CN-224203076-U - Operation platform for detecting quality of chip tube core at fixed point

CN224203076UCN 224203076 UCN224203076 UCN 224203076UCN-224203076-U

Abstract

The utility model discloses an operation platform capable of accurately moving a specified area of a chip edge to a position under a microscope to check the quality of a chip tube core, which comprises a chassis, a sliding rail, a bracket, a wafer carrying platform, a motor, a controller and the microscope, wherein the sliding rail is arranged on the chassis, the bracket is arranged in the sliding rail, the wafer carrying platform is horizontally arranged on the bracket, a bearing of the motor is fixedly connected with the center of the wafer carrying platform, the controller is electrically connected with the motor, a lens of the microscope is arranged right above the sliding rail, the controller is used for controlling the motor to drive the wafer carrying platform to rotate, when the bracket moves to a first position in the sliding rail along the sliding rail, the center of the wafer carrying platform is positioned right below the lens of the microscope, and when the bracket moves to a second position in the sliding rail along the sliding rail, a third position on the edge of the wafer carrying platform is positioned right below the lens of the microscope.

Inventors

Yu Dengheng
SUN BIN

Assignees

江苏新顺微电子股份有限公司

Dates

Publication Date: 20260505
Application Date: 20250509

Claims (6)

1. An operating platform for detecting the quality of a chip die at a fixed point, comprising: Chassis, slide rail, support, wafer bearing table, motor, controller and microscope; The sliding rail is arranged on the chassis, the support is arranged in the sliding rail, the wafer bearing table is horizontally arranged on the support, the bearing of the motor is fixedly connected with the center of the wafer bearing table, the controller is electrically connected with the motor, and the lens of the microscope is arranged right above the sliding rail; the controller is used for controlling the motor to drive the wafer carrying platform to rotate; When the support moves to a first position in the slide rail along the slide rail, the center of the wafer carrying platform is positioned right below the lens of the microscope, and when the support moves to a second position in the slide rail along the slide rail, a third position on the edge of the wafer carrying platform is positioned right below the lens of the microscope.
2. The operating platform for detecting the die quality of a chip at fixed points according to claim 1, wherein the slide rail is an L-shaped slide rail, the first position is located on an intersection point of two sides of the L-shaped slide rail, the second position is located at the tail end of a vertical side of the L-shaped slide rail, and a lens of the microscope is arranged right above the intersection point of two sides of the L-shaped slide rail.
3. The operating platform for detecting the die quality of the chip at fixed points according to claim 2, wherein the shape of the chip carrying platform is a circle, and the distance from the third position to the center of the chip carrying platform is equal to the length of the vertical edge of the L-shaped slide rail.
4. The manipulation stage for spot-detecting die quality of a chip of claim 1 wherein said support comprises an internally hollow cylinder, said motor and said controller being disposed within said internally hollow cylinder.
5. The operation platform for detecting the die quality of the chip at fixed points according to claim 1, wherein an operation button, a reset button and a stop button are arranged on the chassis, and the operation button, the reset button and the stop button are respectively connected with the controller: Each time the operation button is pressed, the controller controls the motor to rotate by a preset angle; when the reset button is pressed, the controller controls the motor to recover to an initial angle; When the stop button is pressed, the controller controls the motor to stop rotating.
6. The operation platform for detecting the quality of a chip die at fixed points according to claim 1, the support is characterized by comprising a telescopic column body.

Description

Operation platform for detecting quality of chip tube core at fixed point Technical Field The utility model relates to the technical field of semiconductors, in particular to an operation platform for detecting the quality of a chip tube core at fixed points. Background In the production process of the semiconductor chip, regional abnormality of the chip may occur due to problems of process matching, equipment and machine station difference, operation abnormality and the like. Timely finding anomalies and preventing and improving the anomalies is a key to ensuring the quality of products. The reliability of the device is critical to enabling process detection to effectively and accurately identify anomalies. The regional abnormality detection of the current chip mainly relies on manual operation of a detection platform by a worker to perform fixed-point detection on a specified region. However, the manual operation of the inspection platform to perform the fixed-point inspection cannot ensure that the specified area of the chip is accurately moved to the microscope for inspection, and particularly, the edge area of the chip is prone to abnormal omission. Disclosure of utility model The utility model aims to overcome the defects in the prior art and provide the operation platform which is simple to operate and can accurately move the specified area of the chip edge to a fixed point under a microscope for checking and detecting the quality of the chip die. In order to achieve the above object, the present utility model provides an operation platform for detecting the die quality of a chip at a fixed point, comprising: Chassis, slide rail, support, wafer bearing table, motor, controller and microscope; The sliding rail is arranged on the chassis, the support is arranged in the sliding rail, the wafer bearing table is horizontally arranged on the support, the bearing of the motor is fixedly connected with the center of the wafer bearing table, the controller is electrically connected with the motor, and the lens of the microscope is arranged right above the sliding rail; the controller is used for controlling the motor to drive the wafer carrying platform to rotate; When the support moves to a first position in the slide rail along the slide rail, the center of the wafer carrying platform is positioned right below the lens of the microscope, and when the support moves to a second position in the slide rail along the slide rail, a third position on the edge of the wafer carrying platform is positioned right below the lens of the microscope. Further, the sliding rail is an L-shaped sliding rail, the first position is located on the intersection point of two sides of the L-shaped sliding rail, the second position is located at the tail end of the vertical side of the L-shaped sliding rail, and the lens of the microscope is arranged right above the intersection point of two sides of the L-shaped sliding rail. Further, the shape of the piece bearing table is circular, and the distance from the third position to the center of the piece bearing table is equal to the length of the vertical edge of the L-shaped sliding rail. Further, the bracket comprises an inner hollow cylindrical body, and the motor and the controller are arranged in the inner hollow cylindrical body. Further, an operation button, a reset button and a stop button are arranged on the chassis, and the operation button, the reset button and the stop button are respectively connected with the controller: Each time the operation button is pressed, the controller controls the motor to rotate by a preset angle; when the reset button is pressed, the controller controls the motor to recover to an initial angle; When the stop button is pressed, the controller controls the motor to stop rotating. Further, the bracket comprises a telescopic column body. The utility model has the advantages that the operation is simple, the fixed positions of the center and the edge of the wafer carrying platform can be moved to the position right below the microscope through the limit of the slide rail, and the fixed positions of the edge of the wafer carrying platform can be converted to be arranged below the microscope through the rotation of the motor to drive the wafer carrying platform to rotate by a fixed angle, so that the specified areas of the center and the edge of the chip arranged on the wafer carrying platform are accurately positioned right below the microscope for inspection, and the problem that abnormal omission is caused because the specified areas of the chip on the wafer carrying platform cannot be accurately moved to the position right below the microscope due to manual operation is avoided. Drawings FIG. 1 is a side view of an operating platform for spot-detecting the quality of a chip die in accordance with the present utility model; Fig. 2 is a top view of fig. 1. In the figure, the detection positions are 1, a chassis, 2, a wafer carrying table, 3, a sli