CN-122029997-A - Stage device, lithographic apparatus, and article manufacturing method

Abstract

A stage apparatus includes a stage, an actuator that drives the stage, a mover that moves together with the stage, and a stator that generates thrust to the mover, a gyro moment generating unit that is connected to the mover, and a control unit that controls the gyro moment generating unit such that at least a part of a moment acting on the mover by driving the stage using the actuator is cancelled by the moment generated by the gyro moment generating unit.

Inventors

• SASAKI TAKERU

Assignees

• 佳能株式会社

Dates

Publication Date

20260512

Application Date

20241011

Priority Date

20231017

Claims (17)

1. 1. A stage apparatus, comprising: A carrier; An actuator including a mover that moves together with the stage and a stator that generates thrust to the mover, and configured to drive the stage; A gyroscopic moment generating unit connected to the mover, and And a control unit configured to control the gyroscopic moment generating unit such that at least a part of a moment acting on the mover when the stage is driven by the actuator is canceled out by the moment generated by the gyroscopic moment generating unit.
2. 2. The stage device according to claim 1, wherein, The gyro moment generating unit includes: a first gimbal configured to support a rotating body so that the rotating body can rotate about a second axis perpendicular to a first axis parallel to a direction in which the actuator drives the stage; A first motor configured to rotate the rotating body around the second axis; A second gimbal configured to support the first gimbal such that the first gimbal is rotatable about the first axis, and A second motor configured to rotate the first gimbal about the first axis.
3. 3. The stage device according to claim 2, wherein, The control unit performs feedforward control on the second motor based on control information for controlling the actuator.
4. 4. The stage device according to claim 3, wherein, The control information includes a thrust force to be generated by the actuator.
5. 5. The stage device according to claim 3, wherein, The control information includes a current to be supplied to the actuator.
6. 6. The stage device according to any one of claims 1 to 5, further comprising: A flat plate, and a driving unit connected to the mover to move on the flat plate; Wherein the stage moves on the plate together with a driving unit.
7. 7. The stage device according to claim 6, wherein, The gyroscopic moment generating unit is connected to an upper surface of the mover.
8. 8. The stage device according to claim 6, wherein, The gyroscopic moment generating unit is connected to a side surface of the mover.
9. 9. The stage device according to claim 6, wherein, The gyroscopic moment generating unit is connected to a lower surface of the mover.
10. 10. The stage device according to any one of claims 1 to 9, further comprising: A plurality of gyro moment generating units including the gyro moment generating unit, Wherein the gyro moment generating units are connected to the mover, and The control unit controls the plurality of gyro moment generating units such that at least a part of the moment acting on the mover when the stage is driven by the actuator is canceled out by the moment generated by the plurality of gyro moment generating units.
11. 11. The stage device according to claim 10, wherein, The gyro moment generating units are aligned in a direction in which the actuator drives the stage.
12. 12. The stage device according to claim 2, further comprising: A second gyroscopic moment generating unit connected to the mover, Wherein the gyroscopic moment generating unit and the second gyroscopic moment generating unit are aligned along a direction in which the actuator drives the stage, The second gyro moment generating unit includes: a third gimbal configured to support a second rotating body such that the second rotating body is rotatable about the second axis; A third motor fixed and configured to rotate the second rotating body around the second axis; a fourth gimbal configured to support the third gimbal such that the third gimbal is rotatable about the first axis, and A fourth motor configured to rotate the fourth gimbal about the first axis, A direction in which the first motor rotates the rotating body in the gyroscopic moment generating unit is opposite to a direction in which the third motor rotates the second rotating body in the second gyroscopic moment generating unit, and The second motor in the gyroscopic moment generating unit rotates the rotating body in a direction opposite to a direction in which the fourth motor in the second gyroscopic moment generating unit rotates the second rotating body.
13. 13. The stage device according to any one of claims 1 to 9, further comprising: a plurality of gyro moment generating units including the gyro moment generating unit, and A plurality of actuators including the actuators, Wherein each of the plurality of actuators includes a mover that moves together with the stage and a stator that generates thrust to the mover; Each gyroscopic moment generating unit of the plurality of gyroscopic moment generating units is connected to a mover of a corresponding one of the plurality of actuators.
14. 14. The stage device according to claim 13, wherein, The control unit performs feed-forward control on each of the gyro moment generation units based on control information for controlling a corresponding one of the plurality of actuators.
15. 15. The stage device according to any one of claims 1 to 14, wherein, The control unit activates the gyroscopic moment generating unit before the actuator starts driving the stage.
16. 16. A lithographic apparatus for transferring a pattern of a master to a substrate, the lithographic apparatus comprising: A stage device as defined in any one of claims 1 to 15, configured to align the master with the substrate.
17. 17. A method of manufacturing an article, comprising: A transfer step of transferring a pattern of a master onto a substrate using the lithographic apparatus as defined in claim 16, and And a processing step of processing the substrate subjected to the transfer step, thereby obtaining an article.

