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CN-122029137-A - Glass

CN122029137ACN 122029137 ACN122029137 ACN 122029137ACN-122029137-A

Abstract

The invention provides a glass which can reduce thermal expansion rate, inhibit cracking and be easily manufactured. The glass (10) has a parameter A of 0.1 to 1.0, a parameter B of 1.75 to 2.10, and a Young's modulus of 110GPa or more.

Inventors

  • MEN LIYE
  • Moral is blog article forever
  • Tatebe Takashi
  • Kobayashi Yunami

Assignees

  • ＡＧＣ株式会社

Dates

Publication Date
20260512
Application Date
20241010
Priority Date
20231013

Claims (20)

  1. 1. A glass, wherein the parameter A shown in formula (1) is 0.1-1.0, The parameter B shown in the formula (2) is 1.75-2.10, The Young's modulus is more than 110GPa, A=[RO]/[RE 2 O 3 ] ···(1) B＝｛（441－2.845×［SiO 2 ］－1.833×［Al 2 O 3 ］－3.864×［B 2 O 3 ］－1.569×［MgO］－2.252×［CaO］－4.031×［SrO］－3.384×［BaO］－0.956×［Li 2 O］－2.000×［ZnO］－0.554×［ZrO 2 ］－2.815×［TiO 2 ］＋1.636×［Y 2 O 3 ］－0.651×［Gd 2 O 3 ］－0.911×［La 2 O 3 ］）／（29.637－0.1851×［SiO 2 ］－0.1408×［Al 2 O 3 ］－0.1984×［B 2 O 3 ］－0.1343×［MgO］－0.1271×［CaO］－0.0556×［SrO］＋0.0369×［BaO］－0.1083×［Li 2 O］－0.0134×［ZnO］＋0.0192×［ZrO 2 ］－0.1408×［TiO 2 ］＋0.0794×［Y 2 O 3 ］＋0.3092×［Gd 2 O 3 ］＋0.1983×［La 2 O 3 ］）－10｝ 0.5 ···（2） Wherein RO is an oxide of a metal R of valence 2, and RE 2 O 3 is an oxide of a rare earth metal RE of valence 3.
  2. 2. The glass according to claim 1, wherein the RO content is more than 0% and 20.0% or less in mol% based on oxide.
  3. 3. The glass according to claim 1 or 2, wherein the glass contains SiO 2 ：45.0%～60.0%、Al 2 O 3 in an amount of 10.0% to 26.0% in mol% based on the oxide.
  4. 4. The glass according to claim 1 or 2, wherein the glass contains B 2 O 3 in an amount of 0% to 10.0% by mol based on the oxide.
  5. 5. The glass according to claim 1 or 2, wherein MgO is contained in an amount of 0 to 20.0% in terms of mol% based on the oxide.
  6. 6. The glass according to claim 1 or 2, wherein Y 2 O 3 is 5.0% to 20.0% by mol based on oxide.
  7. 7. The glass according to claim 1 or 2, wherein CaO is contained in an amount of 0 to 20.0% by mol based on the oxide.
  8. 8. The glass according to claim 1 or 2, wherein SrO is contained in an amount of 0% to 20.0% in terms of mol% based on the oxide.
  9. 9. The glass according to claim 1 or 2, wherein BaO is contained in an amount of 0% to 20.0% in terms of mol% based on the oxide.
  10. 10. The glass according to claim 1 or 2, wherein RE 2 O 3 ：10.0%～20.0%、Y 2 O 3 is contained in an amount of 7.0% to 12.0% in terms of mol% based on the oxide.
  11. 11. The glass of claim 1 or 2, wherein the glass is substantially free of alkali oxides.
  12. 12. The glass according to claim 1 or 2, wherein the ratio of the RO content to the total content of SiO 2 、Al 2 O 3 and B 2 O 3 , i.e., (RO)/(SiO 2 ＋Al 2 O 3 ＋B 2 O 3 ), is 0.00 to 0.50.
  13. 13. The glass according to claim 1 or 2, wherein the ratio of the MgO content to the RO content, i.e., (MgO)/(RO), is 0.10 to 0.90.
  14. 14. The glass according to claim 1 or 2, wherein the ratio of the total content of ZrO 2 ＋TiO 2 to the content of RE 2 O 3 , i.e. (ZrO 2 ＋TiO 2 ）／（RE 2 O 3 ), is 0.05 to 0.90 in mol% based on oxide.
  15. 15. The glass according to claim 1 or 2, wherein the Young's modulus parameter Y calculated from the composition is 0.8 or more.
  16. 16. The glass according to claim 1 or 2, wherein young's modulus E is 111gpa to 125gpa.
  17. 17. Glass according to claim 1 or 2, wherein the ratio of young's modulus E to density ρ, E/ρ, is 32.5 GPa-cm 3 ／g～34.0GPa·cm 3 /g.
  18. 18. The glass according to claim 1 or 2, wherein the linear thermal expansion coefficient α is 4.5ppm/°c to 4.7ppm/°c.
  19. 19. Glass according to claim 1 or 2, for use as a substrate.
  20. 20. The glass of claim 19, for use in manufacturing at least one of a fan-out wafer level package and a fan-out panel level package.

