CN-224203302-U - Resistivity detection mechanism and processing equipment

CN224203302UCN 224203302 UCN224203302 UCN 224203302UCN-224203302-U

Abstract

The application relates to a resistivity detection mechanism and processing equipment, wherein the resistivity detection mechanism comprises a carrier for carrying a workpiece, a resistivity detection component and a moving platform, wherein the resistivity detection component is positioned on one side of the carrier, and the moving platform can adjust the relative positions of the carrier and the resistivity detection component in at least one direction of the horizontal direction and the height direction perpendicular to the horizontal direction of the resistivity detection mechanism so as to enable the carrier and the resistivity detection component to be relatively close to or far away from each other along at least one direction of the horizontal direction and the height direction of the resistivity detection mechanism. The resistivity detection mechanism effectively improves the problem that work efficiency is low because the workpiece is required to be manually moved for many times in the detection process, and ensures the accuracy and the movement efficiency of the workpiece moving process while improving the stability of the workpiece moving process, thereby meeting the detection requirement of a large number of workpieces in the workpiece processing process and further meeting the higher requirement of the workpiece processing process.

Inventors

WANG BO
LIU SHENG
WENG MINGJIE
WU LIJIE
WANG FANFAN
Han Zijuan
YIN JIANGANG

Assignees

深圳市大族半导体装备科技有限公司

Dates

Publication Date: 20260505
Application Date: 20250324

Claims (10)

1. A resistivity detection mechanism, comprising: A carrier for carrying the workpiece; The resistivity detection component is positioned on one side of the carrier; The motion platform can adjust the relative positions of the carrier and the resistivity detection component in at least one of the horizontal direction and the height direction of the resistivity detection mechanism so as to enable the carrier and the resistivity detection component to be relatively close to or far away from each other along the at least one of the horizontal direction and the height direction of the resistivity detection mechanism; the height direction is perpendicular to the horizontal direction.
2. The resistivity detection mechanism of claim 1, the resistivity detection mechanism is characterized by further comprising: and the rotating unit is connected with the carrying platform so as to drive the carrying platform to rotate.
3. The resistivity detection mechanism of claim 2, wherein the motion stage is capable of adjusting a relative position of the stage and the resistivity detection assembly in the horizontal direction.
4. The resistivity detection mechanism of claim 1, wherein the motion stage includes a lateral axis motion stage, a longitudinal axis motion stage, and a vertical axis motion stage; The horizontal direction includes a length direction and a width direction; The transverse axis motion platform can adjust the relative positions of the carrier and the resistivity detection assembly in the length direction; the longitudinal axis moving platform can adjust the relative positions of the carrying platform and the resistivity detection component in the width direction; The vertical axis motion platform can adjust the relative positions of the carrying platform and the resistivity detection assembly in the height direction.
5. The resistivity detection mechanism of claim 1, wherein the resistivity detection assembly includes a resistivity detection member and a first connection member, the resistivity detection member being connected to the motion stage by the first connection member.
6. The resistivity detection mechanism of claim 5, further comprising a first mounting member, wherein the resistivity detection member is disposed on the first mounting member, wherein a first through hole is disposed in an end surface of the first mounting member adjacent to the motion stage, and wherein the first connector is connected to the motion stage through the first through hole.
7. The resistivity detection mechanism of claim 1, wherein the motion platform includes a lateral motion platform, a longitudinal motion platform, and a vertical motion platform, the lateral motion platform including a lateral driver, a lateral movable member, and a lateral rail, an output of the lateral driver being coupled to the lateral movable member, the lateral movable member being coupled to the longitudinal motion platform or the vertical motion platform, a bottom of the lateral movable member being slidably coupled to the lateral rail.
8. The resistivity testing mechanism of claim 7, wherein the longitudinal motion stage includes a longitudinal driver, a longitudinal movable member, and a longitudinal rail, an output of the longitudinal driver being coupled to the longitudinal movable member, the longitudinal movable member being coupled to the lateral or vertical motion stages, a bottom of the longitudinal movable member being slidably coupled to the longitudinal rail.
9. The resistivity testing mechanism of claim 7, wherein the vertical axis motion platform includes a vertical axis driver, a vertical axis movable member, and a vertical axis slide rail, wherein an output end of the vertical axis driver is connected to the vertical axis movable member, the vertical axis movable member is connected to the horizontal axis motion platform or the vertical axis motion platform, and a bottom of the vertical axis movable member is slidably connected to the vertical axis slide rail.
10. A processing apparatus, comprising: A resistivity sensing mechanism according to any one of claims 1 to 9.

