Search

CN-224199473-U - Coating equipment

CN224199473UCN 224199473 UCN224199473 UCN 224199473UCN-224199473-U

Abstract

The application provides coating equipment, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problems that a spraying structure of the traditional coating equipment causes uneven distribution of process gas and uneven coating. The film plating equipment comprises a vacuum cavity, a driving assembly, a spraying block, two or more air inlet pipes, two or more corrugated pipe assemblies and a film plating device, wherein the spraying block is arranged at the top of the vacuum cavity and is in transmission connection with the second end of the driving assembly, the spraying block is provided with a first air inlet end and a second air inlet end which are opposite, the two or more air inlet pipes respectively penetrate through two or more second through holes and are respectively communicated with the first air inlet end and the second air inlet end, and the two or more corrugated pipe assemblies are respectively sleeved on the two or more air inlet pipes. The spraying block is driven by the driving component to move along the second horizontal direction, so that the air outlet position of the process air in the vacuum chamber can be dynamically adjusted, the concentration of the process air at different positions in the vacuum chamber can be flexibly adjusted, and the film coating uniformity of the sheet material at different positions is improved.

Inventors

  • Zhu henan
  • DAI JIA
  • KONG QI
  • DONG XUEDI

Assignees

  • 拉普拉斯(无锡)半导体科技有限公司

Dates

Publication Date
20260505
Application Date
20250529

Claims (10)

