CN-224207472-U - Device for filtering helium in liquid supply process

Abstract

The utility model relates to the technical field of liquid supply and discloses a helium filtering device in the liquid supply process, which comprises a sealing tube, an upper end cover and a lower end cover, wherein the upper end cover and the lower end cover are arranged at two ends of the sealing tube, the sealing tube is sealed by the upper end cover and the lower end cover, a helium filter membrane tube is arranged in the sealing tube, a liquid inlet tube is arranged on the upper end cover, a liquid outlet tube is arranged on the lower end cover, the helium filter membrane tube is connected with the liquid inlet tube and the liquid outlet tube, a vacuum connecting tube is further arranged on the upper end cover, the vacuum connecting tube is connected to the outside of the helium filter membrane tube in the sealing tube, and the vacuum connecting tube is used for enabling negative pressure to be formed in the sealing tube. According to the utility model, the small molecular helium escapes under the negative pressure effect through the filter membrane tube in the prior art, so that helium on the liquid is effectively removed.

Inventors

• LIU HONGGANG

Assignees

• 上海利骞电子科技有限公司

Dates

Publication Date

20260508

Application Date

20250603

Claims (7)

1. 1. The device for filtering helium in the liquid supply process is characterized by comprising a sealing tube, an upper end cover and a lower end cover, wherein the upper end cover and the lower end cover are arranged at two ends of the sealing tube, the sealing tube is sealed by the upper end cover and the lower end cover, a helium filter membrane tube is arranged in the sealing tube, a liquid inlet tube is arranged on the upper end cover, a liquid outlet tube is arranged on the lower end cover, the helium filter membrane tube is connected with the liquid inlet tube and the liquid outlet tube, a vacuum connecting tube is further arranged on the upper end cover, the vacuum connecting tube is connected to the outer part of the helium filter membrane tube in the sealing tube, and the vacuum connecting tube is used for enabling negative pressure to be formed in the sealing tube.
2. 2. The device for filtering helium in a liquid supply process according to claim 1, wherein valves are arranged on the liquid inlet pipe and the liquid outlet pipe.
3. 3. The apparatus for filtering helium during a liquid supply of claim 1, wherein said vacuum connecting tube is coupled to a vacuum pump.
4. 4. A device for filtering helium during a liquid supply according to claim 1, wherein a leak sensor is attached to said lower end cap.
5. 5. The apparatus of claim 1 to 4, wherein the helium gas filter tube is a spiral tube, and the helium gas permeability is greater than 99%.
6. 6. The apparatus of claim 5, wherein a holder is provided on the sealing tube.
7. 7. The apparatus of claim 5, wherein the spiral tube and the sealing tube are made of transparent glass material.

Description

Device for filtering helium in liquid supply process Technical Field The utility model relates to the technical field of liquid supply, in particular to a device for filtering helium in a liquid supply process. Background In some liquid supply apparatuses used in the production process in the industries of semiconductor, solar energy, liquid crystal panel manufacturing, etc., there is a high requirement for the purity of the liquid. These liquids include hydrochloric acid, nitric acid, hydrogen peroxide, etc., and since helium gas mixed in these liquids is an inert gas, it cannot be removed effectively by chemical means. These small amounts of helium often directly affect the production accuracy of semiconductors and liquid crystal panels. Disclosure of utility model The utility model aims to solve the problems, and provides a device for filtering helium in the liquid supply process, which enables micromolecular helium to escape under the action of negative pressure through a filter membrane tube in the prior art, so that helium on liquid is effectively removed. The technical scheme adopted by the utility model is as follows: the utility model provides a device of confession liquid in-process filtration helium, characterized by, includes upper end cover and the lower extreme that sealed tube and sealed tube both ends set up, upper end cover and lower extreme seal the sealed tube is intraductally to set up helium filter membrane pipe, sets up the feed liquor pipe on the upper end cover, sets up the drain pipe on the lower extreme cover, helium filter membrane union coupling feed liquor pipe and drain pipe still set up the vacuum connecting pipe on the upper end cover, the vacuum connecting pipe is connected to the outside of intraductal helium filter membrane pipe of sealed, the vacuum connecting pipe is used for making the intraductal negative pressure that forms of sealed. Further, valves are arranged on the liquid inlet pipe and the liquid outlet pipe. Further, the vacuum connection tube is coupled to a vacuum pump. Further, a liquid leakage sensor is connected to the lower end cover. Further, the helium filter membrane tube is a spiral tube, and the helium permeability is greater than 99%. Further, a fixing seat is arranged on the sealing tube. Further, the spiral tube and the sealing tube are made of transparent glass materials. The beneficial effects of the utility model are as follows: (1) The spiral filter membrane tube increases the flowing time of the liquid, and effectively discharges helium; (2) The negative pressure enables helium to be discharged more quickly; (3) The glass tube is beneficial to observation during use; (4) The liquid leakage sensor timely finds out the liquid leakage problem in the infusion process. Drawings FIG. 1 is a schematic perspective view of the present utility model; FIG. 2 is a schematic view of the transparent arrangement of the sealing tube; Fig. 3 is a schematic diagram of the present patent. The reference numerals in the drawings are respectively: 1. a sealing tube, an upper end cover; 3. a liquid inlet pipe; 5. a liquid outlet pipe, a filter membrane pipe; 7. a vacuum connection tube; 8, a liquid leakage sensor; 9. a fixing seat. Detailed Description The following describes in detail an embodiment of a device for filtering helium in a liquid feeding process according to the present utility model with reference to the accompanying drawings. Referring to fig. 1 to 3, an upper end cover 2 and a lower end cover 3 are arranged at two ends of a sealing tube 1, the sealing tube 1 is sealed by the upper end cover 2 and the lower end cover 3, the sealing tube 1 is a transparent glass tube, and acid-proof alkali-proof corrosion-resistant glass materials are selected for use, so that observation during liquid injection is facilitated. The liquid inlet pipe 4 is arranged on the upper end cover 2, the liquid outlet pipe 5 is arranged on the lower end cover 3, the helium filter membrane pipe 6 is arranged in the sealing pipe 1, and the helium filter membrane pipe 6 is connected with the liquid inlet pipe 4 and the liquid outlet pipe 5 to form a liquid channel. The helium filter membrane tube 6 is a spiral tube, and the helium permeability is more than 99%. The filter membrane tube 6 is a commercially available product, and the working principle is that the molecular gaps between the filter membranes can only pass through small molecules such as helium and cannot pass through macromolecular structures such as water and acid, when liquid flows through the filter membrane tube 6, the liquid molecules cannot escape from the filter membrane, and only the helium with small molecules escapes, so that the helium in the liquid is discharged. A vacuum connection pipe 7 is further arranged on the upper end cover 2, the vacuum connection pipe 7 is connected to the outside of the helium gas filter membrane pipe 6 in the sealing pipe 1, and the vacuum connection pipe 7 is used for forming n