Search

CN-122029267-A - Cleaning liquid for removing particles and cleaning method

CN122029267ACN 122029267 ACN122029267 ACN 122029267ACN-122029267-A

Abstract

The invention provides a cleaning liquid which has a low global warming potential and has particle removability equal to or higher than that of conventional hydrofluoroethers. The present invention relates to a cleaning liquid for removing particles, which contains a hydrofluoroether, wherein the hydrofluoroether is a compound represented by the following general formula (1).

Inventors

  • Tan Yeliang
  • UEDA KOJI
  • IDE TOSHIHISA

Assignees

  • 中央硝子株式会社

Dates

Publication Date
20260512
Application Date
20241008
Priority Date
20231016

Claims (10)

  1. 1. A cleaning liquid for removing particles, which contains a hydrofluoroether compound represented by the following general formula (1): [ chemical formula 1] , In the general formula (1), rf 1 and Rf 2 are each independently a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or a chlorofluoroalkyl group having 1 to 6 carbon atoms, R 3 is an alkyl group having 1 to 6 carbon atoms, or a fluoroalkyl group having 1 to 6 carbon atoms, and at least one of Rf 1 and Rf 2 is a perfluoroalkyl group having 1 to 6 carbon atoms, or a chlorofluoroalkyl group having 1 to 6 carbon atoms.
  2. 2. The cleaning solution of claim 1, wherein the cleaning solution comprises a lower alcohol.
  3. 3. The cleaning liquid according to claim 1 or 2, wherein, the hydrofluoroether is selected from the group consisting of 1, 3-hexafluoro-2-methoxypropane, 1, 3-hexafluoro-2-fluoromethoxypropane 1, 3-hexafluoro-2-ethoxypropane, 1, 3-hexafluoro-2-n-propoxypropane, 1, 3-hexafluoro-2-isopropoxypropane 1, 3-hexafluoro-2-ethoxypropane, 1, 3-hexafluoro-2-n-propoxypropane 1, 3-hexafluoro-2-isopropoxypropane.
  4. 4. The cleaning solution according to any one of claims 1 to 3, wherein the hydrofluoroether is 1, 3-hexafluoro-2-methoxypropane.
  5. 5. The cleaning liquid according to any one of claims 1 to 4, wherein the volume resistivity of the cleaning liquid at an applied voltage of 250V is 10 x 10 8 Ω -m or less.
  6. 6. A method for removing particles from an object to be cleaned, comprising the steps of: a step (3) of bringing the cleaning liquid into contact with the object to be cleaned having particles adhered to the surface thereof A step (4) of removing the cleaning liquid from the object to be cleaned, Wherein the step (4) is performed by volatilizing the cleaning liquid under a pressure lower than a saturated vapor pressure, The cleaning solution contains hydrofluoroether, wherein the hydrofluoroether is a compound shown in the following general formula (1): [ chemical formula 2] , In the general formula (1), rf 1 and Rf 2 are each independently a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or a chlorofluoroalkyl group having 1 to 6 carbon atoms, R 3 is an alkyl group having 1 to 6 carbon atoms, or a fluoroalkyl group having 1 to 6 carbon atoms, and at least one of Rf 1 and Rf 2 is a perfluoroalkyl group having 1 to 6 carbon atoms, or a chlorofluoroalkyl group having 1 to 6 carbon atoms.
  7. 7. The method of removing particles from an object to be cleaned according to claim 6, wherein the cleaning liquid comprises a lower alcohol.
  8. 8. The method for removing particles from an object to be cleaned according to claim 6 or 7, wherein, the hydrofluoroether is selected from the group consisting of 1, 3-hexafluoro-2-methoxypropane, 1, 3-hexafluoro-2-fluoromethoxypropane 1, 3-hexafluoro-2-ethoxypropane, 1, 3-hexafluoro-2-n-propoxypropane, 1, 3-hexafluoro-2-isopropoxypropane 1, 3-hexafluoro-2-ethoxypropane, 1, 3-hexafluoro-2-n-propoxypropane 1, 3-hexafluoro-2-isopropoxypropane.
  9. 9. The method for removing particles from an object to be cleaned according to any one of claims 6 to 8, wherein the hydrofluoroether is 1, 3-hexafluoro-2-methoxypropane.
  10. 10. The method for removing particles from an object to be cleaned according to any one of claims 6 to 9, wherein the volume resistivity of the cleaning liquid under an applied voltage of 250V is 10 x 10 8 Ω -m or less.

