CN-224199469-U - Tail end cover and atomic layer deposition equipment

CN224199469UCN 224199469 UCN224199469 UCN 224199469UCN-224199469-U

Abstract

The application relates to the technical field of photovoltaics and semiconductors, in particular to a tail end cover and atomic layer deposition equipment, wherein the tail end cover comprises a substrate, a thermal field mounting hole, a thermal field forming device and a thermal field forming device, wherein the thermal field mounting hole is configured to be inserted into or extracted from a thermal field; the reinforced structure assembly comprises a strength member, a flange plate, a sealing plate, a wire outlet sealing column and a wire outlet sealing column, wherein the strength member extends along the edge of a thermal field mounting hole in the direction away from a substrate, the flange plate extends outwards from the side surface of one end, away from the substrate, of the strength member, the sealing plate is mounted on the flange plate in a sealing mode, the thermal field wire outlet hole is formed in the sealing plate, the wire outlet sealing column is mounted in the thermal field wire outlet hole in a sealing mode, and the wire outlet sealing column is connected with the thermal field in an electrical mode. Through adjusting the connection mode of thermal field and ALD equipment tail end cover, utilize additional strengthening subassembly and closing plate to seal and fix the thermal field independently, simplified the dismouting technology of thermal field, reduced the maintenance degree of difficulty and side's safety risk.

Inventors

LIU WENTAO
TAN ZUJIAN
GUO SHUANGFA

Assignees

拉普拉斯新能源科技股份有限公司

Dates

Publication Date: 20260505
Application Date: 20250429

Claims (10)

1. A tail end cap for sealing one end of a furnace body, comprising: A substrate provided with a thermal field mounting hole configured to insert or withdraw a thermal field; A reinforced structural assembly comprising: A strength member extending in a direction away from the substrate vertically along an edge of the thermal field mounting hole; A flange plate extending outward from a side surface of one end of the strength member away from the base plate; the sealing plate is hermetically arranged on the flange plate, and a thermal field wire outlet hole is formed in the sealing plate; and the wire outlet sealing column is hermetically arranged in the wire outlet hole of the thermal field and is configured to be electrically connected with the thermal field.
2. The tail end cover of claim 1, wherein a first dovetail groove is formed in a side of the base plate away from the strength member, a first sealing ring is mounted in the first dovetail groove, and the first dovetail groove is configured to be in sealing connection with the furnace body in cooperation with the first sealing ring.
3. The tail end cover of claim 1, wherein a second dovetail groove is formed in a surface of the flange plate away from the base plate, a second sealing ring is mounted in the second dovetail groove, and the second dovetail groove is configured to be in sealing connection with the sealing plate in cooperation with the second sealing ring.
4. The tail end cap of claim 1, wherein the base plate is provided with a suction hole and a pressure tap, the tail end cap further comprising: an extraction flange mounted on the extraction aperture, the extraction flange configured to connect to a negative pressure device; the pressure measuring flange is arranged on the pressure measuring hole; And the pressure measuring assembly is connected with the pressure measuring flange and is used for measuring the gas pressure in the furnace body.
5. The tail end cap of claim 4, wherein the number of pressure taps, pressure flanges and pressure assemblies is two, the pressure assemblies comprising a wide-range pressure gauge and a small-range film gauge mounted on two of the pressure flanges, respectively.
6. The tail end cover of claim 1, wherein the number of thermal field mounting holes is a plurality, and the plurality of thermal field mounting holes are annularly and uniformly distributed on the substrate, wherein each thermal field mounting hole is arranged with one thermal field.
7. The tail end cover of claim 1, wherein the thermal field mounting holes are waist holes, the sizes of the waist holes are matched with the sizes of the thermal field sections, the number of the thermal field wire outlet holes is a plurality, and the plurality of the thermal field mounting holes are uniformly distributed at intervals along the long axis of the waist holes.
8. The tail end cap of claim 1, wherein the base plate is circular or square.
9. An atomic layer deposition apparatus comprising a trailing end cap according to any one of claims 1 to 8.
10. The atomic layer deposition apparatus according to claim 9, further comprising: A furnace body; The thermal field is arranged in the furnace body, one end of the thermal field is fixedly connected with the furnace body, and the other end of the thermal field is electrically connected with the outgoing line sealing column.

