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CN-122029136-A - Glass

CN122029136ACN 122029136 ACN122029136 ACN 122029136ACN-122029136-A

Abstract

The present invention provides a glass which has a Young's modulus of 80GPa or more, suppresses bending and is easy to manufacture, by setting the parameter A shown in the formula (1) to 0.817 or less, the parameter B shown in the formula (2) to 0.898 or more, and the ratio of the MgO content expressed as mole% based on oxide to the total content of divalent oxides RO to 0.65 or more, and being alkali-free glass .A＝1.747－0.022×［SiO 2 ］＋0.006×［Al 2 O 3 ］＋0.018×［B 2 O 3 ］＋0.013×［MgO］－0.010×［CaO］－0.003×［SrO］＋0.012×［BaO］＋0.015×［ZnO］···（1）B＝1.315－0.010×［SiO 2 ］＋0.005×［Al 2 O 3 ］＋0.023×［B 2 O 3 ］＋0.004×［MgO］－0.016×［CaO］－0.007×［SrO］＋0.011×［BaO］＋0.010×［ZnO］···（2）.

Inventors

  • MEN LIYE
  • Moral is blog article forever
  • Tatebe Takashi
  • Kobayashi Yunami

Assignees

  • ＡＧＣ株式会社

Dates

Publication Date
20260512
Application Date
20241010
Priority Date
20231013

Claims (19)

  1. 1. A glass which has the characteristics of high glass, The parameter A shown in the formula (1) is 0.817 or less, The parameter B shown in the formula (2) is more than 0.898, The ratio of the MgO content expressed as mole% based on the oxide to the total content of the divalent oxides RO is 0.65 or more, The Young's modulus is more than 80GPa, Which is an alkali-free glass and is characterized in that, A＝1.747－0.022×［SiO 2 ］＋0.006×［Al 2 O 3 ］＋0.018×［B 2 O 3 ］＋0.013×［MgO］－0.010×［CaO］－0.003×［SrO］＋0.012×［BaO］＋0.015×［ZnO］ ···（1） B＝1.315－0.010×［SiO 2 ］＋0.005×［Al 2 O 3 ］＋0.023×［B 2 O 3 ］＋0.004×［MgO］－0.016×［CaO］－0.007×［SrO］＋0.011×［BaO］＋0.010×［ZnO］ ···（2）.
  2. 2. The glass according to claim 1, wherein the glass contains, in mol% based on oxides SiO 2 ：55.0%～65.0%、Al 2 O 3 ：3.0%～13.0%、B 2 O 3 ：1.0%～10.0%、RO：10.0%～40.0%.
  3. 3. The glass according to claim 1 or 2, wherein MgO is contained in an amount of 10.0 to 25.0% in terms of mol% based on the oxide.
  4. 4. The glass according to claim 1or 2, wherein CaO is contained in an amount of 1.0 to 10.0% by mol based on the oxide.
  5. 5. The glass according to claim 1 or 2, wherein SrO is contained in an amount of 0% to 5.0% in terms of mol% based on the oxide.
  6. 6. The glass according to claim 1 or 2, wherein BaO is contained in an amount of 0% to 5.0% in mol% based on the oxide.
  7. 7. The glass according to claim 1 or 2, wherein, The parameter A is 0.781-0.817, The parameter B is 0.903-0.935, The ratio of the MgO content expressed as mole% based on the oxide to the total content of the divalent oxides RO is 0.65 to 0.9.
  8. 8. The glass according to claim 1 or 2, wherein the glass contains 7.0% to 8.5% of SiO 2 ：61.0%～63.5%、Al 2 O 3 in terms of mol% based on oxide.
  9. 9. The glass according to claim 1 or 2, wherein the glass contains, in mol% based on oxides, 12% -22% MgO, 1.1% -7% CaO, 0.1% -5.0% SrO, and 0.1% -5.0% BaO.
  10. 10. The glass according to claim 1 or 2, wherein the glass is substantially free of alkali metal oxides.
  11. 11. The glass according to claim 1 or 2, wherein the Young's modulus parameter Y represented by formula (3) is 0.9 or more, Y＝（60－0.244［SiO 2 ］＋0.27［Al 2 O 3 ］－0.60［B 2 O 3 ］＋0.63［MgO］＋0.48［CaO］－0.56［SrO］－0.22［BaO］＋1.37［ZnO］）／85···（3）.
  12. 12. Glass according to claim 1 or 2, wherein the ratio E/p of young's modulus E to density p is 30GPa cm 3 ／g～40GPa·cm 3 /g.
  13. 13. The glass according to claim 1 or 2, wherein the difference T 2 －T 4 between the melting temperature T 2 and the forming temperature T 4 is 400 ℃ or less.
  14. 14. Glass according to claim 1 or 2, wherein the difference between the forming temperature T 4 and the softening temperature T 7.65 , i.e. T 4 －T 7.65 , is 250 ℃ or more.
  15. 15. The glass according to claim 1 or 2, wherein the ratio of the content of RO to the total content of SiO 2 、Al 2 O 3 and B 2 O 3 , i.e., (RO)/(SiO 2 ＋Al 2 O 3 ＋B 2 O 3 ), is 0.2 to 0.5.
  16. 16. Glass according to claim 1 or 2, wherein the total amount of SiO 2 、Al 2 O 3 , mgO, caO, i.e. SiO 2 ＋Al 2 O 3 + MgO + CaO, expressed as mole% based on oxides, is 85% -98%.
  17. 17. The glass according to claim 1 or 2, wherein the difference of Al 2 O 3 -RO, which is a value obtained by subtracting the content of RO from the content of Al 2 O 3 , is-30% to 0% in terms of mol% based on oxides.
  18. 18. Glass according to claim 1 or 2, wherein it is used as a substrate.
  19. 19. The glass of claim 15, wherein it is used to manufacture at least one of a fan-out wafer level package and a fan-out panel level package.

