Search

CN-224207691-U - Combined cold trap

CN224207691UCN 224207691 UCN224207691 UCN 224207691UCN-224207691-U

Abstract

The utility model relates to a composite cold trap which comprises a shell, an attachment plate, an outer net barrel, an air inlet pipe and an air outlet pipe, wherein the inner cavity of the shell is respectively communicated with the air inlet pipe and the air outlet pipe, the attachment plate and the outer net barrel are positioned in the shell, the attachment plate is positioned between the outer net barrel and the air inlet pipe, the outer net barrel is positioned between the attachment plate and the air outlet pipe, and an adsorbent is arranged in the outer net barrel. The utility model is provided with the air duct by surrounding the plurality of attachment plates and the second baffle plate, thereby increasing the contact area of the waste gas and the attachment plates and increasing the quantity of dust deposited on the attachment plates in the waste gas, the annular cavity between the outer net barrel and the inner net barrel is internally provided with the adsorbent, so that the waste gas radially passes through the adsorbent, the resistance of the adsorbent when leaving the adsorbent is reduced, the flow rate of the waste gas is increased, the quantity of the waste gas treated in unit time is increased, and the waste gas passes through all positions of the adsorbent, so that all the adsorbents more uniformly adsorb the waste gas, and the adsorbent is saved.

Inventors

  • CUI HANBO
  • DU QUANCHENG

Assignees

  • 上海高笙集成电路设备有限公司

Dates

Publication Date
20260508
Application Date
20250605

Claims (10)

  1. 1. The composite cold trap is characterized by comprising a shell, an attachment plate (3), an outer net barrel (6), an air inlet pipe (13) and an air outlet pipe (14), wherein the inner cavity of the shell is respectively communicated with the air inlet pipe (13) and the air outlet pipe (14), the attachment plate (3) and the outer net barrel (6) are positioned inside the shell, the attachment plate (3) is positioned between the outer net barrel (6) and the air inlet pipe (13), the outer net barrel (6) is positioned between the attachment plate (3) and the air outlet pipe (14), and an adsorbent is arranged in the outer net barrel (6).
  2. 2. The composite cold trap of claim 1, wherein the housing comprises an inner cylinder (1), a bottom plate (11) and a top plate (12), wherein the bottom of the inner cylinder (1) is fixedly connected with the bottom plate (11), the top of the inner cylinder (1) is fixedly and detachably connected with the top plate (12), the air inlet pipe (13) is fixedly connected with the inner cylinder (1), and the air outlet pipe (14) is fixedly connected with the top plate (12).
  3. 3. The composite cold trap of claim 2, further comprising an outer cylinder (2), wherein the outer cylinder (2) is located outside the inner cylinder (1) and is fixedly connected with the inner cylinder (1), a cooling cavity (20) is formed between the inner cylinder (1) and the outer cylinder (2), the outer cylinder (2) is fixedly connected with a water inlet pipe (21) and a water outlet pipe (22) respectively, and the water inlet pipe (21) and the water outlet pipe (22) are respectively communicated with the cooling cavity (20).
  4. 4. The composite cold trap of claim 2, further comprising a first baffle (4) and a second baffle (31), wherein the attaching plates (3) are cylindrical, the centers of the attaching plates (3) are the same and the radii of the attaching plates are different, vent holes (30) are formed in the side surfaces of the attaching plates (3), the second baffle (31) is arranged on the outer side of the attaching plates (3) close to the vent holes (30), and the first baffle (4) is located at the upper end of the attaching plates (3) and seals the space between two adjacent attaching plates (3) and the space between the outermost attaching plate (3) and the inner barrel (1).
  5. 5. The composite cold trap of claim 4, further comprising a guide plate (5) and a second fixing rod (9), wherein the second fixing rod (9) passes through the inside of the attachment plate (3) of the innermost layer, the upper end and the lower end of the second fixing rod (9) are respectively fixedly connected with the guide plate (5) and the bottom plate (11), the guide plate (5) is positioned above the first baffle plate (4), and a channel (50) is formed between the outer side of the guide plate (5) and the inner barrel (1).
  6. 6. A composite cold trap according to claim 2, further comprising a first fixing rod (8) and a supporting plate (81), wherein the first fixing rod (8) is located below the top plate (12) and is fixedly and detachably connected with the top plate (12), the lower end of the first fixing rod (8) is fixedly connected with the supporting plate (81), and the outer net drum (6) is placed above the supporting plate (81).
  7. 7. The composite cold trap of claim 6, further comprising an inner mesh tube (7), wherein the inner mesh tube (7) is located inside the outer mesh tube (6), the inner mesh tube (7) is placed above the supporting plate (81), the adsorbent is located between the outer mesh tube (6) and the inner mesh tube (7), and an annular space exists between the outer side surface of the outer mesh tube (6) and the inner wall of the shell.
  8. 8. The composite cold trap of claim 1, wherein the adsorbent is absorbent cotton.
  9. 9. A composite cold trap according to claim 2, further comprising a drain (16), wherein the base plate (11) is fixedly connected to the drain (16), and wherein the drain (16) is in communication with the interior cavity of the housing.
  10. 10. A composite cold trap according to claim 2, further comprising a plurality of universal wheels (17), the plurality of universal wheels (17) being mounted below the base plate (11).

