Search

CN-224203523-U - Area array light-splitting interferometer with optical imaging navigation

CN224203523UCN 224203523 UCN224203523 UCN 224203523UCN-224203523-U

Abstract

The utility model discloses an area array light-splitting interferometer with optical imaging navigation, which is characterized by comprising an area array type point scanning light-splitting interference module, an optical imaging module and an optical path conversion module, wherein the area array type point scanning light-splitting interference module, the optical imaging module and the optical path conversion module are assembled in the same structure, the center of a scanning range or an actual scanning range of the area array light-splitting interferometer is in an optical imaging visual field range, the optical path conversion module can realize optical path switching between the area array type point scanning light-splitting interference module and the optical imaging module, and the area array type point scanning light-splitting interference module and the optical imaging module can respectively carry out high-precision 3D point cloud acquisition and optical image acquisition on the same position of a sample under the condition that the position of the area array type point scanning light-splitting interference module and the optical imaging module is unchanged.

Inventors

  • SUN LIANG

Assignees

  • 成都励扬精密机电有限公司

Dates

Publication Date
20260505
Application Date
20250514

Claims (9)

  1. 1. The planar array light-splitting interferometer with the optical imaging navigation is characterized by comprising a planar array type point scanning light-splitting interference module, an optical imaging module and an optical path conversion module, wherein the planar array type point scanning light-splitting interference module, the optical imaging module and the optical path conversion module are assembled in the same structure, the center of a scanning range or an actual scanning range of the planar array light-splitting interferometer is in an optical imaging visual field range, the optical path conversion module can realize optical path switching between the planar array type point scanning light-splitting interference module and the optical imaging module, and the planar array type point scanning light-splitting interference module and the optical imaging module can respectively perform high-precision 3D point cloud acquisition and optical image acquisition on the same position of a sample under the condition that the position of the planar array type point scanning light-splitting interference module and the optical imaging module is unchanged through the change of the position of a reflecting mirror in the optical path conversion module.
  2. 2. The planar array optical interferometer with optical imaging navigation as claimed in claim 1, wherein the optical axis of the imaging lens included in the optical imaging module is parallel or perpendicular to the optical axis of the objective lens of the planar array optical interferometer.
  3. 3. The planar array optical interferometer with optical imaging navigation as claimed in claim 1, wherein when the optical axis of the imaging lens included in the optical imaging module is in a non-parallel or non-perpendicular state with the optical axis of the objective lens of the planar array optical interferometer, the direction of the optical axis of the imaging lens is changed by reflection of at least more than 1 reflecting mirror, so as to ensure that the center or the actual scanning range of the planar array optical interferometer is within the optical imaging visual field range.
  4. 4. The planar array optical interferometer with optical imaging navigation as claimed in claim 1, wherein the second reflecting mirror connected with the end of the lens of the planar array spot scanning optical interferometer can move or turn over to keep no object shielding between the lens of the planar array spot scanning optical interferometer and the sample to be detected when the planar array optical interferometer works, the first reflecting mirror connected with the optical lens of the optical imaging module and the reflecting mirror connecting part can be separated from the lens, and after separation, the optical imaging module can work independently without any object shielding between the lens and the sample to be detected and without any reflecting mirror reflection.
  5. 5. The planar array optical spectral interferometer with optical imaging navigation as claimed in claim 2, wherein the optical imaging module comprises a first reflecting mirror connected with an optical lens of the optical imaging module when an optical imaging optical axis is parallel to an optical axis of a spectral interference module of the planar array spot scanning optical spectral interferometer, a mirror surface of the reflecting mirror forms an included angle with the optical axis of the optical lens of the optical imaging module, the included angle has an angle ranging from 30 DEG to 60 DEG, and a mirror surface of the first reflecting mirror connected with an imaging lens of the optical imaging module is parallel to a mirror surface of a second reflecting mirror connected with an interferometer objective lens.
  6. 6. The planar array optical splitter interferometer with optical imaging navigation as set forth in claim 2, wherein the optical imaging module comprises an optical imaging axis perpendicular to an optical axis of the optical splitting interferometer of the planar array spot scanning optical splitter interferometer, and an optical lens axis of the optical imaging module forms an included angle with a second mirror connected to an objective lens end of the planar array spot scanning optical splitter interferometer, and the included angle is an acute angle.
  7. 7. The planar array optical interferometer with optical imaging navigation according to claim 1, wherein the optical imaging module is installed separately from the planar array optical interferometer module or the optical imaging module is directly integrated in the planar array optical interferometer module box.
  8. 8. The planar array optical interferometer with optical imaging and navigation as claimed in claim 1, wherein the second reflecting mirror is connected with the objective lens of the planar array spot scanning optical interferometer and is connected with the lens through a reflecting mirror connecting block, and a lifting contact type observation device is arranged on the second reflecting mirror connecting block.
  9. 9. The planar array optical splitter interferometer with optical imaging navigation of claim 1, wherein a fast-assembling plate is arranged on a shell or a whole shell of the planar array point scanning optical splitter interferometer.

