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CN-224199454-U - Rotating frame toggle conducting device and coating machine

CN224199454UCN 224199454 UCN224199454 UCN 224199454UCN-224199454-U

Abstract

The application relates to a rotating frame stirring and conducting device and a film plating machine, wherein a baffle plate assembly is arranged adjacent to the rotating frame assembly, a cargo cage is arranged on a cargo cage rotating disc assembly, the cargo cage rotating disc assembly is rotatably arranged on the rotating frame assembly, and the cargo cage rotating disc assembly has a position capable of abutting against the baffle plate assembly when the rotating frame assembly rotates, so that the cargo cage and the rotating frame assembly form a preset rotation angle when the cargo cage rotating disc assembly rotates by a first preset angle relative to the rotating frame assembly to be separated from the baffle plate assembly when the cargo cage rotating disc assembly abuts against the baffle plate assembly. The problem of controllable rotation angle of the cargo cages is solved, the times of passing through the target coating area on the surfaces of the base materials borne by each independent cargo cage are guaranteed to be consistent in process time, the consistency of the coating thickness of the surfaces of the base materials borne by each cargo cage and the consistency of uniformity are improved, and the requirements of passing through the target on the base materials on the surfaces of the cargo cages under different processes are different, only the cargo cage turntable assembly is required to be properly adjusted, so that the method is convenient and easy to use.

Inventors

  • YU WENTAO
  • WANG LAIQUAN

Assignees

  • 维达力实业(深圳)有限公司

Dates

Publication Date
20260505
Application Date
20250417

Claims (10)