  1. 1. A coating apparatus, characterized by comprising: A vacuum chamber having a vacuum chamber, a first through-hole in communication with the vacuum chamber, and two or more second through-holes in communication with the vacuum chamber, the vacuum chamber configured to contain a sheet-like material; The first end of the driving assembly is arranged outside the vacuum chamber, and the second end of the driving assembly penetrates through the first through hole and stretches into the vacuum chamber; The spraying block extends along a first horizontal direction, is arranged at the top of the vacuum chamber, is in transmission connection with the second end of the driving assembly, is configured to move along a second horizontal direction under the driving of the driving assembly, and is crossed with the second horizontal direction, the spraying block is provided with an air inlet chamber, the bottom of the spraying block is provided with a plurality of air outlet holes communicated with the air inlet chamber, and the spraying block is provided with a first air inlet end and a second air inlet end which are opposite in the first horizontal direction; The first pipe ends of the two or more air inlet pipes respectively penetrate through the two or more second through holes and are respectively communicated with the first air inlet end and the second air inlet end, and the two or more air inlet pipes are configured to introduce process gas into the air inlet chamber; The two or more corrugated pipe assemblies are respectively sleeved on the two or more air inlet pipes, the first end of each corrugated pipe assembly is in airtight connection with the vacuum cavity, the second end of each corrugated pipe assembly is in airtight connection with the sleeved air inlet pipe, and the corrugated pipe assemblies are configured to seal a gap between the vacuum cavity and the air inlet pipe.
  2. 2. The coating apparatus according to claim 1, wherein, The distance between the adjacent air outlet holes is reduced along the direction from the first air inlet end to the center of the spray block; and the distance between the adjacent air outlet holes is reduced along the direction from the second air inlet end to the center of the spray block.
  3. 3. The plating apparatus according to claim 1 or 2, wherein the driving assembly comprises: The first driving source is arranged outside the vacuum chamber; The screw rod is in transmission connection with the first driving source and is configured to rotate under the driving of the first driving source, one end of the screw rod penetrates through the first through hole and stretches into the vacuum chamber, and the axial direction of the screw rod is the same as the second horizontal direction; The screw rod is in threaded connection with the screw rod and is connected to the spraying block, and the screw rod can drive the screw rod to rotate and drive the spraying block to move along the second horizontal direction.
  4. 4. The plating apparatus according to claim 3, wherein said driving assembly further comprises: The sealing assembly is sleeved on a connecting area of the screw rod outside the vacuum cavity, one end of the sealing assembly is connected with the vacuum cavity in a sealing mode, and the sealing assembly is configured to seal a gap between the screw rod and the vacuum cavity; or the drive assembly further comprises: The first transmission assembly is in airtight connection with the vacuum cavity, the first end of the first transmission assembly is in transmission connection with the first driving source, the second end of the first transmission assembly is in transmission connection with the screw rod, and the first transmission assembly is configured to transmit the rotation force of the first driving source to the screw rod.
  5. 5. The plating apparatus according to claim 1 or 2, wherein the driving assembly comprises: the second driving source is arranged outside the vacuum chamber; The second transmission assembly is in airtight connection with the vacuum cavity, the first end of the second transmission assembly is in transmission connection with the second driving source, and the second end of the second transmission assembly penetrates through the first through hole and stretches into the vacuum cavity; A first gear disposed within the vacuum chamber, the first gear in driving connection with the second end of the second transmission assembly configured to rotate under the drive of the second transmission assembly; The first rack is arranged in the vacuum chamber, meshed with the first gear and configured to move along the second horizontal direction under the driving of the first gear, and the spraying block is connected with the first rack.
  6. 6. The plating apparatus according to claim 1 or 2, wherein the driving assembly comprises: the third driving source is arranged outside the vacuum chamber; The first end of the third transmission assembly is in transmission connection with the third driving source, and the second end of the third transmission assembly penetrates through the first through hole and stretches into the vacuum cavity; the driving wheel is arranged in the vacuum chamber, is in transmission connection with the second end of the third transmission assembly and is configured to rotate under the drive of the third transmission assembly; The driven wheel is arranged in the vacuum cavity and is rotationally connected with the vacuum cavity; The conveying belt is arranged in the vacuum chamber, sleeved on the driving wheel and the driven wheel, and the spraying block is connected with the conveying belt and is configured to move under the driving of the driving wheel so as to drive the spraying block to move along the second horizontal direction.
  7. 7. The coating apparatus according to claim 1 or 2, wherein the number of the spray blocks is two, the number of the driving assemblies is two, each spray block is in transmission connection with the second end of one driving assembly, the vacuum chamber has a vertical symmetry plane extending in the first horizontal direction, and the two driving assemblies are symmetrically arranged with respect to the vertical symmetry plane.
  8. 8. The coating apparatus according to claim 1 or 2, wherein the number of spray blocks is two; Wherein the drive assembly comprises: the fourth driving source is arranged outside the vacuum chamber; The first end of the fourth transmission assembly is in transmission connection with the fourth driving source, and the second end of the fourth transmission assembly penetrates through the first through hole and stretches into the vacuum cavity; The second gear is arranged in the vacuum chamber, is in transmission connection with the second end of the fourth transmission assembly and is configured to rotate under the drive of the fourth transmission assembly; The two second racks are arranged in the vacuum chamber, meshed with the second gear and configured to move along the second horizontal direction under the driving of the second gear, and the two spraying blocks are respectively connected with the two second racks; Or alternatively The drive assembly includes: the fifth driving source is arranged outside the vacuum chamber; The first end of the fifth transmission assembly is in transmission connection with the fifth driving source, and the second end of the fifth transmission assembly penetrates through the first through hole and stretches into the vacuum cavity; The turntable is arranged in the vacuum chamber, is in transmission connection with the second end of the fifth transmission assembly and is configured to rotate under the drive of the fifth transmission assembly; The two connecting rods are arranged in the vacuum chamber, the first end of each connecting rod is connected with the rotary table, the second end of each connecting rod is connected with one spraying block, and the two connecting rods are configured to move under the driving of the rotary table so as to drive the two spraying blocks to move along the second horizontal direction.
  9. 9. The plating apparatus according to claim 1 or 2, characterized by further comprising: one or more slide rails arranged on the inner wall of the vacuum chamber; and each sliding block is connected with one sliding rail in a sliding way and is connected with one spraying block.
  10. 10. The plating apparatus according to claim 1 or 2, characterized by further comprising: Two or more hoses, each of which has one end connected to a second end of one of the inlet pipes, the hoses being configured to supply process gas to the inlet pipes.

