CN-224207710-U - Emergency disposal system for safe emptying tail gas in polysilicon production

CN224207710UCN 224207710 UCN224207710 UCN 224207710UCN-224207710-U

Abstract

The utility model discloses a safety vent tail gas emergency treatment system for polycrystalline silicon production, which comprises a tail gas vent buffer tank, a condensation mechanism, a dynamic wave mixer, a tail gas washing tower, a water seal tank and an emergency treatment tank, wherein the condensation mechanism is connected with a gas outlet of the tail gas vent buffer tank through a pipeline IV and is used for condensing noncondensable gas output by the tail gas vent buffer tank to generate condensate II and noncondensable gas II, the emergency treatment tank is used for storing alkaline solution and is internally provided with a pipeline twenty-one and a pipeline twenty-two, one end of the pipeline twenty-one is connected with a safety vent main pipe, the safety vent main pipe is connected with the pipeline IV, the pipeline twenty-one is provided with a safety valve I, and the pipeline twenty-two is provided with a safety valve II. When the pressure in the safety vent main pipe is too high, the first safety valve or/and the second safety valve are/is tripped, the tail gas enters an emergency treatment tank through a twenty-one pipeline or a twenty-two pipeline, and the emergency treatment tank can perform high-efficiency acid-base neutralization treatment on the tail gas output by the safety vent main pipe, so that the treatment efficiency is effectively improved.

Inventors

JIANG LEIZHEN
CHEN CHEN
CHANG LULU
ZHANG XIAOMIN
SUN HUI

Assignees

江苏中能硅业科技发展有限公司

Dates

Publication Date: 20260508
Application Date: 20250530

Claims (10)

1. The utility model provides a polycrystalline silicon production safety vent gas emergency disposal system which characterized in that includes: The tail gas emptying buffer tank is used for receiving the process tail gas and performing preliminary condensation to generate condensate I and noncondensable gas I; The condensing mechanism is connected with a gas outlet of the tail gas emptying buffer tank through a pipeline IV and is used for condensing the non-condensable gas I output by the tail gas emptying buffer tank to generate condensate II and non-condensable gas II; the dynamic wave mixer is connected with a gas outlet of the condensing mechanism and is used for receiving non-condensable gas II output by the condensing mechanism and mixing acid and alkali; the tail gas washing tower is connected with the dynamic wave mixer, receives non-condensable gas II after acid-base mixing and performs spray treatment; the water seal tank is connected with a gas outlet of the tail gas washing tower, and is used for dissolving and discharging the waste gas output by the tail gas washing tower; The emergency treatment tank is used for storing alkaline solution and internally provided with a pipeline twenty-one and a pipeline twenty-two, wherein one end of the pipeline twenty-one is connected with a safety vent main pipe, the safety vent main pipe is connected with a pipeline IV, the pipeline twenty-one is provided with a safety valve I and a rupture disk I, and the pipeline twenty-two is provided with a safety valve II and a rupture disk II.
2. The polysilicon production safety vent emergency disposal system according to claim 1, wherein the condensing mechanism comprises a primary condenser and a secondary condenser; The air inlet of the first-stage condenser is connected with the gas outlet of the tail gas emptying buffer tank, the air inlet of the second-stage condenser is connected with the gas outlet of the first-stage condenser, and the gas outlet of the second-stage condenser is connected with the dynamic wave mixer.
3. The emergency disposal system of polysilicon production safety vent apparatus according to claim 1, further comprising a condensate collection tank connected to the liquid outlet of the vent buffer tank and the liquid outlet of the condensing mechanism, and connected to the safety vent manifold via seventeen lines.
4. The emergency disposal system for the safe emptying tail gas in the production of the polycrystalline silicon according to claim 1, wherein the tail gas washing tower is connected with an inlet of a first circulating pump, an outlet of the first circulating pump is connected with one end of a pipeline eight, and the other end of the pipeline eight is connected with a plurality of spray heads I positioned in the tail gas washing tower.
5. The emergency disposal system of polysilicon production safety vent as set forth in claim 1, wherein the first relief valve set pressure and the second relief valve set pressure are different.
6. The emergency treatment system for the safety vent tail gas in the production of polysilicon according to claim 1, wherein the emergency treatment tank is connected with an inlet of a second circulating pump, and an outlet of the second circulating pump is connected with a pipeline twenty; and a part of the pipeline twenty is positioned above the emergency treatment tank and is connected with a plurality of spray heads II.
7. The emergency disposal system for the safety vent tail gas in the production of polysilicon according to claim 3, wherein the safety vent main pipe is connected with the condensate collection tank through a pipeline seventeen which is provided with a valve II; the condensate collecting tank is used for introducing condensate in the safe emptying main pipe through a pipeline seventeen.
8. The emergency disposal system for safely venting tail gas in polysilicon production of claim 1, wherein the tail gas scrubber is connected with a pipeline fifteen for inputting a make-up fluid.
9. The emergency disposal system of polysilicon production safety vent apparatus according to claim 1, wherein the emergency disposal tank is connected with twenty-five pipes for inputting the replenishment liquid.
10. The emergency disposal system of polysilicon production safety vent gas according to claim 1, wherein the other ends of the twenty-one and twenty-two pipelines are provided with a gas dispersion mechanism positioned below the liquid level in the emergency disposal tank.

