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CN-224207690-U - Dust adsorption device

CN224207690UCN 224207690 UCN224207690 UCN 224207690UCN-224207690-U

Abstract

The utility model relates to a dust adsorption device which comprises a first shell, an air inlet pipe, an air outlet pipe and an adsorption assembly, wherein the upper end and the lower end of the interior of the first shell are respectively communicated with the air outlet pipe and the air inlet pipe, the adsorption assembly is positioned in the first shell and comprises adsorption pipes, fixing columns and end plates, the upper end and the lower end of each fixing column are respectively fixedly connected with the end plates, the fixing columns are circumferentially distributed by taking the axis of the air outlet pipe as an axis, and each fixing column is fixedly connected with at least one row of adsorption pipes. The utility model greatly reduces the dust content in the absorbed waste gas through low-temperature adsorption, adsorbent adsorption and normal-temperature adsorption, reduces the quantity of dust deposited on the inner wall of the pipeline, and prevents the pipeline from being blocked between the dry pump and the waste gas treatment equipment.

Inventors

  • CUI HANKUAN
  • CHEN GANG

Assignees

  • 上海高笙集成电路设备有限公司

Dates

Publication Date
20260508
Application Date
20250605

Claims (10)

  1. 1. The dust adsorption device is characterized by comprising a first shell (1), an air inlet pipe (3), an air outlet pipe (4) and an adsorption assembly (5), wherein the upper end and the lower end of the interior of the first shell (1) are respectively communicated with the air outlet pipe (4) and the air inlet pipe (3), the adsorption assembly (5) is positioned in the first shell (1), the adsorption assembly (5) comprises adsorption pipes (52), fixing columns (55) and end plates (51), the upper end and the lower end of each fixing column (55) are respectively fixedly connected with the end plates (51), the fixing columns (55) are circumferentially distributed by taking the axis of the air outlet pipe (4) as a shaft, and each fixing column (55) is at least fixedly connected with one row of adsorption pipes (52).
  2. 2. The dust adsorbing device as set forth in claim 1, wherein the fixing columns (55) are uniformly arranged circumferentially around the axis of the air outlet pipe (4), each row of adsorbing pipes (52) is uniformly arranged linearly along the fixing columns (55), and the axis of each adsorbing pipe (52) is perpendicular to the axis of the air outlet pipe (4).
  3. 3. A dust adsorbing apparatus according to claim 1, wherein the upper end plate (51) is annular and the lower end plate (51) is circular.
  4. 4. The dust adsorbing device according to claim 3, further comprising a screen plate (6) and support plates (11), wherein the inner side of the side wall of the first shell (1) is fixedly connected with two groups of support plates (11), the two groups of support plates (11) are arranged in the up-down direction, one screen plate (6) is placed on each group of support plates (11), the screen plate (6) is located below the adsorbing assembly (5), and an adsorbent is arranged between the two screen plates (6).
  5. 5. The dust adsorbing apparatus according to claim 1, further comprising a second housing (2), wherein the second housing (2) is located below the first housing (1), the first housing (1) is fixedly and detachably connected with the second housing (2), the interior of the first housing (1) is communicated with the interior of the second housing (2), the air outlet pipe (4) is fixedly connected with the first housing (1), and the air inlet pipe (3) is fixedly connected with the second housing (2).
  6. 6. A dust adsorbing apparatus according to claim 5, wherein the first housing (1) comprises a first pipe body and an upper end plate (10), the upper end of the first pipe body is fixedly and detachably connected with the upper end plate (10), the second housing (2) comprises a second pipe body and a lower end plate (20), and the lower end of the second pipe body is fixedly and detachably connected with the lower end plate (20); The adsorption assembly (5) further comprises a connecting column (53) and a fixing plate (54), the connecting column (53) is fixedly connected with the end plate (51), the connecting column (53) is fixedly connected with the fixing plate (54), and the fixing plate (54) is fixedly and detachably connected with the lower side of the upper end plate (10).
  7. 7. The dust adsorbing device as set forth in claim 6, further comprising a refrigerating cylinder (7), a liquid inlet pipe (71) and a liquid outlet pipe (72), wherein the refrigerating cylinder (7) is located inside the second shell (2) and is fixedly connected with the lower end plate (20) of the second shell (2), and the liquid inlet pipe (71) and the liquid outlet pipe (72) are respectively fixedly connected with the lower end plate (20) and are communicated with the inner cavity of the refrigerating cylinder (7).
  8. 8. The dust adsorbing device as set forth in claim 7, further comprising a partition plate (73), wherein the partition plate (73) is located in the inner cavity of the refrigerating cylinder (7), the lower portion of the partition plate (73) is fixedly connected with the lower end plate (20), a channel is formed between the upper portion of the partition plate (73) and the inner wall of the refrigerating cylinder (7), and the liquid inlet pipe (71) and the liquid outlet pipe (72) are located on the left side and the right side of the partition plate (73) respectively.
  9. 9. The dust adsorbing device as set forth in claim 7, further comprising an outer cylinder (8) and fins (81), wherein the inner wall of the outer cylinder (8) is attached to the outer side surface of the refrigerating cylinder (7), and the fins (81) are fixedly connected with the outer side surface of the outer cylinder (8).
  10. 10. A dust adsorbing apparatus according to claim 9, wherein the fin (81) is annular with notches (80), and two notches (80) adjacent to each other in the vertical direction are alternately distributed.

