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CN-224207692-U - Internal and external double-cooling cold trap

CN224207692UCN 224207692 UCN224207692 UCN 224207692UCN-224207692-U

Abstract

The utility model relates to an inner and outer double-cooling type cold trap, wherein the upper end and the lower end of an outer cylinder are respectively and fixedly connected with a top plate and a bottom plate, the inner cylinder is positioned in the outer cylinder, a first cooling cavity is formed between the outer cylinder and the inner cylinder, the cooling cylinder is inserted into the first cavity of the inner cylinder, a second cooling cavity is formed in the cooling cylinder, a first water inlet hole and a first water outlet hole are formed in the top plate, the first water inlet hole and the first water outlet hole are respectively communicated with the first cooling cavity and the second cooling cavity, and an air inlet pipe and an air outlet pipe are respectively communicated with the first cavity. The cooling water is introduced into the first cooling inner cavity and the second cooling inner cavity, so that the inner wall of the inner cylinder can cool down and adsorb dust, the adsorption area is increased, the overall temperature of the first inner cavity is reduced, more dust in waste gas can be adsorbed, the inner wall of the inner cylinder is in contact with the adsorption sheets for heat conduction, the temperature of the adsorption sheets far away from the outer edge of the cooling cylinder is lower, the temperature of the adsorption sheets is further reduced, and the adsorption efficiency is improved.

Inventors

  • CUI HANBO
  • CHENG YONG

Assignees

  • 上海高笙集成电路设备有限公司

Dates

Publication Date
20260508
Application Date
20250605

Claims (10)

  1. 1. The utility model provides an inside and outside double-cooled cold trap, its characterized in that includes urceolus (1), inner tube (2), first inner chamber (20), bottom plate (3), roof (4), cooling cylinder (5), intake pipe (11) and outlet duct (12), urceolus (1) upper and lower both ends respectively with roof (4) and bottom plate (3) fixed connection, inner tube (2) are located urceolus (1) inside, be formed with first cooling chamber (10) between urceolus (1) and inner tube (2), cooling cylinder (5) insert in first inner chamber (20) of inner tube (2), cooling cylinder (5) inside is formed with second cooling chamber (50), roof (4) are formed with first inlet port (41) and first outlet port (42), first inlet port (41) and first outlet port (42) are linked together with first cooling chamber (10) and second cooling chamber (50) respectively, intake pipe (11) and outlet duct (12) are linked together with first inner chamber (20) respectively.
  2. 2. The cold trap according to claim 1, further comprising a fixing plate (53), wherein the fixing plate (53) is located above the cooling cylinder (5) and is fixedly connected with the cooling cylinder (5), the fixing plate (53) is fixedly connected with the upper end of the inner cylinder (2) and is detachably connected with the upper end of the inner cylinder, the fixing plate (53) seals the upper end of the first inner cavity (20), the fixing plate (53) is provided with a second water inlet hole (51) and a second water outlet hole (52), the second water inlet hole (51) and the second water outlet hole (52) are respectively communicated with the second cooling inner cavity (50), and the second water inlet hole (51) and the second water outlet hole (52) are respectively communicated with the first water inlet hole (41) and the first water outlet hole (42).
  3. 3. An inner and outer double-cooled cold trap according to claim 2, wherein a second inner cavity (40) is formed between the top plate (4) and the fixed plate (53), the second water inlet hole (51) and the second water outlet hole (52) are respectively communicated with the second inner cavity (40), the second inner cavity (40) is communicated with the first water inlet hole (41) and the first water outlet hole (42), and the second inner cavity (40) is communicated with the first cooling cavity (10).
  4. 4. An inner and outer double-cooled cold trap according to claim 3, wherein a partition plate is arranged in the second inner cavity (40), the partition plate is arranged between the first water inlet hole (41) and the first water outlet hole (42), and the partition plate is arranged between the second water inlet hole (51) and the second water outlet hole (52).
  5. 5. The cold trap of claim 1, further comprising an adsorption sheet (6), wherein the adsorption sheet (6) is located at the outer side of the cooling cylinder (5) and is fixedly connected with the cooling cylinder (5), the adsorption sheet (6) is arranged in a straight line along the cooling cylinder (5), the adsorption sheet (6) is provided with notches (60), and the notches (60) of two adjacent adsorption sheets (6) are not overlapped.
  6. 6. The cold trap of claim 5, wherein the outer side of the adsorption plate (6) is attached to the inner wall of the inner cylinder (2).
  7. 7. The cold trap according to claim 1, further comprising a hollow plate (54), wherein an inner cavity isolated from the second cooling inner cavity (50) is formed in the hollow plate (54), the hollow plate (54) is located in the second cooling inner cavity (50), the upper part of the hollow plate (54) is fixedly connected with the fixing plate (53), a channel is formed between the lower part of the hollow plate (54) and the inner wall of the cooling cylinder (5), the hollow plate (54) divides the second cooling inner cavity (50) into two parts, and the two parts of the second cooling inner cavity (50) are only communicated through the channel.
  8. 8. The internal and external double-cooling cold trap according to claim 1, wherein the air inlet pipe (11) and the air outlet pipe (12) respectively penetrate through the outer cylinder (1) and the inner cylinder (2), the air inlet pipe (11) and the air outlet pipe (12) are respectively fixedly connected with the outer cylinder (1) and the inner cylinder (2), the height of the air inlet pipe (11) is lower than that of the cooling cylinder (5) and the air outlet pipe (12), and the inner cylinder (2) is communicated with a plurality of air outlet pipes (12).
  9. 9. An inner and outer double-cooled cold trap according to claim 1, wherein the top plate (4) is detachably connected with the outer cylinder (1), and the inner cylinder (2) is fixedly and detachably connected with the bottom plate (3).
  10. 10. The internal and external double-cooling cold trap according to claim 1, further comprising supporting feet (7), universal wheels (8), connecting cylinders (31) and screws (71), wherein the lower part of the bottom plate (3) is fixedly connected with the universal wheels (8), the lower part of the bottom plate (3) is fixedly connected with the connecting cylinders (31), the upper ends of the screws (71) are inserted into the connecting cylinders (31) and are in threaded connection with the connecting cylinders (31), and the lower ends of the screws (71) are fixedly connected with the supporting feet (7).

