent processing chambers (a); the conveying device (2) conveys the carrier (03) for carrying the substrate (02) in the latter of the processing chambers (A) which are arbitrarily adjacent to each other into the former.
  20. 20. The method according to claim 19, wherein the transporting means (2) transports the carrier (03) carrying the substrate (02) in the latter of any adjacent process chambers (a) into the former, comprising the transporting means (2) transporting the carrier (03) in the latter of any adjacent process chambers (a) into the former simultaneously.

Description

Battery piece coating equipment and method thereof Technical Field The application relates to the technical field of vacuum coating, in particular to battery piece coating equipment and a method thereof. Background In the process of producing the battery piece, a continuous coating process is generally adopted to simultaneously coat the substrates on a plurality of carriers, specifically, a plurality of processing chambers which are sequentially arranged are respectively provided with the substrates in different process steps, and the plurality of processing chambers simultaneously carry out corresponding process treatment on the substrates in the processing chambers. In the related art, after corresponding process treatment is performed on the substrates on a plurality of carriers, a single-in and single-out mode is adopted to sequentially convey the carriers in the next processing chamber into the previous processing chamber, so that the substrates on each carrier continue to perform subsequent corresponding process treatment. Specifically, only two adjacent processing chambers are communicated at a time, and then the carriers in the latter processing chamber are conveyed into the former processing chamber, so that the operations are repeated for a plurality of times, and the carriers in the plurality of processing chambers are all conveyed downwards to one station. However, the process beats of the plurality of processing chambers are inconsistent, the operation is troublesome, the utilization rate of the plurality of processing chambers is low, and the productivity is low. Disclosure of Invention The battery piece coating equipment and the method thereof provided by the embodiment of the application are used for solving the problems of lower utilization rate and low productivity of the processing chambers caused by sequential transmission in the conventional equipment production line due to inconsistent beats of the processing chambers. In a first aspect, an embodiment of the application provides a battery piece coating device, which comprises a process section and a conveying device, wherein the process section comprises a plurality of processing chambers which are sequentially arranged, any adjacent processing chambers can be communicated or separated from each other, the plurality of processing chambers comprise a plurality of processing chambers which are sequentially arranged, the conveying device penetrates through the plurality of processing chambers and is used for driving a carrier carrying a substrate to sequentially pass through the plurality of processing chambers, the plurality of processing chambers are used for coating films on two opposite surfaces of the substrate, and the carrier in the latter of any adjacent processing chambers can be conveyed into the former under the condition that any adjacent processing chambers are communicated. According to the battery piece coating equipment provided by the embodiment of the application, the conveying device can drive the carrier to sequentially pass through the plurality of processing chambers in the process section, when the carrier passes through different processing chambers, the different processing chambers can carry out different process treatments on the substrate on the carrier, for example, when the substrate passes through the plurality of processing chambers, the processing chambers can coat the surface of the substrate. After the substrates in different processing chambers finish corresponding processing links, any adjacent processing chambers are communicated simultaneously, and carriers in the latter of the any adjacent processing chambers are conveyed in the former, that is, carriers in a plurality of processing chambers are conveyed backwards, so that the same in and out of the carriers in the processing chambers can be realized, the utilization rate of the processing chambers is improved, the process beat is improved, and the production efficiency is improved. In one possible implementation of the present application, the carriers in the latter of any adjacent process chambers can be transported simultaneously in the former, with the latter being in communication with any adjacent process chamber. Therefore, when any adjacent processing chambers are communicated, the carriers in different processing chambers can be synchronously conveyed into the next processing chamber, so that the process beats can be further compressed, and the production efficiency is improved. In one possible implementation of the application, the plurality of processing chambers further comprises a preheating chamber, the process chamber being preceded by a preheating chamber within which the substrate can be heated. In this way, the preheating chamber can heat the substrate before the substrate enters the process chamber, so that the substrate has a certain temperature, and the film plating of the substrate in the process chamber is facilitated. In one