CN-224205570-U - Corrosion device for silicon dioxide oxide layer

Abstract

The utility model relates to the technical field of corrosion devices, and discloses a corrosion device for a silicon dioxide oxide layer, which solves the problems in the prior art and comprises a bracket, wherein a motor is arranged on the bracket, the output end of the motor is connected with a rotating shaft, a first driving wheel and a second driving wheel are arranged on the rotating shaft, the first driving wheel is connected with a first driven wheel through a first belt, the second driving wheel is connected with a second driven wheel through a second belt, the first driven wheel is connected with a stirring roller, the stirring roller is arranged in a corrosion liquid bin, a linkage rod is arranged on the second driven wheel, a rotary sample table is arranged on the linkage rod, and a corrosion bin is sleeved outside the rotary sample table.

Inventors

• ZHANG SHUBAO
• WANG MINGDE
• NING SHUYU

Assignees

• 丹东安顺微电子有限公司

Dates

Publication Date

20260505

Application Date

20250418

Claims (5)

1. 1. The corrosion device for the silicon dioxide oxide layer is characterized by comprising a support (1), wherein a motor (2) is arranged on the support (1), the output end of the motor (2) is connected with a rotating shaft (3), a first driving wheel (4) and a second driving wheel (5) are arranged on the rotating shaft (3), the first driving wheel (4) is connected with a first driven wheel (7) through a first belt (6), the second driving wheel (5) is connected with a second driven wheel (9) through a second belt (8), the first driven wheel (7) is connected with a stirring roller (10), the stirring roller (10) is arranged inside a corrosion liquid bin (11), a linkage rod (12) is arranged on the second driven wheel (9), a rotary sample table (13) is sleeved outside the linkage rod, and a corrosion bin (14) is connected with the corrosion liquid bin (11) through a communication device.
2. 2. The device for etching the silicon dioxide oxide layer according to claim 1, wherein the communication device comprises a connecting channel (15), one end of the connecting channel (15) penetrates through the etching liquid bin (11), the other end of the connecting channel penetrates through the etching liquid bin (14), a pump body (16) is arranged at the joint of the connecting channel (15) and the etching liquid bin (11), and a spray head (17) is arranged at the other end of the connecting channel (15).
3. 3. A silica oxide etching apparatus according to claim 2, wherein stirring blades are provided on the stirring roller (10), and the stirring blades are spirally wound on the stirring roller (10).
4. 4. The apparatus of claim 3, wherein the rotary sample stage (13) is provided with a plurality of sample fixing grooves, and the rotary sample stage (13) is provided with anti-slip lines.
5. 5. A silica oxide layer etching apparatus according to claim 4, wherein the first belt (6) and the second belt (8) are made of a corrosion-resistant material, and the corrosion-resistant material is polytetrafluoroethylene or fluororubber.

Description

Corrosion device for silicon dioxide oxide layer Technical Field The utility model belongs to the technical field of corrosion devices, and particularly relates to a corrosion device for a silicon dioxide oxide layer. Background In the fields of semiconductor fabrication, microelectronics engineering, and material science, the etching of silicon dioxide (SiO 2) oxide layers is a critical process, and silicon dioxide layers are widely used in the fabrication of integrated circuits, MEMS (microelectromechanical systems) devices, and optical elements, where the quality of the etching process directly affects the performance and reliability of the device. The conventional wet etching generally adopts hydrofluoric acid or a buffer solution thereof as an etchant, the basic principle is that a silicon dioxide layer is dissolved through chemical reaction to generate volatilizable hexafluorosilicic acid and water, in the conventional immersion etching process, the etchant is unevenly distributed on the surface of a sample, so that local excessive or insufficient etching is caused, the fluidity of the etchant in an etching barrel is poor, uniform distribution is difficult to realize, concentration gradients are formed in the etching barrel, and the difference of etching rates of different areas is caused. Disclosure of utility model In order to solve the problems in the background technology, the utility model provides the technical scheme that the corrosion device for the silicon dioxide oxide layer comprises a support, a motor is arranged on the support, the output end of the motor is connected with a rotating shaft, a first driving wheel and a second driving wheel are arranged on the rotating shaft, the first driving wheel is connected with a first driven wheel through a first belt, the second driving wheel is connected with a second driven wheel through a second belt, the first driven wheel is connected with a stirring roller, the stirring roller is arranged in a corrosion liquid bin, a linkage rod is arranged on the second driven wheel, a rotary sample table is arranged on the linkage rod, a corrosion bin is sleeved outside the rotary sample table, and the corrosion bin is connected with the corrosion liquid bin through a communication device. Preferably, the communication device comprises a connecting channel, one end of the connecting channel penetrates through the corrosive liquid bin, the other end of the connecting channel penetrates through the corrosive liquid bin, a pump body is arranged at the joint of the connecting channel and the corrosive liquid bin, a spray head is arranged at the other end of the connecting channel, the connecting channel and the pump body are used for conveying corrosive liquid from the corrosive liquid bin to the corrosive liquid bin, the spray head is used for uniformly spraying the corrosive liquid to the surface of a sample, and the uniformity and the precision of corrosion are improved. Preferably, stirring blades are arranged on the stirring roller, the stirring blades are spiral and spiral on the stirring roller, the spiral stirring blades can improve stirring efficiency, the corrosive liquid is ensured to be uniformly distributed in the corrosive liquid bin, the local concentration is prevented from being too high or too low, bubbles generated in the stirring process can be reduced by the spiral design, and the uniformity of the corrosive liquid is further improved. Preferably, a plurality of sample fixing grooves are formed in the rotary sample table, anti-slip lines are formed in the rotary sample table and used for fixing a plurality of samples simultaneously, batch processing capacity of the device is improved, the anti-slip lines are used for increasing friction force between the samples and the rotary sample table, sliding or displacement of the samples in the rotary process is prevented, and corrosion uniformity is guaranteed. Preferably, the first belt and the second belt are made of corrosion-resistant materials, the corrosion-resistant materials are polytetrafluoroethylene or fluororubber, and the belt made of the corrosion-resistant materials can prolong the service life of the device, reduce the maintenance cost and ensure the stability and the reliability of a transmission system. Compared with the prior art, the utility model has the beneficial effects that: During operation, firstly, a sample to be corroded is placed in a sample fixing groove on a rotary sample table, a motor is started to drive a rotary shaft to rotate, a first driving wheel and a second driving wheel are mounted on the rotary shaft, power is transmitted to the first driven wheel and the second driven wheel through a first belt and a second belt respectively, the first driven wheel is connected with a stirring roller, when the stirring roller rotates, a spiral blade pushes corrosive liquid to circularly flow in the corrosive liquid bin to ensure uniform concentration of the corrosive liqui