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CN-224205605-U - Cylindrical cam driven silicon wafer correction mechanism

CN224205605UCN 224205605 UCN224205605 UCN 224205605UCN-224205605-U

Abstract

The utility model relates to the technical field of silicon wafer correction mechanisms, in particular to a cylindrical cam driven silicon wafer correction mechanism, which mainly solves the technical problems of lower correction precision, lower correction efficiency, shorter service life and easiness in pollution to silicon wafers in the existing silicon wafer correction mechanism. The mechanism comprises a frame, a transmission shaft, a driving assembly, a cylindrical cam, a correction clamp and a linkage piece, wherein the driving assembly drives the transmission shaft to rotate, so that the cylindrical cam is driven to rotate, and the correction clamp is further moved close to or away from each other under the cooperation of the cylindrical cam and the linkage piece. The mechanism can realize the reciprocating motion of the correction clamp through the unidirectional rotation of the cylindrical cam, can enable the correction clamp to accurately reach a preset position, can improve correction efficiency, is in hard contact with the linkage piece, has small abrasion, can ensure the service life, and can avoid dust caused by abrasion, so that pollution to silicon wafers can be avoided.

Inventors

  • XUE JUNTIAN
  • Shen Daiqi
  • ZHE FEI
  • HUANG JIN
  • CHEN JIARONG

Assignees

  • 西北电子装备技术研究所(中国电子科技集团公司第二研究所)

Dates

Publication Date
20260505
Application Date
20250509

Claims (10)

  1. 1. A cylindrical cam driven silicon wafer correction mechanism comprising: A frame (1); A transmission shaft (2) which is arranged in the left-right direction and is rotatably mounted on the frame (1); The driving assembly (3) is arranged on the frame (1) and used for driving the transmission shaft (2) to rotate; The cylindrical cams (4) are provided with two cylindrical cams which are fixedly sleeved at two end parts of the transmission shaft (2) respectively, the two cylindrical cams (4) are distributed symmetrically left and right, and a curved track (41) is formed on the circumferential surface of each cylindrical cam (4); The correction clamps (5) are arranged in two sets corresponding to the cylindrical cams (4) and are distributed symmetrically left and right, and each set of correction clamp (5) is arranged on the frame (1) and can slide along the left and right directions; The linkage pieces (6) are arranged in two corresponding correction clamps (5), and the linkage pieces (6) are fixedly connected with the corresponding correction clamps (5) and movably clamped on the curve tracks (41) of the corresponding cylindrical cams (4).
  2. 2. Cylindrical cam driven silicon wafer correction mechanism according to claim 1, characterized in that the frame (1) comprises: the vertical plates (11) are provided with two vertical plates which are distributed left and right; The cross beam (12) is fixedly connected to the two vertical plates (11) in a lap joint manner to form a gantry supporting structure; The transmission shaft (2) is located under the cross beam (12) and two ends of the transmission shaft are respectively rotatably mounted on the two vertical plates (11), the correction clamp (5) is slidably mounted on the cross beam (12), the upper end of the linkage piece (6) is fixedly connected with the corresponding correction clamp (5) and the lower end of the linkage piece is movably clamped on a curve track (41) of the corresponding cylindrical cam (4).
  3. 3. Cylindrical cam driven silicon wafer correction mechanism according to claim 2, characterized in that the drive shaft (2) forms an overhanging drive end (21) through the riser (11), the drive assembly (3) comprising: A rotating electric machine (31) whose housing is fixed to the frame (1) and whose output shaft is arranged in the left-right direction; a driving pulley (32) fixedly sleeved on an output shaft of the rotating motor (31); A driven pulley (33) fixedly sleeved on the overhanging driving end (21); and a timing belt (34) wound around the driving pulley (32) and the driven pulley (33).
  4. 4. A cylindrical cam driven silicon wafer correction mechanism according to claim 2 or 3, characterized in that the transmission shaft (2) penetrates through the vertical plate (11) to form an overhanging detection end (22), a metal baffle (71) is fixed on the overhanging detection end (22), a groove-type photoelectric sensor (72) is installed on the vertical plate (11) corresponding to the overhanging detection end (22), the metal baffle (71) can be placed in the groove-type photoelectric sensor (72) through the rotation of the transmission shaft (2) to acquire an origin position signal, and when the two correction clamps (5) are furthest apart in the origin position, the groove-type photoelectric sensor (72) is in communication connection with the driving assembly (3) to control the driving assembly (3) to stop when the origin position signal is received.
  5. 5. The cylindrical cam driven silicon wafer rectification mechanism as set forth in claim 1, wherein said curvilinear track (41) is elliptical.
  6. 6. The cylindrical cam driven silicon wafer correction mechanism according to claim 1, wherein a curved groove is formed in the circumferential surface of the cylindrical cam (4) to form the curved track, a rotating member (61) is mounted on one side of the linkage member (6) close to the cylindrical cam (4), the rotating member (61) is placed in the curved groove, and the rotating axis is perpendicular to the transmission shaft (2).
  7. 7. The cylindrical cam driven silicon wafer rectifying mechanism according to claim 6, characterized in that said rotary member (61) is a bolt type roller bearing.
  8. 8. The cylindrical cam driven silicon wafer rectification mechanism as claimed in claim 1, wherein the rectification clamp (5) comprises: A slide seat (51) slidably mounted on the frame (1); A strip-shaped mounting plate (52) fixed to the slide seat (51) and arranged in the front-rear direction; And the correction wheels (53) are provided with at least two and are arranged on the strip-shaped mounting plate (52) at intervals along the front-back direction, and the correction wheels (53) extend outwards from the strip-shaped plate so as to be capable of contacting with the silicon wafer.
  9. 9. The cylindrical cam driven silicon wafer rectifying mechanism according to claim 8, characterized in that the left-right position and the front-rear position of the strip-shaped mounting plate (52) relative to the sliding seat (51) are adjustable.
  10. 10. The cylindrical cam driven silicon wafer correction mechanism according to claim 9, wherein the strip-shaped mounting plate (52) is provided with a plurality of strip-shaped holes (521) which are distributed at intervals in the front-rear direction, each strip-shaped hole (521) is arranged in the left-right direction, and the strip-shaped mounting plate (52) is fixed on the sliding seat (51) by bolts penetrating through the strip-shaped holes (521).

