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CN-224204957-U - High-precision linear motor for semiconductor processing

CN224204957UCN 224204957 UCN224204957 UCN 224204957UCN-224204957-U

Abstract

The utility model relates to the technical field of linear motors and discloses a high-precision linear motor for semiconductor processing, which comprises a bottom shell, wherein a fixing seat is fixedly connected to the outer surface of the bottom shell, a heat dissipation assembly is arranged on the surface of the bottom shell, and a splicing assembly is arranged on the surface of the bottom shell. According to the utility model, through the splicing assembly and the assembly, the inserting columns and the inserting grooves at the two ends of the bottom shell are utilized to conveniently assemble the plurality of motor stator bottom shells according to the requirements of high-precision linear travel length of semiconductor processing, the clamping strips on the end covers and the clamping grooves on the surfaces of the bottom shells are used to rapidly position and assemble the end covers at the two ends of the bottom shell after expanding and combining, and in order to meet the requirements of the double-station of the high-precision linear travel of the semiconductor processing, the cover plate is arranged at the top of the bottom shell through the second assembly bolts, and the two linear sliding tables with motor movers are assembled in a limiting mode, so that the requirements of different lengths and double-station are met in an assembling mode, and the applicability of the linear motor is improved.

Inventors

  • LIU JIWU
  • WANG TAO

Assignees

  • 武汉市善银科技有限公司

Dates

Publication Date
20260505
Application Date
20250508

Claims (8)

  1. 1. The high-precision linear motor for semiconductor processing comprises a bottom shell (1) and is characterized in that a fixing seat (2) is fixedly connected to the outer surface of the bottom shell (1), a heat dissipation assembly (3) is arranged on the surface of the bottom shell (1), and a splicing assembly (4) is arranged on the surface of the bottom shell (1); Splice subassembly (4) are including connecting orifice plate (41), connection screw (42), concatenation spliced pole (43), concatenation slot (44), the fixed surface of connecting orifice plate (41) is connected in one side of drain pan (1) surface, connect screw (42) to be located the opposite side of drain pan (1) surface and offer, the both sides activity joint of drain pan (1) has end cover (5), be provided with equipment subassembly (6) between end cover (5) and drain pan (1), the inner wall fixedly connected with motor stator (7) of drain pan (1), the upper surface sliding connection of drain pan (1) has sharp slip table (8), the inner wall fixedly connected with motor rotor (9) of sharp slip table (8), the upper surface laminating of drain pan (1) is connected with apron (10), threaded connection has second equipment bolt (11) between apron (10) and end cover (5).
  2. 2. The high-precision linear motor for semiconductor processing according to claim 1, wherein the end part of the splicing inserting column (43) is fixedly connected to one end of the bottom shell (1), the splicing inserting groove (44) is formed in the other end of the bottom shell (1), and the outer wall of the splicing inserting column (43) is matched with the inner wall of the splicing inserting groove (44) in size.
  3. 3. The high-precision linear motor for semiconductor processing of claim 1, wherein the heat dissipation assembly (3) comprises a heat dissipation groove (31) and a heat dissipation fin (32), the heat dissipation groove (31) is formed in the inner surface of the bottom shell (1), and the end part of the heat dissipation fin (32) is fixedly connected to the outer surface of the bottom shell (1).
  4. 4. The high-precision linear motor for semiconductor processing according to claim 3, wherein a plurality of radiating fins (32) are distributed at equal intervals along the length direction of the bottom shell (1), T-shaped through grooves (33) are formed in the surfaces of the radiating fins (32) penetrating through the radiating grooves (31), and air deflectors (34) are fixedly connected to the inner parts of the T-shaped through grooves (33).
  5. 5. A high precision linear motor for semiconductor processing as set forth in claim 4, wherein the air deflector (34) has an isosceles triangle guide plate structure.
  6. 6. The high-precision linear motor for semiconductor processing according to claim 1, wherein the assembly component (6) comprises a positioning through hole (61), an assembly plate (62), an assembly clamping groove (64) and an assembly seat (65), the positioning through hole (61) is formed in the outer surface of the end cover (5), one side of the inner surface of the assembly plate (62) is fixedly connected with the outer surface of the end cover (5), the other side of the inner surface of the assembly plate (62) is fixedly connected with an assembly clamping strip (63), the assembly clamping groove (64) is formed in the outer surface of the bottom shell (1), the outer wall of the assembly seat (65) is fixedly connected with the inner wall of the end cover (5), and a first assembly bolt (66) is connected between the assembly seat (65) and the bottom shell (1) in a threaded manner.
  7. 7. The high-precision linear motor for semiconductor processing as claimed in claim 6, wherein the inner wall of the positioning through hole (61) is matched with the outer wall of the splicing inserting column (43) in size.
  8. 8. The high-precision linear motor for semiconductor processing as set forth in claim 6, wherein the outer wall of the assembly clamping strip (63) is matched with the inner wall of the assembly clamping groove (64) in size.

