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CN-224202798-U - Grinding fluid mixing sampling valve box

CN224202798UCN 224202798 UCN224202798 UCN 224202798UCN-224202798-U

Abstract

The utility model discloses a grinding fluid mixing sampling valve box which comprises a box body, wherein a fixing plate is arranged in the box body, a sampling valve is arranged on the front side of the fixing plate through a mounting assembly, sampling pipes are arranged on the upper side and the lower side of the sampling valve, the mounting assembly comprises a mounting block arranged on the fixed front side, a mounting groove is formed in the front side of the mounting block, a mounting column is arranged on the surface of the mounting groove, the front side of the mounting column is fixedly arranged on the rear side of the sampling valve, and key components such as the box body, the fixing plate, the mounting assembly and the sampling valve are arranged, the mounting assembly is used for fixing the sampling valve on the front side of the fixing plate through the mounting block, the mounting groove, the mounting column and the like, sampling pipes are arranged on the upper side and the lower side of the sampling valve and used for sampling operation, and the sampling valve is convenient to disassemble and overhaul by workers through the arrangement of the mounting assembly, the extrusion assembly and the positioning assembly.

Inventors

  • WANG MIN
  • JI ZENGWEI
  • WANG TING
  • SHEN XIAOJUAN

Assignees

  • 无锡恒大电子科技有限公司

Dates

Publication Date
20260505
Application Date
20250509

Claims (7)

  1. 1. The grinding fluid mixing sampling valve box comprises a box body (1) and is characterized in that a fixed plate (2) is arranged in the box body (1), a sampling valve (4) is arranged on the front side of the fixed plate (2) through a mounting assembly (3), and sampling pipes (5) are arranged on the upper side and the lower side of the sampling valve (4); The mounting assembly (3) comprises a mounting block (31) arranged on the front side of the mounting block (31), a mounting groove (32) is formed in the front side of the mounting block (31), a mounting column (33) is arranged on the surface of the mounting groove (32), and the front side of the mounting column (33) is fixedly mounted on the rear side of the sampling valve (4); the inside of the mounting block (31) is respectively provided with an extrusion component (6) and two positioning components (7) which are used for fixing the mounting column (33).
  2. 2. The grinding fluid mixing sampling valve box according to claim 1, wherein the extrusion assembly (6) comprises an extrusion rod (61) arranged inside the installation block (31), the left side of the extrusion rod (61) penetrates through the left side of the installation block (31), an extrusion plate (62) is arranged on the right side of the extrusion rod (61), a first spring (63) is arranged on the left side of the extrusion plate (62), and the left side of the first spring (63) is fixedly installed with the inner wall of the installation block (31).
  3. 3. The grinding fluid mixing sampling valve box according to claim 2, wherein the two positioning assemblies (7) comprise positioning rods (71) arranged on the mounting blocks (31), positioning plates (72) are fixedly arranged at the tops of the positioning rods (71), and the bottoms of the positioning rods (71) penetrate through the mounting columns (33).
  4. 4. The grinding fluid mixing sampling valve box according to claim 3, wherein vertical rods (8) penetrate through the upper side and the lower side of the positioning plate (72), the upper side and the lower side of the vertical rods (8) are fixedly installed with the inner wall of the installation block (31) respectively, and the vertical rods (8) are used for supporting movement of the positioning plate (72).
  5. 5. The grinding fluid mixing sampling valve box according to claim 4, wherein the surfaces of the vertical rods (8) are respectively sleeved with a second spring (9), and the upper side and the lower side of the second spring (9) are fixedly installed with the inner wall of the installation block (31) and the top of the positioning plate (72) respectively.
  6. 6. The grinding fluid mixing sampling valve box according to claim 5, wherein inclined plates (10) are fixedly arranged on the opposite sides of the positioning plates (72), and one side of each inclined plate (10) is in contact with one side of the extrusion plate (62).
  7. 7. The grinding fluid mixing sampling valve box according to claim 6, wherein positioning grooves (11) are formed in the upper side and the lower side of the mounting column (33), and the surfaces of the positioning grooves (11) are in contact with the surfaces of the positioning rods (71).