Description

Resistivity detection mechanism and processing equipment Technical Field The application relates to the technical field of laser processing, in particular to a resistivity detection mechanism and processing equipment. Background Along with continuous progress of laser processing technology and continuous diversification of application scenes of laser processing products, requirements on laser processing processes are higher and higher. In the laser modification processing of the workpiece, the resistivity values of the surfaces of the workpiece are different due to the non-uniformity of the internal characteristics of each workpiece, if the resistivity detection is not performed before the workpiece is processed, the internal modification processing is directly performed on the workpiece by using high-power wattage laser, the processing trace on the surface of a separated workpiece piece is heavy, the depth of the required thinning is deepened, the thickness of the workpiece is influenced, and if the internal modification processing is performed on the workpiece by using low-power wattage laser, the workpiece processing is incomplete and the risk of stripping and slicing cannot be performed, so that the detection of the resistivity of the workpiece is necessary before the laser modification processing is performed on the workpiece. In the related art, the resistance values of a plurality of points of a workpiece are required to be detected, the workpiece is required to be manually moved for a plurality of times in the detection process, the working efficiency is low in the manual movement process, and the detection requirement of a large number of workpieces is difficult to meet. Disclosure of utility model In view of the above, it is necessary to provide a resistivity detection mechanism and a processing apparatus. A resistivity detection mechanism, comprising: A carrier for carrying the workpiece; The resistivity detection component is positioned on one side of the carrier; The motion platform can adjust the relative positions of the carrier and the resistivity detection component in at least one of the horizontal direction and the height direction of the resistivity detection mechanism so as to enable the carrier and the resistivity detection component to be relatively close to or far away from each other along the at least one of the horizontal direction and the height direction of the resistivity detection mechanism; the height direction is perpendicular to the horizontal direction. In one embodiment, the resistivity detection mechanism further includes: and the rotating unit is connected with the carrying platform so as to drive the carrying platform to rotate. In one embodiment, the motion stage is capable of adjusting the relative position of the stage and the resistivity detection assembly in the horizontal direction. In one embodiment, the motion platform comprises a horizontal axis motion platform, a vertical axis motion platform and a vertical axis motion platform; The horizontal direction includes a length direction and a width direction; The transverse axis motion platform can adjust the relative positions of the carrier and the resistivity detection assembly in the length direction; the longitudinal axis moving platform can adjust the relative positions of the carrying platform and the resistivity detection component in the width direction; The vertical axis motion platform can adjust the relative positions of the carrying platform and the resistivity detection assembly in the height direction. In one embodiment, the resistivity detection assembly includes a resistivity detection member and a first connection member through which the resistivity detection member is connected to the motion stage. In one embodiment, the resistivity detection assembly further comprises a first mounting component, the resistivity detection component is arranged on the first mounting component, a first through hole is formed in the end face, close to the motion platform, of the first mounting component, and the first connecting component penetrates through the first through hole to be connected to the motion platform. In one embodiment, the motion platform comprises a transverse motion platform, a longitudinal motion platform and a vertical motion platform, the transverse motion platform comprises a transverse driver, a transverse movable part and a transverse sliding rail, the output end of the transverse driver is connected with the transverse movable part, the transverse movable part is connected with the longitudinal motion platform or the vertical motion platform, and the bottom of the transverse movable part is connected with the transverse sliding rail in a sliding manner. In one embodiment, the vertical axis moving platform comprises a vertical axis driver, a vertical axis moving part and a vertical axis sliding rail, wherein the output end of the vertical axis driver is connected with the vertical axis mo