CN-224205600-U - Silicon wafer feeding and conveying device

Abstract

The application relates to the technical field of solar cell manufacturing, in particular to a silicon wafer feeding and conveying device, which comprises a fixing frame, a conveying assembly connected with the fixing frame in a sliding manner, a flower basket, a driving connecting part, a driven connecting part and a flower basket, wherein the driving connecting part slides along a first sliding part in a first direction and a second sliding part in a first direction in a sliding manner, so that the flower basket can reciprocate along the first direction, different transportation runways can be adapted, when a carrier plate structure on the current transportation runway is fully loaded, the flower basket can move onto an operation runway of the carrier plate structure which is not fully loaded along the first direction, the silicon wafer feeding efficiency is improved, empty silicon wafer placing positions on the carrier plate structure are avoided, suction cups are prevented from being polluted, equipment pollution is reduced, the flower basket slides along a third sliding part in the second direction, the flower basket can reciprocate along the second direction, the flower basket is aligned with the transportation runway, the wafer pumping mechanism can pump the wafer to feed the silicon wafer conveniently, and the silicon wafer feeding efficiency is improved.

Inventors

• ZHANG BINGBING
• LU DAXING

Assignees

• 通威太阳能（成都）有限公司

Dates

Publication Date

20260505

Application Date

20250114

Claims (9)

1. 1. The utility model provides a silicon chip material loading conveyor which characterized in that includes: The fixing frame comprises a first sliding part and a second sliding part which extend along a first direction respectively; At least one conveying component which is in sliding connection with the fixing frame, wherein the conveying component comprises a driving connecting part which is in sliding connection with the first sliding part and a driven connecting part which is connected with the driving connecting part, the driven connecting part is in sliding connection with the second sliding part, the driven connecting part comprises a third sliding part which extends along a second direction, and the second direction is perpendicular to the first direction; The flower basket is connected to the third sliding part in a sliding manner and is used for bearing silicon wafers, and the driving connecting part slides along the first direction so as to drive the driven connecting part connected with the flower basket to move along the first direction; The fixing frame further comprises two side plates, a first fixing part and a second fixing part, wherein the two side plates are oppositely arranged in the first direction, the first fixing part is connected with the two side plates respectively, the second fixing part is connected with the two side plates respectively, the first sliding part is located on the first fixing part, and the second sliding part is located on the second fixing part.
2. 2. The silicon wafer loading and conveying device according to claim 1, wherein a plurality of conveying assemblies are arranged, and the plurality of conveying assemblies are sequentially arranged at intervals along the first direction.
3. 3. The silicon wafer feeding and conveying device according to claim 1, wherein the first fixing part comprises a first fixing piece and a second fixing piece which are arranged at intervals relatively, and the first sliding part comprises a first sliding rail arranged on the first fixing piece and a second sliding rail arranged on the second fixing piece; The drive connecting portion comprises a sliding connecting piece and a connecting protrusion, wherein the sliding connecting piece is arranged across the first fixing piece and the second fixing piece, the connecting protrusion is arranged on the sliding connecting piece, and the connecting protrusion is connected with the driven connecting portion through a gap between the first fixing piece and the second fixing piece.
4. 4. The silicon wafer feeding and conveying device according to claim 3, wherein the driving connection part further comprises a driving gear piece, and the driving gear piece is rotatably connected to one side of the sliding connection piece, which is opposite to the connection protrusion; the first fixing part further comprises a linear guide piece, the linear guide piece is arranged opposite to the first fixing piece in the second direction, the linear guide piece comprises a plurality of first guide teeth arranged along the first direction, and the first guide teeth are meshed with the driving gear piece.
5. 5. The silicon wafer feeding and conveying device according to claim 4, wherein the driving gear member comprises a rotating shaft connected to the sliding connecting member through a first bearing, a driving gear body sleeved on the rotating shaft, and a plurality of second guide teeth arranged along the circumferential direction of the driving gear body, and the second guide teeth are meshed with the first guide teeth.
6. 6. The silicon wafer loading and transporting device of claim 5, wherein the drive connection portion further comprises a first drive motor connected to the rotation shaft.
7. 7. The silicon wafer loading and transporting device of claim 4, wherein the first fixing portion further comprises: A fourth sliding part arranged on one side of the first fixing part, which is opposite to the linear guide part, the driven connecting part is connected to the fourth sliding part in a sliding way; A fifth sliding part arranged on one side of the second fixing piece, which is opposite to the second sliding rail, the driven connecting part is connected with the fifth sliding part in a sliding way.
8. 8. The silicon wafer feeding and conveying device according to claim 1, wherein the second sliding part comprises a third sliding rail, and the third sliding part comprises a plurality of fourth sliding grooves which are arranged in parallel.
9. 9. The silicon wafer loading and transporting device according to claim 1, wherein a placing space is formed between the side plate and the transporting assembly adjacent to the side plate.