Description

Area array light-splitting interferometer with optical imaging navigation Technical Field The utility model relates to the field of photoelectric nondestructive detection, in particular to an area array light-splitting interferometer with optical imaging navigation. Background The interferometer is an instrument for precisely measuring by utilizing the interference phenomenon of light, and the core principle is that one beam of light is divided into two or more beams of coherent light, and the two beams of coherent light are transmitted through different paths and recombined to form interference fringes, and the measured information is obtained by analyzing the change of the fringes. The interferometer has sub-nanometer resolution, can realize non-contact ultra-high precision measurement for avoiding sample damage, and can simultaneously acquire information such as morphology, refractive index, stress and the like. Has been widely used in scientific research and production, and is a mature technology. In the application of high-precision micro-area three-dimensional morphology measurement, a white light interference microscope and an area array type interference point scanning interferometer are generally used, and the methods are respectively as follows: White light interference microscopy (also known as optical profiler or coherence scanning interferometer) is a high-precision surface topography measurement technique based on the principle of low coherence interferometry. The method is characterized in that the method utilizes the short coherence characteristic (the strongest interference signal when the optical path difference is zero) of white light (broadband light source), combines the lifting of a microscope and a piezoelectric displacement platform, realizes the non-contact three-dimensional morphology measurement of the nanoscale vertical resolution, can realize the detection in the whole visual field range of the microscope, exceeds the visual field range of the microscope, needs to be completed by matching with a high-precision platform, and has higher requirements on experimental environments (vibration, temperature, humidity and the like). The area array type point scanning interferometer adopts a light splitting mode to split white light into different wavelengths on the basis of white light interference, a high-precision spectrometer is introduced, the distance from a reference point to the surface of a sample is determined by analyzing a spectrum signal, and an XY vibrating mirror is arranged in a light path, so that a single-point interference light path can realize scanning of a large-area appearance of the sample. Because no external platform is needed to cooperate, the requirements of experimental environments (vibration, temperature, humidity and the like) are low, the interferometer has good adaptability, can be applied to various occasions, greatly expands the application of the interferometer, and the specification of Chinese patent application (CN 112325765A) discloses a method based on the principle of spectral white light interference, combines a spectrometer, a telecentric lens, an XY scanning galvanometer and the like, and combines scanning software to realize high-speed large-area scanning of single-point interference on the surface of a sample, thereby obtaining a large-area precise three-dimensional profile of the surface of the sample in a very short time, and has the characteristics of high precision, large measuring range, high speed, strong anti-interference capability and the like. However, the invention has the defects that firstly, the obtained point cloud data in the XYZ direction is scanned, the expressed three-dimensional contour data is free from the real color and gray scale data of the sample surface, and the requirements of qualitative judgment through color, gray scale and the like cannot be met. Secondly, red light indicating points (indicating points in the center of a scanning range) emitted along the optical axis of the objective lens are designed in the invention and are used for searching a scanning area, and for samples with red or near-red surfaces, the red light indicating points are covered by the red surfaces, so that specific scanning positions cannot be judged, and the problem of non-actual attention areas of the areas obtained by scanning is brought. The indication points are designed to be of other colors, and the problems are also faced. Aiming at the problems, an optical imaging and area array light-splitting interferometer objective coaxial imaging technology is developed, optical navigation can be carried out on the area array light-splitting interferometer in real time by using an optical image, a target can be quickly found, an optical image and an interference scanning 3D image can be acquired at the same position, and the unification of qualitative and quantitative judgment is realized, so that the method has practical significance. Discl