CN-122028967-A - Multi-layer filter housing

Abstract

A filter housing is provided having a hollow filter housing body with a housing inlet/outlet portion having an inlet port and an outlet port and defining a fluid flow path between the inlet port and the outlet port, wherein the filter housing body comprises at least three layers. The hollow filter housing body comprises at least three layers, a first layer comprising Perfluoroalkoxyalkane (PFA), a second layer comprising a thermoplastic elastomer, and a third layer comprising a thermoplastic.

Inventors

• Europa Mide Damille Agbala
• Robert A. Xike

Assignees

• 帕尔公司

Dates

Publication Date

20260512

Application Date

20241010

Priority Date

20231017

Claims (9)

1. 1. A filter housing comprising a hollow filter housing body and having a filter housing inlet/outlet portion having an inlet port and an outlet port and defining a fluid flow path between the inlet port and the outlet port, wherein the hollow filter housing body comprises at least three layers, a first layer comprising Perfluoroalkoxyalkane (PFA), a second layer comprising a thermoplastic elastomer, and a third layer comprising a thermoplastic, wherein the second layer is interposed between the first layer and the third layer, the second layer comprising an adhesive layer bonded to both the first layer and the third layer.
2. 2. The filter housing of claim 1, wherein the second layer comprises a thermoplastic elastomer selected from the group consisting of styrene block copolymers, polyolefins, polyamides, or polyester elastomers.
3. 3. The filter housing of claim 1 or 2, wherein the thermoplastic elastomer comprises polymethylpentene (PMP).
4. 4. The filter housing of any one of claims 1 to 3, wherein the third layer comprises a thermoplastic selected from the group consisting of polyolefin homopolymers, polyolefin copolymers, cyclic olefin homopolymers, copolymers of cyclic olefins, ethylene-vinyl acetate copolymers, polyesters, polyamides, polyvinyl chloride, polyvinylidene chloride, polystyrene, styrenic copolymers, polyisoprene, polyurethane, ethylene-ethyl acrylate, ethylene-acrylic acid copolymers, and combinations thereof.
5. 5. The filter housing of claim 4, wherein the thermoplastic comprises Polyetherimide (PEI).
6. 6. The filter housing according to any one of claims 1 to 5, further comprising a filter housing exhaust section having an upstream exhaust port and a downstream exhaust port.
7. 7. The filter housing of any one of claims 1 to 5, wherein the first layer has a first layer thickness, the third layer has a third layer thickness, and the third layer thickness is at least 20% greater than the first layer thickness.
8. 8. The filter housing of any one of claims 1 to 7, wherein the hollow filter housing body has an inner surface comprising the first layer and an outer surface comprising the third layer.
9. 9. The filter housing of any one of claims 1 to 8, wherein the filter housing inlet/outlet portions each comprise at least three layers, a first layer comprising Perfluoroalkoxyalkane (PFA), a second layer comprising a thermoplastic elastomer, and a third layer comprising a thermoplastic, wherein the second layer is interposed between the first layer and the third layer, the second layer comprising an adhesive layer bonded to both the first layer and the third layer.

Description

Multi-layer filter housing Cross Reference to Related Applications This patent application claims the benefit of U.S. provisional patent application No. 63/544,482, filed on 10/17 of 2023, which is incorporated herein by reference. Background Filter housings for filter devices used in applications in the semiconductor industry, such as photolithography and wet etch chemical filter applications, can be exposed to challenging conditions, such as highly corrosive fluids (e.g., hydrochloric acid, sulfuric acid, and hydrofluoric acid), which can be used in extreme temperature ranges, and often in combination with dissolved hydrogen peroxide. These fluids can damage conventional devices and can pose health risks to personnel exposed to these fluids. In addition, the materials in contact with these fluids must not contaminate the fluid or add impurities to the fluid. There is a need for an improved housing. The present invention provides an improvement over at least some of the shortcomings of the prior art. These and other advantages of the present invention will become apparent from the description set forth below. Disclosure of Invention One aspect of the present invention provides a filter housing comprising a hollow filter housing body and having a filter housing inlet/outlet portion having an inlet port and an outlet port and defining a fluid flow path between the inlet port and the outlet port, wherein the hollow filter housing body comprises at least three layers, a first layer comprising Perfluoroalkoxyalkane (PFA), a second layer comprising a thermoplastic elastomer, and a third layer comprising a thermoplastic, wherein the second layer is interposed between the first layer and the third layer, the second layer comprising an adhesive layer adhered to both the first layer and the third layer. Drawings Fig. 1A is a diagram illustrating a side view of an exemplary filter housing comprising a hollow filter housing body and having a filter housing inlet/outlet portion with an inlet port and an outlet port and a filter housing exhaust portion with an upstream exhaust port and a downstream exhaust port, wherein at least the hollow filter housing body comprises at least three layers according to one aspect of the invention, fig. 1B is a diagram illustrating a cross-sectional view of the filter housing shown in fig. 1A wherein a filter element is disposed in a flow path between the inlet port and the outlet port forming a filter device. Fig. 2A is a diagram schematically illustrating one aspect of a sequential injection molding (overmolding) process to fabricate one aspect of at least three layers of film for forming a filter housing according to another aspect of the invention. Fig. 2B is a diagram schematically illustrating one aspect of a compression molding method to manufacture one aspect of at least three layers of film for forming a filter housing according to another aspect of the invention. Detailed Description According to one aspect of the present invention there is provided a filter housing comprising a hollow filter housing body and having a filter housing inlet/outlet portion having an inlet port and an outlet port and defining a fluid flow path between the inlet port and the outlet port, wherein the hollow filter housing body comprises at least three layers, a first layer comprising Perfluoroalkoxyalkane (PFA), a second layer comprising a thermoplastic elastomer, and a third layer comprising a thermoplastic, wherein the second layer is interposed between the first layer and the third layer, the second layer comprising an adhesive layer adhered to both the first layer and the third layer. In some aspects, the filter housing further comprises a filter housing exhaust section having an upstream exhaust port and a downstream exhaust port. In some aspects, the exhaust portion and the exhaust port additionally or alternatively comprise a filter housing exhaust portion and an exhaust port. Advantageously, filter housings according to aspects of the present invention provide desirable chemical resistance and mechanical integrity. They can be produced at lower costs than commercially available single component housings produced by injection molding. The filter housing may be produced using less fluoropolymer than is used to produce commercially available single component housings produced by injection molding, thereby reducing potential contamination. Aspects of the present invention may be used to produce filter housings for filter devices to filter various fluids in the semiconductor industry. Applications include, for example, filtration of fluids containing hydrochloric, sulfuric and hydrofluoric acids and isopropyl alcohol, especially at elevated temperatures, such as hot sulfuric acid and hot isopropyl alcohol. In one aspect of the filter housing, the second layer comprises a thermoplastic elastomer selected from the group consisting of styrene block copolymers, polyolefins, polyamides, or polyester e