CN-224205604-U - Boat circulation mechanism and loading and unloading system

CN224205604UCN 224205604 UCN224205604 UCN 224205604UCN-224205604-U

Abstract

The disclosure relates to the technical field of semiconductors and photovoltaics, in particular to a boat transfer mechanism and a loading and unloading system, which solve the problem that the loading and unloading sequence is disordered after a boat structure carrying marked sheets is transferred by the boat transfer mechanism in the related technology. The boat transfer mechanism comprises a connection assembly and a bearing assembly, wherein the bearing assembly is configured to buffer a boat structure which is transferred by the connection assembly, at least a first sub boat of the same boat structure is placed behind the bearing assembly, a second sub boat of the boat structure is transferred to the inserting and unloading mechanism through the connection assembly, the inserting and unloading mechanism is used for inserting and unloading the second sub boat, the first sub boat is transferred to the inserting and unloading mechanism in the process of inserting and unloading the second sub boat, and the first sub boat and the second sub boat are sequentially distributed along the direction deviating from the inserting and unloading mechanism. The boat circulation mechanism and the loading and unloading system provided by the disclosure separate the first sub boat from the second sub boat in the boat structure and circulate the first sub boat and the second sub boat in sequence, avoid the problem that the circulation marked sheets are disordered in sequence, and save the space occupied by the boat circulation structure.

Inventors

WANG ZHENJIANG
YU SHUAISHUAI
DONG XUEDI
LIU QUN

Assignees

拉普拉斯(无锡)半导体科技有限公司

Dates

Publication Date: 20260505
Application Date: 20250507

Claims (11)