Description

Glass Technical Field The present invention relates to glass. Background In a manufacturing process of a semiconductor device, glass is sometimes used as a member for supporting the semiconductor device. For example, patent document 1 describes a supporting glass substrate set to have a high young's modulus in order to suppress deflection. In addition, in order to suppress deflection due to temperature change, the thermal expansion coefficient may be reduced. Prior art literature Patent literature Patent document 1 Japanese patent laid-open publication No. 2021-20840 Disclosure of Invention If the glass is intended to have a high Young's modulus in order to suppress deflection, the glass generally has a structure with a high ion filling rate. The glass with high ion filling rate has strong high expansion trend, and is not easy to improve Young's modulus and reduce thermal expansion rate. In addition, the modulus of elasticity E/ρ (young's modulus/density) tends to be larger, and cracks may easily occur during processing. Further, for example, if the specific elastic modulus E/ρ is too small, the fracture is liable to occur and the weight becomes too large, and therefore, the handling may be difficult in the process, and the control of the specific elastic modulus is related to the ease of production. The invention aims to provide glass which can reduce the thermal expansion rate, inhibit cracking and be easily manufactured. The glass according to the present disclosure has a parameter A of 0.1 to 1.0, a parameter B of 1.75 to 2.10, and a Young's modulus of 110GPa or more. A=[RO]/[RE2O3] ···(1) B＝｛（441－2.845×［SiO2］－1.833×［Al2O3］－3.864×［B2O3］－1.569×［MgO］－2.252×［CaO］－4.031×［SrO］－3.384×［BaO］－0.956×［Li2O］－2.000×［ZnO］－0.554×［ZrO2］－2.815×［TiO2］＋1.636×［Y2O3］－0.651×［Gd2O3］－0.911×［La2O3］）／（29.637－0.1851×［SiO2］－0.1408×［Al2O3］－0.1984×［B2O3］－0.1343×［MgO］－0.1271×［CaO］－0.0556×［SrO］＋0.0369×［BaO］－0.1083×［Li2O］－0.0134×［ZnO］＋0.0192×［ZrO2］－0.1408×［TiO2］＋0.0794×［Y2O3］＋0.3092×［Gd2O3］＋0.1983×［La2O3］）－10｝0.5　···（2） According to the present invention, the thermal expansion coefficient can be reduced, cracking can be suppressed, and the manufacturing is easy. Drawings Fig. 1 is a schematic view of a glass according to the present embodiment. Fig. 2 is a schematic diagram for explaining the deflection evaluation. Detailed Description Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited to the embodiment, and, when there are a plurality of embodiments, embodiments in which the respective embodiments are combined are also included. In addition, numerical values include rounded ranges. The numerical range indicated by "-" means a numerical range including values before and after "-" as a lower limit value and an upper limit value, and the same meaning is given when "-" is used hereinafter. In addition, the upper limit value and the lower limit value represented by the numerical range may be appropriately combined. (Glass) Fig. 1 is a schematic view of a glass according to the present embodiment. As shown in fig. 1, the glass 10 according to the present embodiment is used as a glass substrate for manufacturing a semiconductor package, more specifically, a supporting glass substrate for manufacturing FOWLP or the like. However, the use of the glass 10 is not limited to the use for manufacturing FOWLP and the like, and may be any glass substrate for supporting a member, and may be used for other purposes than supporting a member. FOWLP and the like include Fan-Out wafer level package (Fan Out WAFER LEVEL PACKAGE: FOWLP), fan-Out panel level package (Fan Out PANEL LEVEL PACKAGE: FOPLP). (Composition of glass) The preferred composition of the glass 10 will be described next. (Parameter A) The parameter a of the glass 10 is represented by the following formula (1). A=[RO]/[RE2O3] ···(1) The content of oxide a xOy (a is an element constituting an oxide, and x and y are arbitrary integers) contained in the glass 10 expressed in mol% based on the oxide is represented by [ a xOy ]. The content thereof refers to the ratio of the content of oxide a xOy to the whole glass 10 expressed in mol% based on the oxide. In addition, RE refers to a metal of valence 2, and RO refers to an oxide of a metal of valence 2R. In addition, RE refers to a rare earth metal of 3 valence, RE 2O3 refers to an oxide of a rare earth metal of 3 valence. For example, RE is at least one of Y, gd, la, ga and Nd. That is, for example, [ RO ] in the formula (1) means a ratio of the RO content to the entire glass 10 expressed in terms of mole% based on the oxide, and [ RE 2O3 ] means a ratio of the RE 2O3 content to the entire glass 10 expressed in terms of mole% based on the oxide. The RO content refers to the total content of oxides 2. When plural kinds of oxides 2 are contained, the total content of oxides 2 means the total content of these oxides 2, and when 1