Description

Coating equipment Technical Field The application relates to the field of semiconductor or photovoltaic material processing, in particular to a film plating device. Background The special gas is introduced to react, which is a common technological process in many processing and manufacturing industries, namely special gas enters the cavity according to a certain air inlet route under a certain condition, and participates in the technological reaction so as to meet the processing requirements, and different production processes have different requirements on parameters such as the air inlet route of the special gas. Taking a solar cell panel manufacturing process as an example, the uniformity of the distribution of the special gas on the surface of the silicon wafer in the film plating process is an important process parameter. Usually, the special gas is transmitted to the spray pipe or the spray plate through the gas inlet pipe, then enters the vacuum cavity from the gas outlet of the spray pipe or the spray plate, and finally is pumped out of the vacuum cavity by the vacuum pump. The special gas path has two problems that firstly, because the silicon wafer carrier plate is an integral body, most special gas flows to the vacuum pump along the back surface from the outer side of the carrier plate, the proportion of the special gas flowing along the surface of the silicon wafer is quite small, so that the thickness of a silicon wafer film coating close to the spray pipe or the spray plate is thicker, the thickness of a silicon wafer film coating far away from the spray pipe or the spray plate is thinner, and the uniformity difference is large, and secondly, because the air inlet pipe provides special gas to the spray pipe or the spray plate from one end of the spray pipe or the spray plate, the special gas flow sprayed out from one end of the spray pipe or the spray plate close to the air inlet pipe is large, the special gas flow sprayed out from one end of the spray pipe is small, so that the thickness of the silicon wafer film coating close to the air inlet pipe is thicker, and the thickness of the silicon wafer film coating far away from the air inlet pipe is thinner. The two problems cause uneven deposition of the coating on the surface of the silicon wafer, so that the quality of the coating is unstable, and the performance and appearance of the product are affected. Also, since the uniformity of the plating layer is poor, in order to thicken the thickness of the thinner region of the plating layer, it is necessary to increase the plating time, thereby consuming more energy and gas sources, raising costs, and the longer the plating time, the more difficult and expensive the maintenance and repair of the shower pipe or the shower plate may become. Disclosure of utility model The present application has been made to solve the above-mentioned technical problems. The embodiment of the application provides a coating device. In a first aspect, an embodiment of the application provides a film plating device, which comprises a vacuum cavity, a driving assembly, a spray block, a spray pipe and a corrugated pipe, wherein the vacuum cavity is provided with a vacuum cavity, a first through hole communicated with the vacuum cavity and two or more second through holes communicated with the vacuum cavity, the vacuum cavity is configured to contain sheet materials, the driving assembly is provided with a first end arranged outside the vacuum cavity, a second end of the driving assembly penetrates through the first through hole and stretches into the vacuum cavity, the spray block extends along a first horizontal direction, is arranged at the top of the vacuum cavity and is in transmission connection with the second end of the driving assembly, is configured to move along a second horizontal direction under the driving of the driving assembly, the first horizontal direction is intersected with the second horizontal direction, the spray block is provided with an air inlet cavity, the bottom of the spray block is provided with a plurality of air outlet holes communicated with the air inlet cavity, the spray block is provided with a first air inlet end and a second air inlet end opposite to the first horizontal direction, the two or more air inlet pipes penetrate through the first through holes, the first ends of the two or more air inlet pipes are respectively communicated with the first air inlet pipe and the second through holes respectively, the first ends of the two or more air inlet pipes are respectively communicated with the first air inlet pipe and the second air inlet pipe respectively, the two or more air inlet pipe ends are respectively communicated with the first air inlet pipe and the second air inlet pipe respectively, the first pipe ends and the air inlet pipe respectively pass through the two air inlet pipe and the air inlet pipe respectively and the air inlet pipe are respectively and the air inlet pipe a