CN-224208409-U - Wafer retaining ring gluing device

CN224208409UCN 224208409 UCN224208409 UCN 224208409UCN-224208409-U

Abstract

The utility model discloses a wafer retaining ring gluing device which comprises a box body, a gluing unit, a glue supply unit, a weighing unit and a visual detection unit, wherein the gluing unit and the weighing unit are positioned in the box body, the gluing unit is communicated with the glue supply unit, the gluing unit comprises a triaxial movement assembly, a double-component screw pump metering valve, a static mixing pipe, a stop valve and a glue outlet needle head, the triaxial movement assembly has an XYZ three-direction movement function, the double-component screw pump metering valve, the static mixing pipe, the stop valve and the glue outlet needle head are arranged in the Z direction, the output end of the double-component screw pump metering valve is provided with the static mixing pipe, the glue outlet needle head is positioned under the static mixing pipe, the stop valve controls the glue outlet needle head, and the double-component screw pump metering valve is connected with the glue supply unit through a pipeline. The utility model combines gluing and detection without transferring, thereby improving detection precision and processing efficiency, saving time and labor and simultaneously reducing cost.

Inventors

WANG HAILONG
Dong Yusun
WANG LING

Assignees

江苏中鲲智能装备有限公司

Dates

Publication Date: 20260508
Application Date: 20250526

Claims (4)

1. The wafer retaining ring gluing device is characterized by comprising a box body, a gluing unit, a glue supply unit, a weighing unit and a visual detection unit, wherein the gluing unit and the weighing unit are positioned in the box body, the gluing unit is communicated with the glue supply unit, the gluing unit comprises a triaxial movement assembly, a double-component screw pump metering valve, a static mixing pipe, a stop valve and a glue outlet needle head, the triaxial movement assembly has an XYZ three-direction movement function, the double-component screw pump metering valve, the static mixing pipe, the stop valve and the glue outlet needle head are arranged in the Z direction, the output end of the double-component screw pump metering valve is provided with the static mixing pipe, the glue outlet needle head is positioned under the static mixing pipe, the stop valve is used for controlling the glue outlet needle head, the double-component screw pump metering valve is connected with the glue supply unit through a pipeline, the visual detection unit comprises a visual detection camera and detection equipment, and the visual detection camera is arranged at the top of the box body and is positioned right above the weighing unit.
2. The wafer retaining ring gluing device of claim 1, wherein the gluing unit comprises a trolley, a controller and a pair of feeding screw pumps are arranged on the trolley, each feeding screw pump is provided with a glue storage tank, the feeding screw pumps are driven by a servo motor, and the feeding screw pumps are respectively connected with a double-component screw pump metering valve.
3. The wafer retaining ring gluing device of claim 1, wherein the three-axis moving assembly comprises a plurality of gantry brackets which are distributed in a U shape, a Y-axis servo line rail and a Y-axis auxiliary rail are respectively arranged on the gantry brackets on the left side and the right side, an X-axis servo line rail is arranged between the sliders of the Y-axis servo line rail and the Y-axis auxiliary rail, a Z-axis servo line rail is arranged on the sliders of the X-axis servo line rail, and a gluing unit is arranged on the sliders of the Z-axis servo line rail.
4. The wafer retaining ring gluing device of claim 1, wherein the weighing unit comprises an electronic scale, jacking cylinders are arranged at four corners of the electronic scale, a tray is placed on the electronic scale, the tray is lifted under the action of the jacking cylinders, and limit brackets are arranged at four corners of the tray.

Description

Wafer retaining ring gluing device Technical Field The utility model relates to the technical field of gluing devices, in particular to a wafer retaining ring gluing device. Background The wafer retaining ring needs to be subjected to gluing treatment in the processing process, then detection is carried out, two types of equipment are adopted for processing at present, the gluing treatment is carried out firstly, and then the wafer retaining ring is transferred to the detection equipment for detection, so that time and labor are wasted, the cost is increased, and meanwhile, the detection precision is influenced in the transfer process. Disclosure of utility model The utility model aims to overcome the defects and shortcomings of the prior art and provides a wafer retaining ring gluing device. The wafer retaining ring gluing device is characterized by comprising a box body, a gluing unit, a glue supply unit, a weighing unit and a visual detection unit, wherein the gluing unit and the weighing unit are positioned in the box body and are communicated with the glue supply unit, the gluing unit comprises a triaxial movement assembly, a double-component screw pump metering valve, a static mixing pipe, a stop valve and a glue outlet needle head, the triaxial movement assembly has an XYZ three-direction movement function, the double-component screw pump metering valve, the static mixing pipe, the stop valve and the glue outlet needle head are arranged in the Z direction, the static mixing pipe is arranged at the output end of the double-component screw pump metering valve, the glue outlet needle head is positioned under the static mixing pipe, the stop valve is used for controlling the glue outlet needle head, the double-component screw pump metering valve is connected with the glue supply unit through a pipeline, and the visual detection unit comprises a visual detection camera and detection equipment, and the visual detection camera is arranged at the top of the box body and is positioned right above the weighing unit. Further, the glue supply unit comprises a trolley, a controller and a pair of feed screw pumps are arranged on the trolley, each feed screw pump is provided with a glue storage tank, the feed screw pumps are driven by a servo motor, and the feed screw pumps are respectively connected with a double-component screw pump metering valve. Further, the triaxial motion assembly comprises a plurality of gantry brackets, the gantry brackets are distributed in a U shape, a Y-axis servo line rail and a Y-axis auxiliary guide rail are respectively arranged on the gantry brackets on the left side and the right side, an X-axis servo line rail is arranged between the Y-axis servo line rail and the sliding block of the Y-axis auxiliary guide rail, a Z-axis servo line rail is arranged on the sliding block of the X-axis servo line rail, and a gluing unit is arranged on the sliding block of the Z-axis servo line rail. Further, the weighing unit comprises an electronic scale, jacking cylinders are arranged at four corners of the electronic scale, a tray is placed on the electronic scale, the tray is lifted under the action of the jacking cylinders, and limit brackets are arranged at four corners of the tray. After the structure is adopted, the utility model has the beneficial effects that: The utility model combines gluing and detection without transferring, thereby improving detection precision and processing efficiency, saving time and labor and simultaneously reducing cost. Drawings FIG. 1 is a front view of the present utility model; FIG. 2 is a perspective view of the first embodiment of the present utility model; FIG. 3 is a second perspective view of the present utility model; fig. 4 is a schematic structural view of a triaxial motion assembly. Reference numerals illustrate: The device comprises a box body 1, a gluing unit 2, a triaxial movement assembly 21, a gantry bracket 211, a servo line rail of a Y-axis 212, an auxiliary guide rail of a Y-axis 213, a servo line rail of a X-axis 214, a servo line rail of a Z-axis 215, a metering valve of a double-component screw pump 22, a static mixing pipe 23, a stop valve 24, a glue outlet needle 25, a glue supply unit 3, a trolley 31, a control machine 32, a feed screw pump 33, a glue storage tank 34, a weighing unit 4, an electronic scale 41, a jacking cylinder 42, a tray 43, a limit bracket 44, a visual detection unit 5, a visual detection camera 51 and detection equipment 52. Detailed Description The utility model is further described below with reference to the accompanying drawings. In order to make the objects, technical solutions and advantages of the present utility model more apparent, the present utility model will be further described in detail below with reference to the accompanying drawings and detailed description. It should be understood that the detailed description is presented by way of example only and is not intended to limit the utility model. Ref