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CN-224203272-U - Modularized probe station

CN224203272UCN 224203272 UCN224203272 UCN 224203272UCN-224203272-U

Abstract

The application discloses a modularized probe station, which relates to the technical field of measuring equipment, and is characterized in that a vacuum corrugated pipe is arranged between an upper cover and a basic container of a detection container of the modularized probe station, so that the upper cover can flexibly move according to requirements on the premise of not disassembling the upper cover, a container poking component for pushing a bearing container in the detection container to transversely move according to requirements is arranged on the upper cover, a part capable of accommodating a stack of bearing containers and driving the whole stack of bearing containers to lift is arranged at the bottom of the detection container, after single sample detection, the detection of other samples can be continued without waiting for the temperature return of the equipment, and the detection of the other samples can be realized by only pushing the bearing container carrying the detected samples away from the center of the detection container.

Inventors

  • ZHANG ZHONGDA
  • WANG SUIDONG

Assignees

  • 苏州大学

Dates

Publication Date
20260505
Application Date
20260407

Claims (10)

  1. 1. A modularized probe station comprises a supporting carrier (100), a detection container (200) and a probe manipulator (300), and is characterized in that: The detection container (200) comprises a base container (210), a vacuum corrugated pipe (220), an upper cover (230), an upper cover fixing rack rod (240) for fixing the upper cover (230), a bearing container (250), a container storage pipe (260), a lifting and lifting module (270) and a container stirring assembly; the base container (210) is a cylindrical container with an opening at the top, and a bottom hole (211) is formed at the bottom; the vacuum bellows (220) is vertically arranged, and the bottom end of the vacuum bellows is fixed at the edge of the top opening of the base container (210); The upper cover (230) is a transversely-arranged hard plate body, an observation window (231) is arranged near the center, and the bottom of the upper cover is detachably fixed at the top of the vacuum bellows (220) near the edge; the bearing container (250) is used for bearing samples to be detected, the number of the bearing containers is a plurality of cylindrical containers which are open at the top and are vertically arranged, and the diameter of the bearing containers is smaller than one third of the diameter of the inner bottom of the base container (210); The container storage tube (260) is vertically arranged, the bottom end of the container storage tube is closed, and the container storage tube is inserted into and fixed in the bottom hole (211); The lifting and lifting module (270) is of a vertically arranged telescopic rod structure and is used for pushing the bearing container (250) to move up and down; The container poking assembly is used for poking the bearing container (250) positioned at the topmost part in the basic container (210) as required so as to expose other bearing containers (250), and the main body is a hard rod positioned on the upper cover (230).
  2. 2. The modular probe station of claim 1, wherein the interior space of the carrier container (250) has a diameter that is greater than 5 times the height of the interior space, and wherein the distance between the edges of the top surface of the carrier container (250) is greater than 0.6 times the height of the interior space.
  3. 3. The modular probe station of claim 1, wherein the side wall of the container storage tube (260) near the top is fixed on the side wall of the bottom hole (211) of the base container (210), and the top surface of the container storage tube (260) is flat and has the same height as the inner bottom of the base container (210); The inner diameter of the container storage tube (260) is similar to the diameter of the carrying container (250) by less than 0.5 cm.
  4. 4. The modular probe station of claim 1, wherein the container toggle assembly comprises a handle lever (281), a float lever (283), a built-in compression spring (284), and a toggle lever (285); the handle rod (281) is a hard straight rod and is fixed on the upper cover (230) at a position close to the observation window (231); The bottom of the handle rod (281) is provided with a bottom cavity (282), and the handle rod (281) is a hard pipe body with a closed top end as a whole due to the existence of the bottom cavity (282); The floating rod (283) is a hard straight rod and is inserted into and slidingly positioned in the bottom cavity (282) of the handle rod (281); The built-in pressure spring (284) is a hard metal pressure spring, is positioned in the bottom cavity (282), one end of the built-in pressure spring is fixed in the handle rod (281), the other end of the built-in pressure spring is fixed at the top of the floating rod (283), and the built-in pressure spring (284) accumulates elastic potential energy when the floating rod (283) moves upwards; The poking rod (285) is a horizontally arranged hard rod body, the top of the poking rod is hinged to the bottom of the floating rod (283) near the center, the bottom always abuts against the inner bottom of the base container (210), and the length direction of the poking rod is the same as the radial direction of the container storage tube (260) and is perpendicular to the length direction of the floating rod (283).
  5. 5. The modular probe station of claim 4, wherein the handle bar (281) has a length perpendicular to the top surface of the upper cover (230).
  6. 6. The modular probe station of claim 4, wherein the angle between the length of the handle bar (281) and the top surface of the upper cover (230) is 70 to 90 degrees.
  7. 7. The modular probe station of claim 1, wherein the inner bottom of the container storage tube (260) is further removably positioned with a rotation module (271); The rotating module (271) is a horizontally arranged rotating disc, and is a manual rotating disc or an automatic rotating disc which rotates around the axis of the rotating module; the bottom of the lifting and lowering module (270) is detachably fixed on the top of the rotating module (271).
  8. 8. The modular probe station of claim 4, wherein the bottom of the toggle lever (285) is further provided with two interference blocks (286); The abutting blocks (286) are hard rectangular blocks or vertically arranged hard columns, and the two abutting blocks (286) are arranged close to the two ends of the toggle rod (285); the height of the abutting blocks (286) is larger than that of the bearing container (250), the distance between the abutting blocks (286) is larger than that of the bottom surface of the bearing container (250), and the radius of the bottom surface of the bearing container (250) is smaller than that of the bottom surface of the bearing container (250); When the bearing container (250) is pushed, the side surfaces or the side edges of the two contact blocks (286) are simultaneously contacted with the side walls of the bearing container (250).
  9. 9. The modular probe station of claim 1 or 8, further comprising a container deposit module (290); The inner side wall of the container storage pipe (260) is provided with a guide groove (261) for allowing a vertical guide rod (291) of the container storage module (290) to pass through, and the guide groove (261) is a straight groove; The container storing module (290) is used for storing and containing the bearing containers (250) loaded with the detected samples, the bottom of the container storing module is detachably fixed at the top of the lifting module (270), and the top of the container storing module is used for bearing the piled bearing containers (250); The container storing module (290) comprises two vertical guide rods (291), a top support plate (292) and a plurality of storage support plates (293); The number of the vertical guide rods (291) is two, and the vertical guide rods are respectively inserted into and slidably positioned in the two guide grooves (261); The top support plate (292) is a horizontally arranged hard circular plate, is fixed between two vertically arranged guide rods (291) and has the top surface equal to the top end of the vertically arranged guide rods (291) in height and is used for bearing and supporting the bearing containers (250) in a pile; The storage supporting plate (293) is a horizontally arranged hard circular plate, is fixed between two vertically arranged guide rods (291) and is positioned at the bottom of the top supporting plate (292) and is arranged in a row; When the upper cover (230) is lifted to the limit position, the built-in pressure spring (284) is in a stretching state, the bottom of the abutting block (286) is separated from the inner bottom of the base container (210) and is greater than the height of the bearing container (250) from the inner bottom of the base container (210).
  10. 10. The modular probe station of claim 9, wherein the bottom edge of the carrier container (250) is chamfered; The top surface of the storage pallet (293) is provided with pits that match the bottom surface and bottom surface chamfer of the carrying container (250).