  1. 1. A rotating frame poking and conducting device (100) is characterized by comprising a rotating frame assembly (1), a cargo cage turntable assembly (2), a cargo cage (3) and a baffle assembly (4); the baffle assembly (4) is arranged adjacent to the rotating frame assembly (1), and the cargo cage (3) is arranged on the cargo cage rotating disc assembly (2); the cargo cage turntable assembly (2) is rotatably arranged on the rotating frame assembly (1); The cargo cage turntable assembly (2) is in a rotating state of the rotating frame assembly (1) and is provided with a position capable of being abutted against the baffle assembly (4), so that the cargo cage (3) and the rotating frame assembly (1) form a preset rotation angle when the cargo cage turntable assembly rotates by a first preset angle relative to the rotating frame assembly (1) to be separated from contact with the baffle assembly (4) in a state of being abutted against the baffle assembly (4).
  2. 2. The turret toggle conducting device (100) according to claim 1, characterized in that said cargo cage carousel assembly (2) comprises a first rotating shaft (5) and a first rotating wheel (7) connected; The first rotating shaft (5) is rotatably arranged on the rotating frame assembly (1), and the cargo cage (3) is arranged on the first rotating shaft (5); The first rotating shaft (5) passes through the first rotating wheel (7), the first rotating wheel (7) is in a rotating state of the rotating frame assembly (1) and is provided with a position capable of being abutted against the baffle assembly (4), so that the first rotating wheel (7) rotates by a first preset angle relative to the rotating frame assembly (1) to be separated from contact with the baffle assembly (4) in a state of being abutted against the baffle assembly (4), and the cargo cage (3) and the rotating frame assembly (1) form the preset rotation angle.
  3. 3. The turret toggle conducting device (100) according to claim 2, characterized in that said cargo cage carousel assembly (2) further comprises a second runner (6) connected to said first rotating shaft (5), said first rotating shaft (5) passing through said second runner (6) and said first runner (7), respectively; The second rotating wheel (6) and the first rotating wheel (7) are relatively fixed and arranged in a staggered mode, and the second rotating wheel (6) is not contacted with the baffle assembly (4) in a state that the first rotating wheel (7) is abutted against the baffle assembly (4); In a state in which the first rotating wheel (7) is out of contact with the baffle assembly (4), the second rotating wheel (6) is provided with a position capable of being abutted against the baffle assembly (4) so as to rotate by a second preset angle relative to the rotating frame assembly (1) to be out of contact with the baffle assembly (4) in a state in which the baffle assembly (4) is abutted against the second rotating wheel, and therefore the cargo cage (3) and the rotating frame assembly (1) form the preset rotation angle together by being matched with the first rotating wheel (7).
  4. 4. A turret toggle conducting device (100) according to claim 3, characterized in that said second wheel (6) is a regular prism or said first wheel (7) is a regular prism, or that The second rotating wheel (6) and the first rotating wheel (7) are regular octagon bodies, or The rotating frame stirring and conducting device (100) further comprises a rotating wheel spacer (8), the first rotating shaft (5) penetrates through the rotating wheel spacer (8), the second rotating wheel (6) and the first rotating wheel (7) are respectively sleeved outside the rotating wheel spacer (8), and a space exists between the second rotating wheel (6) and the first rotating wheel (7), or The baffle assembly (4) comprises a first baffle (19), a second baffle (20), an insulating piece and a mounting seat (29); The first baffle (19) and the second baffle (20) are arranged on the mounting seat (29) and are insulated from the mounting seat (29) through the insulating piece; The first rotating wheel (7) has a position capable of abutting against the second baffle (20) in a state that the rotating frame assembly (1) rotates, so as to rotate by a first preset angle relative to the rotating frame assembly (1) to be out of contact with the second baffle (20) in a state that the first rotating wheel abuts against the second baffle (20); The second rotating wheel (6) is not in contact with the second baffle (20) in the state that the first rotating wheel (7) is abutted against the second baffle (20), and in the state that the first rotating wheel (7) is separated from the second baffle (20), the second rotating wheel (6) is in a position capable of being abutted against the first baffle (19) in the rotating state of the rotating frame assembly (1), so that in the abutting state of the first baffle (19), the second rotating wheel (6) rotates by a second preset angle relative to the rotating frame assembly (1) to be separated from the first baffle (19).
  5. 5. The turret toggle conductive device (100) of claim 2, wherein the turret toggle conductive device (100) further includes a locating feature, the first shaft (5) passing through and being journalled with the locating feature; the cargo cage (3) is arranged on the positioning structural member so as to rotate synchronously with the positioning structural member; The positioning structural member is elastically abutted to the first rotating wheel (7) and is used for elastically positioning and abutting to the positioning groove (30) of the first rotating wheel (7) in a state that the first rotating wheel (7) is not contacted with the baffle assembly (4), so that the cargo cage (3) and the rotating frame assembly (1) form the preset rotation angle.
  6. 6. The turret toggle conductive device (100) of claim 5, wherein the positioning structure includes a spacer, a rotating shaft seat (12), a positioning seat (13), an elastic member (14), a press cap (15), a positioning steel ball (16), and a bearing press plate (17); The first rotating shaft (5) is in shaft connection with the rotating shaft seat (12) through the spacer bush, the cargo cage (3) is arranged on the bearing pressing plate (17), and the bearing pressing plate (17) is arranged on the rotating shaft seat (12); The positioning seat (13) is connected with the autorotation shaft seat (12), the elastic piece (14), the pressing cap (15) and the positioning steel ball (16) are arranged in the positioning seat (13), and the positioning steel ball (16) is provided with a part exposing the positioning seat (13); the elastic piece (14) is elastically abutted against the positioning steel ball (16) through the pressing cap (15), so that the positioning steel ball (16) is elastically abutted against the first rotating wheel (7), and the positioning steel ball (16) is elastically positioned and abutted against the positioning groove (30) of the first rotating wheel (7) in a state that the first rotating wheel (7) is not contacted with the baffle assembly (4).
  7. 7. The turret toggle conducting device (100) of claim 6, wherein the spacer includes a first spacer (9), a second spacer (10), and a third spacer (11); The rotation shaft seat (12) is in shaft connection with the first rotation shaft (5) through the first spacer bush (9), the second spacer bush (10) and the third spacer bush (11), and the first spacer bush (9), the second spacer bush (10) and the third spacer bush (11) are arranged at intervals.
  8. 8. The turret toggle conductor apparatus (100) of claim 1, wherein the baffle assembly (4) includes baffles (19, 20), insulation, and a mounting base (29); The baffles (19, 20) are arranged on the mounting seat (29) and are insulated from the mounting seat (29) through the insulating piece; The cargo cage turntable assembly (2) has a position where the baffles (19, 20) can abut in a state where the turret assembly (1) rotates.
  9. 9. The turret toggle conductor apparatus (100) of claim 8, wherein said number of baffle assemblies (4) is at least two, or said baffle assemblies (4) have at least two of said baffles (19, 20), or The insulating piece comprises a first insulating plate (21), a second insulating plate (22), a third insulating plate (23) and an insulating sleeve (24); The baffles (19, 20) are arranged on the mounting seat (29) through socket head cap screws (27); the insulation sleeve (24) is arranged between the inner hexagon screw (27) and the baffle plates (19, 20), a gasket (25) and a spring pad (26) are arranged between the inner hexagon screw (27) and the mounting seat (29) of the baffle plate assembly (4), and the inner hexagon screw (27) sequentially penetrates through the gasket (25), the spring pad (26) and the insulation sleeve (24) and then is in threaded connection with the mounting seat (29); the first insulating plate (21), the second insulating plate (22) and the third insulating plate (23) are respectively arranged outside the baffles (19, 20) in a surrounding mode.
  10. 10. A film plating machine characterized by comprising a vacuum furnace apparatus and a turret shift transmission device (100) according to any one of claims 1 to 9, the turret shift transmission device (100) being provided in the vacuum furnace apparatus.