Description

Silicon wafer feeding and conveying device Technical Field The application relates to the technical field of solar cell manufacturing, in particular to a silicon wafer feeding and conveying device. Background In the process of preparing the solar cell, at least one functional layer needs to be manufactured on the surface of the silicon wafer by adopting a CVD (Chemica l vapor depos it ion ) mode. When the plate type CVD equipment is adopted for depositing the functional layer, a silicon wafer is required to be placed on a carrier plate structure of the plate type CVD equipment, and then the carrier plate structure enters a sputtering cavity for coating. At present, when silicon chip feeding is performed, a basket loaded with silicon chips is moved to a corresponding transportation runway, a chip drawing mechanism is used for drawing and feeding the silicon chips from the basket so as to place the silicon chips in the basket on the transportation runway, and then the transportation runway is used for transporting the silicon chips to a carrier plate structure. In the final stage of silicon wafer loading, a part of carrier plate structures are fully loaded and cannot be used for continuously loading silicon wafers, a part of carrier plate structures are not fully loaded, but no silicon wafers exist in the basket corresponding to the transportation runway and cannot be used for continuously loading, and the mode is unfavorable for improving the silicon wafer loading efficiency. And after the coating film is finished, the unloading mechanism adsorbs a plurality of silicon wafers on the carrier plate structure one by one through the vacuum chuck, and the vacuum chuck is in one-to-one correspondence with the silicon wafer placing position of the carrier plate structure, and during unloading, the vacuum chuck corresponding to the silicon wafer placing position above the carrier plate structure which is not fully loaded can appear the suction phenomenon, and suction cup pollution can be caused. Disclosure of utility model Based on the above, the application provides a silicon wafer feeding and conveying device, which solves the technical problems that the silicon wafer feeding efficiency is not beneficial to improvement and the equipment pollution is not beneficial to reduction in the prior art. The embodiment of the application provides a silicon wafer feeding and conveying device, which comprises the following components: The fixing frame comprises a first sliding part and a second sliding part which extend along a first direction respectively; At least one conveying component which is in sliding connection with the fixing frame, wherein the conveying component comprises a driving connecting part which is in sliding connection with the first sliding part and a driven connecting part which is connected with the driving connecting part, the driven connecting part is in sliding connection with the second sliding part, the driven connecting part comprises a third sliding part which extends along a second direction, and the second direction is perpendicular to the first direction; And the flower basket is connected to the third sliding part in a sliding manner and is used for bearing silicon wafers, and the driving connecting part slides along the first direction so as to drive the driven connecting part connected with the flower basket to move along the first direction. Optionally, the conveying components are arranged in a plurality, and the conveying components are sequentially arranged at intervals along the first direction. Optionally, the fixing frame includes two curb plates that are set up relatively in the first direction, two with the curb plate is connected respectively first fixed part and with two the curb plate is connected respectively the second fixed part, first sliding part is located on the first fixed part, the second sliding part is located on the second fixed part. Optionally, the first fixing part comprises a first fixing piece and a second fixing piece which are arranged at intervals relatively, and the first sliding part comprises a first sliding rail arranged on the first fixing piece and a second sliding rail arranged on the second fixing piece; The drive connecting portion comprises a sliding connecting piece and a connecting protrusion, wherein the sliding connecting piece is arranged across the first fixing piece and the second fixing piece, the connecting protrusion is arranged on the sliding connecting piece, and the connecting protrusion is connected with the driven connecting portion through a gap between the first fixing piece and the second fixing piece. Optionally, the driving connection part further comprises a driving gear member, and the driving gear member is rotatably connected to one side of the sliding connection member, which is opposite to the connection protrusion; the first fixing part further comprises a linear guide piece, the linear guide piece is arranged opposite to