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CN-224203238-U - Probe card holder capable of being limited in middle

CN224203238UCN 224203238 UCN224203238 UCN 224203238UCN-224203238-U

Abstract

The utility model discloses a probe card holder capable of centering and limiting, which relates to the technical field of holders and comprises: the probe card comprises a fixing frame, a groove, a fixing seat and a probe card main body, wherein the groove is formed in the fixing frame, and the fixing seat is arranged on the outer side of the fixing frame. This but spacing probe card holder placed in middle can insert the probe card main part in two sets of recesses first for the probe card main part can peg graft to the grip block inboard, can carry out the corotation to the two-way threaded rod this moment, and when the two-way threaded rod rotated, can drive two sets of movable blocks and carry out the screw thread slip that is close to each other, the screw thread ring can be fixed the slipmat extrusion at fixed block top surface, thereby fix the position of T shape piece and fixing base, can fix the fixing base on test equipment mesa through the bolt this moment, accomplish the fixing to the holder, through adjusting the position of fixing base, make same size's holder can fix on different grade type test equipment, thereby improve the suitability of holder.

Inventors

  • XU LIQING
  • YIN XIAOHAN
  • LV ZHENGHONG

Assignees

  • 合肥盛源半导体有限公司

Dates

Publication Date
20260505
Application Date
20250430

Claims (7)

  1. 1. The probe card holder capable of being limited in the middle is characterized by comprising a holder (1), a groove (2), a fixing seat (3) and a probe card main body (4); The probe card comprises a fixing frame (1), a probe card main body (4) and a plurality of fixing seats (3), wherein the fixing frame (1) is internally provided with a groove (2), the fixing seat (3) is arranged on the outer side of the fixing frame (1), and the probe card main body (4) is arranged between the two fixing frames (1) together; The inner side of the groove (2) is connected with a sliding block (5) in a sliding mode, a compression spring (6) is connected inside the sliding block (5), one end of the compression spring (6) is connected with a clamping block (7), a rubber pad (8) is adhered to the inner wall of the clamping block (7), the top of the sliding block (5) is connected with a moving block (9), the tops of the two fixing frames (1) are connected with an installation seat (10) together, a bidirectional threaded rod (11) is connected inside the installation seat (10) through a bearing, and a limiting groove (12) is formed in the bottom, close to the moving block (9), of the installation seat (10).
  2. 2. A centrally located probe card holder according to claim 1, wherein the moving block (9) is threaded on the outside of a bi-directional threaded rod (11).
  3. 3. A centrally located probe card holder according to claim 2, wherein the movable block (9) and the holder (1) form a sliding structure therebetween.
  4. 4. The centrally-located probe card holder according to claim 1, wherein the holder (1) is connected with a fixing block (13) near the outer side of the fixing base (3).
  5. 5. A centrally located probe card holder as set forth in claim 4, wherein said fixed block (13) has guide grooves (14) formed therein.
  6. 6. A centrally located probe card holder as set forth in claim 4 wherein said mounting base (3) has a T-shaped block (15) attached to one side thereof adjacent said guide slot (14).
  7. 7. A centrally located probe card holder as set forth in claim 6 wherein said T-block (15) has a threaded post (16) attached to the top thereof.

Description

Probe card holder capable of being limited in middle Technical Field The utility model relates to the technical field of holders, in particular to a probe card holder capable of being limited in the middle. Background The probe card is a core consumable in semiconductor wafer testing, is mainly used for realizing the electric connection of a tester and a chip on a wafer, and is used for completing chip function and performance detection by transmitting test signals, and the probe card needs to be used to a holder in the using process, and can be fixed through the holder, so that the probe card is not easy to generate position offset in the using process. The probe card holder in the prior art is a special device for fixing and positioning the probe card, and has the core function of ensuring that the probe card keeps stable contact in the wafer test process, while the traditional holder is used for fixing and limiting the probe card by using bolts, so that the fixing and limiting mode is more troublesome, and the efficiency of the probe card in the wafer test process is lower. Disclosure of utility model The utility model aims to provide a probe card holder capable of centering and limiting, so as to solve the problem that the probe card holder provided by the background art is troublesome to fix and limit. The probe card holder comprises a holder, grooves, fixing seats and a probe card main body, wherein the grooves are formed in the holder, the fixing seats are arranged on the outer sides of the holder, the probe card main body is jointly arranged between the two holders, the sliding blocks are connected to the inner sides of the grooves in a sliding mode, compression springs are connected to the inner sides of the sliding blocks, clamping blocks are connected to one ends of the compression springs, rubber pads are bonded to the inner walls of the clamping blocks, moving blocks are connected to the tops of the sliding blocks, mounting seats are jointly connected to the tops of the two holders, bidirectional threaded rods are connected to the inner sides of the mounting seats through bearings, and limiting grooves are formed in the bottoms, close to the moving blocks, of the mounting seats. Preferably, the moving block is in threaded connection with the outer side of the bidirectional threaded rod. Preferably, a sliding structure is formed between the moving block and the fixing frame. Preferably, the fixing frame is connected with a fixing block near the outer side of the fixing seat, and a guide groove is formed in the fixing block. Preferably, one side of the fixing seat, which is close to the guide groove, is connected with a T-shaped block, and the top of the T-shaped block is connected with a threaded column. Preferably, the outside threaded connection of screw thread post has the screwed ring, the bottom of screwed ring bonds and has the slipmat, constitute sliding construction between screw thread post and the fixed block. Compared with the prior art, the utility model has the beneficial effects that: 1. Compression spring and rubber pad can play certain cushioning effect for the grip block is fixed the probe card main part when carrying out the centre gripping, and the probe card main part outside is difficult for taking place to damage, and it is spacing to carry out the centre gripping to the probe card main part that can be simple convenient through the grip block, thereby helps improving the wafer test efficiency of probe card main part, and the probe card main part is fixed between two sets of holder in the middle. 2. The screw thread ring can be fixed the slipmat extrusion at fixed block top surface to fix the position of T shape piece and fixing base, through the position of adjusting the fixing base, make same size's holder can fix on different grade type test equipment, thereby improve the suitability of holder. Drawings FIG. 1 is a schematic perspective view of the present utility model; FIG. 2 is a schematic perspective view of a holder according to the present utility model; FIG. 3 is a schematic view of a slider of the present utility model in perspective cut-away; FIG. 4 is a schematic view of a three-dimensional cutaway structure of the mounting base of the present utility model; fig. 5 is a schematic view showing a three-dimensional cutaway structure of the fixing block of the present utility model. The device comprises a fixing frame 1, a groove 2, a fixed seat 3, a probe card main body 4, a sliding block 5, a compression spring 6, a clamping block 7, a rubber pad 8, a moving block 9, a mounting seat 10, a mounting seat 11, a bidirectional threaded rod 12, a limiting groove 13, a fixed block 14, a guide groove 15, a T-shaped block 16, a threaded column 17, a threaded ring 18 and an anti-skid pad. Detailed Description The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it