CN-224205610-U - Transportation equipment and process system

CN224205610UCN 224205610 UCN224205610 UCN 224205610UCN-224205610-U

Abstract

The application relates to the technical field of semiconductors or photovoltaics, in particular to transportation equipment and a process system, which are used for solving the problems of large occupied area and low productivity of the transportation equipment. The transportation equipment comprises a rotating device, a sheet taking and placing device, a bearing structure, a caching device, a slide glass structure carrying device and a bearing structure conveying device, wherein the caching device comprises a processed placing position and a slide glass replacing caching position, the processed placing position can be used for specially temporarily storing a bearing structure carrying processed sheets, the slide glass replacing caching position can mainly cache a first slide glass structure in a slide glass replacing position, the bearing structure can be moved to the slide glass replacing caching position by the processed placing position, process mixing can be avoided, idle time of the transportation equipment is reduced, and when the slide glass of the first slide glass structure of the slide glass replacing caching position is replaced, the processed placing position can simultaneously receive the bearing structure carrying the processed sheets of new blanking, so that synchronous blanking and slide glass replacing are realized, and transportation efficiency and throughput are improved.

Inventors

XU FENG
SHI XIANG
LI WEN
YIN XIPING

Assignees

拉普拉斯(无锡)半导体科技有限公司

Dates

Publication Date: 20260505
Application Date: 20250526

Claims (11)

1. A transport apparatus for transporting to one or more process apparatuses sheets to be processed and outputting processed sheets, the process apparatus having a process chamber capable of receiving a plurality of first slide structures in an erect state for carrying a plurality of the sheets to be processed, the processed sheets being processed to form the processed sheets; Characterized in that the transport device comprises: one or more rotating means for carrying and rotating the first slide structure to bring the first slide structure into an upright or horizontal state; The sheet material taking and placing device is arranged adjacent to the rotating device, and when the rotating device drives the first slide glass structure to be in a horizontal state, a plurality of sheet materials to be processed are placed in the first slide glass structure and/or a plurality of processed sheet materials are taken out by the sheet material taking and placing device; One or more carrying structures for carrying a plurality of the first slide structures in an erect state; A buffer device comprising a processed placement bit for placing the carrier structure carrying the first slide structure carrying the processed sheet, and a change buffer bit to which the carrier structure can be moved from the processed placement bit; Slide structure handling means for handling the first slide structure in an erect state between the slide change buffer location and the rotating means; And the bearing structure conveying device is arranged adjacent to the buffer device and is used for conveying the bearing structure which is buffered by the buffer device and bears the first slide structure of the sheet to be processed to the process equipment and outputting the bearing structure bearing the first slide structure of the processed sheet to the process equipment.
2. The transport apparatus of claim 1, wherein the buffering means comprises: The buffer storage bracket comprises the processed placement bit and the film changing buffer storage bit; Two or more load bearing assemblies mounted to the cache mount configured to bear the load bearing structure; the bearing components are correspondingly arranged on the processed placement position and the film changing cache position, and the bearing structure can be moved onto the bearing components corresponding to the film changing cache position from the bearing components corresponding to the processed placement position.
3. The transport apparatus of claim 2, wherein the buffer device further comprises: The bearing structure jacking component can move to the processed placement position or the film changing cache position and can lift and fall, and is used for driving the bearing structure to be separated from or placed on the bearing component; The jacking and conveying assembly is connected with the bearing structure jacking assembly and used for driving the bearing structure jacking assembly to move so that the bearing structure jacking assembly is positioned at the processed placement position or the film changing cache position; Each bearing assembly comprises two or more bearing blocks, the two or more bearing blocks are mounted on two sides of the buffer support and used for bearing the bearing structure, and the bearing structure jacking assembly can extend out from between the two bearing blocks and used for driving the bearing structure to be separated from or put on the bearing assembly.
4. A transport apparatus according to claim 1, wherein said buffer means comprises two or more of said processed placement bits and one of said change buffer bits, said processed placement bits and said change buffer bits being arranged in sequence along a first direction, each of said processed placement bits corresponding to said load-bearing structure being movable to said change buffer bit.
5. The transport apparatus as recited in claim 1, wherein the carrier structure transporting device is capable of transporting the carrier structure carrying the first slide structure carrying the processed sheet to the processed placement site, and transporting the carrier structure corresponding to the change cache site to the processing apparatus in a case where the processed sheet in the first slide structure carried by the carrier structure corresponding to the change cache site is replaced with the sheet to be processed.
6. The transport apparatus of claim 1, wherein the load-bearing structure conveying means comprises: The inserting and taking assembly is used for placing the bearing structure in the processed placement position or inserting and taking the bearing structure in the film changing cache position; And the movable conveying assembly is connected with the inserting and taking assembly and drives the inserting and taking assembly to move, so that the inserting and taking assembly can place the bearing structure in the processed placing position or place the bearing structure in the disc changing buffer position for inserting and taking.
7. The transport apparatus of any one of claims 1 to 6, wherein a first side of the carrier transport means and a second side of the carrier transport means are arranged opposite each other in a second direction, the first side of the carrier transport means and the second side of the carrier transport means being provided with the buffer means and the rotation means, the buffer means and the rotation means being arranged on the same side in sequence in the first direction, wherein the second direction is perpendicular to the first direction; the sheet taking and placing device is arranged between the two rotating devices.
8. The transport apparatus of claim 1, wherein the slide structure handling device comprises: A support frame; And the carrying assembly is arranged on the supporting frame and is used for carrying the first slide structure in the vertical state between the slide changing buffer position of the buffer device and the rotating device.
9. The transport apparatus of claim 1, further comprising: The buffer table is arranged between the disc changing buffer position and the rotating device, so that the first slide structure can be carried between the buffer device and the buffer table or between the rotating device and the buffer table.
10. A transport apparatus according to any one of claims 1 to 6, wherein the rotating means comprises: The positioning and clamping assembly is used for bearing the first slide structure and positioning and clamping the first slide structure; the rotating assembly is connected with the positioning and clamping assembly and used for driving the positioning and clamping assembly to rotate so as to enable the first slide structure to be in an upright state or a horizontal state; The moving assembly is provided with an inserting sheet working area and a rotating working area along the moving path of the moving assembly, the inserting sheet working area is adjacent to the sheet taking and placing device, the rotating working area is adjacent to the carrying device of the slide structure, the moving assembly is connected with the rotating assembly and used for driving the rotating assembly to move, so that the positioning and clamping assembly is located in the inserting sheet working area and moves in the inserting sheet working area, and the sheet taking and placing device is used for placing a plurality of sheets to be processed into the first slide structure which is carried by the positioning and clamping assembly and is in a horizontal state, or the positioning and clamping assembly is located in the rotating working area, and the rotating assembly is used for driving the positioning and clamping assembly to rotate.
11. A process system, comprising: One or more process apparatuses having a process chamber capable of housing a plurality of first slide structures in an erect state; a transport apparatus as claimed in any one of claims 1 to 10, arranged adjacent to one or more of the process apparatuses, for conveying sheet material to be processed to the process apparatuses.