Description

Tail end cover and atomic layer deposition equipment Technical Field The application relates to the technical field of photovoltaics and semiconductors, in particular to a tail end cover and atomic layer deposition equipment. Background Semiconductor or photovoltaic materials typically require a series of treatments and processes to produce the final product. A part of the process of the solar cell needs to send the sheet material into a reaction furnace body to react under certain process conditions such as temperature and pressure to coat the sheet material. Specific furnace bodies are needed for preparing various processes. The atomic layer deposition (atomiclayer deposition, ALD) equipment is a part of a semiconductor device, the reaction furnace body is the most important part of the semiconductor device, and because the ALD process temperature of the photovoltaic silicon wafer is low, stainless steel can be used for manufacturing the furnace body, and the ALD furnace body is generally designed mainly in consideration of productivity and maintenance convenience. In the current market, customers need equipment in a limited place to improve the productivity of the equipment as much as possible. The demand for capacity of the equipment is higher and higher, so that the furnace body in the market is longer and longer, the place cannot be enlarged, and the internal space of the equipment is smaller, so that the internal space of the equipment is required to be compressed to the greatest extent, and the equipment is convenient to maintain. In the existing equipment, the conventional tail end cover structure has defects in daily maintenance, overhaul and maintenance, a thermal field is arranged in the furnace body, the thermal field is an electric material, the electric material is heated continuously for 24 hours, the electric material is easy to damage, and disassembly and maintenance are needed. The existing tail end cover cannot solve the defects, the tail end cover locks the outgoing line sealing columns of a plurality of thermal fields at one time, when one of the thermal fields is broken, the connecting screw of the tail end cover and the furnace body, the connecting screw of the tail end cover and the thermal field and the tail row pipeline are required to be disassembled, and the maintenance is very inconvenient. In addition, the tail end cover is of a stainless steel structure, the weight of the tail end cover of an atomic layer deposition device of a certain model is 81kg, the space for maintaining is generally small, multiple people are required to lift the tail end cover and match one person to disassemble and assemble screws, and certain potential safety hazards exist. Disclosure of utility model In view of this, the embodiment of the application provides a tail end cover and an atomic layer deposition device, wherein the tail end cover is used for sealing one end of a furnace body, the whole tail end cover is not required to be removed during maintenance, and only a broken thermal field is required to be removed during maintenance, so that the workload of thermal field maintenance, overhaul and maintenance is reduced, the working efficiency is improved, and potential safety hazards are eliminated. According to an inventive concept of one aspect of the present utility model, there is provided a tail end cap for sealing one end of a furnace body, the tail end cap comprising: a substrate provided with a thermal field mounting hole; A reinforced structural assembly comprising: A strength member extending in a direction away from the substrate vertically along an edge of the thermal field mounting hole; A flange plate extending outward from a side surface of one end of the strength member away from the base plate; the sealing plate is hermetically installed on the flange plate, a thermal field wire outlet hole is formed in the sealing plate, and the thermal field wire outlet hole is matched with the outer diameter of a thermal field to be installed. According to some embodiments of the utility model, a first dovetail groove is formed in one side, away from the strength member, of the base plate, a first sealing ring is installed in the first dovetail groove, and the first dovetail groove is configured to be in sealing connection with the furnace body in a matching manner with the first sealing ring. According to some embodiments of the utility model, a second dovetail groove is formed in the surface, away from the base plate, of the flange plate, and a second sealing ring is installed in the second dovetail groove and is configured to be matched with the second sealing ring to be in sealing connection with the sealing plate. According to some embodiments of the utility model, the base plate is provided with a suction hole and a pressure measurement hole, and the tail end cover further comprises: an extraction flange mounted on the extraction aperture, the extraction flange configured to connect to a