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CN-224202435-U - X-axis correction device of manual measuring table and light sensing chip test equipment

CN224202435UCN 224202435 UCN224202435 UCN 224202435UCN-224202435-U

Abstract

The utility model provides a manual measuring table X-axis correction device and light-sensitive chip test equipment, which relate to the technical field of semiconductor test equipment, and comprise a downloading table, an uploading table, a bearing assembly and an elastic floating assembly; the bearing assembly is connected with the downloading platform through the elastic floating assembly, the bearing assembly is provided with floating allowance relative to the elastic floating assembly along the X axis, the bearing assembly is provided with a chip mounting cavity and a first positioning hole, the uploading platform is movably connected with the downloading platform along the Z axis, the uploading platform is provided with a probe which is arranged opposite to the chip mounting cavity along the Z axis, and the uploading platform is provided with a first positioning piece which is used for being inserted into the first positioning hole. The X-axis correction device of the manual measuring table can reduce the combined structural tolerance caused by structural member separation, is more flexible and controllable in adjustment, and can quickly correct when the X-axis direction is positioned inaccurately.

Inventors

  • WANG WEIJUN
  • ZHU YUAN
  • ZHAO DAJUN

Assignees

  • 芯云纵横半导体(上海)有限公司

Dates

Publication Date
20260505
Application Date
20250514

Claims (10)

  1. 1. The X-axis correction device of the manual measuring table is characterized by comprising a downloading table (1), an uploading table (2), a bearing assembly (4) and an elastic floating assembly (5); The bearing assembly (4) is connected with the downloading table (1) through an elastic floating assembly (5), the bearing assembly (4) is provided with a floating allowance along an X axis relative to the elastic floating assembly (5), and the bearing assembly (4) is provided with a chip mounting cavity (421) and a first positioning hole (422); The loading platform (2) is movably connected with the downloading platform (1) along a Z axis, the loading platform (2) is provided with a probe (21) which is arranged opposite to the chip mounting cavity (421) along the Z axis, and the loading platform (2) is provided with a first positioning piece (231) which is inserted into the first positioning hole (422).
  2. 2. The X-axis calibration apparatus of claim 1, wherein the first positioning members (231) are configured in plurality, the plurality of first positioning members (231) are disposed around the probe (21), and the first positioning holes (422) are configured in plurality in one-to-one correspondence with the first positioning members (231).
  3. 3. The X-axis calibration device of a hand table according to claim 1, characterized in that the elastic floating assembly (5) comprises a connecting piece (51) and an elastic piece, the connecting piece (51) is connected with the downloading table (1) through the bearing assembly (4), the bearing assembly (4) is in sliding fit with the connecting piece (51) along the Z-axis, and the bearing assembly (4) has a floating allowance relative to the connecting piece (51) along the X-axis, and the elastic piece is arranged between the bearing assembly (4) and the downloading table (1).
  4. 4. The hand stage X-axis correction device according to claim 1, characterized in that the upload stage (2) comprises a stage body (22) and a probe mount (23) connected to the stage body (22); The carrying platform body (22) is provided with a second positioning piece (221), and the second positioning piece (221) extends along the Z axis towards a direction away from the downloading platform (1); The probe mount (23) is mounted with the probe (21) and the first positioning member (231).
  5. 5. The hand stage X-axis correction device according to claim 1, characterized in that the bearing assembly (4) comprises a bracket (41), a slide frame (42) and a limiting piece (44); the slide glass frame (42) is connected with the bracket (41), and the slide glass frame (42) is provided with the chip mounting cavity (421); -said support (41) has a floating margin along said X-axis with respect to said elastic floating assembly (5); The limiting piece (44) is connected with the side wall of the support (41), and the limiting piece (44) is used for being clamped with the limiting plate group (9) to limit the position of the support (41) along the X axis relative to the limiting plate group (9).
  6. 6. The X-axis calibration device of claim 5, wherein the limiting member (44) is configured as at least one, one end of the limiting member (44) is connected to a side wall of the bracket (41), the other end protrudes from the side wall of the bracket (41), and an outer surface of a portion protruding from the side wall is an arc surface.
  7. 7. A light-sensitive chip testing apparatus comprising a hand table X-axis correction device according to any one of claims 1 to 6.
  8. 8. The light-sensitive chip test device according to claim 7, further comprising a supporting platform (7), a sliding rail (8) and a limiting plate set (9), wherein the sliding rail (8) and the limiting plate set (9) are both connected with the supporting platform (7), the limiting plate set (9) is used for propping against the top surface of the bearing assembly (4), and the downloading table (1) is in sliding fit with the sliding rail (8) along the X axis.
  9. 9. The light-sensitive chip test apparatus according to claim 8, wherein the limiting plate group (9) comprises a support plate (91), a bottom plate (92) and a limiting beam (93); The bottom plate (92) is connected with the supporting platform (7) through the supporting plate (91), and a through hole (921) which is inserted into the second positioning piece (221) in the uploading table (2) is formed in the bottom plate (92); The limiting beam (93) is connected with the bottom plate (92), and a clamping groove (931) which is clamped with the limiting piece (44) in the bearing component (4) is concavely formed in the bottom end of the limiting beam (93), so that the position of the bearing component (4) along the X axis relative to the limiting beam (93) is limited.
  10. 10. The light-sensitive chip testing apparatus according to claim 9, wherein the limit beam (93) extends along the X-axis, an end of the limit beam (93) having a guide surface (932), the guide surface (932) being for guiding the limit piece (44) to below the limit beam (93).

