CN-224201802-U - Energy exchange system and clean factory building

CN224201802UCN 224201802 UCN224201802 UCN 224201802UCN-224201802-U

Abstract

The utility model discloses an energy exchange system and a clean factory building, wherein the energy exchange system comprises a cooling water system and a fresh air unit, the cooling water system comprises a water inlet unit and a water return unit, and cooling water in the water inlet unit is used for absorbing heat of a process machine. The water return unit is used for collecting the cooling water after temperature rising. The fresh air unit comprises a heat exchange unit and an air cavity, the heat exchange unit is positioned in the air cavity, a water inlet of the heat exchange unit is communicated with a water outlet of the backwater unit, and a water outlet of the heat exchange unit is communicated with a water inlet of the water inlet unit. The heat exchange unit is used for exchanging heat with fresh air in the air cavity. By adopting the energy exchange system provided by the utility model, the warmed cooling water flows into the heat exchange unit and exchanges heat with fresh air in the air cavity. Meanwhile, the cooling water cooled by the heat exchange unit flows back to the process machine for continuously absorbing the heat of the process machine, which is beneficial to improving the energy utilization rate of the whole system and reducing the energy loss and the production cost of the system.

Inventors

WANG MINGMING
ZHOU XIANGRONG
ZHANG ZHENG
ZHANG DAWEI
Ji Yubang
LI MU

Assignees

世源科技工程有限公司

Dates

Publication Date: 20260505
Application Date: 20250429

Claims (10)

1. An energy exchange system comprising a cooling water system and a fresh air handling unit, wherein: The cooling water system comprises a water inlet unit and a water return unit, wherein cooling water in the water inlet unit is used for absorbing heat of a process machine; The fresh air handling unit comprises a heat exchange unit and an air cavity, the heat exchange unit is positioned in the air cavity, a water inlet of the heat exchange unit is communicated with a water outlet of the water return unit, and a water outlet of the heat exchange unit is communicated with a water inlet of the water inlet unit; The heat exchange unit is used for exchanging heat with fresh air in the air cavity.
2. The energy exchange system of claim 1, wherein the heat exchange unit comprises a primary heat exchange unit and a secondary heat exchange unit, the temperature of the secondary heat exchange unit is higher than the temperature of the primary heat exchange unit, and the fresh air is blown to the secondary heat exchange unit by the primary heat exchange unit; The water inlet of the primary heat exchange unit is communicated with the water outlet of the backwater unit, and the water outlet of the primary heat exchange unit is communicated with the water inlet of the water inlet unit.
3. The energy exchanging system according to claim 2, further comprising a water temperature control system comprising a high temperature water outlet in communication with the water inlet of the secondary heat exchange unit and a water return port in communication with the water outlet of the secondary heat exchange unit.
4. The energy exchanging system of claim 3, wherein said water temperature control system further comprises a low temperature water outlet in communication with a water inlet of said water inlet unit.
5. The energy exchanging system according to claim 4, wherein the water outlet of the primary heat exchanging unit is communicated with the water return port of the water temperature control system.
6. The energy exchange system of claim 4, further comprising adjacent first and second heat exchange portions, the first heat exchange portion for exchanging heat with a surface of the second heat exchange portion; The water inlet of the first heat exchange part is communicated with the low-temperature water outlet of the water temperature control system, and the water outlet of the first heat exchange part is communicated with the water return port of the water temperature control system; The water outlet of the first heat exchange unit is communicated with the water inlet of the second heat exchange part, and the water outlet of the second heat exchange part is communicated with the water inlet of the water inlet unit.
7. The energy exchange system of claim 6, wherein the liquid temperature of the water inlet of the first heat exchange portion is lower than the liquid temperature of the water inlet of the second heat exchange portion.
8. The energy exchange system of claim 6, further comprising adjacent third and fourth heat exchange portions, the third heat exchange portion configured to exchange heat with a surface of the fourth heat exchange portion; The water inlet of the third heat exchange part is communicated with the water outlet of the water return unit, the water outlet of the third heat exchange part is communicated with the water inlet of the second heat exchange part, and the water outlet of the second heat exchange part is communicated with the water inlet of the water inlet unit; The water outlet of the fourth heat exchange part is communicated with the water inlet of the primary heat exchange unit, and the water inlet of the fourth heat exchange part is communicated with the water outlet of the primary heat exchange unit.
9. The energy exchanging system according to claim 2, further comprising a first water pump disposed between the water outlet of the primary heat exchanging unit and the water inlet of the water inlet unit.
10. A clean plant, characterized in that the clean plant comprises a clean room and an energy exchange system according to any one of claims 1-9, and the fresh air heated in the air chamber is used for blowing to the clean room.