Description

Modularized probe station Technical Field The utility model relates to the technical field of measuring equipment, in particular to a modularized probe station. Background In the technical fields of in-situ analysis, quantum optics, quantum transportation, superconducting material research and other new generation information of semiconductor devices, nanoscale manipulation and characterization of materials and devices are often required under low temperature and/or vacuum environments, and a currently mainstream test system is a characterization system of a probe station combined with an optical microscope. In the prior art, the probe platform comprises a supporting carrier, a detection container (the detection container is also called as a sample platform, a sample platform and a detection cavity), a probe manipulator, a camera shooting assembly, a refrigerating system and a vacuum assembly, wherein the detection container is positioned on the supporting carrier to form a sealed cavity to hold a sample to be detected, a plurality of probes are carried by the probe manipulator to collide with the sample, and when the probe platform is used, the vacuum assembly and the refrigerating system are utilized to carry out vacuumizing and refrigerating (the vacuum pumping is utilized to absorb heat by utilizing liquid helium so as to realize the cooling of the sample), so that the measurement and detection requirements are realized. The probe station in the prior art has the following defects because of being limited by the structure, manufacturing and using costs and being capable of meeting the requirements of temperature control: the detection container can only hold one sample at a time for detection, and after each detection, the upper cover is opened to take out the sample and put in a new sample for continuous treatment after the equipment is heated back, so that the treatment efficiency is low and more energy sources can be wasted. Therefore, there is a need for a modular probe station that can handle multiple samples without opening the cover, without waiting for the equipment to return to temperature, with higher detection efficiency and with relatively less energy consumption. Disclosure of utility model The embodiment of the application solves the technical problems that in the prior art, the probe station can only hold one sample at a time for detection, the upper cover can be opened to take out and put in a new sample for continuous treatment only by waiting for the equipment to return to temperature after each detection, the efficiency is low and the energy consumption is serious, and realizes the technical effects that the modularized probe station can treat a plurality of samples without opening the upper cover, the equipment does not need to wait for the equipment to return to temperature, the detection efficiency is high and the energy consumption is relatively low. The embodiment of the application provides a modularized probe station, which comprises a supporting carrier, a detection container and a probe manipulator, wherein the supporting carrier is arranged on the detection container; The detection container comprises a basic container, a vacuum corrugated pipe, an upper cover fixing rack rod for fixing the upper cover, a bearing container, a container storage pipe, a lifting module and a container stirring assembly; The base container is a cylindrical container with an opening at the top, and a bottom hole is formed in the bottom; The vacuum bellows is vertically arranged, and the bottom end of the vacuum bellows is fixed at the edge of the top opening of the basic container; The upper cover is a transversely arranged hard plate body, an observation window is arranged near the center of the upper cover, and the bottom of the upper cover is detachably fixed at the top of the vacuum corrugated pipe near the edge of the upper cover; The bearing containers are used for bearing samples to be detected, the number of the bearing containers is a plurality of cylindrical containers which are open at the top and are vertically arranged, and the diameter of the bearing containers is smaller than one third of the diameter of the inner bottom of the base container; The container storage tube is vertically arranged, the bottom end of the container storage tube is closed, and the container storage tube is inserted into and fixed in the bottom hole; the lifting and lifting module is of a vertically arranged telescopic rod structure and is used for pushing the bearing container to move up and down; The container stirring assembly is used for stirring the bearing container positioned at the topmost part in the basic container according to the requirement so as to expose other bearing containers, and the main body is a hard rod positioned on the upper cover. Further, the diameter of the inner space of the bearing container is more than 5 times of the height of the inner space, and the distance between the two