1. A boat transfer mechanism configured to transfer a boat structure into or out of a wafer insertion and removal mechanism, the boat structure comprising at least a first sub-boat and a second sub-boat, the boat transfer mechanism comprising: a docking assembly configured to carry and stream the boat structure; The bearing assembly is arranged on the connection assembly and is configured to buffer the boat structure circulated by the connection assembly; After at least the first sub-boat of the same boat structure is placed on the bearing assembly, the second sub-boat of the boat structure is firstly flowed into the inserting and unloading mechanism through the connection assembly, and the inserting and unloading mechanism is used for inserting and unloading the second sub-boat, and the first sub-boat is flowed into the inserting and unloading mechanism, so that the inserting and unloading mechanism can sequentially flow the second sub-boat and the first sub-boat to the connection assembly, and the first sub-boat and the second sub-boat are sequentially arranged along the direction deviating from the inserting and unloading mechanism.
2. The boat flow mechanism of claim 1, wherein the docking assembly comprises: The first transfer mechanism is in butt joint with the sheet inserting and discharging mechanism along a first horizontal direction and comprises a first supporting plate, the first supporting plate transfers the first sub-boat and/or the second sub-boat along a second horizontal direction, the first horizontal direction is mutually perpendicular to the second horizontal direction, and A second transfer mechanism, the first transfer mechanism and the second transfer mechanism being arranged along the first horizontal direction, the second transfer mechanism comprising a second pallet that transfers the first and/or second sub-boats along the second horizontal direction to align the first and second pallets such that the first and second sub-boats can transfer between the first and second pallets; Wherein the bearing assembly is arranged above the first circulation mechanism and/or the second circulation mechanism, and the first supporting plate and/or the second supporting plate can be aligned with the bearing assembly along the first horizontal direction.
3. The boat flow mechanism as claimed in claim 2, wherein, The first flow mechanism includes: a first transfer member disposed along the second horizontal direction; The first sub-supporting plate is connected with the first conveying part and driven by the first conveying part to circulate the processed first sub-boat or second sub-boat along the second horizontal direction; The second sub-supporting plate is connected with the first conveying part and driven by the first conveying part to circulate along the first sub-boat or the second sub-boat before the process in the second horizontal direction; the first sub-supporting plate and the second sub-supporting plate are mutually independent and are arranged at intervals along the second horizontal direction; The second diversion mechanism includes: a second transfer member disposed along the second horizontal direction; The third sub-supporting plate is connected with the second conveying part and driven by the second conveying part to circulate the processed first sub-boat or second sub-boat along the second horizontal direction; A fourth sub-carrier connected to the second transfer member and driven by the second transfer member to circulate the first or second sub-boat in the second horizontal direction; the third sub-pallet and the fourth sub-pallet are independent of each other.
4. The boat flow mechanism of claim 2, wherein the carrier assembly comprises: Two or more sets of carriers, a plurality of the carriers being spaced above the second circulation mechanism along the second horizontal direction, each carrier being configured to carry the first or second sub-boat; two or more sets of lifting driving members, each bearing member being connected to at least one set of lifting driving members, the lifting driving members being capable of driving the bearing members to move in a vertical direction; Each bearing piece comprises two bearing plates which are arranged at intervals along the first horizontal direction, a first distance is reserved between the two bearing plates, the first distance is smaller than the length of the first sub-boat in the first horizontal direction, the first distance is smaller than the length of the second sub-boat in the first horizontal direction, the lifting driving piece can drive the two bearing plates to simultaneously descend until the bearing plates are lower than or equal to the upper surface of the second circulation mechanism in the height direction, the first sub-boat or the second sub-boat is transferred to the two bearing plates, and the lifting driving piece drives the two bearing plates to simultaneously ascend so that the first sub-boat or the second sub-boat is separated from the second circulation mechanism.
5. The boat flow mechanism of claim 2, wherein the carrier assembly comprises: a set of one or more carriers spaced above the first circulation mechanism along the second horizontal direction, one or more of the carriers configured to carry the first sub-boat; two or more sets of lifting driving members, each bearing member being connected to at least one set of lifting driving members, the lifting driving members being capable of driving the bearing members to move in a vertical direction; Each bearing piece comprises two bearing plates which are arranged at intervals along the first horizontal direction, a first distance is reserved between the two bearing plates, the first distance is smaller than the length of the first sub-boat in the first horizontal direction, the first distance is smaller than the length of the second sub-boat in the first horizontal direction, the lifting driving piece can drive the two bearing plates to simultaneously descend until the bearing plates are lower than or equal to the upper surface of the first transfer mechanism in the height direction, the first sub-boat is transferred to the two bearing plates, and the lifting driving piece drives the two bearing plates to simultaneously ascend so that the first sub-boat is separated from the first transfer mechanism.
6. The boat flow mechanism of claim 1, further comprising: The boat picking and placing assembly is arranged above the connection assembly and is configured to transfer the first sub boat or the second sub boat among the inserting and unloading piece mechanism, the connection assembly and the bearing assembly.
7. The boat flow mechanism of claim 1, further comprising: The temporary storage assembly is arranged above the connection assembly and is configured to enable the first sub-boat and/or the second sub-boat which move to the corresponding positions to be separated from the connection assembly for temporary storage.
8. A loading and unloading system, comprising: The inserting and unloading mechanism is used for inserting sheets into the boat structure or taking the sheets out of the boat structure, and the boat structure comprises a first sub boat and a second sub boat; The boat transfer mechanism of any one of claims 1-7 configured to transfer the second and first sub-boats out of the insertion and discharge mechanism in succession prior to processing, and to transfer the second and first sub-boats into the insertion and discharge mechanism in succession after processing in the same order.
9. The loading and unloading system of claim 8, wherein the loading and unloading system comprises a plurality of loading and unloading devices, The first sub-boat and the second sub-boat of the same boat structure are sequentially transferred to the connection assembly, at least the first sub-boat of the boat structure is placed on the bearing assembly, the second sub-boat of the boat structure is firstly transferred to the inserting and unloading mechanism through the connection assembly, the inserting and unloading mechanism is used for transferring the second sub-boat into the inserting and unloading mechanism through the connection assembly in the process of inserting and unloading the second sub-boat, so that the inserting and unloading mechanism can sequentially transfer the second sub-boat and the first sub-boat to the connection assembly, the first sub-boat and the second sub-boat are sequentially distributed along the direction deviating from the inserting and unloading mechanism, and the connection assembly can transfer the second sub-boat and the first sub-boat out sequentially.
10. The loading and unloading system of claim 8, wherein the inserting and unloading mechanism comprises: A first work table configured to carry the first sub-boat; A second work stage arranged at a distance from the first work stage in the second horizontal direction, the second work stage being configured to carry the second sub-boat; And a robot disposed between the first stage and the second stage, the robot being configured to insert the sheet before the process into the first or second sub-boat and to take out the sheet after the process from the first or second sub-boat.
11. The loading and unloading system of claim 10, further comprising: The sheet loading and unloading mechanism is arranged on one side, far away from the boat circulation mechanism, of the sheet loading and unloading mechanism, and is configured to input the sheets before the process to the sheet loading and unloading mechanism and output the sheets after the process from the sheet loading and unloading mechanism, wherein the sheet loading and unloading mechanism at least comprises: The first feeding conveying piece is arranged on one side of the first workbench in the first horizontal direction and is provided with a first feeding bearing position, the first feeding bearing position is configured to bear the sheet before the process of being fed by the first feeding conveying piece, and the mechanical arm can insert the sheet before the process of the first feeding bearing position into the first sub-boat of the first workbench; The first feeding conveying piece and the first discharging conveying piece are arranged at one side of the first workbench in the first horizontal direction at intervals, the first feeding conveying piece and the first discharging conveying piece are arranged at intervals in the second horizontal direction, the first discharging conveying piece is provided with a first discharging bearing position, the mechanical arm can discharge the processed sheet in the first sub boat of the first workbench to the first discharging bearing position, and the processed sheet in the first discharging bearing position is output through the first discharging conveying piece; The second feeding conveying piece is arranged on one side of the second workbench in the first horizontal direction and is provided with a second feeding bearing position, the second feeding bearing position is configured to bear the sheet before the process of being fed by the second feeding conveying piece, and the mechanical arm can insert the sheet before the process of the second feeding bearing position into the second sub-boat of the second workbench; The second unloading conveying piece is arranged on one side of the second workbench in the first horizontal direction, the second loading conveying piece and the second unloading conveying piece are arranged at intervals in the second horizontal direction, the second unloading conveying piece is provided with a second unloading bearing position, and the mechanical arm can be used for unloading the processed sheet in the second sub boat of the second workbench to the second unloading bearing position and outputting the processed sheet in the second unloading bearing position through the second unloading conveying piece.

