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CN-224202612-U - Pressure sensor

CN224202612UCN 224202612 UCN224202612 UCN 224202612UCN-224202612-U

Abstract

The utility model relates to the technical field of pressure sensors, in particular to a pressure sensor, which comprises a shell, wherein one end of the shell is opened, a metal diaphragm is arranged at the other end of the shell, and a supporting ring, a mounting substrate, a compression ring, a first taper sleeve, a second taper sleeve and a sealing cover are sequentially arranged inside the shell from inside to outside. The MEMS chip is convenient to install on external equipment by arranging the shell and the metal membrane, and is convenient to form a quick disassembly structure by arranging the supporting ring, the installation base plate, the compression ring, the first taper sleeve, the second taper sleeve and the sealing cover, when the MEMS chip fails, the sealing cover is disassembled, then the easy pull rope is hooked, the first taper sleeve and the second taper sleeve are convenient to be taken down integrally, then the tool is used for being clamped with the notch, and the compression ring is driven to rotate to be out, so that the installation base plate is replaced, the integral structure is simple, the design is reasonable, and the problems in the prior art are effectively solved.

Inventors

  • Ran Xumao

Assignees

  • 无锡芸莅半导体科技有限公司

Dates

Publication Date
20260505
Application Date
20250630

Claims (6)

  1. 1. The pressure sensor is characterized by comprising a shell, wherein one end of the shell is opened, a metal diaphragm is arranged at the other end of the shell, a supporting ring, a mounting substrate, a compression ring, a first taper sleeve, a second taper sleeve and a sealing cover are sequentially arranged in the shell from inside to outside, the compression ring and the sealing cover are in threaded connection with the shell, a limiting ring is arranged in the supporting ring, the mounting substrate is pushed by the compression ring to enter the supporting ring and is abutted to one side of the limiting ring, the sealing cover pushes the second taper sleeve and the first taper sleeve, MEMS chips are arranged on the side surfaces of the mounting substrate, and connecting wires are arranged in the middle of the first taper sleeve and the second taper sleeve and penetrate through the mounting substrate and are electrically connected with the MEMS chips.
  2. 2. The pressure sensor of claim 1, wherein the side of the housing, which is far away from the middle part of the metal diaphragm, is provided with a regular octagonal boss, the edge of the regular octagonal boss, which is close to the side surface of the metal diaphragm, is provided with a groove, and a sealing ring is arranged in the regular octagonal boss.
  3. 3. A pressure sensor according to claim 2, wherein the outer wall of the housing far from the sealing cover and the middle part of the inner wall of the housing are provided with threads, and the outer shape of the inner wall of the housing is stepped.
  4. 4. The pressure sensor of claim 3, wherein the outer wall of the clamp ring is stepped, and four notches for clamping an external tool are formed in one end of the clamp ring, which is far away from the mounting substrate.
  5. 5. The pressure sensor of claim 4, wherein the first and second sleeves are provided with a plurality of through grooves at the ends far away from the mounting substrate, the edge of the first sleeve near the side of the second sleeve is provided with an easy-to-pull rope, and Yi Lasheng is coiled in the gap between the second sleeve and the inner wall of the housing.
  6. 6. A pressure sensor according to claim 5, wherein a gasket is provided between the seal cover and the end of the housing.

Description

Pressure sensor Technical Field The utility model relates to the technical field of pressure sensors, in particular to a pressure sensor. Background The MEMS pressure sensor is a micro sensor manufactured based on Micro Electro Mechanical System (MEMS) technology, senses pressure through deformation of a sensitive film, and converts a physical signal into an electrical signal to be output. The key characteristics of the device include miniaturization, low power consumption, high integration and mass production advantages, and the device converts physical signals into electric signals to be output through the processing and amplification of related circuits through the deformation of the pressed element. The outside shell that is provided with of traditional pressure sensor, when installing the use, general direct mount has offered pressure channel on the shell in pipeline or pressure vessel, is convenient for pass through pressure channel with the pressure of outside gas or liquid and gives MEMS pressure sensor, but the connected mode is comparatively complicated between traditional pressure sensor and the shell, after the response module of sensor goes wrong, this pressure sensor will directly be abandoned, based on this, proposes a pressure sensor for realize changing inside response module, be used for solving above-mentioned problem. Disclosure of utility model The utility model aims to overcome the defects of the prior art, and provides a pressure sensor which effectively solves the defects of the prior art. In order to achieve the above object, an embodiment of an aspect of the present utility model provides a pressure sensor, including a housing, one end of the housing is opened, the other end is provided with a metal diaphragm, a supporting ring, a mounting substrate, a compression ring, a first taper sleeve, a second taper sleeve and a sealing cover are sequentially disposed inside the housing from inside to outside, the compression ring and the sealing cover are both in threaded connection with the housing, a limiting ring is disposed inside the supporting ring, the mounting substrate is pushed by the compression ring to enter into the supporting ring and is abutted to one side of the limiting ring, the sealing cover pushes the second taper sleeve and the first taper sleeve, MEMS chips are mounted on the side surfaces of the mounting substrate, and connecting wires are disposed in the middle of the first taper sleeve and the second taper sleeve and penetrate through the mounting substrate and are electrically connected with the MEMS chips. By above-mentioned arbitrary scheme preferred, regular octagon boss is installed to one side that the shell kept away from the metal diaphragm middle part, regular octagon boss is close to the edge of metal diaphragm side and is seted up flutedly, and its internally mounted has the sealing washer, in this scheme the shell mainly used forms specific structure, screw thread has all been seted up to one side of its outside and one side of inner wall, and then be convenient for provide the mounted position for clamp ring and sealed lid, the material of shell is preferably selected for corrosion-resistant alloy or high reliability metal for keep apart the fluid under test with inside chip circuit, after shell and outside equipment carry out threaded connection, regular octagon boss compresses tightly the sealing washer, improve the leakproofness of hookup location, prevent to appear the weeping phenomenon. By the preferred of above-mentioned arbitrary scheme, the shell is kept away from the outer wall of sealed lid and the middle part of its inner wall and is all offered the screw thread, the appearance of shell inner wall is echelonment, is convenient for provide the mounted position for clamp ring and sealed lid through using this scheme, and the echelonment structure is convenient for use the tool to carry out the processing of internal thread simultaneously to corresponding reduction material quantity, and guarantee the structural strength of shell. By the preferred form of above-mentioned arbitrary scheme, the appearance of clamp ring outer wall is echelonment, four breach that supply outside instrument joint has been seted up to the one end that the clamp ring kept away from mounting substrate, the boss position that is convenient for make the clamp ring through using this scheme carries out the seting up of screw thread to can mesh with the inside screw thread of shell, the tip position of clamp ring pushes away mounting substrate simultaneously, cooperatees with the spacing ring, is convenient for carry out fixed in position to mounting substrate, and the breach has been seted up to the clamp ring tip, is convenient for provide the joint position for the instrument, is convenient for rotate the clamp ring, is convenient for carry out the dismantlement of earlier stage installation and later stage. By the preferred one end that installation base plate was kept