CN-224203327-U - Electronic testing device

CN224203327UCN 224203327 UCN224203327 UCN 224203327UCN-224203327-U

Abstract

An electronic testing device comprises a testing table, a circuit carrier, a ring-shaped elastic structure, a probe module and a gas channel group. The circuit carrier board is loaded and electrically connected with an object to be lateral. The annular elastic structure is clamped between the test bench and the circuit carrier plate, so that the inner space of the annular elastic structure is sealed between the test bench and the circuit carrier plate. The probe module is positioned on the test bench, partially extends into the inner space and is connected with the circuit carrier plate. The air passage group is positioned on the test bench and communicated with the inner space. When the inner space is vacuumized through the air passage group, and the circuit carrier plate is driven to compress the annular elastic structure and the inner space towards the test bench, the circuit carrier plate is pressed and electrically connected with the probe module, so that the detection carrier plate can be accurately and flatly vertically lowered, the alignment of the probe head and the conductive contact of the detection carrier plate is accurately completed, and the accuracy of the test performance is improved.

Inventors

ZHENG BAIKAI
TAO SUZHEN

Assignees

智昇芯测半导体(上海)有限公司

Dates

Publication Date: 20260505
Application Date: 20250430
Priority Date: 20240812

Claims (10)

1. An electronic testing device, comprising: A test bench; a circuit carrier including a plurality of contacts; The annular elastic structure is clamped between the test bench and the circuit carrier plate, so that an inner space surrounded by the annular elastic structure is sealed between the test bench and the circuit carrier plate; At least one probe module located on the test bench and partially extending into the interior space, the probe module comprising a plurality of compression probes aligned with the plurality of contacts, respectively, and The air passage group is positioned on the test bench and communicated with the inner space.
2. The electronic testing device of claim 1, wherein the annular elastic structure comprises: the intermediate plate is arranged between the test bench and the circuit carrier plate and is positioned in the internal space; An elastic airtight ring surrounding the internal space and fixedly connected with the intermediate plate and clamped between the test board and the circuit carrier plate so that the circuit carrier plate, the intermediate plate and the elastic airtight ring jointly define a first air gap, the test board and the intermediate plate jointly define at least one second air gap, and the second air gap is communicated with the air passage set, and The vacuum channels are distributed on the intermediate plate and are respectively communicated with the first air gap and the second air gap.
3. The electronic testing device of claim 2, wherein the first air gap is larger than the second air gap.
4. The electronic test device of claim 2, wherein the plurality of vacuum channels are spaced around the probe module.
5. The electronic testing device of claim 2, wherein the outer side of the interposer is directly connected to the inner side of the elastic airtight ring and is interposed between the upper side and the lower side of the elastic airtight ring, The upper side of the inner side wall is removably contacted with the circuit carrier board, and the lower side of the inner side wall is fixedly contacted with the test board.
6. The electronic test device of claim 2, wherein the test platform comprises at least one placement opening into which the probe module is inserted, and The probe module is further provided with an airtight sleeve ring which is sleeved on the outer surface of the probe module in a surrounding manner and is clamped between the probe module and the test bench so as to block the communication between the second air gap and the placement opening.
7. The electronic testing device of claim 6, wherein the annular elastic structure comprises: at least one through hole is penetrated on the medium plate, connected with the two opposite surfaces of the medium plate and aligned with the placing opening, wherein the probe module is simultaneously inserted in the through hole and the placing opening.
8. The electronic testing device of claim 7, wherein a side of the interposer opposite the circuit carrier has an outer flange and at least one annular flange, an outer side of the interposer is connected to the outer flange, and the annular flange surrounds along a contour of the through hole, wherein the second air gap is formed between the outer flange and the annular flange.
9. The electronic test device of claim 2, wherein the probe module comprises a module body, the plurality of compression probes are respectively arranged on the end face of the module body in a pressing manner, and The circuit carrier board comprises a wiring board which is placed on the elastic airtight ring, and the plurality of contacts are distributed on the bottom surface of the wiring board.
10. The electronic test device of claim 9, wherein each of the plurality of compression probes has a compression stroke having a length that is the same as a height of the first air gap.

Description

Electronic testing device Technical Field The present utility model relates to an electronic testing device, and more particularly to an electronic testing device with negative pressure type contact alignment. Background The traditional testing device comprises a working module and a detection carrier plate. The detection carrier plate covers the probe head on the working module, and a plurality of probes of the probe head are respectively contacted with each conductive contact of the detection carrier plate. Therefore, the working module can respectively transmit detection signals to the objects to be detected on the detection carrier plate through the probe head, so that relevant electric detection work is carried out. However, since the area of the detection carrier is quite large and all the probes of the probe head are quite precise, the light cannot make the detection carrier drop completely and truly vertically in a conventional manner, so that the alignment of the probes of the probe head and the conductive contacts of the detection carrier is accurately completed, resulting in misalignment of the test performance. It is evident from this that the above-described technique still has inconveniences and drawbacks, and needs to be further improved. Disclosure of utility model The present utility model provides an electronic testing device for solving the problems of the prior art. According to one embodiment of the present utility model, an electronic test apparatus includes a test board, a circuit carrier, a ring-shaped elastic structure, at least one probe module, and an air channel set. The circuit carrier includes a plurality of contacts. The annular elastic structure is clamped between the test bench and the circuit carrier plate, so that the inner space of the annular elastic structure is sealed between the test bench and the circuit carrier plate. The probe module is positioned on the test bench and partially extends into the inner space, and the probe module comprises a plurality of compression probes which are respectively aligned with the joints. The air passage group is positioned on the test bench and communicated with the inner space. In accordance with one or more embodiments of the present utility model, in the electronic testing apparatus, the annular elastic structure includes an interposer, an elastic airtight ring and a plurality of vacuum channels. The intermediate board is arranged between the test board and the circuit carrier board and is positioned in the inner space. The elastic airtight ring surrounds the inner space, surrounds and is fixedly connected with the intermediate plate, and is clamped between the test bench and the circuit carrier plate, so that the circuit carrier plate, the intermediate plate and the elastic airtight ring jointly define a first air gap, the test bench and the intermediate plate jointly define at least one second air gap, and the second air gap is communicated with the air passage group. The vacuum channels are distributed on the interposer and respectively connect the first air gap and the second air gap. In one or more embodiments of the present utility model, in the electronic testing device, the first air gap is larger than the second air gap. In accordance with one or more embodiments of the present utility model, in the above-described electronic test device, the vacuum channels surround the probe modules at intervals. In one or more embodiments of the present utility model, in the electronic testing device, the outer side edge of the interposer is directly connected to the inner side wall of the elastic airtight ring and is between an upper side and a lower side of the elastic airtight ring. The upper side of the inner side wall is removably contacted with the circuit carrier board, and the lower side of the inner side wall is fixedly contacted with the test board. According to one or more embodiments of the present utility model, in the electronic testing apparatus, the testing stand includes at least one placement opening, and the probe module is inserted into the placement opening. The probe module is further provided with an airtight sleeve ring which is sleeved on the outer surface of the probe module in a surrounding mode and clamped between the probe module and the test bench so as to block the communication between the second air gap and the placement opening. In one or more embodiments of the present utility model, in the electronic testing device, the annular elastic structure includes at least one through hole. The through holes are penetrated on the intermediate plate, are connected with two opposite surfaces of the intermediate plate, and are aligned with the placement openings. The probe module is inserted into the through hole and the placement opening at the same time. In accordance with one or more embodiments of the present utility model, in the electronic testing apparatus, a surface of the interposer opposite to the circu