CN-224203220-U - Flat-bed scanning device and atomic force microscope scanning system

CN224203220UCN 224203220 UCN224203220 UCN 224203220UCN-224203220-U

Abstract

The application provides a flatbed scanning device and an atomic force microscope scanning system. The flatbed scanner comprises a flatbed scanner, wherein the flatbed scanner comprises a positioning platform body and a moving platform which are connected through a weak area, so that the moving platform can move relative to the positioning platform body. The two sides of the adapter plate are respectively provided with a flat-bed scanner, which is respectively marked as a first flat-bed scanner and a second flat-bed scanner, the moving platform of the first flat-bed scanner is connected with the adapter plate, and the positioning platform body of the second flat-bed scanner is connected with the adapter plate. The flatbed scanner is configured such that the motion stage of the first flatbed scanner drives the adapter plate to move horizontally with the second flatbed scanner along a first direction, and the motion stage of the second flatbed scanner can move horizontally along a second direction perpendicular to the first direction. In the technical scheme, the motion of the motion platform of the first flat-bed scanner and the motion of the motion platform of the second flat-bed scanner are mutually independent, so that parasitic motion can be reduced.

Inventors

CHEN ZHENYU
ZHANG XIAOLONG

Assignees

东莞泽攸科技有限公司
安徽泽攸科技有限公司

Dates

Publication Date: 20260505
Application Date: 20250515

Claims (10)

1. A flatbed scanning device comprising a flatbed scanner, the flatbed scanner comprising a positioning platform body and a moving platform connected by a weak area, such that the moving platform can move relative to the positioning platform body; The two sides of the adapter plate are respectively provided with one flat-bed scanner, which is respectively marked as a first flat-bed scanner and a second flat-bed scanner, the moving platform of the first flat-bed scanner is connected with the adapter plate, and the positioning platform body of the second flat-bed scanner is connected with the adapter plate; The flatbed scanner is configured such that the motion platform of the first flatbed scanner drives the adapter plate and the second flatbed scanner to move horizontally along a first direction, and the motion platform of the second flatbed scanner can move horizontally along a second direction perpendicular to the first direction.
2. The flat bed scanning device according to claim 1, wherein the positioning stage body is provided with a driving unit, an output end of the driving unit is in contact with the moving stage to drive the moving stage to move relative to the positioning stage body, and the output end acts on a middle portion of the moving stage in a thickness direction of the flat bed scanner.
3. The flatbed scanning device as recited in claim 2, wherein a mounting groove is provided on one side of the positioning platform body, a through hole facing the moving platform is provided at a bottom of the mounting groove, and the driving unit is provided in the mounting groove and the output end is connected to the moving platform through the through hole.
4. The flat bed scanning device according to claim 2, wherein a detection unit is further provided in the positioning platform body, a detection end of the detection unit abuts against a side of the moving platform away from the output end to detect a displacement amount of the moving platform, and the detection unit is in signal connection with the driving unit.
5. The flatbed scanner of claim 4, wherein a first through slot is provided on a side of the adapter plate facing the first flatbed scanner, the signal line of the detecting unit and/or the signal line of the driving unit in the first flatbed scanner are/is provided in the first through slot, a second through slot is provided on a side of the adapter plate facing the second flatbed scanner, and the signal line of the detecting unit and/or the signal line of the driving unit in the second flatbed scanner are/is provided in the second through slot.
6. The flatbed scanner of claim 2, wherein the driving unit comprises a displacement amplifying member and a piezoelectric ceramic, the output end is positioned on the displacement amplifying member, the displacement amplifying member is connected with a threaded fastener, the threaded fastener is configured to contact an end of the piezoelectric ceramic in an expansion direction during rotation; The driving unit is configured such that the piezoelectric ceramic expands such that the output end is close to or far from the motion platform.
7. The flatbed scanner of claim 1, wherein the flatbed scanner comprises a first side and a second side, the motion platform is provided with a first boss on the first side, the positioning platform body is provided with a second boss on the second side; The adapter plate is connected to the first boss of the first flat-panel scanner so that a gap is formed between the positioning platform body of the first flat-panel scanner and the weak area, and the second boss of the second flat-panel scanner is connected to the adapter plate so that a gap is formed between the moving platform of the second flat-panel scanner and the weak area.
8. The flatbed scanner of claim 2, wherein the weakened zone comprises two opposite U-shaped structures, the output end is located between the two U-shaped structures in a direction perpendicular to the motion of the motion platform, one end of the U-shaped structure is connected with the motion platform, the other end is connected with the positioning platform body, and the U-shaped structure is configured to deform when the motion platform moves relative to the positioning platform body.
9. The flatbed scanner of any one of claims 1-8, wherein the first flatbed scanner is structurally identical to the second flatbed scanner.
10. An atomic force microscope scanning system comprising a flatbed scanning device as claimed in any one of claims 1 to 9, the motion stage of the second flatbed scanner being connected to the sample stage.

