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CN-224203243-U - Test fixture

CN224203243UCN 224203243 UCN224203243 UCN 224203243UCN-224203243-U

Abstract

The utility model discloses a test tool, which belongs to the technical field of semiconductor test equipment and is technically characterized by comprising a vacuum cavity, a friction force test assembly, a bearing table assembly and a test material, wherein the friction force test assembly comprises a second servo vertical linear lifting mechanism, a second spring, a second force transducer, a connecting piece, a lifting pulley assembly and a connecting wire, a second guide rod of the second servo vertical linear lifting mechanism stretches into the vacuum cavity, the second guide rod, the second spring, the second force transducer and the connecting piece are sequentially connected from top to bottom, the lifting pulley assembly is arranged below the connecting piece, and the bearing table assembly is used for placing the test material. The utility model aims to provide a test fixture which can measure static friction force between different materials.

Inventors

  • GAO YINGJIE
  • LIU JIDONG

Assignees

  • 苏州中科科美科技有限公司

Dates

Publication Date
20260505
Application Date
20250508

Claims (5)

  1. 1. A test fixture, its characterized in that includes: a vacuum chamber; The friction force testing assembly comprises a second servo vertical linear lifting mechanism, a second spring, a second force transducer, a connecting piece, a lifting pulley assembly and a connecting wire, wherein a second guide rod of the second servo vertical linear lifting mechanism stretches into the vacuum cavity, the second guide rod, the second spring, the second force transducer and the connecting piece are sequentially connected from top to bottom, and the lifting pulley assembly is arranged below the connecting piece; a carrier assembly for placing a test material.
  2. 2. The test fixture of claim 1, wherein the liftable pulley assembly comprises a lifting power assembly, two lug plates and a pulley, one end of each lug plate is connected with the lifting power assembly, and the pulley is rotatably connected with the other end of each lug plate through a rotating shaft.
  3. 3. The test fixture of claim 1, wherein the electrostatic force test assembly comprises a first servo vertical linear lifting mechanism, a first spring, a first force transducer and a universal joint, wherein a first guide rod of the first servo vertical linear lifting mechanism extends into the vacuum cavity, and the first guide rod, the first spring, the first force transducer and the universal joint are sequentially connected from top to bottom.
  4. 4. A test fixture as claimed in claim 3, wherein the first and second servo vertical linear elevating mechanisms are identical in construction.
  5. 5. The test fixture according to claim 3 or 4, wherein the first servo vertical linear lifting mechanism comprises a vertical plate, a horizontal lifting plate, a lifting driving assembly, a first guide rod and a corrugated pipe, wherein the vertical plate is arranged at the top of the vacuum cavity, the lifting driving assembly is arranged on the vertical plate and can drive the horizontal lifting plate to move up and down, the first guide rod is fixedly arranged on the lower side surface of the horizontal lifting plate, the corrugated pipe is arranged between the lower side surface of the horizontal lifting plate and the vacuum cavity, and the first guide rod is arranged inside the corrugated pipe.

Description

Test fixture Technical Field The utility model relates to the technical field of semiconductor test equipment, in particular to a test fixture. Background Electrostatic force testing is an important test indicator in the fields of semiconductors, integrated circuits, and the like. Currently, electrostatic force testing is focused mainly on testing electrostatic forces when two components are vertically far apart from each other. Such as: Document 1, CN2807475Y. Which is used to test the electrostatic force between the wafer and the electrostatic chuck. The power device is connected with the wafer, and the electrostatic chuck is fixed on the vacuum cavity. The power device is used for lifting the wafer and testing the electrostatic force between the wafer and the electrostatic chuck through the dynamometer. Document 2 CN103376176B. A ranging sensor was added to CN2807475Y, which was used to test the relationship between the gap amount between the wafer and the electrostatic chuck and the electrostatic force. In addition to electrostatic forces, horizontal friction is an important test item in semiconductor materials. The prior art lacks a test fixture for detecting horizontal friction force (static friction force). Disclosure of utility model The utility model aims to provide a test tool aiming at the defects of the prior art. The technical scheme of the utility model is as follows: A test fixture, comprising: a vacuum chamber; The friction force testing assembly comprises a second servo vertical linear lifting mechanism, a second spring, a second force transducer, a connecting piece, a lifting pulley assembly and a connecting wire, wherein a second guide rod of the second servo vertical linear lifting mechanism stretches into the vacuum cavity, the second guide rod, the second spring, the second force transducer and the connecting piece are sequentially connected from top to bottom, and the lifting pulley assembly is arranged below the connecting piece; a carrier assembly for placing a test material. Further, the liftable pulley assembly comprises a lifting power assembly, two lug plates and a pulley, wherein one end of each lug plate is connected with the lifting power assembly, and the pulley is rotationally connected with the other end of each lug plate through a rotating shaft. The electrostatic force testing assembly further comprises a first servo vertical linear lifting mechanism, a first spring, a first force transducer and a universal joint, wherein a first guide rod of the first servo vertical linear lifting mechanism stretches into the vacuum cavity, and the first guide rod, the first spring, the first force transducer and the universal joint are sequentially connected from top to bottom. Further, the first servo vertical linear elevating mechanism and the second servo vertical linear elevating mechanism are identical in construction. The first servo vertical linear lifting mechanism comprises a vertical plate, a horizontal lifting plate, a lifting driving assembly, a first guide rod and a corrugated pipe, wherein the vertical plate is arranged at the top of the vacuum cavity, the lifting driving assembly is arranged on the vertical plate and can drive the horizontal lifting plate to move up and down, the first guide rod is fixedly arranged on the lower side face of the horizontal lifting plate, the corrugated pipe is arranged between the lower side face of the horizontal lifting plate and the vacuum cavity, and the first guide rod is arranged in the corrugated pipe. The application has the beneficial effects that: (1) The application provides a testing tool which comprises a second servo vertical linear lifting mechanism, a second spring, a second force transducer, a connecting piece, a lifting pulley assembly and a connecting wire, wherein a second guide rod of the second servo vertical linear lifting mechanism stretches into a vacuum cavity, the second guide rod, the second spring, the second force transducer and the connecting piece are sequentially connected from top to bottom, and the lifting pulley assembly is arranged below the connecting piece, so that the static friction force between a first material part (such as a wafer) and a second material part (such as an electrostatic chuck) is tested. (2) The testing tool is provided with the friction force testing component and the electrostatic force testing component at the same time, and can integrate the electrostatic force and the horizontal friction force into the same testing tool. Drawings The utility model is described in further detail below in connection with the embodiments in the drawings, but is not to be construed as limiting the utility model in any way. Fig. 1 is a three-dimensional structure diagram of a test fixture according to the first embodiment. Fig. 2 is a three-dimensional structural diagram of a test fixture according to the first embodiment under another view angle. Fig. 3 is a three-dimensional structural diagram o