Description

Dust adsorption device Technical Field The utility model relates to the field of dust adsorption, in particular to a dust adsorption device. Background In the semiconductor manufacturing industry, there is a need to treat the exhaust gases generated by semiconductor manufacturing. When the dry pump delivers the exhaust gas, the exhaust gas needs to be transported through a long pipeline to reach the exhaust gas treatment equipment. Since the semiconductor exhaust gas contains dust, the dust is deposited in the pipeline during the movement of the exhaust gas, thereby causing the pipeline to be blocked. In order to avoid the pipeline blockage, manual periodical pipeline disassembly and cleaning are needed, and the cost and the workload are increased. Disclosure of utility model The present utility model is directed to solving the above problems, and provides a dust adsorbing device that solves the above problems. The dust adsorption device comprises a first shell, an air inlet pipe, an air outlet pipe and an adsorption assembly, wherein the upper end and the lower end of the interior of the first shell are respectively communicated with the air outlet pipe and the air inlet pipe, the adsorption assembly is positioned in the first shell and comprises an adsorption pipe, fixing columns and end plates, the upper end and the lower end of each fixing column are respectively fixedly connected with the end plates, the fixing columns are circumferentially distributed by taking the axis of the air outlet pipe as a shaft, and each fixing column is at least fixedly connected with one row of adsorption pipes. Preferably, the fixing columns are uniformly distributed along the circumference by taking the axis of the air outlet pipe as a shaft, each row of adsorption pipes are uniformly distributed along the straight line of the fixing columns, and the axis of each adsorption pipe is perpendicular to the axis of the air outlet pipe. Preferably, the upper end plate is annular and the lower end plate is circular. Preferably, the adsorption device further comprises a screen plate and support plates, wherein the inner side of the side wall of the first shell is fixedly connected with two groups of support plates, the two groups of support plates are distributed in the vertical direction, one screen plate is placed on each group of support plates, the screen plate is located below the adsorption assembly, and an adsorbent is arranged between the two screen plates. Preferably, the air inlet pipe is fixedly connected with the first shell, the air outlet pipe is fixedly connected with the second shell, and the air inlet pipe is fixedly connected with the second shell. Preferably, the first shell comprises a first pipe body and an upper end plate, wherein the upper end of the first pipe body is fixedly and detachably connected with the upper end plate; The adsorption assembly further comprises a connecting column and a fixing plate, wherein the connecting column is fixedly connected with the end plate, the connecting column is fixedly connected with the fixing plate, and the fixing plate is fixedly connected with the lower side of the upper end plate in a detachable mode. Preferably, the refrigerator further comprises a refrigeration cylinder, a liquid inlet pipe and a liquid outlet pipe, wherein the refrigeration cylinder is positioned in the second shell and fixedly connected with the lower end plate of the second shell, and the liquid inlet pipe and the liquid outlet pipe are respectively fixedly connected with the lower end plate and communicated with the inner cavity of the refrigeration cylinder. Preferably, the refrigerator further comprises a partition plate, the partition plate is located in the inner cavity of the refrigerator barrel, the lower portion of the partition plate is fixedly connected with the lower end plate, a channel is formed between the upper portion of the partition plate and the inner wall of the refrigerator barrel, and the liquid inlet pipe and the liquid outlet pipe are located on the left side and the right side of the partition plate respectively. Preferably, the refrigerator further comprises an outer cylinder and fins, wherein the inner wall of the outer cylinder is attached to the outer side face of the refrigeration cylinder, and the fins are fixedly connected with the outer side face of the outer cylinder. Preferably, the fins are annular with notches, and two notches adjacent to each other in the vertical direction are distributed in a staggered manner. The utility model has the advantages that the dust content in the absorbed waste gas is greatly reduced through the low-temperature adsorption, the adsorbent adsorption and the normal-temperature adsorption for three times, the quantity of dust deposited on the inner wall of the pipeline is reduced, and the pipeline between the dry pump and the waste gas treatment equipment is prevented from being blocked. Drawings In order to more clearly illus