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CN-122028699-A - Slide holder driving device

CN122028699ACN 122028699 ACN122028699 ACN 122028699ACN-122028699-A

Abstract

The invention provides a slide holder driving device which comprises a slide holder and a driving assembly. The driving assembly comprises a first piezoelectric ceramic, a second piezoelectric ceramic and a supporting piece, wherein the first piezoelectric ceramic comprises a first fixing part and a first driving part which are connected, the second piezoelectric ceramic comprises a second fixing part and a second driving part which are connected, the first fixing part is connected with the slide holder, the second fixing part is connected with the first driving part, the supporting piece is connected with the second driving part and is positioned on one side of the second driving part in the first direction, and the first driving part and the second driving part can drive the supporting piece to move back and forth perpendicular to the first direction and enable the supporting piece to move back and forth between one side and the other side of the supporting surface. The slide table driving device provided by the embodiment of the invention has a higher adjusting range and adjusting precision.

Inventors

  • Wu guiyang

Assignees

  • 矽电半导体设备(深圳)股份有限公司

Dates

Publication Date
20260512
Application Date
20260415

Claims (10)

  1. 1. Slide holder drive arrangement, its characterized in that includes: the wafer carrying platform is provided with a first direction and a bearing surface for placing a wafer in the first direction, wherein the bearing surface is perpendicular to the first direction; The driving assembly comprises a first piezoelectric ceramic, a second piezoelectric ceramic and a supporting piece, wherein the first piezoelectric ceramic comprises a first fixing part and a first driving part which are connected, the second piezoelectric ceramic comprises a second fixing part and a second driving part which are connected, the first fixing part is connected with the slide holder, the second fixing part is connected with the first driving part, and the supporting piece is connected with the second driving part and is positioned at one side of the second driving part in the first direction; The first driving part can move relative to the first fixing part to drive the second piezoelectric ceramic to move, and the second driving part can move relative to the second fixing part to enable the first driving part and the second driving part to drive the supporting piece to move back and forth perpendicular to the first direction and enable the end part of the supporting piece to move back and forth between one side of the bearing surface in the first direction and one side of the bearing surface opposite to the first direction.
  2. 2. The stage drive of claim 1, wherein the drive assembly further comprises a rotating member rotatably coupled to the stage, the second stationary portion being coupled to the rotating member; the first driving part is in transmission connection with the rotating part and can drive the rotating part to rotate around a first rotation axis perpendicular to the first direction relative to the slide holder so that the supporting part can reciprocate between one side of the bearing surface in the first direction and one side of the bearing surface opposite to the first direction, and the second driving part can be close to and far away from the first rotation axis.
  3. 3. The stage driving device according to claim 2, wherein the rotating member has an abutment surface of the first rotation axis, and an end of the first driving portion remote from the first fixing portion abuts against the abutment surface to drive the rotating member to rotate about the first rotation axis perpendicular to the first direction; The driving assembly further comprises an elastic piece, wherein the elastic piece is connected to the rotating piece and used for resetting the rotating piece.
  4. 4. The stage driving device according to claim 3, wherein a side of the first driving portion remote from the first fixing portion has a spherical surface, the spherical surface abutting the abutment surface.
  5. 5. The stage driving device according to claim 1, wherein the first driving portion is located on a side of the first fixing portion perpendicular to the carrying surface, and an end portion of the first driving portion is reciprocally movable with respect to the first fixing portion between a side of the carrying surface in the first direction and a side opposite to the first direction; Or the second driving part is positioned at one side of the second fixing part perpendicular to the bearing surface, the end part of the second driving part can reciprocate between one side of the bearing surface in the first direction and one side opposite to the first direction relative to the second fixing part, and the first driving part is positioned at one side of the first fixing part in the direction parallel to the bearing surface and can reciprocate relative to the first fixing part in the direction parallel to the bearing surface.
  6. 6. The stage drive of any one of claims 1 to 5, comprising at least two of the drive assemblies, each of the drive assemblies being uniformly distributed on a side edge of the bearing surface.
  7. 7. The stage drive of claim 6, comprising at least three of the drive assemblies, the supports of each of the drive assemblies being on a same circle, the stage drive being capable of synchronously driving the first and second drive portions of each of the drive assemblies to move synchronously so that each of the supports is capable of moving back and forth in a tangential direction of the same circle.
  8. 8. The stage drive of claim 1, wherein the stage has a receiving slot extending in the first direction to the bearing surface, the drive assembly being received in the receiving slot.
  9. 9. The stage drive of claim 8, wherein the receiving slot is located at a side edge of the bearing surface.
  10. 10. The stage drive of claim 1, wherein the first piezoelectric ceramic, the second piezoelectric ceramic, and the support are each spaced apart from the stage.

