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CN-224203070-U - Wafer box internal pollution detection device

CN224203070UCN 224203070 UCN224203070 UCN 224203070UCN-224203070-U

Abstract

The utility model provides an internal pollution detection device of a wafer box, which relates to the field of detection devices of wafer boxes and comprises a base, wherein the upper end of the base is connected with a side plate, the upper side of the base is provided with a detection frame, the inner side of the side plate is connected with a detection assembly in a sliding manner, the detection frame comprises a fixed frame, the inner side wall of the fixed frame is provided with a limit strip, the upper side of the fixed frame is provided with a groove plate, the upper end of the groove plate is connected with a measurement plate in a sliding manner, the top of the measurement plate is provided with a limit plate, the detection assembly comprises a lifting plate, the outer end of the lifting plate is connected with a mounting plate, the upper side of the mounting plate is provided with a dust detector, and the outer end of the dust detector is connected with a detection probe through a wire. The utility model has the effects of facilitating the pollution detection on the surface of the slot on the inner side of the wafer box and simultaneously facilitating the detection on the appearance of the wafer box.

Inventors

  • Wu Muyan
  • CHEN JUAN
  • ZHANG JIAHUI
  • Guan Ranran
  • XIA YUTING
  • ZHANG NA

Assignees

  • 欣福半导体科技(合肥)有限公司

Dates

Publication Date
20260505
Application Date
20250414

Claims (7)

  1. 1. The device for detecting the pollution inside the wafer box comprises a base (1) and is characterized in that the upper end of the base (1) is connected with a side plate (2), the upper side of the base (1) is provided with a detection frame (3), the inner side of the side plate (2) is slidably connected with a detection assembly (4), the detection frame (3) comprises a fixing frame (31), the inner side wall of the fixing frame (31) is provided with a limit strip (32), the upper side of the fixing frame (31) is provided with a groove plate (33), the upper end of the groove plate (33) is slidably inserted with a measuring plate (34), the top of the measuring plate (34) is provided with a limit plate (36), the detection assembly (4) comprises a lifting plate (41), the outer end of the lifting plate (41) is connected with a mounting plate (42), the upper side of the mounting plate (42) is provided with a dust detector (43), and the outer end of the dust detector (43) is connected with a detection probe (432) through a wire (431).
  2. 2. The wafer cassette internal contamination detection apparatus according to claim 1, wherein a driving groove (21) and a limiting groove (22) are provided in the side plate (2), and a screw (24) is rotatably connected to the inside of the driving groove (21), and a lifting motor (23) is connected to an upper end of the screw (24).
  3. 3. The wafer cassette internal contamination detection apparatus according to claim 1, wherein the lifting plate (41) is slidably connected in the driving groove (21) and the limiting groove (22), and the screw (24) is screwed through the lifting plate (41), and both sides of the lifting plate (41) are provided with guide bars.
  4. 4. The wafer cassette internal contamination detection apparatus according to claim 1, wherein an electric push rod (47) is installed at the bottom of the mounting plate (42), and a moving plate (46) is connected to an outer end of the electric push rod (47), and a guide rod (48) is connected between the moving plate (46) and the mounting plate (42).
  5. 5. The wafer cassette internal contamination detection apparatus according to claim 4, wherein a steering motor (45) is installed at a bottom of the moving plate (46), and a driving shaft (451) is connected to an upper end of the steering motor (45), and a fixing plate (44) is connected to an upper end of the driving shaft (451).
  6. 6. A wafer cassette internal contamination detection apparatus as recited in claim 1, wherein the detection probe (432) is mounted in the fixed plate (44), and the detection probe (432) faces the detection frame (3) side.
  7. 7. The device for detecting the internal pollution of the wafer box according to claim 1, wherein a damping rotating shaft (35) is arranged at the upper end of the measuring plate (34), the limiting plate (36) is rotatably connected with the measuring plate (34) through the damping rotating shaft (35), and scale marks are arranged on the outer wall of one side of the measuring plate (34).

