Search

CN-224207426-U - Device for refining electronic grade ultra-pure ammonia through medium pressure rectification light and heavy removal

CN224207426UCN 224207426 UCN224207426 UCN 224207426UCN-224207426-U

Abstract

The utility model belongs to the technical field of electronic chemical purifying equipment, and discloses a device for refining electronic grade ultra-pure ammonia by medium-pressure rectification light and heavy removal. The device comprises a light component removing tower subsystem and a heavy component removing tower subsystem. The light component removing tower kettle of the light component removing tower subsystem is provided with a first liquid phase extraction port and a first gas phase extraction port which are parallel, and the first liquid phase extraction port and the first gas phase extraction port are communicated with a feed inlet of the heavy component removing tower after being connected in parallel through pipelines to form a switchable feed structure. The weight removing tower subsystem is provided with a switchable product extraction structure comprising a first extraction port and a second extraction port. The condensing equipment can be a split condenser and a reflux tank or a reflux condenser which is integrated at the top of the tower and has a chamfer structure at the lower end of the heat exchange tube. The utility model enhances the adaptability of the device to different raw materials and product requirements through the specific switchable feeding and extracting structure.

Inventors

  • LIU GUOCHENG
  • XIE YINGQIN
  • HOU WENGUI
  • LI MINGZHU
  • LI HAIHUA

Assignees

  • 天津深蓝化工技术有限公司

Dates

Publication Date
20260508
Application Date
20260205

Claims (10)

  1. 1. The device for purifying electronic grade ultra-pure ammonia by medium pressure rectification light and heavy removal is characterized by comprising a light removal tower subsystem and a heavy removal tower subsystem; The light component removing subsystem comprises a light component removing tower (1), condensing equipment communicated with the top of the light component removing tower (1) and a light component removing tower reboiler (4) communicated with the tower bottom of the light component removing tower (1), wherein the tower bottom of the light component removing tower (1) is provided with a first liquid phase extraction port (L1) and a first gas phase extraction port (V1) which are parallel; The heavy-removal tower subsystem comprises a heavy-removal tower (5), condensing equipment communicated with the top of the heavy-removal tower (5) and a heavy-removal tower reboiler (8) communicated with the tower kettle of the heavy-removal tower (5), and is also provided with a product extraction mechanism; The first liquid phase extraction port (L1) is communicated with the feed inlet of the weight removing tower (5) after being connected in parallel with the first gas phase extraction port (V1) through a pipeline, and the product extraction mechanism is communicated with the inlet of a product cooler (9) through a product pipeline.
  2. 2. The device according to claim 1, wherein the condensing equipment in the light component removal subsystem comprises a light component removal tower condenser (2) and a light component removal tower reflux tank (3) which are communicated with each other, a gas phase inlet of the light component removal tower condenser (2) is communicated with the top of the light component removal tower (1), a liquid phase outlet of the light component removal tower condenser is communicated with an inlet of the light component removal tower reflux tank (3), and a liquid phase outlet of the light component removal tower reflux tank (3) is communicated with the top of the light component removal tower (1) through a reflux pipeline.
  3. 3. The apparatus according to claim 1, characterized in that the condensing means in the light ends column subsystem is a light ends column reflux condenser (10) integrated in the top of the light ends column (1).
  4. 4. The device according to claim 1, wherein the condensing equipment in the de-weight tower subsystem comprises a de-weight tower condenser (6) and a de-weight tower reflux tank (7) which are communicated with each other, a gas phase inlet of the de-weight tower condenser (6) is communicated with the top of the de-weight tower (5), a liquid phase outlet of the de-weight tower condenser is communicated with an inlet of the de-weight tower reflux tank (7), and a liquid phase outlet of the de-weight tower reflux tank (7) is communicated with the top of the de-weight tower (5) through a reflux pipeline.
  5. 5. The apparatus according to claim 1, wherein the condensing device in the de-duplication column subsystem is a de-duplication column reflux condenser (11) integrally arranged at the top of the de-duplication column (5).
  6. 6. The device according to claim 1, characterized in that the product extraction mechanism comprises a first extraction port (P1) and a second extraction port (P2), the first extraction port (P1) is arranged on a reflux drum (7) of the de-weight tower or on a tower body of the de-weight tower (5), the second extraction port (P2) is arranged on the tower body of the de-weight tower (5), and the first extraction port (P1) and the second extraction port (P2) are connected in parallel through a pipeline and are alternatively communicated with the product pipeline.
  7. 7. A device according to claim 3, characterized in that the lower ports of the heat exchange tubes in the light ends removal column reflux condenser (10) have a chamfer structure.
  8. 8. The apparatus according to claim 5, wherein the lower port of the heat exchange tube in the de-duplication column reflux condenser (11) has a chamfer structure.
  9. 9. The apparatus of claim 1, wherein all condensing units in the light and heavy ends removal column subsystem are provided with a circulating cooling water interface and all reboilers are provided with a hot water interface.
  10. 10. The device according to claim 1, wherein the light component removal tower (1), the condensing equipment, the light component removal tower reboiler (4), the heavy component removal tower (5), the heavy component removal tower reboiler (8) and the connecting pipeline are integrally arranged on a common base to form a skid-mounted structure.

