CN-122029998-A - Aligner and substrate processing system

Abstract

Provided is a technique capable of correcting the position of a belt frame based on a frame portion or a substrate. The controller (150) may perform position correction by a first position correction process of correcting the position of the frame section (F) of the belt frame (TF) mounted on the stage (100) based on a captured image of the frame section (F) captured by the camera (120), or a second position correction process of correcting the position of the wafer (W) on the belt section (T) of the belt frame (TF) mounted on the stage (100) based on a captured image of the wafer (W) captured by the camera (120).

Inventors

• Okazaki ocean

Assignees

• 昕芙旎雅有限公司

Dates

Publication Date

20260512

Application Date

20241001

Priority Date

20231017

Claims (4)

1. 1. An aligner for correcting a position of a belt frame having an endless frame portion on which a first detecting portion is formed, and a belt portion formed inside the frame portion and on which a disc-shaped substrate on which a second detecting portion is formed is attached, the aligner comprising: A stage configured to mount the belt frame thereon; a camera configured to image a partial region on the stage as a camera field of view, and The controller is used for controlling the operation of the controller, Wherein the controller is configured to perform position correction by a first position correction process of correcting a position of the frame portion of the belt frame mounted on the stage based on a captured image obtained by imaging the frame portion using the camera or a second position correction process of correcting a position of the substrate of the belt portion of the belt frame mounted on the stage based on a captured image obtained by imaging the substrate using the camera.
2. 2. The aligner of claim 1, further comprising: a moving mechanism configured to be able to move the stage in the X direction, the Y direction, and the theta direction, and An illuminator configured to illuminate an area on the stage containing the partial area, Wherein, when the position correction is performed by the first position correction process, the controller is configured to correct the position of the frame portion based on the photographed image by imaging the first detection portion using the camera while illuminating the area with the illuminator by moving the stage to a position where the first detection portion of the frame portion falls within the field of view of the camera using the moving mechanism, and then move the belt frame by using the moving mechanism so that the center position of the frame portion after the position correction becomes a handover position where the belt frame is handed over, and When the position correction is performed by the second position correction process, the controller is configured to image the second detection portion using the camera while illuminating the area with the illuminator by moving the stage to a position where the second detection portion of the substrate falls within the field of view of the camera using the moving mechanism, correct the position of the substrate based on the captured image, and then move the belt frame by using the moving mechanism so that the center position of the substrate after the position correction becomes a handover position for handing over the belt frame.
3. 3. The aligner according to claim 2, wherein when the position correction is performed by both the first position correction process and the second position correction process, the controller is configured to grasp a positional relationship between the frame portion and the substrate on the belt frame based on positional information of the first detection portion of the frame portion obtained when the position of the frame portion is corrected by the first position correction process, and positional information of the second detection portion of the substrate obtained when the position of the substrate is corrected by the second position correction process.
4. 4. A substrate processing system, comprising: an aligner as claimed in any one of claims 1 to 3; A storage configured to store the belt frame; a processing apparatus configured to perform a predetermined process on the substrate of the belt portion of the belt frame, and A transfer robot configured to perform a first transfer process of taking out and transferring the belt frame stored in the storage device, mounting the belt frame on the stage of the aligner, receiving and transferring the belt frame whose position has been corrected by the aligner, and transferring the belt frame to the processing apparatus, and a second transfer process of receiving the belt frame from the processing apparatus, transferring the belt frame, mounting the belt frame on the stage of the aligner, receiving and transferring the belt frame whose position has been corrected by the aligner, and storing the belt frame in the storage device, Wherein the controller of the aligner corrects the position of the substrate by the second position correction process when the transfer robot performs the first transfer process while mounting the belt frame on the stage of the aligner, and corrects the position of the frame portion by the first position correction process when the transfer robot performs the second transfer process while mounting the belt frame on the stage of the aligner.

Description

Aligner and substrate processing system Technical Field The present invention relates to an aligner for correcting the position of a belt frame (TAPE FRAME), and a substrate processing system including the same. Background Patent document 1 describes an apparatus for measuring rotational offsets of bonded substrates, which detects rotational offsets between respective ones of bonded substrates formed by stacking and bonding a plurality of disk-shaped substrates (such as semiconductor wafers), each substrate having a notch formed on an outer edge thereof. In the device described in patent document 1, the control target is to bond the substrates. An aligner that corrects the position of a belt frame as a control target, which has a frame portion and a belt portion formed inside the frame portion, on which a substrate is attached, is also known in the art. Prior art literature Patent literature Patent document 1 Japanese patent No. 5836223 Disclosure of Invention Problems to be solved by the invention However, the above-described conventional aligner corrects the position of the belt frame based on the frame portion, and does not correct the position of the substrate attached to the belt portion. Therefore, if there is an offset between the frame portion and the substrate attached to the belt portion, when the belt frame whose position has been corrected by the aligner is handed over to the processing apparatus, the substrate inside the belt frame may not fall within the field of view of the high-precision camera mounted on the processing apparatus side, and it is necessary to correct the position of the belt frame based on the substrate on the processing apparatus side alone. The present invention provides a technique capable of correcting a framed position based on a frame portion or a substrate. Means for solving the problems In order to achieve the above object, an aligner according to claim 1 is an aligner for correcting a position of a belt frame having an annular frame portion on which a first detection portion is formed, and a belt portion formed inside the frame portion and on which a disc-shaped substrate is attached, the aligner including a stage configured to mount the belt frame thereon, a camera configured to image a partial region on the stage as a camera field of view, and a controller configured to perform position correction based on a captured image obtained by imaging the frame portion of the belt frame mounted on the stage using the camera, the controller being configured to perform position correction based on the captured image obtained by imaging the frame portion of the belt frame mounted on the stage using the camera. Thus, the aligner according to claim 1 can perform framed position correction based on the frame portion or the substrate. Further, in the aligner of claim 1, the aligner according to claim 2 further includes a moving mechanism configured to be able to move the stage in an X direction, a Y direction, and a θ direction, and an illuminator configured to irradiate a region including the partial region on the stage, wherein when the position correction is performed by the first position correction process, the controller is configured to move the stage to a position where the first detection portion of the frame portion falls within the field of view of the camera by using the moving mechanism, to image the first detection portion by using the camera while irradiating the region with the illuminator, to correct the position of the frame portion based on the photographed image, and then to move the belt frame by using the moving mechanism such that a center position of the frame portion after the position correction becomes a handover position of the belt frame, and when the position correction is performed by the second position correction process, the controller is configured to perform the position correction by using the camera while correcting the position of the substrate by using the second position correction process, to image the position of the frame portion by using the camera, and then to image the first detection portion by using the camera. As a result, regardless of whether the positional correction of the belt frame is performed based on the frame portion or the substrate, the center position of the frame portion or the wafer after the positional correction becomes a hand-over position for handing over the belt frame. Therefore, the belt frame can be accurately handed over. Further, in the aligner of claim 2, in the aligner according to claim 3, when the position correction is performed by both the first position correction process and the second position correction process, the controller is configured to grasp a positional relationship between the frame portion and the substrate on the belt frame based on positional information of the first detection portion of the frame portion obtained when the position of the frame portion is corrected by the first positi