Description

Boat circulation mechanism and loading and unloading system Technical Field The disclosure relates to the technical field of semiconductors and photovoltaics, in particular to a boat transfer mechanism and a loading and unloading system. Background With the development of photovoltaic technology, semiconductor or photovoltaic materials are widely used in industries such as electronics, new energy, and the like. The semiconductor and the photovoltaic material can be applied to products through chemical treatment, and a coating technology is one of the treatment modes, has an indispensable effect in the manufacturing process of the battery piece, and has an important effect on the efficiency of the battery piece. The related equipment related to film coating at least comprises a silicon wafer loading and unloading equipment, a boat transfer equipment, film coating equipment and the like, and as the capacity requirement is increased, the silicon wafer size requirement is increased, the film coating equipment is properly increased, and the number of corresponding transfer silicon wafers and boat structures is increased. In order to enable the silicon wafer to have traceability, the silicon wafer is generally marked, and the marking sequence of the silicon wafer is the sequence of loading and unloading the silicon wafer before and after film coating. However, as the number of boat structures increases, the condition of disordered silicon wafer marking can occur, so that the problem of disordered silicon wafer loading and unloading sequences before and after film coating can be caused. Disclosure of utility model In view of the above, the embodiments of the present disclosure provide a boat transfer mechanism and a loading and unloading system, so as to solve the problem in the related art that the order of loading and unloading silicon wafers is disordered after the boat structure carrying the marked sheets is transferred by the boat transfer mechanism. In a first aspect, an embodiment of the present disclosure provides a boat transfer mechanism configured to transfer a boat structure into or out of a wafer inserting and unloading mechanism, where the boat structure at least includes a first sub boat and a second sub boat, the boat transfer mechanism includes a docking assembly configured to carry and transfer the boat structure, and a carrying assembly disposed on the docking assembly and configured to buffer the boat structure transferred by the docking assembly, where after the at least first sub boat of the same boat structure is placed on the carrying assembly, the second sub boat of the boat structure is transferred into the wafer inserting and unloading mechanism through the docking assembly, and the wafer inserting and unloading mechanism is capable of transferring the second sub boat and the first sub boat to the docking assembly in sequence, so that the first sub boat and the second sub boat are sequentially arranged along a direction deviating from the wafer inserting and unloading mechanism. In some embodiments, the docking assembly includes a first transfer mechanism interfacing with the wafer insertion and removal mechanism in a first horizontal direction, the first transfer mechanism including a first pallet that transfers the first and/or second sub-boats in a second horizontal direction, the first horizontal direction being perpendicular to the second horizontal direction, and a second transfer mechanism aligned in the first horizontal direction, the second transfer mechanism including a second pallet that transfers the first and/or second sub-boats in the second horizontal direction to align the first and second pallets such that the first and second sub-boats can transfer between the first and second pallets, wherein the carrier assembly is disposed above the first and/or second transfer mechanisms, the first and/or second pallets can be aligned in the first horizontal direction with the carrier assembly. In a second aspect, an embodiment of the present disclosure further provides a loading and unloading system, including a sheet inserting and unloading mechanism for inserting sheets into or taking sheets out of a boat structure, where the boat structure includes a first sub-boat and a second sub-boat, and the boat transfer mechanism described above is configured to sequentially transfer the second sub-boat and the first sub-boat before the process out of the sheet inserting and unloading mechanism, and transfer the second sub-boat and the first sub-boat after the process into the sheet inserting and unloading mechanism in the same order. According to the boat transfer mechanism and the loading and unloading system, the boat transfer mechanism is configured to transfer boat structures which are at least divided into the first sub boat and the second sub boat, so that when the boat transfer mechanism transfers the first sub boat and the second sub boat respectively, the first sub boat and the s