Description

Internal and external double-cooling cold trap Technical Field The utility model relates to the field of waste gas and dust adsorption, in particular to an internal and external double-cooling cold trap. Background In the semiconductor manufacturing industry, there is a need to treat the exhaust gases generated by semiconductor manufacturing. When the dry pump delivers the exhaust gas, the exhaust gas needs to be transported through a long pipeline to reach the exhaust gas treatment equipment. Since the semiconductor exhaust gas contains dust, the dust is deposited in the pipeline during the movement of the exhaust gas, thereby causing the pipeline to be blocked. In order to avoid the pipeline blockage, manual periodical pipeline disassembly and cleaning are needed, and the cost and the workload are increased. Disclosure of utility model The utility model aims to solve the problems, and provides an inner-outer double-cooling cold trap which solves the problem that dust in waste gas is deposited on a pipeline. The inner-outer double-cooling cold trap comprises an outer cylinder, an inner cylinder, a first inner cavity, a bottom plate, a top plate, a cooling cylinder, an air inlet pipe and an air outlet pipe, wherein the upper end and the lower end of the outer cylinder are respectively and fixedly connected with the top plate and the bottom plate, the inner cylinder is positioned inside the outer cylinder, a first cooling cavity is formed between the outer cylinder and the inner cylinder, the cooling cylinder is inserted into the first inner cavity of the inner cylinder, a second cooling inner cavity is formed inside the cooling cylinder, a first water inlet hole and a first water outlet hole are formed in the top plate, the first water inlet hole and the first water outlet hole are respectively communicated with the first cooling cavity and the second cooling inner cavity, and the air inlet pipe and the air outlet pipe are respectively communicated with the first inner cavity. Preferably, the cooling device further comprises a fixing plate, wherein the fixing plate is positioned above the cooling cylinder and is fixedly connected with the cooling cylinder, the fixing plate is fixedly connected with the upper end of the inner cylinder and is detachably connected with the upper end of the inner cylinder, the fixing plate is used for blocking the upper end of the first inner cavity, the fixing plate is provided with a second water inlet hole and a second water outlet hole, the second water inlet hole and the second water outlet hole are respectively communicated with the second cooling inner cavity, and the second water inlet hole and the second water outlet hole are respectively communicated with the first water inlet hole and the first water outlet hole. Preferably, a second inner cavity is formed between the top plate and the fixed plate, the second water inlet hole and the second water outlet hole are respectively communicated with the second inner cavity, the second inner cavity is communicated with the first water inlet hole and the first water outlet hole, and the second inner cavity is communicated with the first cooling cavity. Preferably, a partition plate is arranged in the second inner cavity, the partition plate is located between the first water inlet hole and the first water outlet hole, and the partition plate is located between the second water inlet hole and the second water outlet hole. Preferably, the cooling device further comprises an adsorption sheet, wherein the adsorption sheet is positioned at the outer side of the cooling cylinder and is fixedly connected with the cooling cylinder, the adsorption sheets are linearly arranged along the cooling cylinder, gaps are formed in the adsorption sheets, and the gaps of two adjacent adsorption sheets are not overlapped. Preferably, the outer side surface of the adsorption piece is attached to the inner wall of the inner cylinder. Preferably, the cooling device further comprises a hollow plate, wherein an inner cavity isolated from the second cooling inner cavity is formed in the hollow plate, the hollow plate is positioned in the second cooling inner cavity, the upper part of the hollow plate is fixedly connected with the fixed plate, a channel is formed between the lower part of the hollow plate and the inner wall of the cooling cylinder, the second cooling inner cavity is divided into two parts by the hollow plate, and the two parts of the second cooling inner cavity are communicated only through the channel. Preferably, the air inlet pipe and the air outlet pipe respectively penetrate through the outer cylinder and the inner cylinder, the air inlet pipe and the air outlet pipe are respectively fixedly connected with the outer cylinder and the inner cylinder, the height of the air inlet pipe is lower than that of the cooling cylinder and the air outlet pipe, and the inner cylinder is communicated with a plurality of air outlet pipes. Preferab