Description

Transportation equipment and process system Technical Field The application relates to the technical field of semiconductors or photovoltaics, in particular to transportation equipment and a process system. Background With the rapid development of photovoltaic and semiconductor technologies, the application of automation technology has become an important direction of product line upgrade today in pursuit of high-efficiency production, and transportation equipment is a key to realize large-scale and high-efficiency production. But the existing transportation equipment has low feeding efficiency and large occupied area. Disclosure of utility model In view of the above, the embodiment of the application provides a transportation device and a process system, which are used for solving the problems of low feeding efficiency and large occupied area of the transportation device. In a first aspect, an embodiment of the present application provides a transporting apparatus for transporting a to-be-processed sheet to one or more processing apparatuses and outputting a processed sheet, the processing apparatus having a processing chamber capable of accommodating a plurality of first slide structures in an erect state, the first slide structures being configured to hold a plurality of to-be-processed sheets, the to-be-processed sheet being processed to form a processed sheet, wherein the transporting apparatus includes one or more rotating means for holding and rotating the first slide structures such that the first slide structures are in an erect state or a horizontal state, a sheet pick-and-place device disposed adjacent to the rotating means, the sheet pick-and-place device being configured to place a plurality of to-be-processed sheets in the first slide structures and/or to pick out a plurality of processed sheets in the horizontal state, one or more holding structures for holding a plurality of first slide structures in an erect state, a buffer device including a processed place and a buffer place for holding the first slide structures holding the processed sheet, the holding the first slide structures, the holding structures being configured to be capable of being moved from the erect state to the buffer place, and the buffer structure being configured to be in a buffer place, and the buffer structure being configured to be placed between the erect state and the first slide structures, and the transporting apparatus being configured to hold the first slide structures. In a second aspect, an embodiment of the application provides a process system comprising one or more process tools having a process chamber capable of receiving a plurality of first slide structures in an erect condition, and a transport apparatus as referred to in any one of the first aspects disposed adjacent the one or more process tools for transporting a sheet to be processed to the process tools. The transportation equipment that this embodiment provided, when first slide glass structure material loading, bear and be in the horizontality by rotary device for first slide glass structure can accept more sheets more steadily, makes the size of first slide glass structure can be by the design bigger, and then holds more sheets, is favorable to improving the material loading efficiency of sheet. Besides, the first slide glass structure is transported in the vertical state except for feeding, so that the occupied area of the transportation equipment is reduced. In addition, the bearing structure bears the plurality of first slide structures, so that the plurality of first slide structures can feed the process equipment at the same time, and the feeding efficiency is further improved. In addition, the buffer device comprises a processed placement bit and a film-changing buffer bit, wherein the processed placement bit can be used for specially temporarily storing a bearing structure carrying processed sheets, the film-changing buffer bit can mainly buffer a first slide structure in film-changing, the bearing structure can be moved to the film-changing buffer bit from the processed placement bit, process mixing can be avoided, and idle time of conveying equipment is reduced. And when the first slide glass structure of the slide glass replacing buffer position is used for replacing the slide glass, the processed position can simultaneously receive the newly-discharged bearing structure for bearing processed sheet materials, so that the synchronous proceeding of the discharging and the slide glass replacing is realized, and the transportation efficiency and the throughput are improved. Meanwhile, the transportation equipment and the process equipment can form a process system, and as the process equipment can process the to-be-processed sheets borne by the plurality of first slide structures in the vertical state, the occupied area of the process equipment is reduced, the process efficiency of the process equipment is improved, the occupied area of t