Description

Cleaning liquid for removing particles and cleaning method Technical Field The invention relates to a cleaning liquid for removing particles and a cleaning method. Background As described in patent documents 1 to 4, a cleaning method of an object to be cleaned (object to be cleaned) using hydrofluoroethers is known. Among them, a hydrofluoroether composed of methyl perfluoro isobutyl ether, methyl perfluoro n-butyl ether, or the like is used as a cleaning liquid for removing particles from an object to be cleaned (non-patent document 1). In the production process of precision equipment, semiconductors, and the like, there is a possibility that particles adhere to parts, which may reduce the production yield. In the electronics industry, miniaturization and integration of parts are being promoted, and particle removal of parts in the production process is becoming indispensable. In this regard, in the present specification, particles refer to microparticles having a diameter (particle size) of 5000nm or less as measured by a particle classifier, and refer to microparticles having a size of, for example, 5nm to 5000 nm. Prior art literature Patent literature Patent document 1 International patent publication No. 93/09272 Patent document 2 Japanese patent laid-open No. 2020-132688 Patent document 3 Japanese patent laid-open No. 2022-41936 Patent document 4 International patent publication No. 2021/065428 Non-patent literature Non-patent document 1, cleaning No.15, release date 2015, 4 and 3 Disclosure of Invention First, the technical problem to be solved For the cleaning liquid using hydrofluoroether disclosed in non-patent document 1, the Global Warming Potential (GWP) is 320 for model "Novec 7100" (manufactured by 3M company, chemical formula C 4F9OCH3), 55 for model "Novec 7200" (manufactured by 3M company, chemical formula C 4F9OC2H5), and 210 for model "Novec 7300" (manufactured by 3M company, chemical formula C 6F13OCH3). The present invention provides a cleaning liquid having a low global warming potential and having particle removability equal to or higher than that of the hydrofluoroether. (II) technical scheme One embodiment of the present invention is the cleaning liquid according to the following inventions [ 1] to [ 5 ]. [ Invention 1] A cleaning liquid for removing particles, which contains a hydrofluoroether, wherein the hydrofluoroether is a compound represented by the following general formula (1). [ Chemical formula 1] In the general formula (1), rf 1 and Rf 2 are each independently a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or a chlorofluoroalkyl group having 1 to 6 carbon atoms, R 3 is an alkyl group having 1 to 6 carbon atoms, or a fluoroalkyl group having 1 to 6 carbon atoms, and at least one of Rf 1 and Rf 2 is a perfluoroalkyl group having 1 to 6 carbon atoms, or a chlorofluoroalkyl group having 1 to 6 carbon atoms. [ Invention 2] The cleaning liquid according to the invention 1, which contains a lower alcohol. [ Invention 3] The cleaning liquid according to the invention 1 or 2, wherein, the hydrofluoroether is selected from the group consisting of 1, 3-hexafluoro-2-methoxypropane, 1, 3-hexafluoro-2-fluoromethoxypropane 1, 3-hexafluoro-2-ethoxypropane, 1, 3-hexafluoro-2-n-propoxypropane, 1, 3-hexafluoro-2-isopropoxypropane 1, 3-hexafluoro-2-ethoxypropane, 1, 3-hexafluoro-2-n-propoxypropane 1, 3-hexafluoro-2-isopropoxypropane. [ Invention 4] The cleaning liquid according to any one of the inventions 1 to 3, wherein the hydrofluoroether is 1, 3-hexafluoro-2-methoxypropane. [ Invention 5] The cleaning liquid according to any one of the inventions 1 to 4, wherein the volume resistivity of the cleaning liquid at an applied voltage of 250V is 10X 10 8 Ω·m or less. In addition, one embodiment of the present invention is a method for removing particles from an object to be cleaned as described in the following [ invention 6] to [ invention 10 ]. [ Invention 6] A method for removing particles from an object to be cleaned, comprising the steps of: a step (3) of bringing the cleaning liquid into contact with the object to be cleaned having particles adhered to the surface thereof A step (4) of removing the cleaning liquid from the object to be cleaned, Wherein the step (4) is performed by volatilizing the cleaning liquid under a pressure lower than a saturated vapor pressure, The cleaning liquid contains hydrofluoroether, and the hydrofluoroether is a compound shown in the following general formula (1). [ Chemical formula 2] In the general formula (1), rf 1 and Rf 2 are each independently a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or a chlorofluoroalkyl group having 1 to 6 carbon atoms, R 3 is an alkyl group having 1 to 6 carbon atoms, or a fluoroalkyl group having 1 to 6 carbon atoms, and at least one of Rf 1 and Rf 2 is a perfluoroalkyl group having 1 to 6 carbon atoms, or a chlorofluoroalkyl group having 1 to 6 carbon atoms. [ Invention 7] The