Description

Flat-bed scanning device and atomic force microscope scanning system Technical Field The application relates to the field of atomic force microscopes, in particular to a flat-bed scanning device and an atomic force microscope scanning system. Background A flatbed scanner is one of the key parts in an atomic force microscope for moving a sample in the X-direction and the Y-direction within a horizontal plane to detect different positions of the sample. In the conventional flatbed scanner, the piezoelectric ceramics are connected in parallel. In a macro-micro workbench disclosed in CN207282156U, a first piezoelectric ceramic and a second piezoelectric ceramic are respectively disposed in a first groove 22 and a second groove 24, and the first piezoelectric ceramic and the second piezoelectric ceramic drive a movable table body 10 to move in an X direction and a Y direction in parallel. Because the first piezoelectric ceramic and the second piezoelectric ceramic are connected in parallel and act on the same movable platform body 10, parasitic movement in the Y direction may exist in the movable platform body 10 in the process of driving the movable platform body 10 to move in the X direction by the first piezoelectric ceramic, and similarly, parasitic movement in the X direction may exist in the movable platform body 10 in the process of driving the movable platform body 10 to move in the Y direction by the second piezoelectric ceramic, so that the detection result of a sample is inaccurate. Disclosure of utility model The application aims to provide a flat-bed scanning device and an atomic force microscope scanning system, so as to reduce parasitic movement. Embodiments of the present application are implemented as follows: In a first aspect, embodiments of the present application provide a flatbed scanner comprising a positioning platform body and a motion platform connected by a region of weakness, such that the motion platform is movable relative to the positioning platform body. The two sides of the adapter plate are respectively provided with the flat-bed scanner, the flat-bed scanner is respectively marked as a first flat-bed scanner and a second flat-bed scanner, a moving platform of the first flat-bed scanner is connected with the adapter plate, and a positioning platform body of the second flat-bed scanner is connected with the adapter plate. The flatbed scanner is configured such that the motion platform of the first flatbed scanner drives the adapter plate and the second flatbed scanner to move horizontally along a first direction, and the motion platform of the second flatbed scanner can move horizontally along a second direction perpendicular to the first direction. According to the technical scheme, the first flat-bed scanner and the second flat-bed scanner are respectively arranged on two sides of the adapter plate, and the motion of the motion platform of the first flat-bed scanner and the motion of the motion platform of the second flat-bed scanner are mutually independent, so that parasitic motion in the second direction is difficult to occur when the motion platform of the first flat-bed scanner moves horizontally along the first direction, and parasitic motion in the first direction is difficult to occur when the motion platform of the second flat-bed scanner moves horizontally along the second direction, and the detection result of a sample can be more accurate. In some alternative embodiments, the positioning platform body is provided with a driving unit, and an output end of the driving unit is in contact with the moving platform to drive the moving platform to move relative to the positioning platform body, wherein the output end acts on the middle part of the moving platform in the thickness direction of the flat bed scanner. In the technical scheme, the output end of the driving unit acts on the middle part of the motion platform in the thickness direction of the flat bed scanner, so that the tendency of deflection of the motion platform in motion can be reduced, and parasitic motion of the motion platform is further reduced. In some optional embodiments, a mounting groove is formed in one side of the positioning platform body, a through hole facing the moving platform is formed in the bottom of the mounting groove, and the driving unit is arranged in the mounting groove and the output end is connected with the moving platform through the through hole. In the technical scheme, the mounting groove is formed in one side of the positioning platform body, so that the driving unit can be conveniently mounted in the mounting groove, and the through hole at the bottom of the groove faces the moving platform, so that the output end of the driving unit can conveniently act on the middle part of the moving platform in the thickness direction of the flat-panel scanner, and parasitic movement of the moving platform in the thickness direction of the flat-panel scanner is reduced. In some optional