Description

Wafer box internal pollution detection device Technical Field The utility model relates to the technical field of wafer box detection devices, in particular to a wafer box internal pollution detection device. Background The wafer box is suitable for placing wafers, is convenient for transferring the wafers, and is generally of a hollow frame structure made of metal materials. According to the prior art (bulletin number: CN 220382059U), a detection device of a wafer box is described, wherein an accommodating space for accommodating wafers is formed in the wafer box, positioning pieces which are arranged at intervals are arranged on the inner side wall of the accommodating space, slots for inserting wafers are formed between two adjacent positioning pieces, the detection device of the wafer box comprises a main body, a tooth assembly and a tooth assembly, the tooth assembly is arranged on the outer side wall of the main body, the tooth assembly comprises a plurality of protruding portions which are arranged at intervals, the protruding portions are limited to extend into the slots by the positioning pieces when the wafer box is in a deformation state and the tooth assembly starts to enter the wafer box, and the movement of the protruding portions along the extending direction of the slots is limited by the positioning pieces after the wafer box is in the deformation state and the tooth assembly enters the wafer box. The application can effectively detect the unqualified wafer box, avoid the unqualified wafer box from being put on the machine, and reduce the risk of damaging products or equipment. " Although the detection device of the wafer box in the prior art realizes the detection of the overall dimension of the wafer box, the detection device of the prior detection device of the wafer box still has some defects that the detection device of the prior detection device of the wafer box can only detect the slot of the wafer box, and the surface of the slot must be subjected to pollution detection when the wafer box is used for loading wafers, otherwise, pollutants such as dust particles possibly exist, the wafer can be polluted, and meanwhile, the prior detection device is not convenient for detecting the overall dimension of the wafer box so as to ensure that the appearance of the wafer box has no deformation condition. Disclosure of utility model In order to overcome the defects in the prior art, a device for detecting the internal pollution of a wafer box is provided so as to solve the problems in the prior art. In order to achieve the above purpose, the device for detecting the pollution inside the wafer box comprises a base, wherein the upper end of the base is connected with a side plate, the upper side of the base is provided with a detection frame, the inner side of the side plate is in sliding connection with a detection assembly, the detection frame comprises a fixing frame, the inner side wall of the fixing frame is provided with a limit strip, the upper side of the fixing frame is provided with a groove plate, the upper end of the groove plate is in sliding connection with a measuring plate, the top of the measuring plate is provided with a limit plate, the detection assembly comprises a lifting plate, the outer end of the lifting plate is connected with a mounting plate, the upper side of the mounting plate is provided with a dust detector, and the outer end of the dust detector is connected with a detection probe through a wire. Further, a driving groove and a limiting groove are formed in the side plate, a screw rod is connected in the driving groove in a rotating mode, and the upper end of the screw rod is connected with a lifting motor. Further, the lifting plate is slidably connected in the driving groove and the limiting groove, the screw rod is in threaded connection with the lifting plate, and guide strips are arranged on two sides of the lifting plate. Further, the electric push rod is installed to the bottom of mounting panel, and the electric push rod outer end is connected with the movable plate to be connected with the guide bar between movable plate and the mounting panel. Further, a steering motor is installed at the bottom of the moving plate, a driving shaft is connected to the upper end of the steering motor, and a fixing plate is connected to the upper end of the driving shaft. Further, the detection probe is installed in the fixed plate, and the detection probe faces one side of the detection frame. Further, the upper end of measuring board is equipped with the damping pivot, and the limiting plate passes through the damping pivot and rotates with measuring board to measuring board one side outer wall is equipped with the scale mark. The utility model has the beneficial effects that: 1. The wafer box is conveniently placed on the upper side of the limit strips by utilizing the fixing frame and the limit strips which are included in the detection frame, at the moment, the wafer