Description

Energy exchange system and clean factory building Technical Field The utility model relates to the technical field of clean rooms, in particular to an energy exchange system and a clean factory building. Background Both the semiconductor production factory and the display panel production factory have certain requirements on the ambient temperature, the humidity and the cleanliness, so that in the factories, a clean room and a fresh air system are required to be arranged, and the fresh air system is mainly responsible for supplying fresh air at 23-28 ℃ to the clean room. Currently, the required fresh air of the fresh air system comes from outdoors, and during winter periods, the MAU unit of the fresh air system needs to be additionally provided with heating equipment for heat-treating the fresh air blown from outdoors. However, this will also result in additional energy consumption and cost increase for the clean plant. Therefore, how to reduce the energy consumption and the production cost of clean factories has become a challenge for those skilled in the art. Disclosure of utility model The utility model provides an energy exchange system and a clean factory building, which are used for reducing energy consumption and production cost of the clean factory building. In a first aspect, the utility model provides an energy exchange system, which comprises a cooling water system and a fresh air unit, wherein the cooling water system comprises a water inlet unit and a water return unit, cooling water in the water inlet unit is used for absorbing heat of a process machine, and the water return unit is used for collecting cooling water after temperature rising. The fresh air unit comprises a heat exchange unit and an air cavity, the heat exchange unit is positioned in the air cavity, a water inlet of the heat exchange unit is communicated with a water outlet of the backwater unit, and a water outlet of the heat exchange unit is communicated with a water inlet of the water inlet unit. The heat exchange unit is used for exchanging heat with fresh air in the air cavity. By adopting the energy exchange system provided by the utility model, as the warmed cooling water flows into the heat exchange unit through the water outlet of the water return unit, the outer surface of the heat exchange unit can exchange heat with the fresh air in the air cavity after being heated, so that the fresh air in the air cavity is warmed, and meanwhile, the cooling water in the heat exchange unit is cooled. In addition, the water outlet of the heat exchange unit is communicated with the water inlet of the water inlet unit of the cooling water system, so that the cooling water cooled by the heat exchange unit flows back to the process machine for continuously absorbing the heat of the process machine, thereby realizing the cooling of the process machine, effectively improving the energy utilization rate of the whole system and reducing the energy loss and the production cost of the system. In one possible implementation of the utility model, the heat exchange unit comprises a primary heat exchange unit and a secondary heat exchange unit, the temperature of the secondary heat exchange unit is higher than that of the primary heat exchange unit, and fresh air is blown to the secondary heat exchange unit by the primary heat exchange unit. The water inlet of the primary heat exchange unit is communicated with the water outlet of the backwater unit, and the water outlet of the primary heat exchange unit is communicated with the water inlet of the water inlet unit. Therefore, fresh air entering the air cavity is preheated through the primary heat exchange unit and then is further heated through the secondary heat exchange unit, so that the energy consumption of the secondary preheating unit is reduced while the temperature requirement of a clean room is met, and the energy consumption and the production cost of the system are reduced. In one possible implementation of the present utility model, the energy exchange system further includes a water temperature control system, the water temperature control system including a high temperature water outlet and a water return port, the high temperature water outlet being in communication with the water inlet of the secondary heat exchange unit. The water return port is communicated with the water outlet of the secondary heat exchange unit. So that the secondary heat exchange unit can continuously exchange heat with the fresh air in the air cavity, thereby effectively improving the stability of the temperature of the fresh air blown into the clean room and being beneficial to improving the heat exchange efficiency. In one possible implementation of the present utility model, the water temperature control system further includes a low temperature water outlet, which is in communication with the water inlet of the water inlet unit. The low-temperature cooling water in the low-temperature water tank can flo