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CN-224203922-U - Heat dissipation inductance, matcher and radio frequency energy transmission device

CN224203922UCN 224203922 UCN224203922 UCN 224203922UCN-224203922-U

Abstract

The utility model relates to the technical field of radio frequency power amplification and discloses a heat dissipation inductor, a matcher and a radio frequency energy transmission device, wherein the heat dissipation inductor is of a hollow tube structure and comprises a first sub inductor, a connecting section and a second sub inductor which are sequentially communicated, extension ends of the first sub inductor and the second sub inductor are respectively used for grounding, a first end of the heat dissipation inductor is an input port of cooling liquid, and a second end of the heat dissipation inductor is an output port of the cooling liquid. The utility model can fully utilize the physical structure characteristic of the air core inductor, rapidly take away the heat generated by the coil due to the current passing through by utilizing the liquid in a limited space, and the cooling liquid is directly contacted with the air core tube structure, thereby realizing high-efficiency heat dissipation, needing no additional arrangement of a heat dissipation system occupying space, reducing the volume and weight of equipment, reducing the cost of the equipment and ensuring the reliability and stability of the matcher.

Inventors

  • HUANG XIAODONG
  • WU JIJIE
  • LIN WEIQUN

Assignees

  • 深圳市恒运昌真空技术股份有限公司

Dates

Publication Date
20260505
Application Date
20250516

Claims (10)

  1. 1. The heat dissipation inductor is characterized by being of a hollow tube structure and comprising a first sub-inductor (1), a connecting section (3) and a second sub-inductor (2) which are sequentially communicated, wherein the extending ends of the first sub-inductor (1) and the second sub-inductor (2) are respectively used for being grounded; The extending end of the first sub-inductor (1) is an input port of cooling liquid, and the cooling end of the second sub-inductor (2) is an output port of the cooling liquid.
  2. 2. The heat sink inductance according to claim 1, characterized in that the first sub-inductance (1) and the second sub-inductance (2) are symmetrically distributed.
  3. 3. The heat dissipation inductance of claim 2, wherein the first sub-inductance (1) and the second sub-inductance (2) extend in the same direction, and wherein the first sub-inductance (1) and the second sub-inductance (2) are in opposite spiral directions.
  4. 4. A heat dissipation inductance as claimed in claim 3, characterized in that the side walls of the first sub-inductance (1) and the second sub-inductance (2) facing away from each other are provided with connecting tabs (6) for grounding, respectively.
  5. 5. The heat sink inductor according to any one of claims 1-4, characterized in that the connection section (3) is of U-shaped structure.
  6. 6. A matcher comprising the heat dissipation inductor as set forth in any one of claims 1-4.
  7. 7. The matcher of claim 6 further comprising a first connection plate (7), wherein the connection section (3) of the heat dissipating inductance is attached to the first connection plate (7).
  8. 8. The matcher of claim 7, wherein a second connection plate (8) is arranged in parallel with a surface of the first connection plate (7) facing away from the heat dissipation inductance, and a capacitor is connected between the first connection plate (7) and the second connection plate (8).
  9. 9. The matcher of claim 8 wherein the capacitance comprises an adjustable capacitance (5) and a non-adjustable capacitance (4) arranged in parallel.
  10. 10. A radio frequency energy transmission device, comprising: The radio frequency power supply is used for sending out radio frequency signals; The matcher of any of the claims 6-9, the matcher having an input connected to the radio frequency power supply and an output (10) connected to a load for matching an output impedance of the radio frequency power supply with an input impedance of the load.

Description

Heat dissipation inductance, matcher and radio frequency energy transmission device Technical Field The utility model relates to the technical field of radio frequency power amplification, in particular to a heat dissipation inductor, a matcher and a radio frequency energy transmission device. Background The radio frequency power supply can excite gas to obtain plasma, and then the ion beam sputtering deposition principle can be utilized to perform vacuum coating, etching and other works. Because the impedance value of the load in the ion chamber can change linearly along with the change of the environment parameters in the chamber, if the radio frequency power supply is directly connected with the load, the impedance mismatch is inevitably caused to generate high-power reflection, so that the load capacity is insufficient and the radio frequency power supply is overheated. Therefore, a matcher capable of automatically adjusting is required to be connected in series between the radio frequency power supply and the load, and the matching network of the matcher can convert the impedance of the load into standard 50 ohms so as to ensure that the radio frequency power supply works normally and efficiently. The most common matcher is an LC matching network consisting of an inductance and a capacitance, and the impedance of the load is transformed to a value matching the output impedance of the power supply by reasonably selecting or adjusting the values of the inductance and the capacitance and the corresponding connection modes (such as L-type, T-type, pi-type, etc.). However, in operation of the matcher, the inductor is an element which works by utilizing the electromagnetic induction principle, when current passes through the inductor, a magnetic field is generated around the inductor, the change of the magnetic field can cause energy loss in the inductor, and the loss is finally expressed in the form of heat. If the heat generated by the inductor cannot be timely emitted, the temperature of the inductor can be increased, and the performance of the inductor is affected and even damaged. In the prior art, a special heat dissipation system is generally adopted to dissipate heat of the inductor, but the problems of high cost, low efficiency and long time consumption exist. Disclosure of utility model In view of this, the utility model provides a heat dissipation inductor, a matcher and a radio frequency energy transmission device, so as to solve the problems of high cost, low efficiency and long time consumption of a matcher heat dissipation system. The utility model provides a heat dissipation inductor which is of a hollow tube structure and comprises a first sub inductor, a connecting section and a second sub inductor which are sequentially communicated, wherein the extending ends of the first sub inductor and the second sub inductor are respectively used for grounding, the extending end of the first sub inductor is an input port of cooling liquid, and the cooling end of the second sub inductor is an output port of the cooling liquid. According to the heat dissipation inductor provided by the utility model, the hollow tube structure is adopted, the first end is the input port of cooling liquid, and the second end is the output port of the cooling liquid, so that the physical structure characteristic of the hollow inductor can be fully utilized, heat generated by the current passing through the coil is rapidly taken away by using the liquid in a limited space, the cooling liquid is directly contacted with the hollow tube structure, high-efficiency heat dissipation is realized, a heat dissipation system occupying space is not required to be additionally arranged, the volume and the weight of equipment are reduced, the cost of the equipment is reduced, and the reliability and the stability of the matcher are ensured. In an alternative embodiment, the first sub-inductance and the second sub-inductance are symmetrically distributed. By this arrangement, a relatively uniform magnetic field can be generated in the spatial region where the first sub-inductance and the second sub-inductance co-act. The first sub-inductor and the second sub-inductor are symmetrically distributed, and the uniform dissipation of heat is facilitated. When the sub-inductor works, heat is generated, and the heat can be uniformly diffused in the surrounding space by symmetrical distribution, so that the local overheating phenomenon is avoided. This helps to extend the life of the inductor and peripheral electronic components, improving the stability and reliability of the overall system. In an alternative embodiment, the first sub-inductance and the second sub-inductance extend in the same direction, and the first sub-inductance and the second sub-inductance are in opposite spiral directions. The first sub-inductance is spiral in the opposite direction to the second sub-inductance, meaning that they produce magnetic fields in opposite directi