Description

Device for refining electronic grade ultra-pure ammonia through medium pressure rectification light and heavy removal Technical Field The utility model relates to the technical field of electronic chemical purification, in particular to a rectifying device for refining ultra-pure ammonia, and especially relates to a medium-pressure rectifying light and heavy removal device with various switchable feeding and extraction structures. Background Electronic grade ultra-pure ammonia is a key raw material in semiconductor manufacturing, and the purity requirement is extremely high. At present, a rectifying tower device is mainly adopted in industry to purify industrial ammonia. However, the existing rectification apparatus has the following significant drawbacks in construction: The structure is single, the adaptability is poor, and the connection from the tower bottom to downstream equipment of the existing rectifying device is usually only a single liquid phase extraction pipeline. When the composition of the raw materials changes, particularly when the content of heavy components (such as water and oil) is high, the single liquid phase feeding mode easily causes excessive load of downstream equipment and poor separation effect. Meanwhile, the product extraction is usually fixed on a tower top reflux tank or a tower kettle, and the structural design for flexibly adjusting the extraction position according to the purity requirements of different products is lacking. The cold and hot medium interface is high in requirement and complex in matching, and in order to realize low-temperature separation, a condenser in the existing device is required to be connected with a low-temperature refrigerant (such as liquid nitrogen) conveying pipeline, and a reboiler is required to be connected with a high-temperature heat source pipeline. The special medium pipeline system has complex structure and high investment and maintenance cost. The filling link has a pollution risk structure that the product outlet of the existing device is usually low in pressure and can be filled only by additionally connecting a booster pump. The introduction of the booster pump increases the complexity and connection point of the device, while its internal lubrication structure risks introducing contaminants into the product piping. Therefore, the ultra-pure ammonia rectification device in the prior art has the problems of insufficient flexibility in construction, complex matched system, easy pollution risk introduction and the like, and an improved device construction is needed to solve the problems. Disclosure of utility model The utility model aims to overcome the defects of the existing ultra-pure ammonia rectifying device in structure and provides a novel device for purifying electronic grade ultra-pure ammonia through medium-pressure rectification light and heavy removal. The device realizes flexible switching of feeding and extracting modes by improving the structures of the tower body, the pipeline connection and the interfaces, simplifies an external medium system, optimizes a product output structure, and improves the adaptability, the economy and the product protection performance of the device. In order to solve the technical problems, the utility model provides the following technical scheme: An apparatus for purifying electronic grade ultra-pure ammonia by medium pressure rectification light and heavy removal comprises a light removal tower subsystem and a heavy removal tower subsystem; The light component removing tower subsystem comprises a light component removing tower, condensing equipment communicated with the top of the light component removing tower and a light component removing tower reboiler communicated with the bottom of the light component removing tower, wherein the bottom of the light component removing tower is provided with a first liquid phase extraction port and a first gas phase extraction port which are parallel, and both extraction ports are provided with valves; The weight-removing tower subsystem comprises a weight-removing tower, condensing equipment communicated with the top of the weight-removing tower and a weight-removing tower reboiler communicated with the bottom of the weight-removing tower, wherein the weight-removing tower is communicated with at least one product extraction mechanism; The first liquid phase extraction port and the first gas phase extraction port of the tower kettle of the light component removal tower are connected in parallel through a pipeline, and then are alternatively connected with the feed inlet of the heavy component removal tower, and the product extraction mechanism is connected to the inlet of a product cooler through a product pipeline. In some embodiments, the condensing equipment in the light component removal subsystem is a light component removal tower condenser and a light component removal tower reflux tank which are communicated with each other, a gas phase inlet