Description

Glass Technical Field The present invention relates to glass. Background In the manufacturing process of semiconductor devices, glass is sometimes used as a member for supporting the semiconductor devices. For example, patent document 1 describes a supporting glass substrate having a high young's modulus for suppressing deflection. Prior art literature Patent literature Patent document 1 Japanese patent laid-open publication No. 2021-20840 Disclosure of Invention In many cases, glass having a high young's modulus for suppressing deflection in this way has a viscosity curve unsuitable for production, that is, a temperature dependence of viscosity, due to the components added to the glass to have a high young's modulus, and it is required to facilitate production. The invention aims to provide glass which is easy to manufacture and can inhibit deflection. Regarding the glass of the present disclosure, the parameter a shown in formula (1) is 0.817 or less, the parameter B shown in formula (2) is 0.898 or more, the ratio of the MgO content expressed as mole% based on oxide to the total content of divalent oxides RO is 0.65 or more, the young's modulus is 80GPa or more, and the glass is alkali-free glass. A＝1.747－0.022×［SiO2］＋0.006×［Al2O3］＋0.018×［B2O3］＋0.013×［MgO］－0.010×［CaO］－0.003×［SrO］＋0.012×［BaO］＋0.015×［ZnO］···（1） B＝1.315－0.010×［SiO2］＋0.005×［Al2O3］＋0.023×［B2O3］＋0.004×［MgO］－0.016×［CaO］－0.007×［SrO］＋0.011×［BaO］＋0.010×［ZnO］···（2） According to the present invention, the deflection can be suppressed and the manufacturing is easy. Drawings Fig. 1 is a schematic view of the glass of the present embodiment. Detailed Description Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited to the embodiment, and, when there are a plurality of embodiments, the present invention includes embodiments in which the respective embodiments are combined. In addition, the numerical values include rounded ranges. The numerical range indicated by "-" means a numerical range including values before and after the numerical range of-the same meaning is used in the case of "to". In addition, the upper limit value and the lower limit value expressed by numerical ranges may be appropriately combined. (Glass) Fig. 1 is a schematic view of the glass of the present embodiment. As shown in fig. 1, the glass 10 of the present embodiment is used as a glass substrate for manufacturing a semiconductor package, more specifically, a supporting glass substrate for manufacturing FOWLP and the like. However, the application of the glass 10 is not limited to the use for manufacturing FOWLP and the like, and may be any glass substrate used for supporting a member, or may be used for applications other than supporting a member. FOWLP and the like include Fan-Out wafer level packages (Fan Out WAFER LEVEL PACKAGE: FOWLP), and Fan-Out panel level packages (Fan Out PANEL LEVEL PACKAGE: FOPLP). (Composition of glass) Next, a preferred composition of the glass 10 will be described. (Parameter A) The parameter a of the glass 10 is shown in the following formula (1). A＝1.747－0.022×［SiO2］＋0.006×［Al2O3］＋0.018×［B2O3］＋0.013×［MgO］－0.010×［CaO］－0.003×［SrO］＋0.012×［BaO］＋0.015×［ZnO］···（1） The content of oxide a xOy (a is an element constituting an oxide, and x and y are arbitrary integers) contained in glass 10, which is expressed as mol% based on oxide, is represented by [ a xOy ]. The content herein refers to the ratio of the content of oxide a xOy to the entire glass 10, which is expressed in mol% based on oxide. That is, for example, [ SiO 2 ] in the formula (1) means a ratio of the content of SiO 2 to the entire glass 10, which is expressed in mol% based on the oxide. The glass 10 may not contain all the oxides represented by the formula (1). In the formula (1), the content of oxide not contained in the glass 10 is treated as 0. The glass 10 may contain a component other than the oxide represented by the formula (1). The parameter a of the glass 10 is preferably 0.817 or less, more preferably 0.813 or less, more preferably 0.809 or less, more preferably 0.802 or less, more preferably 0.796 or less, more preferably 0.789 or less. The parameter a is also preferably 0.781 or more, preferably 0.781 to 0.817, preferably 0.783 or less, preferably 0.776 or less, and preferably 0.770 or less. By setting the parameter a in this range, the temperature difference between the melting temperature and the molding temperature of the glass 10 is suppressed from increasing, and thus an increase in energy loss during the transition from the melting step to the molding step can be suppressed, and the manufacturing can be facilitated. Further, by setting the parameter a in this range, the temperature difference between the molding temperature and the softening temperature is suppressed from becoming too small, and the viscosity at the time of molding can be easily controlled, a