CN-224203010-U - Adjusting mechanism of light emitting device

CN224203010UCN 224203010 UCN224203010 UCN 224203010UCN-224203010-U

Abstract

The utility model provides an adjusting mechanism of a light-emitting device, which comprises a supporting seat and a floating disc, wherein the supporting seat is fixed on a measuring device frame, the floating disc is connected to the supporting seat in a floating way, a light-emitting lens barrel is arranged on the floating disc, and the floating disc drives the lens barrel to move so as to adjust a light-emitting angle. The front side and the end side of the adjusting mechanism are provided with driving parts, the driving parts are arranged in a space convenient to operate, the driving parts comprise transverse driving parts and vertical driving parts, at least one part of the transverse driving parts drive the floating disc to move along the end face of the supporting seat, and the vertical driving parts are used for adjusting the distance and the inclination of the floating disc relative to the supporting seat so as to change the height of the floating disc in the normal direction of the end face of the supporting seat and the swinging angle of the floating disc.

Inventors

SHI LEI
WEI HONGTAO
WANG DI
ZHANG FENG

Assignees

江苏芯势科技有限公司

Dates

Publication Date: 20260505
Application Date: 20250512

Claims (6)

1. The adjusting mechanism of the light emitting device is characterized by comprising a supporting seat and a floating disc, wherein the supporting seat is fixed on a measuring device frame, the floating disc is connected to the supporting seat in a floating mode, a light emitting lens barrel is installed on the floating disc, driving parts are arranged on the front side and the end side of the adjusting mechanism, the driving parts comprise a transverse driving part and a vertical driving part, at least one part of the transverse driving part drives the floating disc to move along the end face of the supporting seat, and the vertical driving part is used for adjusting the distance and the inclination of the floating disc relative to the supporting seat.
2. The adjusting mechanism of the light emitting device according to claim 1, wherein the transverse driving part is arranged on the front side of the supporting seat, the vertical driving part is arranged on the end side of the floating disc, the accommodating cavity is arranged in the middle of the supporting seat, the floating disc comprises a top plate and an abutting sleeve positioned on the end face of the top plate, the abutting sleeve is inserted into the accommodating cavity, the vertical driving part is arranged between the top plate and the end face of the supporting seat, the transverse driving part comprises two transverse driving parts, the two transverse driving parts are separated along the circumferential direction of the supporting seat and are abutted with the abutting sleeve, an elastic supporting part is arranged at the position, in the accommodating cavity, in balance with the force exerted by the transverse driving parts, of the elastic supporting part is abutted on the abutting sleeve, the vertical driving part comprises a vertical driving part, and the vertical driving part drives the top plate to move along the normal direction of the end face of the supporting seat or adjusts the swing angle of the top plate relative to the normal.
3. The adjusting mechanism of a light emitting device according to claim 2, wherein one end of one of the lateral driving members is abutted against the abutment sleeve, and the other lateral driving member drives a lateral steering member located inside the support base, the lateral steering member being abutted against the abutment sleeve, and the lateral steering member converts a movement of the lateral driving member into an abutting movement against the abutment sleeve.
4. The adjusting mechanism of the light-emitting device according to claim 2, wherein the floating plate further comprises an adjusting cylinder, the top plate and the abutting sleeve are provided with penetrating incident holes, the adjusting cylinder is screwed in the incident holes, and the light-emitting lens cylinder is connected to the adjusting cylinder.
5. The adjusting mechanism of the light emitting device of claim 2, wherein the transverse driving member and the vertical driving member are selected to be tightly screwed on the front side of the supporting seat, the tightly screwed on the end side of the floating disc is screwed on the supporting seat or the top plate, the tightly screwed is rotationally connected with the top plate when the tightly screwed on the end side of the supporting seat, and the tightly screwed is abutted on the end surface of the supporting seat through the top plate when the tightly screwed on the top plate.
6. The adjusting mechanism of the light-emitting device of claim 5, wherein an elastic connecting piece is arranged between the top plate and the supporting seat, the elastic connecting piece comprises two rod bodies and an elastic body positioned between the rod bodies, the rod bodies are respectively positioned in grooves on the back surfaces of the top plate and the supporting seat, and the elastic body is positioned in through holes of the top plate and the supporting seat.