Description

High-precision linear motor for semiconductor processing Technical Field The utility model relates to the technical field of linear motors, in particular to a high-precision linear motor for semiconductor processing. Background In the semiconductor manufacturing process, the motion precision and stability of the linear motor directly affect the manufacturing quality and efficiency, and the linear motor is required to have high-precision position control and speed control so as to ensure that the positioning and the motion of the wafer in the manufacturing process can achieve extremely high precision. In a linear motor, which is a stator of the rotary motor, and which is a secondary of a rotor of the rotary motor, the primary is communicated with the alternating current, and the secondary moves linearly along the primary under the action of electromagnetic force. In the prior art, although the linear motor is excellent in positioning and moving in the aspect of semiconductor manufacturing, in different processing steps, the fixed dimension of the linear motor cannot be expanded to be difficult to rapidly adapt to the requirements of different lengths and double stations, the applicability and the efficiency of the linear motor are affected, the use is inconvenient, and the problem is solved by providing a high-precision linear motor for semiconductor processing. Disclosure of utility model In order to make up for the defects, the utility model provides a high-precision linear motor for semiconductor processing, and aims to solve the problems that in different processing steps in the prior art, the fixed and inextensible size is difficult to quickly adapt to the requirements of different lengths and double stations, and the applicability and efficiency of the linear motor are affected. In order to achieve the aim, the utility model adopts the following technical scheme that the high-precision linear motor for semiconductor processing comprises a bottom shell, wherein the outer surface of the bottom shell is fixedly connected with a fixing seat, the surface of the bottom shell is provided with a heat dissipation assembly, and the surface of the bottom shell is provided with a splicing assembly; The utility model provides a splice assembly, splice assembly is including connecting the orifice plate, connecting the screw, splice spliced eye, splice slot, connect the fixed surface of orifice plate to be connected in one side of drain pan surface, connect the opposite side that the screw is located the drain pan surface to be seted up, the both sides activity joint of drain pan has the end cover, be provided with the equipment subassembly between end cover and the drain pan, the inner wall fixedly connected with motor stator of drain pan, the upper surface sliding connection of drain pan has sharp slip table, the inner wall fixedly connected with motor rotor of sharp slip table, the upper surface laminating of drain pan is connected with the apron, threaded connection has the second equipment bolt between apron and the end cover. As a further description of the above technical solution: The spliced eye-splice is characterized in that the end part of the spliced eye-splice is fixedly connected with one end of the bottom shell, the spliced slot is arranged at the other end of the bottom shell, and the outer wall of the spliced eye-splice is matched with the inner wall of the spliced slot in size. As a further description of the above technical solution: The heat dissipation assembly comprises a heat dissipation groove and heat dissipation fins, wherein the heat dissipation groove is formed in the inner surface of the bottom shell, and the end parts of the heat dissipation fins are fixedly connected to the outer surface of the bottom shell. As a further description of the above technical solution: the radiating fins are distributed at equal intervals along the length direction of the bottom shell, T-shaped through grooves are formed in the surfaces of the radiating fins, which penetrate through the radiating grooves, and air deflectors are fixedly connected to the inner parts of the T-shaped through grooves. As a further description of the above technical solution: The air deflector is of an isosceles triangle guide plate structure. As a further description of the above technical solution: The assembly component comprises a positioning through hole, an assembly plate, an assembly clamping groove and an assembly seat, wherein the positioning through hole is formed in the outer surface of the end cover, one side of the inner surface of the assembly plate is fixedly connected with the outer surface of the end cover, the other side of the inner surface of the assembly plate is fixedly connected with an assembly clamping strip, the assembly clamping groove is formed in the outer surface of the bottom shell, the outer wall of the assembly seat is fixedly connected with the inner wall of the end cover, and a first assembly b