Search

CN-224202143-U - Plating substrate conveying device and plating substrate working machine

CN224202143UCN 224202143 UCN224202143 UCN 224202143UCN-224202143-U

Abstract

The utility model relates to the technical field of electroplating equipment and discloses an electroplating substrate conveying device and an electroplating substrate operation machine, wherein the electroplating substrate conveying device comprises an equipment body, a conveying mechanism and an inclined air knife mechanism, the conveying mechanism is arranged in the equipment body and comprises a first conveying component and a second conveying component which are arranged at intervals along the conveying direction of a substrate, the inclined air knife mechanism is arranged at a gap between the first conveying component and the second conveying component and comprises a first air knife and a second air knife which are arranged at intervals up and down, the included angle between the length direction of the first air knife and the second air knife and the conveying direction of the substrate is an acute angle, a first air outlet of the first air knife and a second air outlet of the second air knife are arranged oppositely, and the substrate penetrates through the gap between the first air knife and the second air knife. According to the utility model, the inclined air knife mechanism is arranged at the gap between the first conveying assembly and the second conveying assembly, so that the length of the conveying mechanism is shortened, and the use cost and the occupied area are reduced.

Inventors

  • ZHOU JIAN

Assignees

  • 昆山东威科技股份有限公司

Dates

Publication Date
20260505
Application Date
20250530

Claims (10)

  1. 1. An apparatus for transporting a plating substrate, comprising: an equipment body (1); A conveying mechanism (2) arranged in the equipment body (1), wherein the conveying mechanism (2) comprises a first conveying assembly (201) and a second conveying assembly (202) which are arranged at intervals along the conveying direction of the substrate; The inclined air knife mechanism (3) is arranged at the gap of the first conveying assembly (201) and the second conveying assembly (202), the inclined air knife mechanism (3) comprises a first air knife (301) and a second air knife (302) which are arranged at intervals up and down, the included angles between the length directions of the first air knife (301) and the second air knife (302) and the conveying direction of the substrate are acute angles, a first air outlet (3011) of the first air knife (301) and a second air outlet (3021) of the second air knife (302) are oppositely arranged, and the substrate is suitable for penetrating through the gap between the first air knife (301) and the second air knife (302).
  2. 2. The plating substrate conveying device according to claim 1, wherein a longitudinal direction of the first air knife (301) and a longitudinal direction of the second air knife (302) are identical, and an angle between the longitudinal direction of the first air knife (301) and a conveying direction of the substrate is θ 1 , satisfying 66 ° - θ 1 -76 °.
  3. 3. The plating substrate conveying apparatus according to claim 2, wherein the diagonal blade mechanism (3) further comprises a pair of holders (303), a pair of the holders (303) are provided on the device body (1) at intervals, opposite ends of the first blade (301) are rotatably provided between the pair of holders (303) and fixed by a locking member, and opposite ends of the second blade (302) are rotatably provided between the pair of holders (303) and fixed by a locking member.
  4. 4. The plating substrate transport apparatus according to claim 3, wherein the first air outlet (3011) is disposed obliquely with respect to a longitudinal direction of the first air knife (301) and has an included angle θ 2 , satisfying 0 ° < θ 2 +≤5 °; The second air outlet (3021) is obliquely arranged relative to the length direction of the second air knife (302), and the included angle is theta 3 , so that the angle is 0 DEG < theta 3 and less than or equal to 5 deg.
  5. 5. The plating substrate conveying device according to claim 1, wherein the first conveying assembly (201) comprises a plurality of first transmission shafts (2011) arranged at intervals, at least one first roller (2012) is respectively arranged on each first transmission shaft (2011), the axis of each first transmission shaft (2011) is respectively perpendicular to the conveying direction of the substrate, and the lengths of the plurality of first transmission shafts (2011) close to the inclined air knife mechanism (3) gradually decrease along the conveying direction of the substrate.
  6. 6. The plating substrate conveying device according to claim 5, wherein the second conveying assembly (202) comprises a plurality of second transmission shafts (2021) arranged at intervals, at least one second roller (2022) is respectively arranged on each second transmission shaft (2021), the axis of each second transmission shaft (2021) is respectively perpendicular to the conveying direction of the substrate, and the lengths of the plurality of second transmission shafts (2021) close to the inclined air knife mechanism (3) are gradually increased along the conveying direction of the substrate.
  7. 7. The plating substrate conveying device according to claim 1, wherein the conveying mechanism (2) further comprises a third conveying assembly (203) and a fourth conveying assembly (204), the third conveying assembly (203) is arranged above the first conveying assembly (201) at intervals, and the fourth conveying assembly (204) is arranged above the second conveying assembly (202) at intervals.
  8. 8. The plating substrate conveying device according to claim 1, wherein the oblique air knife mechanism (3) further comprises a fan (304) and an air inlet pipe (305), at least one first air inlet is provided on a side surface of the first air knife (301), at least one second air inlet (3022) is provided on a side surface of the second air knife (302), and the first air inlet and the second air inlet (3022) are connected with the fan (304) through the air inlet pipe (305) respectively.
  9. 9. The plating substrate conveying device according to claim 1, further comprising a positive air knife mechanism (4), wherein the positive air knife mechanism (4) is disposed above the second conveying assembly (202) and perpendicular to the conveying direction of the substrate, for drying the substrate.
  10. 10. A plating substrate handling machine according to any one of claims 1 to 9, comprising a plating substrate transport apparatus.