Description

Cylindrical cam driven silicon wafer correction mechanism Technical Field The utility model relates to the technical field of silicon wafer correction mechanisms, in particular to a silicon wafer correction mechanism driven by a cylindrical cam. Background The silicon wafer correction mechanism is an important component of the photovoltaic automation equipment, is widely applied to silicon wafer transmission tracks of various automation equipment, and has the function of correcting the silicon wafer in transmission through the clamp, so that the silicon wafer is ensured not to be abnormal such as a card, a blocking piece and the like when entering a carrier such as a cache, a basket and the like. The existing silicon wafer correcting mechanism comprises a direct current stepping motor, a synchronous belt, belt wheels and correcting clamps, wherein an output shaft of the direct current stepping motor is vertically arranged, the synchronous belt is wound on the two belt wheels, one belt wheel is fixedly sleeved on the output shaft of the direct current stepping motor, the correcting clamps are provided with two linear sections which are respectively fixed on the synchronous belt, the belt wheels are driven to rotate by the output shaft of the direct current stepping motor, the synchronous belt is driven to operate, and then the two correcting clamps are mutually close to correct the silicon wafer or are mutually far away from the silicon wafer to avoid the transportation of the silicon wafer. The structure has the following defects that firstly, the approach or the separation of the two correction clamps is realized through the forward and reverse rotation of the direct current stepping motor, the frequent forward and reverse rotation can cause the failure problems of step loss, error accumulation and the like of the direct current stepping motor, the correction precision is influenced, the correction clamps cannot reach a preset position, the two correction clamps cannot be corrected too far or the two correction clamps are too close to clamp broken silicon wafers, the speed needs to be started from zero in the forward and reverse rotation, the correction process needs to take a long time, the correction efficiency is low, the beat requirement of a high-productivity scene can not be met, secondly, the synchronous belt needs to drive the correction clamps to move, and the synchronous belt needs to be horizontally arranged. Disclosure of utility model The utility model provides a cylindrical cam driven silicon wafer correcting mechanism, which aims to overcome the technical defects of lower correcting precision, lower correcting efficiency, shorter service life and easiness in pollution to silicon wafers in the existing silicon wafer correcting mechanism. The utility model provides a cylindrical cam driven silicon wafer correction mechanism, which comprises: A frame; A transmission shaft which is arranged in the left-right direction and is rotatably installed on the frame; The driving assembly is arranged on the rack and used for driving the transmission shaft to rotate; the two cylindrical cams are respectively and fixedly sleeved at two end parts of the transmission shaft, are symmetrically distributed left and right, and are all provided with curved tracks on the circumferential surface of each cylindrical cam; The correction clamps are arranged in two sets corresponding to the cylindrical cams and are distributed symmetrically left and right, and each set of correction clamp is arranged on the frame and can slide along the left and right directions; the linkage piece is provided with two corresponding correction clamps, and the linkage piece is fixedly connected with the corresponding correction clamps and movably clamped on the curve track of the corresponding cylindrical cam. Optionally, the rack includes: The vertical plates are provided with two vertical plates which are distributed left and right; the cross beam is fixedly connected to the two vertical plates in a lap joint manner to form a gantry supporting structure; The transmission shaft is located under the beam, two ends of the transmission shaft are respectively rotatably mounted on the two vertical plates, the correction clamp is slidably mounted on the beam, the upper end of the linkage piece is fixedly connected with the corresponding correction clamp, and the lower end of the linkage piece is movably clamped on a curve track of the corresponding cylindrical cam. Optionally, the drive shaft forms an overhanging drive end through the riser, and the drive assembly includes: A rotary motor, the housing of which is fixed on the frame and the output shaft is arranged along the left-right direction; a driving pulley fixedly sleeved on an output shaft of the rotating motor; the driven belt wheel is fixedly sleeved on the overhanging driving end; and the synchronous belt is wound on the driving belt pulley and the driven belt pulley. Optionally, the