CN-224203172-U - Water quality measuring device

CN224203172UCN 224203172 UCN224203172 UCN 224203172UCN-224203172-U

Abstract

The embodiment of the disclosure provides a water quality measurement device, which comprises a constant temperature water supply module, a first measurement assembly and a second measurement assembly, wherein the constant temperature water supply module is used for inputting liquid to be measured, controlling the liquid to be measured to keep constant temperature and outputting the liquid to be measured, the first measurement assembly and the second measurement assembly are communicated with the constant temperature water supply module, the first measurement assembly comprises an oxygen content measurement unit for measuring the oxygen content of the liquid to be measured output by the constant temperature water supply module, and the second measurement assembly comprises a conductivity measurement unit for measuring the conductivity of the liquid to be measured output by the constant temperature water supply module and a temperature measurement unit for measuring the temperature of the liquid to be measured output by the constant temperature water supply module. The water quality measuring device provided by the embodiment of the disclosure can measure a plurality of water quality indexes, and can avoid setting temperature measuring probes on the oxygen content measuring unit and the conductivity measuring unit, so that the structure is simplified, and the measuring efficiency is improved.

Inventors

HE MINGLIN
YIN ZIQING

Assignees

北方集成电路技术创新中心(北京)有限公司

Dates

Publication Date: 20260505
Application Date: 20250118

Claims (15)

1. A water quality measurement device, comprising: The constant temperature water supply module is used for inputting liquid to be measured, controlling the liquid to be measured to keep constant temperature and outputting the liquid to be measured; a first measurement assembly and a second measurement assembly in communication with the constant temperature water supply module; The first measuring component comprises an oxygen content measuring unit for measuring the oxygen content of the liquid to be measured, which is output by the constant-temperature water supply module, and the second measuring component comprises a conductivity measuring unit for measuring the conductivity of the liquid to be measured, which is output by the constant-temperature water supply module, and a temperature measuring unit for measuring the temperature of the liquid to be measured, which is output by the constant-temperature water supply module.
2. The water quality measuring apparatus of claim 1, wherein the first measuring assembly and the second measuring assembly are disposed on top of the constant temperature water supply module and are connected to different communication ports on top of the constant temperature water supply module.
3. The water quality measuring device according to claim 2, wherein the top of the constant temperature water supply module is provided with a first communication port and a second communication port; The first measuring assembly is communicated with the constant temperature water supply module through the first communication port, wherein the first communication port protrudes out of the top of the constant temperature water supply module and is inserted into the first measuring assembly to provide the liquid to be measured for the first measuring assembly; The second measuring assembly is communicated with the constant-temperature water supply module through the second communication port, wherein the second communication port protrudes out of the top of the constant-temperature water supply module and is inserted into the second measuring assembly to provide the liquid to be measured for the second measuring assembly.
4. A water quality measuring apparatus according to claim 3, wherein the first measuring assembly further comprises a measuring reservoir communicated with the first communication port and a measuring electrolyte tank located above the measuring reservoir, a first partition plate is arranged between the measuring reservoir and the measuring electrolyte tank, and a measuring film of the oxygen content measuring unit is arranged in the first partition plate, wherein gas in liquid to be measured in the measuring reservoir passes through the measuring film and enters the measuring electrolyte tank.
5. The water quality measurement device according to claim 4, wherein an exhaust unit, an oxygen content measurement probe of the oxygen content measurement unit and an oxygen content measurement sensor of the oxygen content measurement unit are arranged in the measurement electrolyte tank; The exhaust unit is used for exhausting bubbles of electrolyte in the measuring electrolyte tank, and the oxygen content measuring probe and the oxygen content measuring sensor are used for measuring the oxygen content of the liquid to be measured.
6. The water quality measuring apparatus according to claim 5, wherein a second partition is further provided in the measuring electrolyte tank, the exhaust unit penetrates through the second partition, and the oxygen content measuring probe is isolated from the oxygen content measuring sensor by the second partition.
7. The water quality measurement device of claim 5, wherein the conductivity measurement unit includes a conductivity measurement probe extending into the constant temperature feedwater module, a conductivity sensor coupled to the conductivity measurement probe; The temperature measuring unit comprises a temperature measuring probe extending into the constant temperature water supply module and a temperature sensor connected with the temperature measuring probe.
8. The water quality measurement device of claim 7, wherein the second measurement assembly further comprises a third diaphragm for carrying an electrolyte delivery unit, a conductivity measurement unit, and a temperature measurement unit; the electrolyte conveying unit is used for conveying and recycling electrolyte to the first measuring assembly, the conductivity sensor and the temperature sensor are arranged at the top of the third partition board, and the conductivity measuring probe and the temperature measuring probe are arranged at the bottom of the third partition board.
9. The water quality measuring apparatus according to claim 8, wherein the second measuring assembly further comprises a drain unit for draining the liquid to be measured out of the water quality measuring apparatus, the drain unit comprising a communication pipe communicating the measuring reservoir with the second measuring assembly, and a drain pipe penetrating the third partition to communicate the second measuring assembly with the outside of the water quality measuring apparatus.
10. The water quality measuring apparatus according to claim 9, wherein the electrolyte transporting unit comprises an electrolyte storage bottle fixedly connected with the third partition plate, a peristaltic pump communicated with the electrolyte storage bottle, and a valve communicated with the peristaltic pump; and the peristaltic pump is used for conveying electrolyte to the measuring electrolyte tank during forward operation and recovering the electrolyte from the measuring electrolyte tank during reverse operation, and the valve is used for controlling the flow of the electrolyte.
11. The water quality measurement device of claim 10, wherein a control circuit box for controlling the water quality measurement device is further provided on top of the third partition plate, and the control circuit box is electrically connected to at least the temperature sensor, the conductivity sensor, the oxygen content measurement sensor, and the peristaltic pump.
12. The water quality measuring device according to claim 11, wherein a water inlet communicated with the outside of the water quality measuring device is formed in one side of the constant temperature water supply module, and is used for inputting liquid to be tested into the constant temperature water supply module; And one side of the constant temperature water supply module provided with the water inlet is also provided with an air inlet which is communicated with the outside of the water quality measuring device and is used for providing clean gas for the water quality measuring device.
13. The water quality measuring apparatus of claim 12, further comprising a housing for receiving the constant temperature water supply module, the first measuring assembly, and the second measuring assembly, the housing having a housing water inlet opening in communication with the water inlet opening, a housing air inlet opening in communication with the air inlet opening, and a housing drain opening in communication with the drain pipe.
14. The water quality measuring apparatus of claim 13, wherein the housing is provided at a side thereof with a first door and a second door which are openable, and the second door is provided with a display screen for displaying water quality measuring parameters and keys for controlling the water quality measuring apparatus.
15. The water quality measuring apparatus according to claim 14, wherein the electrolyte is one of a potassium chloride solution, a sodium chloride solution, or a sodium sulfate solution, and the cleaning gas is one of nitrogen, helium, argon, or dry air.