Description

Emergency disposal system for safe emptying tail gas in polysilicon production Technical Field The utility model relates to an emergency treatment system for safe emptying tail gas in polysilicon production, and belongs to the technical field of polysilicon production. Background In the production process of polysilicon, a few tail gases with pollution are produced, in the original process flow, the safe vent tail gases enter a safe vent buffer tank through a safe vent tail gas main pipe, the process vent tail gases enter the process vent buffer tank through a process vent tail gas main pipe, after being converged at the outlets of the process vent buffer tank and the safe vent buffer tank, the process vent buffer tank enter a first-stage condenser and a second-stage condenser, the produced chlorosilane condensate enters a condensate collecting tank through a pipeline, non-condensable gases condensed by the first-stage condenser and the second-stage condenser enter a dynamic wave mixer through a pipeline to be neutralized with alkali liquor for preliminary acid and alkali, and then enter a tail gas washing tower, a spraying system is arranged at the top of the tail gas washing tower, the produced waste liquid enters the dynamic wave mixer through a pipeline, a part of the waste liquid is used as the tail gas washing tower for spraying, a part of the waste liquid is conveyed to a sewage treatment device through the pipeline for continuous treatment, the produced waste gas enters a water seal tank, the produced waste liquid is fully absorbed by the liquid seal tank and then reaches the standard, the produced waste liquid is discharged after being refluxed to the tail gas washing tower through the pipeline, the water seal tank and the washing tower is supplemented with the pipeline, and the alkali and the fresh water seal liquid level of the tail gas treatment device is maintained. The main stream polysilicon production device has the characteristics of high productivity, large-scale device equipment and corresponding increase of the tail gas discharge amount of the matched design, but when the tail gas treatment device operates, the problems that the system cannot timely treat the discharged tail gas, the pressure of a main tail gas pipe is high, the high pressure and high load operation risk of the tail gas treatment device are increased under the conditions that a safety valve takes off a large amount of safety discharge and a tail gas treatment device tower and a blow-down pipe are blocked exist. Disclosure of utility model The utility model aims to overcome the defects in the prior art, provides a polysilicon production safety vent tail gas emergency treatment system, and aims to ensure that the pressure of a pipeline can be released in time through an emergency treatment tank and a safety valve and a rupture disk in a pipeline, so that the operation safety of the whole system is ensured. In order to achieve the above purpose, the utility model is realized by adopting the following technical scheme: The utility model provides an emergency treatment system for safely emptying tail gas in polysilicon production, which comprises the following components: The tail gas emptying buffer tank is used for receiving the process tail gas and performing preliminary condensation to generate condensate I and noncondensable gas I; The condensing mechanism is connected with a gas outlet of the tail gas emptying buffer tank through a pipeline IV and is used for condensing the non-condensable gas I output by the tail gas emptying buffer tank to generate condensate II and non-condensable gas II; the dynamic wave mixer is connected with a gas outlet of the condensing mechanism and is used for receiving non-condensable gas II output by the condensing mechanism and mixing acid and alkali; the tail gas washing tower is connected with the dynamic wave mixer, receives non-condensable gas II after acid-base mixing and performs spray treatment; the water seal tank is connected with a gas outlet of the tail gas washing tower, and is used for dissolving and discharging the waste gas output by the tail gas washing tower; The emergency treatment tank is used for storing alkaline solution and internally provided with a pipeline twenty-one and a pipeline twenty-two, wherein one end of the pipeline twenty-one is connected with a safety vent main pipe, the safety vent main pipe is connected with a pipeline IV, the pipeline twenty-one is provided with a safety valve I and a rupture disk I, and the pipeline twenty-two is provided with a safety valve II and a rupture disk II. Further, the condensing mechanism comprises a primary condenser and a secondary condenser; The air inlet of the first-stage condenser is connected with the gas outlet of the tail gas emptying buffer tank, the air inlet of the second-stage condenser is connected with the gas outlet of the first-stage condenser, and the gas outlet of the second-stage condenser is connected