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CN-224205599-U - Silicon wafer basket of adaptation not unidimensional silicon wafer

CN224205599UCN 224205599 UCN224205599 UCN 224205599UCN-224205599-U

Abstract

The utility model relates to a silicon wafer basket for adapting silicon wafers with different sizes, which comprises a main body, a sliding piece capable of sliding on the main body in an adjustable mode, a first supporting rod for supporting the silicon wafer, a second supporting rod for supporting the silicon wafer, a guiding piece for guiding the sliding piece, a limiting piece for rapidly limiting the position of the sliding piece and a locking piece for preventing the sliding piece from retreating. The problem that silicon wafers of different sizes cannot be adapted in the use process of the silicon wafer basket is solved, and the silicon wafer basket of various specifications is required to be adapted to the silicon wafers of different sizes, so that the cost is increased.

Inventors

  • QIAN CHENG
  • MENG LING

Assignees

  • 江苏世通新材料科技有限公司

Dates

Publication Date
20260505
Application Date
20250530

Claims (7)

  1. 1. The silicon wafer basket suitable for the silicon wafers of different sizes is characterized by comprising a main body (1), sliding pieces (2) capable of sliding on the main body (1) in an adjustable mode, a first supporting rod (3) for supporting the silicon wafers, a second supporting rod (4) for supporting the silicon wafers, a guide piece (5) for guiding the sliding pieces (2), a limiting piece (6) for rapidly limiting the positions of the sliding pieces (2) and a locking piece (7) for preventing the sliding pieces (2) from retreating, wherein the main body (1) and the sliding pieces (2) are concave, clamping plates (8) are arranged on the first supporting rod (3) and the second supporting rod (4), a plurality of silicon wafers are clamped between two groups of adjacent clamping plates (8) in an array mode, the guide piece (5) is arranged at the bottom of the sliding pieces (2), a first groove (11) corresponding to the sliding pieces (2) is formed in the main body (1), the sliding pieces (2) are arranged along the first groove (11), and the clamping plates (8) are arranged on one side of the sliding pieces (2).
  2. 2. The silicon wafer flower basket adapting to silicon wafers with different sizes according to claim 1 is characterized in that a second groove (12) is formed in one side of the main body (1), a third groove (13) is formed in the other side of the main body (1), the limiting piece (6) corresponds to the second groove (12), the locking piece (7) corresponds to the third groove (13), and a plurality of groups of the second groove (12) and the third groove (13) are formed along the moving direction of the sliding piece (2).
  3. 3. The silicon wafer flower basket adapting to silicon wafers with different sizes according to claim 1, wherein the first supporting rods (3) are provided with two groups of the first supporting rods (3) which are vertically arranged up and down, the second supporting rods (4) are arranged at the bottom, clamping plates (8) on the second supporting rods (4) are obliquely upwards, and the two groups of the first supporting rods (3) can adapt to the silicon wafers with different sizes and ensure that the silicon wafers can be stabilized.
  4. 4. Silicon wafer basket for adapting silicon wafers of different sizes according to claim 1, characterized in that the guide (5) is T-shaped and the first groove (11) corresponds to the guide (5).
  5. 5. The silicon wafer flower basket adapting to the silicon wafers with different sizes according to claim 2 is characterized in that the four grooves (21) are formed in two sides of the sliding piece (2), the limiting piece (6) comprises a first elastic piece (61) and a limiting block (62) for limiting, the first elastic piece (61) is an elastic piece, the limiting block (62) is square, and a chamfer which is convenient to move is formed in the limiting block (62).
  6. 6. Silicon wafer flower basket adapting to silicon wafers with different sizes according to claim 5, characterized in that the locking piece (7) comprises a second elastic piece (71) and a limiting plate (72) for limiting, the second elastic piece (71) is an elastic piece, the limiting plate (72) is inclined at an angle, and when the sliding piece (2) is pushed to move inwards, the surface of the limiting plate (72) abuts against the third groove (13) so that the second elastic piece (71) is compressed until the limiting plate (72) is clamped into the next group of the third grooves (13).
  7. 7. The silicon wafer flower basket adapting to the silicon wafers with different sizes according to claim 1 is characterized in that scales (14) are formed on the side wall of the main body (1), the sliding piece (2) corresponds to the scales (14), and the scales (14) show that when the sliding piece (2) moves to a certain position, the silicon wafers with the current sizes correspond to each other.

