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CN-122029139-A - Laminated piezoelectric ceramic element and device

CN122029139ACN 122029139 ACN122029139 ACN 122029139ACN-122029139-A

Abstract

The present invention provides a low-cost lead-free laminated piezoelectric ceramic element having high insulation properties even when used for a long period of time under a high-temperature and high-electric field, and a device using the same. A laminated piezoelectric ceramic element (100) is formed by alternately laminating internal electrodes (104, 105) and piezoelectric ceramic layers (103), wherein the internal electrodes (104, 105) are composed of Ni as a main component, and the piezoelectric ceramic layers (103) are composed of a main phase containing an alkali niobate perovskite oxide and a sub-phase containing an oxide different from the alkali niobate perovskite oxide, wherein the alkali niobate perovskite oxide contains Ni, and the oxide of the sub-phase contains Mn and Ti.

Inventors

  • Panshi kil
  • ICHIKI KENTARO
  • MARUYAMA KOJI
  • YAMAZAKI MASATO

Assignees

  • 日本特殊陶业株式会社

Dates

Publication Date
20260512
Application Date
20241030
Priority Date
20240315

Claims (8)

  1. 1. A laminated piezoelectric ceramic element comprising an internal electrode and a piezoelectric ceramic layer alternately laminated, wherein the internal electrode contains Ni as a main component, the piezoelectric ceramic layer comprises a main phase containing an alkali niobate perovskite oxide and a sub-phase containing an oxide different from the alkali niobate perovskite oxide, The alkali niobate perovskite type oxide contains Ni, The oxide of the secondary phase contains Mn and Ti.
  2. 2. The laminated piezoelectric ceramic element according to claim 1, wherein Ni contained in the alkali niobate perovskite oxide is 1.5mol% or less.
  3. 3. The laminated piezoelectric ceramic element according to claim 1 or claim 2, wherein the alkali niobate perovskite-type oxide further contains at least one of Cu or Ag.
  4. 4. The laminated piezoelectric ceramic element according to claim 3, wherein each of Cu and Ag contained in the alkali niobate perovskite oxide is 0.5mol% or less.
  5. 5. The laminated piezoelectric ceramic element according to claim 1 or claim 2, wherein the main component of the alkali niobate-based perovskite-type oxide is represented by a composition formula (K 1-a-b Na a M b ) c (Nb 1-d-e-f Mn d Zr e Ti f )O 3+g , wherein element M is at least one of Ba, ca, sr, 0≤a≤1.0, 0≤b≤1.0, 0< a+b≤1.0, c satisfies 0.8≤c≤1.2, 0≤d≤0.3, 0≤e≤0.3, 0≤f≤0.3, 0≤d+e+f <0.5, g is a value representing a shortage or excess of oxygen.
  6. 6. The laminated piezoelectric ceramic element according to claim 1 or claim 2, wherein the oxide of the secondary phase contains at least an mn—ti—o-based oxide.
  7. 7. An apparatus comprising the laminated piezoelectric ceramic element according to claim 1 or claim 2.
  8. 8. The device of claim 7, selected from the group consisting of an actuator, a haptic feedback, a buzzer, and an ultrasonic sensor.

Description

Laminated piezoelectric ceramic element and device Technical Field The present invention relates to a laminated piezoelectric ceramic element that is displaced by application of a voltage, and an apparatus using the laminated piezoelectric ceramic element. Background In recent years, a laminated piezoelectric ceramic actuator which is small and can be driven with high displacement even at low voltage has been attracting attention. A PZT-based (lead zirconate titanate-based) piezoelectric ceramic containing lead that adversely affects the environment is used as a typical laminated piezoelectric ceramic element, and Pt and Pd are contained in an internal electrode at high cost. Therefore, a laminated piezoelectric ceramic member having a low environmental load and low cost is demanded. Therefore, lead-free laminated piezoelectric ceramics containing inexpensive base metal Ni as a main component have been proposed (see patent documents 1 and 2). Prior art literature Patent literature Patent document 1 Japanese patent No. 5862983 Patent document 2 Japanese patent No. 6094682 Disclosure of Invention Problems to be solved by the invention The actuator is sometimes required to be used for a long time under a high electric field (for example, 5 kV/mm), and therefore, it is required to maintain high insulation even under severe conditions under such a high electric field. For example, patent documents 1 and 2 propose a laminated piezoelectric ceramic element in which an internal electrode mainly composed of Ni and a piezoelectric ceramic layer mainly composed of an alkali niobate perovskite oxide are alternately laminated. But durability under high electric fields is not considered. The present invention has been made in view of such circumstances, and an object thereof is to provide a low-cost lead-free laminated piezoelectric ceramic element having high insulation properties even when used for a long period of time under a high electric field, and an apparatus using the same. Means for solving the problems (1) In order to achieve the above object, the laminated piezoelectric ceramic element of the present invention adopts the following means. Specifically, the multilayer piezoelectric ceramic element according to the application example of the present invention is a multilayer piezoelectric ceramic element in which internal electrodes and piezoelectric ceramic layers are alternately laminated, the internal electrodes containing Ni as a main component, and the piezoelectric ceramic layers being composed of a main phase containing an alkali niobate perovskite oxide and a sub-phase containing an oxide different from the alkali niobate perovskite oxide, wherein the alkali niobate perovskite oxide contains Ni and the oxide of the sub-phase contains Mn and Ti. (2) In the laminated piezoelectric ceramic element according to the application example of (1), ni contained in the alkali niobate-based perovskite oxide is 1.5mol% or less. (3) In the laminated piezoelectric ceramic element according to the application example of (1) or (2), the alkali niobate perovskite oxide further contains at least one of Cu and Ag. (4) In the multilayer piezoelectric ceramic element according to (3), cu or Ag contained in the alkali niobate-based perovskite oxide is 0.5mol% or less, respectively. (5) In the laminated piezoelectric ceramic element according to any one of the above (1) to (4), the main component of the alkali niobate perovskite type oxide is represented by a composition formula (K 1-a-bNaaMb)c(Nb1-d-e-fMndZreTif)O3+g (wherein, the element M is at least one of Ba, ca and Sr, 0≤a≤1.0, 0≤b≤1.0, 0< a+b≤1.0, c satisfies 0.8≤c≤1.2, 0≤d≤0.3, 0≤e≤0.3, 0≤f≤0.3, and 0≤d+e+f <0.5, g is a value indicating oxygen deficiency or excess). (6) The laminated piezoelectric ceramic element according to any one of (1) to (5), wherein the oxide of the secondary phase contains at least an Mn-Ti-O-based oxide. (7) The device according to an application example of the present invention includes the laminated piezoelectric ceramic element according to any one of the above (1) to (6). (8) The device according to the application example of (7) above is selected from the group consisting of an actuator, a haptic feedback device, a buzzer, and an ultrasonic sensor. Effects of the invention According to the present invention, a low-cost lead-free laminated piezoelectric ceramic element having high insulation properties even when used for a long period of time under a high electric field, or a device using the same can be produced. Drawings Fig. 1 is a front sectional view of a laminated piezoelectric ceramic element. Fig. 2 is a schematic diagram showing an example of a schematic configuration of an actuator as a device. Fig. 3 is a cross-sectional view showing an example of a schematic configuration of a haptic feedback device as a device. Fig. 4 is a cross-sectional view showing an example of a schematic configuration of a buzzer as a device. Fig. 5 is a