Description

Stage device, lithographic apparatus, and article manufacturing method Technical Field The invention relates to a stage device, a lithographic apparatus and an article manufacturing method. Background In a lithographic apparatus typified by an exposure apparatus and an imprint apparatus, a substrate may be driven such that a projection region of the substrate is aligned with a master. In such a lithographic apparatus, the stage for alignment between the substrate and the master can be driven at high speed. However, if the stage is driven at a high speed, a moment corresponding thereto is generated, which may vibrate the stage or vibrate a floor on which the lithographic apparatus is mounted. Japanese patent application laid-open No. 11-190786 describes a stage device including a movable stage, a surface plate (surface plate) supporting the stage, a driving mechanism driving the stage, and a rotor generating a moment to reduce a reaction force generated in conjunction with the movement of the stage. Japanese patent application laid-open No. 2012-161896 describes a moving device that includes a moving body, a linear motor that includes a mover attached to the moving body and moves the mover in one axial direction, and a rotary motor fixed to the moving body. When the linear motor moves the mover, the combined mover formed of the mover, the mover and the rotary motor will receive a rotational torque. The rotating electrical machine rotates the rotor to offset at least a portion of the rotational torque. However, japanese patent application laid-open nos. 11-190786 and 2012-161896 do not disclose a concept of canceling at least a part of a moment generated when moving a mover by a gyro moment. Disclosure of Invention The present invention provides a technique advantageous in reducing vibrations that can be generated by driving a stage. According to an aspect of the present invention, there is provided a stage apparatus including a stage, an actuator including a mover that moves together with the stage and a stator that generates thrust to the mover, and configured to drive the stage, a gyroscopic moment generating unit that is connected to the mover, and a control unit configured to control the gyroscopic moment generating unit such that at least a part of a moment acting on the mover when the stage is driven by the actuator is cancelled by the moment generated by the gyroscopic moment generating unit. Other features and advantages of the present invention will become apparent from the following description taken in conjunction with the accompanying drawings. Note that the same reference numbers will be used throughout the drawings to refer to the same or like parts. Drawings The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description, serve to explain the principles of the invention. Fig. 1 is a perspective view showing the configuration of a stage device according to a first embodiment. Fig. 2A is a diagram schematically showing a standby state of the gyro moment generation unit. Fig. 2B is a diagram schematically showing an operation state of the gyro moment generation unit. Fig. 3 is a diagram schematically showing a state in which the stage is driven. Fig. 4 is a diagram schematically showing a configuration in which a gyroscopic moment generating unit is connected to a lower surface of a mover. Fig. 5 is a perspective view showing the configuration of a stage device according to a second embodiment. Fig. 6 is a diagram schematically showing the operation states of the two gyro moment generating units. Fig. 7 is a perspective view showing the configuration of a stage device according to a third embodiment. Fig. 8 is a perspective view illustrating an operation of the stage device according to the third embodiment. Fig. 9 is a diagram showing the configuration of an exposure apparatus according to the embodiment. Fig. 10 is a block diagram of a control system that controls the angular velocity of the second motor. Fig. 11 is a diagram schematically showing a configuration in which a gyroscopic moment generating unit is connected to a side surface of a mover. Fig. 12 is a view showing the angular velocity of the second motor of the gyro moment generating unitAngular velocity of Y, first motorA graph of an example of the time rate of change of Z and stage moment AM. Detailed Description Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following examples are not intended to limit the scope of the claimed invention. The embodiments describe various features, but are not limited to inventions requiring all of them, and a plurality of these features may be combined as desired. In addition, in the drawings, the same or similar configurations are given the same reference numerals, and repetitive description thereof will be omitted. In the pres