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CN-224203573-U - Alignment device is carved to cover

CN224203573UCN 224203573 UCN224203573 UCN 224203573UCN-224203573-U

Abstract

The utility model relates to the technical field of photoetching and discloses an alignment device for alignment of standard workpieces and workpieces to be processed, which comprises an imaging device, a prism assembly, a positioning and adjusting device and a positioning and adjusting device, wherein the prism assembly is used for transmitting top surface images of the standard workpieces to the imaging device and transmitting bottom surface images of the workpieces to be processed to the imaging device, the positioning and adjusting device is used for supporting and fixing the standard workpieces and adjusting positions of the workpieces to be processed along a horizontal plane, the standard workpieces are positioned on one side of the top of the workpieces to be processed, and the imaging device is electrically connected with the positioning and adjusting device. The alignment device can be beneficial to reducing the cost of the device.

Inventors

  • ZHOU JIE

Assignees

  • 广东奥普特科技股份有限公司

Dates

Publication Date
20260505
Application Date
20250220

Claims (10)

  1. 1. An alignment device for alignment is characterized by being used for positioning a standard workpiece (100) and a workpiece (200) to be processed to be aligned, and comprises, An imaging device (1); A prism assembly (2) for transmitting an image of the top surface of a standard workpiece to the imaging device (1) and transmitting an image of the bottom surface of a workpiece (200) to be processed to the imaging device (1); The positioning and adjusting device (3) is used for supporting and fixing a standard workpiece, adjusting the position of the workpiece (200) to be processed along a horizontal plane, wherein the standard workpiece is positioned at one side of the top of the workpiece (200) to be processed, and the imaging device (1) is electrically connected with the positioning and adjusting device (3).
  2. 2. The alignment device according to claim 1, characterized in that the center line of the imaging device (1) is located in a set symmetry plane (101); The prism assembly (2) comprises an upper triangular prism (21), a lower triangular prism (22) and an intermediate triangular prism (23), wherein the upper triangular prism (21), the lower triangular prism (22) are symmetrical about the set symmetry plane (101), and the intermediate triangular prism (23) is provided with a first total reflection surface (231) and a second total reflection surface (232) which are symmetrical about the set symmetry plane (101); The top surface image of the standard workpiece is sequentially reflected by the upper triangular prism (21) and the first total reflection surface (231) to enter the imaging device (1), and the bottom surface image of the workpiece to be processed (200) is sequentially reflected by the lower triangular prism (22) and the second total reflection surface (232) to enter the imaging device (1).
  3. 3. The alignment device according to claim 2, wherein the upper triangular prism (21) comprises a first upper reflecting surface (211) and a second upper reflecting surface (212) perpendicular to each other; The second upper reflection surface (212) is parallel to the first total reflection surface (231) and is positioned right above the first total reflection surface (231); the first upper reflecting surface (211) is opposite to the top surface of the standard workpiece.
  4. 4. The alignment device according to claim 2, wherein the lower triangular prism (22) comprises a first lower reflecting surface (221) and a second lower reflecting surface (222) perpendicular to each other; The second lower reflecting surface (222) is parallel to the second total reflecting surface (232) and is positioned right above the second total reflecting surface (232); The first lower reflecting surface (221) is opposite to the top surface of the workpiece (200) to be processed.
  5. 5. The alignment device according to claim 1, wherein the positioning adjustment device (3) comprises a first support bracket (31) for supporting and positioning the standard workpiece (100), a second support bracket (32) located at one side of the bottom of the first support bracket (31) for supporting the workpiece (200) to be processed, and a horizontal driving platform (33) fixedly connected with the first support bracket (31), and a driving part of the horizontal driving platform (33) is fixedly connected with the second support bracket (32).
  6. 6. The alignment device according to claim 1, characterized in that the prism assembly (2) comprises a first and a second set of reflecting prisms, and the first and second set of reflecting prisms are symmetrical with respect to a set symmetry plane (101); The center line of the imaging device (1) is positioned on the set symmetry plane (101).
  7. 7. The alignment device according to claim 1, further comprising an industrial personal computer electrically connected to the imaging device (1) and the positioning adjustment device (3), respectively.
  8. 8. The alignment device according to claim 5, wherein the horizontal drive stage (33) is an XY stage.
  9. 9. The alignment device according to claim 5, wherein the first support bracket (31) is provided with a positioning groove for positioning the standard workpiece; The top of the first support bracket (31) is provided with a penetrating image capturing hole.
  10. 10. The alignment device according to claim 1, characterized in that the imaging device (1) comprises a detection camera and a lens.