Description

Plating substrate conveying device and plating substrate working machine Technical Field The utility model relates to the technical field of electroplating equipment, in particular to an electroplating substrate conveying device and an electroplating substrate operation machine. Background Currently, in TGV (Through Glass Via, glass through hole) electroplating, a substrate is generally blown and dried by a front-mounted air knife, the front-mounted air knife is arranged above a conveying mechanism, and an air outlet of the front-mounted air knife is perpendicular to the conveying direction of the substrate. However, the water vapor blown off by the front-mounted air knife is easy to adhere to the glass substrate, and part of the water vapor in the holes is difficult to blow out, so that a plurality of groups of front-mounted air knives are usually required to blow and dry the substrate, the whole length of the conveying mechanism is longer, the use cost is higher, and a larger field is occupied. Disclosure of utility model In view of the above, the present utility model provides a conveying device for an electroplated substrate and an electroplated substrate working machine, so as to solve the problems of longer length, higher use cost and larger occupied area of a conveying mechanism caused by the need of arranging a plurality of groups of upright air knives for drying by adopting the upright air knives. In a first aspect, the present utility model provides a plating substrate conveying apparatus, comprising: an equipment body; The conveying mechanism is arranged in the equipment body and comprises a first conveying assembly and a second conveying assembly which are arranged at intervals along the conveying direction of the substrate; The inclined air knife mechanism is arranged at the gap of the first conveying assembly and the second conveying assembly and comprises a first air knife and a second air knife which are arranged at intervals up and down, the included angle between the length direction of the first air knife and the length direction of the second air knife and the conveying direction of the substrate is an acute angle, the first air outlet of the first air knife and the second air outlet of the second air knife are oppositely arranged, and the substrate is suitable for penetrating through the gap between the first air knife and the second air knife. The electroplating substrate conveying device has the beneficial effects that the oblique air knife mechanism is arranged at the gap between the first conveying component and the second conveying component, and the first air knife and the second air knife of the oblique air knife mechanism can simultaneously blow the upper surface and the lower surface of the substrate, so that the blow-drying efficiency is improved, and the blow-drying effect can be realized by arranging a small number of oblique air knife mechanisms, so that the length of the conveying mechanism is shortened, and the use cost and the occupied area are reduced. In an alternative embodiment, the length direction of the first air knife is consistent with the length direction of the second air knife, and the included angle between the length direction of the first air knife and the conveying direction of the substrate is theta 1, so that the angle is 66 degrees less than or equal to theta 1 degrees less than or equal to 76 degrees. The air knife has the beneficial effects that the length direction of the first air knife is consistent with the length direction of the second air knife, so that the upper surface and the lower surface of the substrate are uniformly dried. Through controlling the included angle between the length direction of two air knives and the conveying direction of the substrate in a proper range, the air flow can form an inclined flow path on the upper surface and the lower surface of the substrate, the contact time between the air flow and the substrate is longer, and therefore moisture on the substrate can be stripped more fully, and the drying efficiency is improved. In an alternative embodiment, the oblique air knife mechanism further comprises a pair of supports, the pair of supports are arranged on the equipment body at intervals, two opposite ends of the first air knife are rotatably arranged between the pair of supports and are fixed through locking pieces, and two opposite ends of the second air knife are rotatably arranged between the pair of supports and are fixed through locking pieces. The support is used for supporting the first air knife and the second air knife, and the first air knife and the second air knife are rotatably arranged on the support, so that the inclination angles of the first air knife and the second air knife can be finely adjusted, and the drying efficiency of the substrate is further improved. In an alternative embodiment, the first air outlet is obliquely arranged relative to the first air knife, and the inclination angle is th