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CN-224205582-U - Precise etching machine for glass-based chip

CN224205582UCN 224205582 UCN224205582 UCN 224205582UCN-224205582-U

Abstract

The utility model discloses a glass-based chip precise etching machine, and relates to the technical field of etching machines. The utility model comprises a box body, a ring frame, a partition plate and an ejector, wherein the partition plate is arranged in the box body, the ring frame is arranged in the box body, a gear ring is arranged on the inner wall of the ring frame, a motor is arranged on the inner wall of the lower end of the box body, a gear is arranged at the output end of the motor, a trough is arranged in the upper end of the ring frame, a guide rail is arranged on the inner wall of the lower end of the box body, a ball is rotatably arranged at the lower end of the ring frame, a liquid tank is arranged at the upper end of the box body, the ejector is arranged on the inner wall of the upper end of the box body, a conveying pipe is arranged at the lower end of the ejector, and an ejector head is arranged at the lower end of the conveying pipe. The utility model stably etches the glass-based chip by arranging the independent and relatively sealed chambers, so as to solve the problems that frequent opening and closing equipment accesses the chip, a large amount of protective gas is lost, the stable etching of the chip is affected and the processing cost is increased.

Inventors

  • CAI SONGWEI
  • XIAO LIANGCAN
  • SHI JIE

Assignees

  • 安徽盛诺科技集团股份有限公司

Dates

Publication Date
20260505
Application Date
20250515

Claims (7)

  1. 1. The glass-based chip precise etching machine comprises a box body (1), a ring frame (8), a partition plate (11) and an ejector (12), and is characterized in that the partition plate (11) is arranged inside the box body (1), the ring frame (8) is arranged inside the box body (1), a gear ring (21) is arranged on the inner wall of the ring frame (8), a motor (18) is arranged on the inner wall of the lower end of the box body (1), a gear (19) meshed with the gear ring (21) is arranged at the output end of the motor (18), a trough (13) which is distributed in an annular array is formed inside the upper end of the ring frame (8), guide rails (23) which are arranged on two sides of the partition plate (11) are arranged inside the inner wall of the lower end of the box body (1), balls (24) which are distributed in an annular array and are arranged inside the guide rails (23) in a rolling mode are arranged at the lower end of the ring frame (8), a liquid box (3) is arranged at the upper end of the box body (1), a conveyer pipe (29) is arranged at the upper end of the box body (1), the inner wall of the upper end of the box body (12) is provided with the ejector (12), and a conveyer pipe (29) is arranged at the lower end of the ejector pipe.
  2. 2. The precise etching machine for glass-based chips, as set forth in claim 1, characterized in that a sleeve (15) is sleeved outside the conveying pipe (29), a shielding cover (17) is provided at the lower end of the sleeve (15), and a second hydraulic rod (28) with a telescopic end connected with the conveying pipe (29) through a connecting block is provided at the inner wall of the upper end of the box body (1).
  3. 3. The precise etching machine for glass-based chips of claim 1, wherein the front end of the box body (1) is provided with a visual plate (2), the rear end of the box body (1) is rotatably provided with an opening and closing cover (5), one end of the box body (1) is provided with a first hydraulic rod (7), and the output end of the first hydraulic rod (7) is provided with a clamping plate (6) with a conical inner wall.
  4. 4. The precise etching machine for glass-based chips of claim 1, wherein the first sealing sleeve (9) and the second sealing sleeve (10) are embedded and installed in the partition plate (11), and the ring frame (8) is rotatably installed in the first sealing sleeve (9) and the second sealing sleeve (10).
  5. 5. The precise etching machine for glass-based chips of claim 1, wherein the ring frame (8) is provided with a ring groove (20) on the inner wall, the gear ring (21) is positioned on the inner wall of the ring groove (20), and the upper end of the box body (1) is provided with a negative pressure pump (4) communicated with the inside of the box body (1).
  6. 6. The precise etching machine for glass-based chips of claim 1, wherein the ring frame (8) is internally provided with a support ring (27), the support ring (27) is internally provided with a first through hole (25), and the lower end of the ring frame (8) is internally provided with a second through hole (26) distributed in an annular array.
  7. 7. The precise etching machine for glass-based chips of claim 1, wherein the inner wall of the lower end of the box body (1) is provided with a liquid groove (14) which is annular and is positioned below the ring frame (8), and the inner wall of the lower end of the box body (1) is provided with a suction pump (22) with a suction end positioned inside the liquid groove (14).