Description

Slide holder driving device Technical Field The invention relates to the technical field of wafer testing, in particular to a slide holder driving device. Background The slide holder is used for placing the wafer and can conduct angle adjustment on the placed wafer, so that precise positioning of the wafer is provided for wafer testing, packaging and cutting. In some technologies, the slide holder driving device directly drives the slide holder to rotate through a motor, but the slide holder is rotated by the motor with lower precision, which is not beneficial to adjusting the angle of the wafer. In some technologies, the slide holder driving device directly rotates the slide holder through the extension and contraction of the piezoelectric ceramics, but the extension range of the piezoelectric ceramics is smaller, so that the adjusting range is smaller. Disclosure of Invention The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, the invention provides a slide table driving device which has a higher adjusting range. A stage driving device according to an embodiment of the first aspect of the present invention includes: the wafer carrying platform is provided with a first direction and a bearing surface for placing a wafer in the first direction, wherein the bearing surface is perpendicular to the first direction; The driving assembly comprises a first piezoelectric ceramic, a second piezoelectric ceramic and a supporting piece, wherein the first piezoelectric ceramic comprises a first fixing part and a first driving part which are connected, the second piezoelectric ceramic comprises a second fixing part and a second driving part which are connected, the first fixing part is connected with the slide holder, the second fixing part is connected with the first driving part, and the supporting piece is connected with the second driving part and is positioned at one side of the second driving part in the first direction; the first driving part can move relative to the first fixing part so as to drive the second piezoelectric ceramic to move, and the second driving part can move relative to the second fixing part so that the first driving part and the second driving part can drive the supporting piece to move back and forth perpendicular to the first direction and the supporting piece can move back and forth between one side of the bearing surface in the first direction and one side of the bearing surface opposite to the first direction. The slide table driving device provided by the embodiment of the invention has at least the following beneficial effects: When the driving assembly is used for driving the supporting piece to move, the end part of the supporting piece can move from one side of the bearing surface opposite to the first direction to one side of the first direction of the bearing surface, so that the wafer placed on the bearing surface is supported, and the part of the wafer supported by the end part of the supporting piece is lifted off the bearing surface. When the wafer is supported, the end part of the supporting piece can drive the part of the wafer supported by the end part of the supporting piece to move relative to the part of the wafer not supported by the end part of the supporting piece to be perpendicular to the first direction, so that the rotation of the wafer is realized, when the end part of the supporting piece rotates to the limit of the travel of the first piezoelectric ceramic and the second piezoelectric ceramic, the end part of the supporting piece supporting the wafer can move back to the side of the supporting piece, which is opposite to the first direction, from the side of the supporting surface, in the first direction, so that the wafer is placed on the supporting surface again, the end part of the supporting piece, which is positioned on the side of the supporting surface, can move back to the original position in the direction perpendicular to the first direction, the end part of the supporting piece, which is supported by the end part of the supporting piece, can move back to the original position from the side of the supporting surface in the first direction, so that the end part of the supporting piece, which is supported by the end part of the supporting piece, on the supporting piece, can be lifted from the supporting surface, can be moved away from the supporting surface, and can be rotated again. The driving assembly is matched with the first piezoelectric ceramic and the second piezoelectric ceramic to enable the wafer to rotate for multiple times, the rotatable angle of the wafer is larger than the single adjustment range of the piezoelectric ceramic, and the high precision of the piezoelectric ceramic is utilized, so that the rotation precision is higher. According to some embodiments of the invention, the drive assembly further comprises a rotating member rotatably coupled to the stage, the second sta