Description

Silicon wafer basket of adaptation not unidimensional silicon wafer Technical Field The utility model relates to the field of silicon wafer flower baskets, in particular to a silicon wafer flower basket which is adaptive to silicon wafers with different sizes. Background In the prior art, application number is CN201920132417.1, a silicon wafer flower basket is disclosed, the silicon wafer flower basket comprises an end plate and a toothed bar, a guide body is arranged at the lower part of the toothed bar, the length of the guide body extending outwards relative to the toothed bar is gradually increased from one end of the guide body to the other end of the guide body, the width of the guide body is gradually increased along with the increase of the length of the guide body, the toothed bar is cylindrical, the guide body further comprises two intersected side surfaces, the longest side line on the side surfaces is tangent with the excircle of the toothed bar, the intersection of the two side surfaces is an arc, the radius of the arc is smaller than 0.2mm, the included angle between the intersection line of the two side surfaces of the guide body and the toothed bar is 2 degrees, and the included angle between the two side surfaces of the guide body is 60 degrees, and the toothed bar and the end plate are vertically arranged. Compared with the prior art, the silicon wafer basket greatly reduces residual liquid after wool making, so that the service cycle of the drug effect is prolonged, the drying time is shortened, and the production efficiency is improved. However, in the use process of the silicon wafer basket, silicon wafers with different sizes cannot be matched, and the silicon wafer basket with various specifications is required to be matched with the silicon wafers with different sizes, so that the cost is increased. Disclosure of utility model The embodiment of the application solves the problems that in the prior art, silicon wafer baskets cannot be adapted to silicon wafers with different sizes in the use process, and the silicon wafer baskets with various specifications are required to be adapted to the silicon wafers with different sizes, so that the cost is increased. The technical scheme adopted by the embodiment of the application is as follows. The silicon wafer basket suitable for the silicon wafers with different sizes comprises a main body, a sliding piece capable of sliding on the main body in an adjustable mode, a first supporting rod for supporting the silicon wafers, a second supporting rod for supporting the silicon wafers, a guide piece for guiding the sliding piece, a limiting piece for rapidly limiting the position of the sliding piece and a locking piece for preventing the sliding piece from retreating; the main body and the sliding piece are concave, clamping plates are arranged on the first supporting rod and the second supporting rod, a plurality of clamping plates are arranged in an array, a silicon wafer is clamped between two adjacent clamping plates, the guide piece is arranged at the bottom of the sliding piece, a first groove corresponding to the sliding piece is formed in the main body, the sliding piece slides along the first groove, the guide piece is arranged on one side of the sliding piece, and the locking piece is arranged on the other side of the sliding piece. The technical scheme is further improved in that a second groove is formed in one side of the main body, a third groove is formed in the other side of the main body, the limiting piece corresponds to the second groove, the locking piece corresponds to the third groove, and a plurality of groups of the second groove and the third groove are formed in the moving direction of the sliding piece. The technical scheme is further improved in that the first support rods are provided with two groups, the two groups of the first support rods are vertically arranged up and down, the second support rods are arranged at the bottom, the clamping plates on the second support rods are obliquely upwards, and the two groups of the first support rods can be adapted to silicon wafers with different sizes and ensure that the silicon wafers are stable. As a further improvement of the technical scheme, the guide piece is of a T shape, and the first groove corresponds to the guide piece. As a further improvement of the technical scheme, the two sides of the sliding piece are provided with fourth grooves; the limiting piece comprises a first elastic piece and a limiting block for limiting, wherein the first elastic piece is an elastic piece, the limiting block is square, and a chamfer convenient to move is arranged on the limiting block. The technical scheme is further improved in that the locking piece comprises a second elastic piece and a limiting plate for limiting, the second elastic piece is an elastic piece, the limiting plate is inclined in an angle, and when the sliding piece is pushed to move inwards, the surface of the l