Description

Alignment device is carved to cover Technical Field The utility model relates to the technical field of photoetching, in particular to an alignment device for alignment. Background With the progress of technology, the development of moore's law continues to extend, the critical dimension is smaller and the chip integration is higher, which puts more and more stringent demands on the semiconductor manufacturing process, so overlay errors must be reduced as much as possible during the process. In the existing alignment positioning mode, a plurality of imaging devices and a plurality of lens sets are generally required to be equipped so as to reduce alignment errors, but the cost of the device is greatly increased. In view of this, it is desirable to design an alignment device to reduce the cost of the device. The above information is presented as background information only to aid in the understanding of the present disclosure and is not intended or admitted to be prior art relative to the present disclosure. Disclosure of utility model The utility model provides an alignment device for alignment, which is used for reducing the cost of the device. In order to achieve the above object, the present utility model provides the following technical solutions: An alignment device for positioning a standard workpiece and a workpiece to be processed to be aligned, comprising: An imaging device; The prism assembly is used for transmitting the top surface image of the standard workpiece to the imaging device and transmitting the bottom surface image of the workpiece to be processed to the imaging device; The positioning and adjusting device is used for supporting and fixing a standard workpiece, adjusting the position of the workpiece to be processed along a horizontal plane, and enabling the standard workpiece to be positioned at one side of the top of the workpiece to be processed, and the imaging device is electrically connected with the positioning and adjusting device. Optionally, a center line of the imaging device is located in a set symmetry plane; The prism assembly comprises an upper triangular prism, a lower triangular prism and a middle triangular prism, wherein the upper triangular prism and the lower triangular prism are symmetrical about the set symmetry plane, and the middle triangular prism is provided with a first total reflection surface and a second total reflection surface which are symmetrical about the set symmetry plane; The top surface image of the standard workpiece is sequentially reflected by the upper triangular prism and the first total reflection surface to enter the imaging device, and the bottom surface image of the workpiece to be processed is sequentially reflected by the lower triangular prism and the second total reflection surface to enter the imaging device. Optionally, the upper triangular prism includes a first upper reflecting surface and a second upper reflecting surface that are perpendicular to each other; The second upper reflecting surface is parallel to the first total reflecting surface and is positioned right above the first total reflecting surface; The first upper reflective surface is opposite to the top surface of the standard workpiece. Optionally, the lower triangular prism includes a first lower reflecting surface and a second lower reflecting surface that are perpendicular to each other; the second lower reflecting surface is parallel to the second total reflecting surface and is positioned right above the second total reflecting surface; the first lower reflecting surface is opposite to the top surface of the workpiece to be processed. Optionally, the positioning adjustment device comprises a first support bracket for supporting and positioning the standard workpiece, a second support bracket positioned at one side of the bottom of the first support bracket for supporting the workpiece to be processed, and a horizontal driving platform fixedly connected with the first support bracket, and a driving part of the horizontal driving platform is fixedly connected with the second support bracket. Optionally, the prism assembly includes a first reflecting prism group and a second reflecting prism group, and the first reflecting prism group and the second reflecting prism group are symmetrical about a set symmetry plane; The center line of the imaging device is positioned on the set symmetry plane. Optionally, the alignment device further includes an industrial personal computer, and the industrial personal computer is electrically connected to the imaging device and the positioning adjustment device respectively. Optionally, the horizontal driving platform is an XY platform. Optionally, a positioning groove for positioning the standard workpiece is formed in the first support bracket; the top of first support bracket has seted up the image capturing hole that runs through. Optionally, the imaging device comprises a detection camera and a lens. Compared with the prior a