Description

Precise etching machine for glass-based chip Technical Field The utility model relates to the technical field of etchers, in particular to a glass-based chip precise etcher. Background The glass-based chip is an integrated circuit or a microelectronic device manufactured by using ultra-thin glass with the thickness of 50-200 mu m as a substrate material, and the processing environment of the chip etching process needs high physical and chemical conditions. The Chinese patent discloses a chip etching machine (grant bulletin number CN 221149945U), this patent technology box and liquid reserve tank, the bottom of box inner chamber is provided with places the frame, the top of placing the frame is provided with a plurality of chip groove, the liquid reserve tank sets up at the top of box, the lateral wall of liquid reserve tank is provided with the catheter, the one end of catheter is connected with the sprayer, in this application file, is in the in-process to chip corrosion removal burr, is convenient for carry out categorised injection corrosive liquid to a plurality of chips, and the injection effect is even, and the effect of getting rid of chip burr is better, can reduce the splash on the inner wall when the corrosive liquid sprays simultaneously, improves the protectiveness of device. The technology has the advantage of preventing the sputtering of etching liquid in the using process, but the defects still exist in the using process, the external environment can directly act on the inside of the etching environment in the chip accessing process, various protective gases are required to be added in the etching environment in the etching process, the stable processing of the chip is ensured, the chip is accessed by frequent opening and closing equipment, a large amount of protective gases are lost, the stable etching processing of the chip is influenced, and the processing cost is increased, so that a glass-based chip precise etching machine is provided by a person skilled in the art to solve the problems in the background technology. Disclosure of utility model 1. Technical proposal In order to solve the technical problems, the utility model is realized by the following technical scheme: The utility model relates to a glass-based chip precise etching machine which comprises a box body, a ring frame, a partition plate and an ejector, wherein the partition plate is arranged in the box body, the ring frame is arranged in the box body, a gear ring is arranged on the inner wall of the ring frame, a motor is arranged on the inner wall of the lower end of the box body, a gear meshed with the gear ring is arranged at the output end of the motor, the interior of the ring frame is hollow, a trough distributed in an annular array is arranged in the upper end of the ring frame, guide rails positioned on two sides of the partition plate are arranged on the inner wall of the lower end of the box body, balls which are distributed in an annular array and are arranged in the guide rails in a rolling mode are rotatably arranged at the lower end of the ring frame, a liquid tank is arranged at the upper end of the box body, the ejector is arranged at the lower end of the ejector, and an ejector head is arranged at the lower end of the conveying pipe. Further, a sleeve is sleeved on the outer side of the conveying pipe, a shielding cover is arranged at the lower end of the sleeve, and a second hydraulic rod with a telescopic end connected with the conveying pipe through a connecting block is arranged on the inner wall of the upper end of the box body; Specifically, the sleeve pipe longitudinally moves on the outer wall of the conveying pipe through the driving of the second hydraulic rod, the lower end of the shielding cover is driven to be attached to the upper end of the ring frame, the trough below the spraying head is shielded, the glass-based chip inside the trough is subjected to sealed spraying etching, and liquid sputtering is avoided. Further, a visual plate is arranged at the front end of the box body, an opening and closing cover is rotatably arranged at the rear end of the box body, a first hydraulic rod is arranged at one end of the box body, and a clamping plate with a conical inner wall is arranged at the output end of the first hydraulic rod; Specifically, the rotation of the ring frame and the conveying condition of the glass base chip are known through the visual plate, the opening and closing cover is pressed and held through a hydraulic rod and a driving clamping plate, and the closing cover at the rear end of the rotary closing box body is pressed and fastened. Further, a first sealing sleeve and a second sealing sleeve are embedded and installed in the partition plate, and the ring frame is rotatably installed in the first sealing sleeve and the second sealing sleeve; Specifically, when the ring frame rotates, the first sealing sleeve and the second sealing sleeve rotate in the partition plate, the outer