Description

Combined cold trap Technical Field The utility model relates to the field of dust adsorption, in particular to a composite cold trap. Background In the semiconductor manufacturing industry, there is a need to treat the exhaust gases generated by semiconductor manufacturing. When the dry pump delivers the exhaust gas, the exhaust gas needs to be transported through a long pipeline to reach the exhaust gas treatment equipment. Since the semiconductor exhaust gas contains dust, the dust is deposited in the pipeline during the movement of the exhaust gas, thereby causing the pipeline to be blocked. In order to avoid the pipeline blockage, manual periodical pipeline disassembly and cleaning are needed, and the cost and the workload are increased. The resistance of the existing waste gas adsorption device is large, so that the flow speed of waste gas in the waste gas adsorption device is low, and the waste gas with large flow rate is not easy to treat. And the exhaust gas often passes through the same fixed position when passing through the adsorbent, and when the adsorbent at the position is saturated, the adsorbents at other positions are not saturated yet. However, all the adsorbent still needs to be replaced at this time, which causes waste of the adsorbent. Disclosure of utility model The present utility model is directed to solving the above-mentioned problems, and provides a composite cold trap, which solves the above-mentioned problems. The composite cold trap comprises a shell, an attachment plate, an outer net barrel, an air inlet pipe and an air outlet pipe, wherein the inner cavity of the shell is respectively communicated with the air inlet pipe and the air outlet pipe, the attachment plate and the outer net barrel are positioned in the shell, the attachment plate is positioned between the outer net barrel and the air inlet pipe, the outer net barrel is positioned between the attachment plate and the air outlet pipe, and an adsorbent is arranged in the outer net barrel. Preferably, the shell comprises an inner cylinder, a bottom plate and a top plate, wherein the bottom of the inner cylinder is fixedly connected with the bottom plate, the top of the inner cylinder is fixedly and detachably connected with the top plate, the air inlet pipe is fixedly connected with the inner cylinder, and the air outlet pipe is fixedly connected with the top plate. Preferably, the cooling device further comprises an outer cylinder, wherein the outer cylinder is positioned outside the inner cylinder and is fixedly connected with the inner cylinder, a cooling cavity is formed between the inner cylinder and the outer cylinder, the outer cylinder is respectively and fixedly connected with a water inlet pipe and a water outlet pipe, and the water inlet pipe and the water outlet pipe are respectively communicated with the cooling cavity. Preferably, the device further comprises a first baffle and a second baffle, the attachment plates are cylindrical, the circle centers of the attachment plates are the same and the radii of the attachment plates are different, vent holes are formed in the side faces of the attachment plates, the second baffle is arranged on the outer sides of the attachment plates and close to the vent holes, and the first baffle is located at the upper ends of the attachment plates and seals the space between two adjacent attachment plates and the space between the outermost attachment plate and the inner cylinder. Preferably, the device further comprises a guide plate and a second fixing rod, wherein the second fixing rod penetrates through the inside of the attaching plate of the innermost layer, the upper end and the lower end of the second fixing rod are respectively fixedly connected with the guide plate and the bottom plate, the guide plate is positioned above the first baffle, and a channel is formed between the outer side of the guide plate and the inner cylinder. Preferably, the outer net drum comprises a top plate, a bottom plate, a first fixing rod and a supporting plate, wherein the first fixing rod is located below the top plate and is fixedly and detachably connected with the top plate, the lower end of the first fixing rod is fixedly connected with the supporting plate, and the outer net drum is placed above the supporting plate. Preferably, the device further comprises an inner net barrel, wherein the inner net barrel is positioned inside the outer net barrel, the inner net barrel is placed above the supporting plate, the adsorbent is positioned between the outer net barrel and the inner net barrel, and an annular space exists between the outer side surface of the outer net barrel and the inner wall of the shell. Preferably, the adsorbent is absorbent cotton. Preferably, the water draining device further comprises a water draining pipe, wherein the bottom plate is fixedly connected with the water draining pipe, and the water draining pipe is communicated with the inner cavity of the shell. P