Description

Adjusting mechanism of light emitting device Technical Field The invention relates to the technical field of wafer measurement, in particular to an adjusting mechanism of a light emitting device. Background One of the current wafer surface measurement technologies is to scan a wafer rotating at a high speed by using a laser, and the laser irradiates the wafer surface through a light emitting device, wherein the spot shape of the laser on the wafer surface is determined by the orientation of the light emitting device relative to a machine base, and the light emitting device needs to be finely adjusted after the installation is completed so as to meet the angle requirement of measuring light. However, the wafer measuring device has a small installation space, the light emitting device cannot be adjusted from multiple directions, the adjustable degree of freedom is poor, and the existing adjusting mechanism has a complex structure and large occupied space and is not suitable for the installation environment of the wafer measuring device. Therefore, how to design the adjusting mechanism of the light emitting device to meet the requirement of multi-degree-of-freedom adjustment in a narrow space is a technical problem to be solved in the field. Disclosure of utility model In order to solve the technical problems, the utility model provides an adjusting mechanism of a light emitting device, which is used for realizing multi-degree-of-freedom adjustment on the light emitting device in a narrow space of a measuring device frame by optimizing the internal structure of the adjusting mechanism and arranging a driving part of the adjusting mechanism on an end face easy to operate. In order to achieve the above purpose, the adjusting mechanism of the light emitting device comprises a supporting seat and a floating disc, wherein the supporting seat is fixed on a measuring device frame, the floating disc is connected to the supporting seat in a floating mode, a light emitting lens barrel is arranged on the floating disc, and the floating disc drives the light emitting lens barrel to move so as to adjust a light emitting angle. An operation space is left on the front side (the front side in the present utility model refers to the side which is not interfered by other components and is convenient to operate) and the end side of the adjusting mechanism, and the driving portion is provided on the front side and the end side of the adjusting mechanism. The driving part comprises a transverse driving part and a vertical driving part, wherein the transverse driving part drives at least one part of the floating disc to move along the end surface of the supporting seat, and the vertical driving part is used for adjusting the distance and the gradient of the floating disc relative to the supporting seat so as to change the height of the floating disc in the normal direction of the end surface of the supporting seat and the swing angle of the floating disc. The transverse driving part is arranged at the front side of the supporting seat, and the vertical driving part is arranged at the end side of the floating disc. The floating disc comprises a top plate and an abutting sleeve positioned on the end face of the top plate, wherein the abutting sleeve is inserted into the accommodating cavity, and a vertical driving part is arranged between the top plate and the end face of the supporting seat. The transverse driving part comprises two transverse driving parts, the two transverse driving parts are spaced along the circumferential direction of the supporting seat, the transverse driving parts are abutted with the abutting sleeve and used for driving the abutting sleeve, an elastic supporting part is arranged at the position, in the accommodating cavity, in balance with the force applied by the transverse driving parts, the elastic supporting part is abutted on the abutting sleeve, elastic support is provided for the abutting sleeve, and when the abutting sleeve is driven by the transverse driving parts, the abutting sleeve can move in the accommodating cavity and can be kept stable. The vertical driving part comprises a vertical driving piece, and the vertical driving piece drives the top plate to move along the normal direction of the end surface of the supporting seat or adjusts the swing angle of the top plate relative to the normal. Further, the end of one of the lateral driving members is abutted with the abutting sleeve, the other lateral driving member drives the lateral steering member positioned in the supporting seat, the lateral steering member is abutted with the abutting sleeve, and the lateral steering member converts the movement of the lateral driving member into the abutting movement of the abutting sleeve. The driving member may be an electric driving member such as an electric telescopic rod, a manual driving member such as a jack screw, or a hydraulic driving member such as a hydraulic telescopic rod, as long as the