Description

Grinding fluid mixing sampling valve box Technical Field The utility model belongs to the technical field of grinding fluid supply, and particularly relates to a grinding fluid mixing sampling valve box. Background Chemical mechanical polishing is an indispensable process in chip processing, and is not only used in the wafer preparation stage, but also used for global planarization of the wafer surface during the wafer processing process. Through installation piece, mounting groove and erection column in the installation component to and extrusion subassembly and locating component's synergism, realized the firm fixed to the sample valve, this has solved the problem of rocking or becoming flexible that traditional sample valve probably appears in the installation, has ensured the stability and the reliability of sample valve in the course of the work, also is convenient for workman's follow-up dismantlement overhauls simultaneously. Disclosure of utility model Aiming at the problems existing in the prior art, the utility model provides the grinding fluid mixing sampling valve box which has the advantages of being convenient for workers to disassemble and overhaul the sampling valve and being more stable in the use process of the sampling valve, and the stable fixation of the sampling valve is realized through the synergistic effect of the mounting blocks, the mounting grooves and the mounting columns in the mounting assembly and the extrusion assembly and the positioning assembly, so that the problem of shaking or loosening possibly occurring in the mounting process of the traditional sampling valve is solved, the stability and the reliability of the sampling valve in the working process are ensured, and the follow-up disassembly and overhaul of workers are also convenient. The utility model discloses a grinding fluid mixing sampling valve box, which comprises a box body, wherein a fixed plate is arranged in the box body, a sampling valve is arranged on the front side of the fixed plate through a mounting assembly, and sampling pipes are arranged on the upper side and the lower side of the sampling valve; the mounting assembly comprises a mounting block arranged on the front side of the mounting block, a mounting groove is formed in the front side of the mounting block, a mounting column is arranged on the surface of the mounting groove, and the front side of the mounting column is fixedly mounted on the rear side of the sampling valve; The inside of installation piece is provided with respectively and is used for fixed extrusion subassembly and two locating component to the erection column. As a preferred embodiment of the present utility model, the extrusion assembly includes an extrusion rod disposed inside the installation block, the left side of the extrusion rod penetrates to the left side of the installation block, the right side of the extrusion rod is provided with an extrusion plate, the left side of the extrusion plate is provided with a first spring, the left side of the first spring is fixedly installed with the inner wall of the installation block, and the installation column can be firmly fixed in the installation groove through the design of the extrusion assembly, so that the stability and reliability of the sampling valve are ensured, and the arrangement of the first spring also provides a certain buffering effect, which is helpful for reducing damage caused by external force impact. As the utility model is preferable, the two positioning components comprise the positioning rods arranged on the mounting blocks, the top parts of the positioning rods are fixedly provided with the positioning plates, the bottoms of the positioning rods penetrate into the mounting columns, the fixing effect of the mounting columns is further enhanced through the design of the positioning components, the positioning rods are prevented from loosening or falling off in the working process, and the positioning rods penetrate into the mounting columns and are matched with the positioning grooves, so that the accurate positioning of the mounting columns is realized. As the preferable mode of the utility model, the upper side and the lower side of the locating plate are respectively penetrated with the vertical rods, the upper side and the lower side of the vertical rods are respectively fixedly installed with the inner wall of the installation block, the vertical rods are used for supporting the movement of the locating plate, the locating plate is more stable in the moving process through the arrangement of the vertical rods, the error caused by shaking is prevented, and meanwhile, the vertical rods also provide necessary guiding function for the movement of the locating plate. As the utility model is preferable, the surface of the vertical rod is sleeved with the second springs, the upper side and the lower side of the second springs are respectively fixedly installed with the inner wall of the installation block