CN-224205579-U - Needle lifting mechanism and process reaction cavity comprising same

Abstract

The utility model provides a lifting needle mechanism and a process reaction cavity comprising the same, wherein the lifting needle mechanism comprises a plurality of lifting needles, a lifting ring, a controller and an alarm device, wherein the lifting needles penetrate through a plurality of through holes of a base in a one-to-one correspondence manner, the lifting ring is used for driving the lifting needles to move up and down, the lifting ring comprises an annular base plate, an annular groove extending downwards from the top surface of the annular base plate is formed in the annular base plate, annular needle bases with matched shapes are arranged in the annular groove, the bottoms of the lifting needles are longitudinally fixed on the annular needle bases, contact sensors are arranged on the bottom surface of the annular needle bases and/or the bottom wall of the annular groove and used for detecting whether the positions of the annular needle bases are abnormal, and the controller is used for controlling the alarm device to alarm when the contact sensors detect that the positions of the annular needle bases are abnormal. The utility model can reduce the probability of the lifting needle being blocked, and can early warn in time even if the lifting needle is accidentally blocked, thereby reducing the subsequent process abnormality.

Inventors

• DU GANG
• YANG XIAOLIANG
• GONG MAOJIANG

Assignees

• 上海积塔半导体有限公司

Dates

Publication Date

20260505

Application Date

20250508

Claims (10)

1. 1. The utility model provides a lift needle mechanism, sets up in the technology reaction chamber, the technology reaction chamber is interior still to be equipped with the base, its characterized in that, lift needle mechanism includes: The lifting pins are correspondingly penetrated into the through holes of the base one by one, and the diameter of each lifting pin is smaller than the inner diameter of each through hole; The lifting ring is used for driving the lifting needle to move up and down, the lifting ring comprises an annular chassis, an annular groove extending downwards from the top surface of the annular chassis is formed in the annular chassis, an annular needle seat with a matched shape is arranged in the annular groove, and the bottom of each lifting needle is longitudinally fixed on the annular needle seat; A contact sensor arranged on the bottom surface of the annular needle seat and/or the bottom wall of the annular groove for detecting whether the annular needle seat is abnormal in position or not, and And the controller is connected with the contact sensor and used for controlling the alarm device to alarm when the contact sensor detects that the position of the annular needle seat is abnormal.
2. 2. The lift pin mechanism of claim 1, wherein said annular hub is provided with a plurality of screw holes for threaded connection with the bottom of said lift pin.
3. 3. The lift pin mechanism of claim 1, wherein said lift pin mechanism includes a plurality of said contact sensors spaced apart.
4. 4. The lift pin mechanism of claim 1, wherein said alarm device comprises an audible and visual alarm.
5. 5. The lift pin mechanism of claim 1, wherein said controller is further coupled to a process control device of said process reaction chamber for informing said process control device to stop performing a corresponding process when said contact sensor detects an abnormality in the position of said annular hub.
6. 6. The lift pin mechanism of claim 1, wherein said lift pin mechanism comprises at least three lift pins.
7. 7. The lift pin mechanism of claim 1, further comprising a lift drive for driving the lift ring up and down.
8. 8. The lift pin mechanism of any one of claims 1-7, wherein the annular chassis is a metal chassis and the annular hub is a ceramic ring.
9. 9. A process chamber comprising a base and a lift pin mechanism as claimed in any one of claims 1 to 8.
10. 10. The process chamber of claim 9, wherein the process chamber is a thin film deposition chamber.

Description

Needle lifting mechanism and process reaction cavity comprising same Technical Field The utility model relates to the technical field of semiconductor equipment, in particular to a needle lifting mechanism and a process reaction cavity comprising the needle lifting mechanism. Background In a semiconductor process reaction chamber, a wafer carrier is typically provided for carrying wafers. Taking a TF (thin film deposition) reaction chamber as an example, a wafer stage is included on which a wafer is placed in order to perform a deposition process of the wafer. Referring to fig. 1 and 2, a cross-sectional view of a conventional wafer carrier is shown. As shown, the wafer carrier is disposed in a process chamber 100, and includes a base 10, a plurality of Lift pins (liftpin) 20, and a Lift ring (Lift ring) 30. Wherein the susceptor 10 may be a heater in the process chamber 100 such that the wafer 40 placed on the susceptor 10 may be uniformly heated via thermal conduction to perform a deposition process. The upper part of the base 10 is a flat circular platform, the inside of the base is provided with a plurality of through holes 11 extending longitudinally, and the lifting pins 20 are arranged in the through holes 11 in a one-to-one correspondence manner. The lifting ring 30 is driven by a lifting driving device (not shown) to be movable up and down. After the wafer 40 is transferred to the process chamber 100 by a robot arm (not shown), the lift driving device drives the lift ring 30 to lift up against the lift pins 20, so that the lift pins 20 lift up through the through holes 11 to contact and lift the wafer 40 up, and the wafer 40 is separated from the robot arm, and then the robot arm is withdrawn from the process chamber 100, thereby completing one transfer of the wafer 40. Then, the lift driving device drives the lift ring 30 to descend, and the lifted lift pins 20 move downward accordingly, so that the wafer 40 disposed thereon is lowered onto the susceptor 10 for subsequent processing. However, it was found that the lift pins 20 are easily inclined during the up-and-down movement during actual use, and may even be caught in the through holes 11 of the base 10 due to the inclination, particularly when the outer walls thereof are attached with the attached products after a process reaction for a while. It should be appreciated that after the lift pins 20 are stuck, the process within the process chamber 100 may continue to run, which may easily result in abnormal or even scrapped wafer processing. Disclosure of utility model Aiming at the defects in the prior art, the utility model provides the lifting needle mechanism and the process reaction cavity comprising the mechanism, so that the probability of clamping the lifting needle is reduced, and even if the lifting needle is accidentally clamped, early warning can be timely carried out, and the subsequent process abnormality is reduced. In order to achieve the above purpose, the present utility model adopts the following technical scheme: In a first aspect, the present utility model provides a lift pin mechanism disposed in a process reaction chamber, wherein a base is further disposed in the process reaction chamber, and the lift pin mechanism includes: The lifting pins are correspondingly penetrated into the through holes of the base one by one, and the diameter of each lifting pin is smaller than the inner diameter of each through hole; The lifting ring is used for driving the lifting needle to move up and down, the lifting ring comprises an annular chassis, an annular groove extending downwards from the top surface of the annular chassis is formed in the annular chassis, an annular needle seat with a matched shape is arranged in the annular groove, and the bottom of each lifting needle is longitudinally fixed on the annular needle seat; The contact sensor is arranged on the bottom surface of the annular needle seat and/or the bottom wall of the annular groove and is used for detecting whether the annular needle seat is abnormal in position or not; And the controller is connected with the contact sensor and used for controlling the alarm device to alarm when the contact sensor detects that the position of the annular needle seat is abnormal. Further, a plurality of screw holes are formed in the annular needle seat, and the bottom of the lifting needle is in threaded connection with the screw holes. Further, the lift pin mechanism includes a plurality of the contact sensors disposed at intervals. Further, the alarm device comprises an audible and visual alarm. Further, the controller is further connected with a process control device of the process reaction chamber, so as to inform the process control device to stop executing the corresponding process when the contact sensor detects that the annular needle seat is abnormal in position. Further, the lift pin mechanism includes at least three lift pins. Further, the lifting needle mechanism further co