Description

Rotating frame toggle conducting device and coating machine Technical Field The application relates to the field of magnetron sputtering coating, in particular to a rotating frame stirring and conducting device and a coating machine. Background Magnetron sputtering is a physical vapor deposition (Physical Vapor Deposition, PVD) technology, which utilizes the combined action of a magnetic field and an electric field to sputter atoms or molecules on the surface of a target material and form a film on the surface of a substrate. In order to obtain a desired film thickness, it is necessary to control the sputtering time and sputtering power. The rotation controllability of the substrate turret is one of the main factors affecting the uniformity of the thickness of the film layers of each substrate. The rotation of the substrate of the rotating frame of the traditional coating machine is realized by a gear set transmission structure, and the times of each substrate surface facing the target material are inconsistent in a certain process time, so that the thickness of the film layer on each substrate surface is also inconsistent. Specifically, the in-furnace rotating frame of the traditional coating machine adopts the gear set conduction device to drive the cargo cage base materials to rotate, the times of the surface of each base material of each independent cargo cage passing through the target coating area cannot be guaranteed to be consistent in the process time, and therefore the coating thickness and uniformity of the surface of each cargo cage base material cannot be guaranteed to be consistent. In addition, the requirements of the different processes on the passing of the target materials on the surface base material of the cargo cage are different, and the gear set is not regulated accurately enough. Disclosure of utility model Based on this, it is necessary to provide a turret toggle conduction device and a coating machine. The application provides a rotating frame toggle conducting device, which comprises a rotating frame assembly, a cargo cage rotating disc assembly, a cargo cage and a baffle assembly, wherein the baffle assembly is arranged adjacent to the rotating frame assembly, the cargo cage is arranged on the cargo cage rotating disc assembly, the cargo cage rotating disc assembly is rotatably arranged on the rotating frame assembly, and the cargo cage rotating disc assembly is provided with a position capable of abutting against the baffle assembly when the rotating frame assembly rotates, so that the cargo cage rotates by a first preset angle relative to the rotating frame assembly to be separated from contact with the baffle assembly when the cargo cage rotates, and a preset rotation angle is formed between the cargo cage and the rotating frame assembly. The rotating frame is used for stirring the conduction device, the rotating frame assembly, the cargo cage rotating disc assembly, the cargo cage and the baffle assembly are matched, so that the cargo cage rotating disc assembly rotates along with the rotating frame assembly in the rotating process, the cargo cage is subjected to the baffle assembly through the cargo cage rotating disc assembly and rotates in the revolving state, the problem of controllable rotation angle of the cargo cage is solved, the times of passing through the target coating area on the surface of each substrate borne by each independent cargo cage are guaranteed to be consistent in process time, the consistency of the coating thickness and the consistency of the uniformity of the surface of the substrate borne by each cargo cage are improved, and the requirement on the surface of the cargo cage to pass through the target material is different under different processes, so that the device is convenient and easy to use and has strong universality. In some embodiments, the cargo cage carousel assembly includes a first shaft and a first wheel connected; the first rotating shaft is rotatably arranged on the rotating frame assembly, and the cargo cage is arranged on the first rotating shaft; the first rotating shaft penetrates through the first rotating wheel, and the first rotating wheel is provided with a position capable of being abutted against the baffle plate assembly in a rotating state of the rotating frame assembly, so that the first rotating shaft rotates by a first preset angle relative to the rotating frame assembly to be separated from contact with the baffle plate assembly in a state of being abutted against the baffle plate assembly, and the cargo cage and the rotating frame assembly form the preset rotation angle. In some of these embodiments, the cargo basket carousel assembly further includes a second runner coupled to the first runner, the first runner passing through the second runner and the first runner, respectively; The second rotating wheel and the first rotating wheel are relatively fixed and arranged in a staggered mode, and the second rotating whe