Description

X-axis correction device of manual measuring table and light sensing chip test equipment Technical Field The utility model relates to the technical field of semiconductor test equipment, in particular to a X-axis correction device of a manual measuring table and light-sensitive chip test equipment. Background In the testing process of light sensing chips (such as TOF sensors, photoelectric conversion chips and the like), inaccurate positioning is a core problem which restricts testing efficiency and accuracy. The alignment precision of the chip and the test component (such as a light source and a probe) is insufficient in long-term use of the traditional test platform, and particularly in multi-parameter and high-frequency test, errors such as mechanical vibration and manual operation are easy to cause position offset, so that the problems of damaged light path exposure area, signal acquisition distortion and the like are caused. Meanwhile, the packaging technology and the test structure have poor cooperativity (such as mechanical stress during chip assembly and disassembly), so that positioning deviation is further aggravated, and the test result has low repeatability and insufficient reliability. For example, the positioning deviation of the X-axis direction exists after the prior art is used for a long time, so that the test result and the optical barrel or probe have the problem of inaccurate positioning. The wedge-shaped block or the spring plunger is usually used for split type pre-positioning to solve the problems, and due to the fact that accurate positioning is not on the same structural member, deviation caused by combination tolerance is easy to occur, meanwhile, the adjustment flexibility is poor, and quick positioning cannot be achieved when positioning is inaccurate. Disclosure of utility model The utility model aims to provide a manual measuring table X-axis correction device and a light-sensitive chip test device, which can reduce the combined structural tolerance caused by structural member separation, are more flexible and controllable in adjustment, and can quickly correct when the X-axis direction is positioned inaccurately. In order to achieve the above purpose, the present utility model provides the following technical solutions: In a first aspect, the utility model provides an X-axis correction device of a manual measuring table, which comprises a downloading table, an uploading table, a bearing assembly and an elastic floating assembly; The bearing assembly is connected with the downloading table through an elastic floating assembly, the bearing assembly is provided with a floating allowance along an X axis relative to the elastic floating assembly, and the bearing assembly is provided with a chip mounting cavity and a first positioning hole; The upper loading platform is movably connected with the lower loading platform along a Z axis, the upper loading platform is provided with a probe which is arranged along the Z axis and opposite to the chip mounting cavity, and the upper loading platform is provided with a first positioning piece which is used for being inserted into the first positioning hole. In an alternative embodiment, the first positioning members are configured in a plurality, a plurality of the first positioning members are arranged around the probe, and the first positioning holes are configured in a plurality corresponding to the first positioning members one by one. In an alternative embodiment, the elastic floating assembly comprises a connecting piece and an elastic piece, the connecting piece penetrates through the bearing assembly and is connected with the downloading table, the bearing assembly is in sliding fit with the connecting piece along the Z axis, the bearing assembly has floating allowance relative to the connecting piece along the X axis, and the elastic piece is arranged between the bearing assembly and the downloading table. In an alternative embodiment, the upload stage includes a stage body and a probe mount connected to the stage body; the carrier body is provided with a second positioning piece which extends along the Z axis towards a direction away from the downloading table; the probe mount is mounted with the probe and the first positioning member. In an alternative embodiment, the carrier assembly includes a bracket, a slide frame, and a stop; The slide glass frame is connected with the bracket and is provided with the chip mounting cavity; the bracket having a float margin along the X-axis relative to the resilient float assembly; The limiting piece is connected with the side wall of the support, and the limiting piece is used for being clamped with the limiting plate group to limit the position of the support along the X axis relative to the limiting plate group. In an alternative embodiment, the limiting piece is configured to be at least one, one end of the limiting piece is connected with the side wall of the support, the other end of th