Description

Water quality measuring device Technical Field The embodiment of the disclosure relates to the field of semiconductor manufacturing, in particular to a water quality measuring device. Background In some flushing links in the semiconductor production process, in order to avoid the influence of impurity ions on semiconductor products, highly purified ultrapure water is required to be used for flushing, so that the water quality of the ultrapure water is required to be measured, and the defect of products caused by water quality problems is avoided. Under the background, how to provide a measuring device for measuring multiple water quality indexes and simplify the structure of the measuring device is a technical problem that needs to be solved by those skilled in the art. Disclosure of utility model In order to solve the technical problems, an embodiment of the present disclosure provides a water quality measurement device. In a first aspect, embodiments of the present disclosure provide a water quality measurement device, comprising: The constant temperature water supply module is used for inputting liquid to be measured, controlling the liquid to be measured to keep constant temperature and outputting the liquid to be measured; a first measuring assembly and a second measuring assembly in communication with the constant temperature water supply module; The first measuring component comprises an oxygen content measuring unit for measuring the oxygen content of the liquid to be measured, which is output by the constant-temperature water supply module, and the second measuring component comprises a conductivity measuring unit for measuring the conductivity of the liquid to be measured, which is output by the constant-temperature water supply module, and a temperature measuring unit for measuring the temperature of the liquid to be measured, which is output by the constant-temperature water supply module. In a second aspect, embodiments of the present disclosure provide a semiconductor manufacturing system comprising a water quality measurement device as described in the first aspect. According to the water quality measuring device, the constant-temperature water supply module is used for controlling the temperature of liquid to be measured, which is supplied to the water quality measuring device, and conveying the liquid to be measured to the first measuring component and the second measuring component which are communicated with the constant-temperature water supply module, the oxygen content of the liquid to be measured is measured through the oxygen content measuring unit of the first measuring component, the conductivity and the temperature of the liquid to be measured are respectively measured through the conductivity measuring unit and the temperature measuring unit of the second measuring component, and the constant-temperature liquid to be measured is provided for the first measuring component and the second measuring component through the constant-temperature water supply module, so that a plurality of water quality indexes can be measured, a temperature probe does not need to be arranged on the measuring probe of the conductivity and the oxygen content, the structure of the water quality measuring device is simplified, a transmitter is not required to use a temperature compensation algorithm for calculation, and the measuring efficiency of the water quality measuring device is improved. Drawings In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is apparent that the drawings in the following description are only embodiments of the present disclosure, and other drawings may be obtained according to the provided drawings without inventive effort to those of ordinary skill in the art. Fig. 1 is a schematic view of a dissolved oxygen measuring apparatus. Fig. 2 is a schematic diagram of a conductivity measuring device. FIG. 3 is a graph of dissolved oxygen test results versus temperature. FIG. 4 is a graph of conductivity test results versus temperature. Fig. 5 is a schematic view of a water quality measurement device according to an embodiment of the present disclosure. Fig. 6 is a schematic diagram of a temperature measurement unit in a water quality measurement device according to an embodiment of the present disclosure. FIG. 7 is another schematic view of a water quality measuring device provided in an embodiment of the present disclosure. FIG. 8 is a schematic view of a water quality measuring device according to an embodiment of the present disclosure. Detailed Description As known from the background art, in some cleaning steps in the semiconductor production process, highly purified ultrapure water is required for rinsing in order to avoid the influence of impurity ions on the semiconductor